submicron technologies brochure

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COMPANY PROFILE

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Teesing supplies components for applications in a wide variety of products, assemblies and systems associated with gasses and liquids used for semiconductor porcessing. Ranging from cooling systems, bulk storage gas cabinets, gas monitoring applications, bulk filtration and purification to point of use gas supply. Ultra High Purity components and sub-assemblies such as piping, valves, tubing, manifolds and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor industry. Double packed and produced under cleanroom conditions.

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Page 1: Submicron Technologies brochure

COMPANY PROFILE

Page 2: Submicron Technologies brochure

2 | TEESING

ABOuT TEESINGtechnical supplier since 1952

Since 1952 Teesing is `The right connection` as an international supplier of fittings, valves, tubing, systems and assemblies for industrial applications in four sectors: pneumatics, hydraulics, instrumentation and transport of media. With offices in the Netherlands (Rijswijk), U.S.A. (New Jersey), China (Beijing) and Zhubei City (Taiwan) we are globally active in several specialised niche markets, such as semiconductor, railway, alternative fuels, pharmaceutical and (Petro)chemical industries.

We supply a complete package of products and services you require for your connection applications. Through our specialised knowledge of our products and markets we are capable in responding quickly to all your questions regarding the transport of gases and liquids to your point of use connection. Thanks to our engineering department we are also capable of delivering customised products and assemblies that are developed to meet the specifications of your critical process demands.

• ABoutteesing 2• WHYteesing 3• teesingBusinessunits 4• stintroduction 5• rotArex 6-9• entegris 10• teesingFiLters 11• serto 12• rectus 13• ceLeritY 14• nupure 15

CONTENTS

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TEESINGintroduction

WHYteesing?

• TheInternationalSupplierofhighqualityconnectivitysolutionsWith Offices in Europe, USA and Asia, Teesing can support you all over the world with large variety of products.

• ExtensiveknowledgeinapplicationadviceOur experienced sales engineers can advise you on any application.

• CustomerfocusedWe are willing to adapt to customer requirements. We are interested in your specific application to ensure you acquire the best products and support.

• FlexibilityTeesing has a new warehouse-system to deliver fast and secure. Double packed or regular.

• Technicalsupplierforover60yearsWe supply since 1952, Teesing is a solid partner for a large amount of companies worldwide.

• InnovativeEngineeringdepartmentIn close co-operation with the customer and supported by the latest technology, Teesing can develop the right products and assemblies for your specific requirements.

• In-houseCleanroomintheNetherlandsTeesing has the unique capability to assemble it’s UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom.

• GlobalPartnershipsWe have exclusive partnerships in Europe, USA and Asia to deliver you the best products at the right price.

ALLproductssuppLiedBYteesingCAN BE douBLepAcked IN CLEANROOM conditionsON REquEST

Page 4: Submicron Technologies brochure

4 | TEESING

TEESING BUSINESS UNITSintroduction

industriALAppLicAtions

International supplier of fittings, valves, tubing, systems and assemblies. Our markets include the (petro) chemical industry, life science, railways and labaratory applications.

suBmicrontecHnoLogies

International supplier of HP/UHP components and assemblies from source to process. Our markets include the semi- conductor, mechatronics, photovoltiac and LED industry.

ALTERNATIvE ENERGY

International supplier of components, systems and assemblies for CNG/H2 projects. Our markets include the automotive and transport industry and all markets related to alternative energy.

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SUBMICrON TEChNOlOGIES introduction

ABoutteesingsuBmicrontecHnoLogies

Teesing supplies components for applications in a wide variety of pro-ducts, assemblies and systems associated with gases and liquids used for semiconductor processing. Ranging from cooling systems, bulk storage gas cabinets, gas monitoring applications, bulk filtration and purification to point of use gas supply.

uLtrAHigHpuritYcomponents&equipments

High quality components and sub-assemblies such as: piping, valves, tubing, manifolds, assemblies, and systems are supplied to semicon-ductor toolmakers and meet the stringent demands of the semiconduc-tor industry. Double packed and produced under cleanroom conditions.

Special features for the semiconductor industry include: minimal dead space in valves and fittings, minimal use of specific lubricants, cleaned and highly polished stainless steel, radial mounting, compression fit-tings weld fittings, diaphragm valves, purifiers, mass flow controllers, pressure sensors, specific cleanroom solutions and more!

“uNIquE CAPABILITY TO ASSEMBLE IN cLAss100cLeAnroom”

Leen Nugteren, Business Manager Submicron Technologies:“As we have a cleanroom on location in the Netherlands, all the products we supply can be double-packaged in clean air, nitrogen or helium. Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class 100 cleanroom. For small assemblies it is possible to produce class 10.”

Page 6: Submicron Technologies brochure

6 | TEESING

rOTarExsubmicron technologies product range

Rotarex is a well known manufacturer of valves, fittings and regulators for High Purity (HP) and Ultra High Purity (UHP) applications. Based in the heart of Europe’s technical crescent, Luxembourg, Rotarex is one of the best in technical engineering and precision manufacturing worldwide.Since 1922, Rotarex assures technical quality, safety and reliability for gas pressured systems. During the years, many brands such as Selfa, Gazel and Sagana have become a part of the Rotarex Group.

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rOTarExsubmicron technologies product range

rotArexseLFAValVes & regulators

All Selfa products are manufactured to meet the highest standards and are assembled in a clean room. Avoiding particles starts already with the design which minimizes the number of parts in gas wetted areas which makes Selfa valves, fittings and regulators ideal for semiconductor applications. Metal diaphragms and bellows technologies assure a perfect tightness and high life span even when used for highly corrosive and reactive gases. Selfa can count on a large range of standard products but customization is also a possibility.

Selfa range is composed of 3 main product types:

• Valves: Diaphragm and bellows valves, ranging from small 4mm

passage all the way to large 100mm, manual or pneumatic actuation,oracombinationinV-blocks.Selfaalsoofferscryogenic valves for liquefied gases.

• Regulators: Special design for lowest particle generation.

• Fittings: Cylinder connectors for all types of gases and for all

connection standards

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8 | TEESING

rOTarExsubmicron technologies product range

rotArexgAZeLFace-seal Fittings

GazelfittingsaretheUHPfittings(VCR-type)rangeoftheROTAREX Group. Manufactured to the highest standards. Gazel fittings are cleaned, mounted and packed in clean room conditions according to UHP specifications. Electro polishing ensures a perfect surface finish.

Gazel has 5 ranges of fittings:

• Metalgasketfacesealfittings• Spacesaverfittings• Highflowfittings• Microfittings• Weldfittings

Gazel fittings are compatible with the industry leading face seal fittings. Gazel has a large range of standard fittings but also custom solutions are possible.

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rOTarExsubmicron technologies product range

rotArexsAgAnAinstrumentation

Sagana is part of Rotarex Group and manufactures all types of connections, fittings, and many other instrumentation parts for all types of applications. Focused more on the standard and low to medium purity applications for industrial or laboratory use. Sagana offers many thousand standard parts, stainless steel and brass.

The product range is divided in 7 main groups:

• Tubefittings• Threadfittings• Valves• Checkvalves• Filters• Quickconnectors• Hoses

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10 | TEESING

ENTEGrISsubmicron technologies product range

ENTEGRIS company proFile

Entegris provides products and services that purify, protect and transport critical materials used in the manufacturing of semi-conductors and other microelectronics. As the materials science and contamination controlexpert, Entegris enables its customers to meet the demands of the market by reducing cost, enhancing yield, increasing produc-tivity and improvingprocess control.

ENTEGRIS Filters and puriFiers

Entegris’s Liquid Microcontamination business has a long history of providing critical and enabling solutions to our customers’ fluid contamination and process control requirements.

Gas Microcontamination Solutions of Entegris addresses all gas contamination needs in the fab with a full range of chemical filtration and purification products to help improve process stability, reduce defects and improve throughput and yield.

ENTEGRIS ValVes and Fittings

Entegris fluid handling systems comprise the broadest range of carefully developed and fully characterized fluid handling products from UHP fittings to complete systems.

ENTEGRIS WaFer and reticle handling

Entegris is the industry leader and supplier of choice for predic-table, reliable and innovative wafer and reticle handling solutions to increase yields and maximize productivity.

• Wafershipping• Waferprocessing• Reticlehandling• FinishedElectronicsProducts• On-siteandoff-siteservices

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TEESINGsubmicron technologies product range

TEESINGcompany proFile

Teesing Submicron Technologies is famous for Ultra High Purity couplers, valves and regulators, this range of products is now extended with a new range of UHP/ HP gas and liquid filters. Besides the general UHP applications, these filters match the high purity standards for the Semiconductor and LED/LCD industries

TEESINGFiltersTeesing filters are available in Hastelloy, stainless steel and PTFE and are able to filter up to 3 nanometer particles with a flow range from 15 SLM until 9000 SLM. These gas and liquid filters are suitable for systems working under extreme high pressure up to 3620PSI and can handle high temperatures up to 842 F.

neWFor201

3

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12 | TEESING

SErTOsubmicron technologies product range

SERTOcompany proFile

Since the beginning 1952, Teesing has been the exclusive distributor for Serto products in the Netherlands. Serto is an unparalleled Swiss brand that uses high performance, patented technology to supply an extensive range of couplings, valves, tubing and complete assemblies to fit the industry needs.The semiconductor industry has specific requirements regarding cleanliness and compactsize. Serto uses a cleanroom in order to comply to the highest standards of cleanliness.

SERTOconnectors

Serto stands for a unique modular system. The union can be fitted or released radially thus eliminating the need to displace or even bend tubing runs. When the nut is tightened down, the clamping ring is deformed and constricts lightly around the tube without producing a notch. In the area of the constriction and at the “clamping ring/base part” joint, the deformation forces produce high specific surface-area pressure contacts which guarantee a firm hold of the tube and tight metallic sealing.

Serto will make it possible to connect UHP tubing to plastic tubing or hoses, even flexible hoses are connected leak free by using an internal support sleeve

SERTO CONNECTION SYSTEM: uNIquE!teesing FactsSerto connectors mount radially onto the tube, making the connection easy, time saving and without any damage to the tube itself. It is a leak tight, flat-flace, metal to metal connection without O-rings or washers.

Apart from easy assembly, the conections are extremely reliable, as some connectors can take up to 250 bar of internal pressure.

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rECTUSsubmicron technologies product range

RECTuScompany proFile

Rectus is one of the largest German brands in the field of quick-connectors. Apart from a wide range of standard couplings, Rectus also provides tailor-made solutions.

RECTuS quick connectors

Rectus has world’s widest range of quick connectors and has developed specific versions for use in high purity conditions. Specifically for the semiconductor industry Teesing and Rectus havedevelopeddedicatedQuickconnectorswithforusein cleanroom environment. One example is the flat-faced KL series which makes it possible to connect or disconnect without any droplets. Also the ergonomic grip allows easy use with cleanroom hand kerchieves.ForaggressivechemicalsRectushastheRectuchemQuickConnectors completely made of high quality plastics, such as PFA,PVDF.All Rectus products for use in submicron technologies are cleaned, assembled and double bagged in cleanroom class 10.000 area.

RECTuS CONNECTORS AreusedBYoneoFtHeWorLd’sLArgestMANuFACTuRERSoFLitHogrApHY SYSTEMS

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14 | TEESING

CElErITysubmicron technologies product range

CELERITYcompany proFile

Celerity’s broad selection of pressure transducers, pressure gauges, and related instruments provides best-in-class monitoring of ultra-high-purity bulk gases, specialty gases, and liquefied process gases.

CELERITY pressure tranducers

Celerity’s pressure transducers use the latest technology advancements in strain gauge technology, including a high-temperature glass bonding process, digital signal processing, high-performance digital electronics, reverse polarity protection, and EMI immunity.

CELERITYpressure gauges

Celerity’s stainless steel pressure gauges are designed and developed for the demanding high-purity applications of the semiconductor industry. Welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines, the gauges include pressure switches and transmitters and come in a variety of pressure ranges and process connections.

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NUpUrEsubmicron technologies product range

NuPuREcompany proFile

In 1996, NuPure Corporation was founded, with the charter of being the leading supplier of Gas Purifiers to the Analytical Industry. By the end of 1997, NuPure had expanded it’s product offering by taking over, under license, the complete line of Gas Purifiers and Particle Filters, from UltraPure™ Systems Inc., of Colorado Springs, CO, USA. During 1998 - 2001, Nupure added technological strengths by exclusively licensing five new patents for gas purification. And in 2002 Nupure internally developed several new designs of purifiers especially for new Optics applications, with verified PPT-level performance.

NuPuRE puriFiers , Filters & systems

Because of Teesing’s and NuPure’s exclusive focus on gas purification and filtration, our reputation has grown as a quality supplier of these products to both the Semiconductor and Analytical Industries. With the help of Nupure’s Corporate HeadQuartersinOttawa,Canada,Teesingisreadytosupportyou worldwide with our locations in Europe, North America and Asia.

Page 16: Submicron Technologies brochure

TEESING B.V.Verrijn Stuartlaan 40

2288 EL Rijswijk

The Netherlands

Tel +31 70 413 07 00

Fax +31 70 413 07 30

[email protected]

www.teesing.com

CHINA OFFICEHong Kong Macau Center

Suite 418

4Th Floor, Office Tower

2 Chao Yang Men Bei Da Jie

100028 Beijing, China

Tel +86 10 659 590 74

Fax +86 10 650 142 48

[email protected]

www.teesing.com.cn

USA OFFICE10 Millpond Road Unit 7

Lafayette, NJ 07848

United States of America

Tel +1 973 383 0691

Fax +1 973 383 0691

[email protected]

www.teesing.com

TAIWAN OFFICE4F.-15, No.36, Taiyuan St.

Zhubei City

Hsinchu County 302

Taiwan

Tel +03 560 05 60

Fax +03 560 05 60

[email protected]

www.teesing.com

Aspro TIS (Beijing) Co. Ltd.Xi Tuo Cun, Ma Chi Kou Zhen

Chang Ping District

Beijing 102206

China

Tel +86 10 807 221 65

[email protected]

www.aspro-tis.com.cn

www.TEESING.COM

Contact our sales engineers to receive detailed product information. We recommend to visit our website for regularly updated product information.