sst special surface treatment en - heraeus · special surface treatment (sst) heraeus quarzglas...
TRANSCRIPT
![Page 1: SST special surface treatment en - Heraeus · Special Surface Treatment (SST) Heraeus Quarzglas GmbH & Co. KG Page 1. A typical thin-film application in Semicon-manufacturing: CVD](https://reader035.vdocuments.mx/reader035/viewer/2022062507/5fc55e8585f341169c587590/html5/thumbnails/1.jpg)
Special Surface Treatment (SST)
Heraeus Quarzglas GmbH & Co. KG
Page 1
![Page 2: SST special surface treatment en - Heraeus · Special Surface Treatment (SST) Heraeus Quarzglas GmbH & Co. KG Page 1. A typical thin-film application in Semicon-manufacturing: CVD](https://reader035.vdocuments.mx/reader035/viewer/2022062507/5fc55e8585f341169c587590/html5/thumbnails/2.jpg)
A typical thin-film application in Semicon-manufacturing: CVD
Material buildup in high temperature and low pressure atmosphere
Stress due to different CTEand (!) temperature dependence of stress in deposited layer
this leads to peeling / particles in the deposited layer, later on to cracks / chipping – worst case cracks distributed into tube
Quartz
Sample Process: DCS + ammonia silicon nitride SiH2Cl2 + 5NH3 Si3N4 + NH4Cl +5HCl + 6H2
whereas the DCS:Ammonia ratio controls layers intrinsic stress (tensile vs. compressive)
Page 2
![Page 3: SST special surface treatment en - Heraeus · Special Surface Treatment (SST) Heraeus Quarzglas GmbH & Co. KG Page 1. A typical thin-film application in Semicon-manufacturing: CVD](https://reader035.vdocuments.mx/reader035/viewer/2022062507/5fc55e8585f341169c587590/html5/thumbnails/3.jpg)
Stress in CVD layers on different quartz surfaces
Firepolished Quartz
Ground/Sandblasted Quartz
SST Quartz
Small Stress Component Vectors
Large Stress Component Vectors
Quartz
Quartz
Roughness != Roughness
Page 3
![Page 4: SST special surface treatment en - Heraeus · Special Surface Treatment (SST) Heraeus Quarzglas GmbH & Co. KG Page 1. A typical thin-film application in Semicon-manufacturing: CVD](https://reader035.vdocuments.mx/reader035/viewer/2022062507/5fc55e8585f341169c587590/html5/thumbnails/4.jpg)
Comparison: machined vs. SST surface
no micro-cracks
Fire-polish closes micro-cracks SST creates necessary roughness.
Fire polished plus SST
SST reduces micro-cracks byfilling with solid crystal.Increase the surface finish.
less micro-cracks
Ground plus SSTGround Surface
Grinding creates sub surface damage (micro-cracks)
many micro-cracks
Tension in CVD layer worsens micro-cracks the lesser micro-cracks the better.SST defines a rough surface without grinding, or sandblasting no micro-cracks
Page 4
![Page 5: SST special surface treatment en - Heraeus · Special Surface Treatment (SST) Heraeus Quarzglas GmbH & Co. KG Page 1. A typical thin-film application in Semicon-manufacturing: CVD](https://reader035.vdocuments.mx/reader035/viewer/2022062507/5fc55e8585f341169c587590/html5/thumbnails/5.jpg)
Machined vs SST surface: post etching @ 500x
mechanicallytreated surface
SST surface
20% HF 30min
20% HF 30min
Page 5