slme linear actuators - festo€¦ · slme linear actuators ball screw driven with recirculating...

SLME Linear ActuatorsBall Screw Driven with Recirculating Ball Bearing Guide

Precision Motion ControlPositioning accuracy to 0.060 mm

High repeatability of ± 0.005 mm

Dynamic load capacity up to 27 kN

Moment load capacity up to 1410 Nm

Maximum speed: 1.05 m/s

ApplicationSemiconductor manufacturing

Medical devices and laboratory automation

Easy-to-install/configure into single or multi-axis systems

Compact design for envelope constraints

Adheres to high quality control standards

Info 154 US

Design FeaturesCompact via gothic arch bearing configuration

Minimal deflection with steel U-shaped guide rail

Corrosion resistant surfaces ensure predictable life

Cleanroom compatible with C-Grease lubrication

Optional dust cover protects ball bearings from debris

Festo...Your AutomationPartner Worldwide

As a global leader in industrialautomation components andsystems, with over $1.8 billionsales worldwide, Festo hasthe resources and applicationexperience to be your long-term partner for cost-effectiveautomation solutions.

• 55 independentsubsidiaries worldwide

• Representation in180 countries

• Worldwide networking for consistent standards of products, consultancy, sales and services.

• Worldwide support provided by over 10,500 team members

Festo Quality Assurance,ISO 9001 Certification

Festo Corporationis committed toprovide Festoproducts and services that willmeet or exceed our customers’requirements inproduct quality, delivery, customer service and satisfaction.

All Festo locations within the UnitedStates are registered to ISO 9001.

Online LiteratureLiterature in PDF format is available for download at: www.festo-usa.com/pdfindex.html

High Performance Handling Solutions

High Accuracy and RepeatabilityThe SLME utilizes a fine pitch ballscrew and recirculating ball bearing carriage to achieve highaccuracy and repeatability. The steelU-shaped body has ground bearingraces for the ball bearing carriageand ground mounting surfaces for the base and carriage to provide high positioning accuracy. Preloadedbearing and ball screw versions areavailable in the SLME23 and SLME30,providing a high repeatability of±0.005 mm.

High Load Capacity and RigidityThe ball tracks of the SLME each have 4 contact points, providing high dynamic load (up to 27 kN) andmoment (up to 1410 Nm) capacity.This allows you to design smaller and more compact equipment by eliminating separate guiding systems, thereby also reducing thenumber of parts and associated costs.

Long LifeSLME actuators come standard with RAYDENT® corrosion resistanttreatment that protects the guidingsurfaces for the life of the actuator.An optional dust cover protects theunit from debris.

Flexible DesignThe SMLE is available with two different ball screw leads for each of the three frame sizes:

Type Lead (mm)SLME23 2 or 5SLME30 5 or 10SLME46 10 or 20

Optional EnhancementsThe SLME is available with home and end-of-travel sensors. A cleanroom version with C-Grease is suitable for FS209E Class 100 use.

Typical ApplicationsThe SLME is an ideal linear actuatorsolution for such high-tech industriesas semiconductor manufacturing, laboratory automation, and electronic component assembly.

09/2005 – Subject to change – Info 154 US 3

SLME Linear Actuators

Guiding surface is ground into the steel body. This eliminatesthe need for separate internal guiding rails, allowing the unit to be compact in height and width.

RAYDENT treatment provides rust preventative surface on guide unit. RAYDENT is a thin-film surface treatment (1-2 micron) which is widely used in the electronic industry.

2 or 4 ball ways and 4 contact points allows for high load and moment capacity, while providing smooth operation.

Steel U-shaped guide rail provides high rigidity in all directions.

The SLME is so versatile it can be used for handling solutions in many high-tech industries.

Multiple screw options are available. Two different screw leads and precision rating per frame size.

Dust cover options

Home and end-of-travel sensor options

Suitable for cleanroom applications (with C-Grease)

Flexible Reliable Easy

High load and moment capacity of unit eliminates separate guiding systems on machines, therefore reducing number of parts and costs.

Economical

Product Overview .............................................. 4

Technical Data, Linear Actuators ...................... 6

Technical Data, Photoelectric Sensors .......... 16

Ordering Information and Type Code ............. 18

Motor Flanges and Custom Mounting Kits ..... 19

Lubrication and Corrosion Protection ............. 20

Engineering Support ....................................... 22

Operating Recommendations ......................... 23

Application Worksheet .................................... 24

Table of Contents

Sizes: 23, 30 and 46 mm

Stroke lengths up to 1000 mm

Maximum speed of 1.05 m/s

Repeatability of ± 0.005 mm

Maximum dynamic load of 27 kN

Axial force up to 3200 N

RAYDENT corrosion protection

Gothic arch configuration(4 points contact structure)

U-shaped guide rail provides compact frame size

Features and Benefits

SLME Linear Actuator

SLME Linear Actuator

with Dust Cover

Info 154 US – Subject to change – 09/20054

Product OverviewSLME Linear Actuators

Sizes: 23, 30, 46 mm

Stroke lengths: 50 to 1000 mm

C7 class ball screw

Four sizes of pitch on ball screw; 2 mm, 5 mm, 10 mm, and 20 mm

Wide range of options for third-party motor mounting kits

Minimized axial play between ball and groove is less than 0.02 mm, or withoversized preloaded ball, there is virtually no play.

RAYDENT (LSL-BL) treatedsurface standard. For more information, see page 21.

Sizes: 23, 30, 46 mm


The ball screw and guide are covered with an aluminum dustproof cover to protect against the ingress of particles from above.

Linear Actuators with PNP Sensors (SLME...-PS) or NPN Sensors (SLME...-NS)

Sizes: 23, 30, 46 mm


Both PNP and NPN photoelectric sensor packages are available

24 V DC, 4 wire connection

The sensor packages come with three gap sensors, mounting rail on the linear actuator, and the sensor lug attached to the slide.

All three sensors have Normally Open (NO) and Normally Closed (NC)connection possibilities.

Basic Linear Actuator (SLME...)

Linear Actuator with Dustproof Cover (SLME...-GA)


Gothic arch configuration

(4 points contact structure)

assures smooth and

high-precision motion.

As a standard adopted by

machine builders for the

Connection plates to combine

upon request.

2 3 4 5 6 7 8 91

1�Housing

2�Grease nipple

3�Damper

4�Side dust cover

5�Slide block

6�Ball screw shaft

7�U Guide rail

8�Coupling cover

High Precision Motion

Multiple Axes Semiconductor industry,

RAYDENT is a thin black

rust preventative film which

coats the surface of the actuator.

It will last more than 10 years

precision of the actuator.

without affecting the high

2 or more axes are available

RAYDENT Rust Proofing

Features and Benefits

Accuracy

suitable preloading to load

resistance against load

Guide rail and ball screw are

eliminating the need for

complicated fine adjustment

and reducing the number of

working processes to a great

extent.

Space-saving

reduce the size and space

considerably as compared

with the usual table type

structure.

Rigidity

balls, it reduces the frictional

integrated in one linear actuator,

No Need For Adjustment

guide rail, making it possible to

Slide block is set in a U-shaped Despite its compact structure,

the rigidity of linear actuator

has been improved by using

a U-shaped guide rail so that

it can be applied evenly to a

structure supported at only

one end.

Because the linear guide has

variation. This single linear

and positioning accuracy.

SLME23 and SLME30:

2 ballways

SLME46:

4 ballways

SLME23-…-GA, SLME30-…-GA

2 ballways

1�Dustproof cover

2�Sub table on slide block

SLME46-…-GA

4 ballways

1

2

9�Motor flange connection

1

2

Please see page 19.

Motor Flanges

actuator has high repeatability

Product OverviewSLME Linear Actuators

SLME23-... SLME30-... SLME46-...

Guide

Mounting position Any

Ball screw diameter [mm] 8 10 15

Pitch [mm] 2 5 5 10 10 20

Standard working stroke [mm] 50, 100, 150, 200 100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800

Extended stroke [mm] 250, 300 700 900, 1000

Radial clearance on guide [mm] - 0.003 to 0 - 0.003 to 0 - 0.003 to 0

[kN] 4.3 7.0 27.0

Static load rating on guide [kN] 7.0 11.8 45.0

Max. allowable feed force * limited by the drive coupling connection

[kN] 1.8 1.9 3.0 2.0 3.2 3.1

Max. allowable driving torque Nm] 0.57 1.51 2.39 3.18 5.09 9.87

Max. starting torque [Nm] W version = 0.03 W version = 0.07 W version = 0.10

U version = 0.06 U version = 0.15 -

[mm] W version = ± 0.010, U version = ± 0.005 [for SLME23 and SLME30 only]

Backlash [mm] W version = 0.020, U version = 0.005 [for SLME23 and SLME30 only]

Positioning accuracy [mm] 50 mm stroke = 0.070 100 mm stroke = 0.080 200 mm stroke = 0.060

100 mm stroke = 0.075 200 mm stroke = 0.090 300 mm stroke = 0.070





- 700 mm stroke = 0.140 800 mm stroke = 0.180

- - 900 mm stroke = 0.200

- - 1000 mm stroke = 0.220

Traveling parallelism [mm] ≤ 200 mm stroke = 0.015 ≤ 400 mm stroke = 0.015 ≤ 400 mm stroke = 0.045

≥ 200 mm stroke = 0.020 ≥ 400 mm stroke = 0.020 500 & 600 mm stroke = 0.050

- - 700 & 800 mm stroke = 0.060

- - 900 & 1000 mm stroke = 0.070

Max. speed [m/s]

≤ 300 mm stroke 0.20 0.49 - - - -

≤ 400 mm stroke - - 0.40 0.81 - -

= 500 mm stroke - - 0.30 0.60 - -

≤ 600 mm stroke - - 0.21 0.43 0.52 1.05

= 700 mm stroke - - 0.16 0.33 0.50 1.01

= 800 mm stroke - - - - 0.39 0.80

= 900 mm stroke - - - - 0.32 0.64

= 1000 mm stroke - - - - 0.26 0.52

– Basic version - SLME...

– With dustproof cover - SLME…-GA

– With integrated sensors - SLME…-PS or SLME…-NS

This technical data is applicable for the following:

Design

* check with Festo regarding stroke deflection

* exclude stroke reserve, see next page

Electromechanical actuator with ball screw and guide

The ball screw sliding block is set into the U-guide rail. 2 or 4 ballways/4 contact points

Repeatability

Dynamic load rating on guide1

(U version = Preloaded)

Technical Data

Type Code

Introduction


Technical DataSLME Linear Actuators

1 See page 22 to calculate theoretical bearing guide service life.

SLME Linear Actuatorwith Sensors

SLME Linear Actuator with Dust Cover and Sensors



Material

L11 The stroke reserve is a

L12

to the stroke.

L3 Working stroke

Type: SLME30-05-300-W

Working stroke = 300 mm

Stroke reserve

L11 = 5.20 mm

L12 = 5.10 mm

Total stroke = 300 + L11 + L12

= 300 + 10.30 mm

= 310.30 mm

Size SLME23 SLME30 SLME46

L11 per end position [mm] 13.20 5.20 3.40

L12 per end position [mm] 13.20 5.10 3.40

L11 L12 L3

1�Circlip

2�Deep groove ball bearing SUJ2-SPCC

3�Slide block SCM420 Steel

4�Damper NBR

5�Sub table

6�Dustproof cover

7�Sensor rail

8�Rolled ballscrew shaft S45C or S55C Steel

9�Guide rail

aJ�Angular contact ball bearing SUJ2-POM or SUJ2-N66C5

aA�Housing

aB�Coupling cover

1 2 3

4 5 6 7

8 9 aJ aA aB

SLME23-… and SLME30-…

SLME46-...

Sectional View of Basic Version

Sectional View of Dustproof Cover Version

Linear Actuator

A5083P or A5052 Aluminum, white alumite treated

A5052P Aluminum, white alumite treated

A6063 Aluminum

A5052P Aluminum, white alumite treated

safety distance available

on both sides of the

actuator in addition

Stroke Reserve

Example:

S55C Steel, Raydent corrosion resistant treatment

S65C Steel, phosphate treated for rustproofing

A5052P or die cast Aluminum, white alumite treated



Version Size Pitch Standard working stroke Speed

feed force

Fy Fz Mx My Mz

[mm] [mm] [mm] [m/s] [mm] [kN] [kN] [kN] [Nm] [Nm] [Nm]

23 2 ± 0.005 to ± 0.010

7.0 7.0 134 46 51

5 7.0 7.0 134 46 51

30 5 100, 200, 300, 400, 500, 0.21 to 11.8 11.8 260 101 120

10 11.8 11.8 260 101 120

46 10 200, 300, 400, 500, 600, 0.39 to 45.0 45.0 1410 572 681

20 200, 300, 400, 500, 600, 0.80 to 45.0 45.0 1410 572 681

* Stroke to check with Festo on deflection

Basic version, with or without dustproof cover

50, 100, 150, 200 0.20

0.49 50, 100, 150, 200

600

600

700, 800

700, 800 1.05

0.52

100, 200, 300, 400, 500, 0.38 to 0.81

0.40

1.8

1.9

3.0

2.0

3.2

3.1

Load Values

ability

Repeat- Max. Permissible static force and torque



The mass moment of inertial JA

follows:

Type Pitch Stroke

SLME… Basic version

SLME…-GA With dustproof cover

[mm] [mm] [kg cm²]

SLME23 02 50 6.07 x 10-3 6.15 x 10-3

100 7.64 x 10-3 7.72 x 10-3

150 9.21 x 10-3 9.29 x 10-3

200 1.08 x 10-2 1.09 x 10-2

250 1.23 x 10-2 1.24 x 10-2

300 1.39 x 10-2 1.40 x 10-2

05 50 6.96 x 10-3 7.41 x 10-3

100 8.53 x 10-3 8.98 x 10-3

150 1.01 x 10-2 1.06 x 10-2

200 1.17 x 10-2 1.21 x 10-2

250 1.33 x 10-2 1.36 x 10-2

300 1.48 x 10-2 1.52 x 10-2

SLME30 05 100 2.03 x 10-2 2.10 x 10-2

200 2.80 x 10-2 2.87 x 10-2

300 3.56 x 10-2 3.63 x 10-2

400 4.33 x 10-2 4.40 x 10-2

500 5.10 x 10-2 5.17 x 10-2

600 5.87 x 10-2 5.93 x 10-2

700 6.65 x 10-2 6.72 x 10-2

10 100 2.61 x10-2 2.88 x 10-2

200 3.37 x 10-2 3.65 x 10-2

300 4.14 x 10-2 4.42 x 10-2

400 4.91 x 10-2 5.18 x 10-2

500 5.67 x 10-2 5.95 x 10-2

600 6.44 x 10-2 6.72 x 10-2

700 7.25 x 10-2 7.51 x 10-2

SLME46 10 200 1.79 x 10-1 1.87 x 10-1

300 2.18 x 10-1 2.25 x 10-1

400 2.57 x 10-1 2.64 x 10-1

500 2.95 x 10-1 3.03 x 10-1

600 3.34 x 10-1 3.42 x 10-1

700 3.73 x 10-1 3.80 x 10-1

800 4.12 x 10-1 4.19 x 10-1

900 4.52 x 10-1 4.59 x 10-1

1000 4.91 x 10-1 4.98 x 10-1

20 200 2.47 x 10-1 2.78 x 10-1

300 2.86 x 10-1 3.17 x 10-1

400 3.25 x 10-1 3.55 x 10-1

500 3.64 x 10-1 3.94 x 10-1

600 4.03 x 10-1 4.33 x 10-1

700 4.41 x 10-1 4.71 x 10-1

800 4.80 x 10-1 5.09 x 10-1

900 5.23 x 10-1 5.53 x 10-1

1000 5.62 x 10-1 5.91 x 10-1

Weight

The overall mass of the entire

Type Stroke Mass



[mm] [kg] [kg]

SLME23 50 1.00 1.11

100 1.21 1.32

150 1.41 1.52

200 1.61 1.73

250 1.81 1.93

300 2.01 2.14

SLME30 100 1.9 2.1

200 2.6 2.7

300 3.3 3.4

400 3.9 4.1

500 4.6 4.7

600 5.2 5.4

700 5.8 5.9

SLME46 200 6.5 7.0

300 8.0 8.5

400 9.0 10.0

500 10.5 11.0

600 12.0 12.5

700 13.0 14.0

800 14.5 15.5

900 16.0 17.0

1000 17.4 18.4

The mass of the slide block is shown as follows:

Type



[kg] [kg]

SLME23 0.14 0.26

SLME30 0.3 0.4

SLME46 0.9 1.2

Size 23 30 46

-5 to +40

Protection class SLME...GA…]

[°C] -5 to +40

Operating and Environmental Conditions

Mass of Slide Block

JA Inertia Moment

Mass Moment of Inertia

is shown as follows:

screw)actuator (slide block and ballof the entire actuator (slide block

and ball screw) is shown as

[kg cm²]

Ambient temperature for basic actuator [°C]

IP 00 and IP10 [for

Ambient temperature for basic actuator with sensor


Technical Data – Dimensions, SLME 23SLME Linear Actuators

Dimensions

SLME23 Linear Actuator

Type

[mm]

L1 L2 L3 L4 L5 m n

SLME23-…-50... 150 210 50 25 35 1 1

SLME23-…-100... 200 260 100 50 20 2 1

SLME23-…-150... 250 310 150 25 45 2 2

SLME23-…-200... 300 360 200 50 30 3 2

SLME23-…-250... 350 410 250 25 55 3 3

SLME23-…-300... 400 460 300 50 40 4 3

All dimensions are in mm

2� 2 x [n+1] x M3, depth 5

3� 2 x [m+1] x Ø4.5, counter

4� 2 x Ø2+0.014, depth 4

5� 4 x M3, depth 4.5

7� 4 x Ø3.4 drilled hole

8� 4 x M3, depth 6

6� 4 x M3, depth 8, countersunk

9 Ø3+0.014 for axis centering

1� 2 x M4, depth 6 [both sides]

[both sides]

bore Ø8, depth 4.4


Technical Data – Dimensions, SLME 23-...-GASLME Linear Actuators

Dimensions

SLME23-...-GA Linear Actuator with Dustproof Cover

Type

[mm]

L1 L2 L3 L4 L5 m n

SLME23-…-50…-GA 150 210 50 25 35 1 1

SLME23-…-100…-GA 200 260 100 50 20 2 1

SLME23-…-150…-GA 250 310 150 25 45 2 2

SLME23-…-200…-GA 300 360 200 50 30 3 2

SLME23-…-250…-GA 350 410 250 25 55 3 3

SLME23-…-300…-GA 400 460 300 50 40 4 3


3� 2 x [m+1] x Ø4.5, counter bore Ø8, depth 4.4

4� 2 x Ø2+0.014, depth 4

5� 4 x M4, depth 13

7� 4 x Ø3.4 drilled hole

8� 4 x M3, depth 6



2� 2 x [n+1] x M3, depth 5 [both sides]

6� 4 x M3, depth 5 [For sensor lug]



Dimensions


Type

[mm]

L1 L2 L3 L5 m n

SLME30-…-100... 200 267 100 50 1 1

SLME30-…-200... 300 367 200 50 2 2

SLME30-…-300... 400 467 300 50 3 3

SLME30-…-400... 500 567 400 50 4 4

SLME30-…-500.. 600 667 500 50 5 5

SLME30-…-600... 700 767 600 50 6 6

SLME30-…-700... 800 867 700 50 7 7


4� 2 x Ø3+0.014, depth 5

5� 4 x M5, depth 8

6� 4 x M3, depth 6

7� 4 x M3, depth 8

8� 2 x M4, depth 8 bore Ø9.5, depth 5.4 3� 2 x [m+1] x Ø5.5, counter






Dimensions


Type

[mm]

L1 L2 L3 L5 m n

SLME30-…-100…-GA... 200 267 100 50 1 1

SLME30-…-200…-GA... 300 367 200 50 2 2

SLME30-…-300…-GA... 400 467 300 50 3 3

SLME30-…-400…-GA... 500 567 400 50 4 4

SLME30-…-500..-GA... 600 667 500 50 5 5

SLME30-…-600…-GA... 700 767 600 50 6 6

SLME30-…-700…-GA... 800 867 700 50 7 7


3� 2 x [m+1] x Ø5.5, counter bore Ø9.5, depth 5.4

4� 2 x Ø3+0.014, depth 5

5� 4 x M5, depth 15

6� 4 x M3, depth 6 [for sensor lug]

7� 2 x M4, depth 8

8� 4 x M3, depth 8






Dimensions


Type

[mm]

L1 L2 L3 L4 L5 m n

SLME46-…-200... 340 438.5 200 20 70 2 3

SLME46-…-300... 440 538.5 300 20 70 3 4

SLME46-…-400... 540 638.5 400 20 70 4 5

SLME46-…-500... 640 738.5 500 20 70 5 6

SLME46-…-600... 740 838.5 600 20 70 6 7

SLME46-…-700... 840 938.5 700 20 70 7 8

SLME46-…-800... 940 1038.5 800 20 70 8 9

SLME46-…-900... 1040 1138.5 900 20 70 9 10

SLME46-…-1000... 1140 1238.5 1000 20 70 10 11


1� Depth of groove 1

2� 4 x M4, depth 5

3� 4 x M6, depth 12

4� 2 x Ø4+0.018, depth 6


6� 8 x M4, depth 8

8� Ø4+0.018 for axis centering

7� 2 x [n+1] x M2.5, depth 6 [both sides]



Dimensions


Type

[mm]

L1 L2 L3 L4 L5 m n

SLME46-…-200…-GA... 340 438.5 200 20 70 2 3

SLME46-…-300…-GA... 440 538.5 300 20 70 3 4

SLME46-…-400…-GA... 540 638.5 400 20 70 4 5

SLME46-…-500…-GA... 640 738.5 500 20 70 5 6

SLME46-…-600…-GA... 740 838.5 600 20 70 6 7

SLME46-…-700…-GA... 840 938.5 700 20 70 7 8

SLME46-…-800…-GA... 940 1038.5 800 20 70 8 9

SLME46-…-900…-GA... 1040 1138.5 900 20 70 9 10

SLME46-…-1000…-GA... 1140 1238.5 1000 20 70 10 11


3� 4 x M3, depth 6

4� 2 x Ø4+0.018, depth 6

5� 4 x M6, depth 22

6� 4 x M5, depth 22


8� 8 x M4, depth 8

1� Ø4+0.018 for axis centering

2� 2 x [n+1] x M2.5, depth 6 [both sides]

Delivery scope

Sensing distance [Gap] 5 mm (fixed)

Sensing object 0.8 X 1.8 mm opaque object (at minimum)

Hysteresis 0.05 mm or less

Repeatability 0.03 mm or less

Supply voltage 5 to 24V DC +/-10% Ripple P-P 10% or less

Current consumption 15 mA or less

Output NPN transistor open collector

Maximum sink current: 50 mA

Utilization category DC12 or DC13

Output operation Incorporated with 2 outputs: Light-ON / Dark-ON

Response time

Response frequency : 1 kHz or more

Operation indicator

Pollution degree 3 (Industrial environment)

Ambient temperature -25 to +55 °C (No dew condensation or icing allowed)

Storage temperature range -30 to +80 °C

Ambient humidity 35 to 85% RH

Ambient illuminance

EMC

Voltage withstandability

Insulation resistance

Vibration resistance 10 to 2,000 Hz frequency, 1.5 mm amplitude in X, Y and Z direction for two hours each

Shock resistance 2

Emitting element Infrared LED (non-modulated)

Material

Cable 2

Weight

Tightening torque 0.5 Nm

NPN wiring

Dark-on

Light-on

+

–

PNP wiring

Light-on

Dark-on

–

+

Type Code

Design

Red LED (lights up under light received condition)

0.09 mm , 4-core cabtire cable

Applied voltage : 30 V DC or less (between output and 0 V)

Residual voltage : 0.7 V or less (at 50 mA sink current), 0.4 V or less (at 16 mA sink current)

Emission: EN50081-2, Immunity: EN50082-2

Fluorescent light: 1,000 lux at the light-receiving face

Under light received condition: 20 microseconds or less

Under light interrupted condition: 100 microseconds or less

1,000 V AC for one min. between all supply terminals connected together and enclosure

50 M ohm or more, with 250 V DC merger between all supply terminals connected together and enclosed

15,000 m/s acceleration (1,500 G approx.) in X, Y and Z directions for three times each

Enclosure: PBT; Slit cover: Polycarbonate; Terminal part: Solid plated

Photoelectric gap sensors integrated onto linear actuator with ball screw and guide via sensor rail

3 photoelectric sensors, sensor rail mounted on actuator and sensor lug mounted on slide block

10 g approx.

Introduction

Technical Data

PS for PNP switching NS for NPN switching


Technical Data – Photoelectric SensorsSLME Linear Actuators

This technical data is applicable for the following:

– PS for PNP switching (2 outputs, for both NO or NC)

– NS for NPN switching (2 outputs, for both NO or NC)

Note: Sensors do not come with polarity protection and short-circuit protection. Faulty wiring may result in damages. Insulate unused output wire.


Technical Data – Dimensions, Photoelectric SensorsSLME Linear Actuators

Dimensions

SLME23-...PS… or SLME23-...NS... SLME23-...GAPS… or SLME23-...GANS...

19

.2

15

.5

15 5

19

.2

15

.5

15 5


5.3 14.7

23

.8

1

5.3 14.7

23

.8

1


15

.5

15

2

15

15

.5

15

2

15

–

– Sensor mounting plate (only for

SLME23 and SLME30) x 3 pcs

–

– Sensor lug on slide block x 1 pc

Linear Actuator with Sensor Package Linear Actuator with Dustproof Cover and Sensor Package

Sensor rail on actuator x 1 pc

Sensor package includes:


Photoelectric gap sensors x 3 pcs


Ordering Information and Type CodeSLME Linear Actuators

SLME...

23 mm from base level to the top of the slide



Pitch [mm] SLME23 SLME30 SLME46

02

05

10

20

SLME23 50, 100, 150, 200, 250*, 300*

SLME30 100, 200, 300, 400, 500, 600, 700*

SLME46 200, 300, 400, 500, 600, 700, 800, 900*, 1000*

Working stroke [mm]

W Axial play ≤ 0.020 mm

U Preloaded with oversize ball ≤ 0.005 mm [Available for SLME23 and SLME30 only]

Dustproof cover

Standard. Without cover

GA With dustproof cover Sensor package incl. rail, sensor lug on slide and 3 sensors

Standard. Without sensor package

PS With PNP sensors, both NO and NC connections

NS With NPN sensors, both NO and NC connections

Grease lubrication

Standard. With normal grease lubrication

RR Suitable for cleanroom application. With C-Grease

SLME – – –

Type Code

Size

23

30

46

Electromechanical linear actuator

Ball screw axial play [Rolled ball screw, class C7]

* Please check with Festo regarding stroke deflection.

Example – Type Code

SLME 46 - 10 - 800 - W GA PS

Linear ActuatorSize

Pitch

Stroke

With PNP Sensors

With Dustproof Cover

Ordering

1. Enter the codes in the boxes to build the type code.2. Use the type code to order the actuator.3. Call 1-800-99-FESTO to place your order.

Axial Play


Motor Flanges and Custom Mounting KitsSLME Linear Actuators

Dimensioning

Maximum and Minimum Values for Sizing

In certain situations, under-sized or oversized motors maynot be able to be mounted to a particular actuator. The dimensions are based on asquare flanged motor design,

with thru holes and a straightshaft. Some dimensions may not be possible for round faced motors withtapped mounting holes.Please consult Festo in thesesituations.

Custom Motor Mounting Kits

Festo custom motor mountingkits provide a custom designedmotor flange adapter plate andcoupling to allow the mountingof some third-party motors.

Festo motor mounting kitsinclude a motor flangeadapter, coupling, and hardware specifically designedto mount to your motor.

Sizing A Motor

There are seven critical dimensions required in orderto physically size a mountingkit. The drawing below shows

these dimensions. Any onedimension can have an impacton the size or even feasibilityof designing a motor adapter.

Mounting Kits

A custom mounting kit shown with motor flange adapter plate,coupling, and hardware.

Motor

Series [W] SLME23

SLME30

SLME46

AC Matsushita MSMA3AZ 30

MSMA5AZ 50

MSMA01 100

MSMA02 200 - -

MSMA04 400 - -

Mitsubishi Electric

HC-KFS(MFS,PQ)053 50

HC-KFS(MFS,PQ)13 100

HC-KFS(MFS,PQ)23 200 - -

HC-KFS(MFS,PQ)43 400 - -

HA-FF053 50 -

HA-FF13 100 -

HA-FF23 200 - -

HA-FF33 300 - -

Yaskawa Electric

SGMAH(SGML)-A3 30

SGMAH(SGML)-A5 50

SGMAH(SGML)-01 100

SGMAH(SGML)-02 200 - -

SGML-03 300 - -

SGMAH(SGML)-04 400 - -

Sanyo Electric

P30B04003 30

P30B04005 50

P30B04010 100

P30B06020 200 - -

P30B06040 400 - -

P50B05005 50 -

P50B05010 100 -

P50B07020 200 - -

P50B07030 300 - -

P50B07040 400 - -

Chiba Precision

EA-2565 12 - -

EA-2580 20 - -

Hitachi ADMA-R5 50

ADMA-01 100

ADMA-02 200 - -

ADMA-04 400 - -

Tamagawa Seiki

TS4601 30

TS4602 50

TS4603 100

TS4606 100 - -

TS4607 200 - -

TS4609 400 - -

Fanuc β M0.2 50

β M0.3 100

Step- Oriental UPD534M-A - -

PMU33AH - -

PK(RK)54,AS4 -

PK(RK)56,AS6 -

UK26,UMK26,CSK26 - -

-

Available - Not available

Type

Motor Bracket Available

Servo Electric Motor Industrial

Industrial Equipment System

per Motor

Motor Supplier

Motor

Pre-Engineered Motor Flanges Available From Festo


LubricationSLME Linear Actuators

the nut contains Multemp PS

No. 2 Grease as a lubricant.

Check the lubricant 2 to 3

months after the ball screw is

used for the first time. If it is

extremely dirty, wipe

off old grease and apply new

grease. Then, check and

supply the lubricant once

every year as a general rule.

However, as the service life

environment, adjust the

C-Grease

Fig. 1 shows the number of

dust particles from ball screw

(Particle diameter of more

Checking and Supplying

Lubricant.

Cleanroom Version with

When ordering the cleanroom

ball screw, plus C-Grease.

comes with RAYDENT on the

Unless otherwise specified,

Standard Lubrication and C-Grease

Standard Lubrication

intervals accordingly.

version, the SLME linear actuator

fluorine grease.

C-Grease meets the need for

cleanliness in semiconductor

manufacturing environments,

in laboratory automation

settings, and in electronic

component assembly lines.

C-GREASE offers cleanliness,

stable torque characteristics,

high lubricating performance,

and excellent rust prevention,

not available from conventional

of lubricants varies with

operating conditions and

than 0.13 µm). Therefore,

C-Grease is suitable for FS209E

Class 100 applications.

Test Conditions

- Ball screw shaft diameter: 20 mm

- Pitch: 20 mm

- Preload: 800 N

- Number of revolutions: 1200 per min

- Stroke: 250 mm

- Amount of grease: 1 cc

- Measurement interval: 1 hour [h]

Fig. 1


Corrosion ProtectionSLME Linear Actuators

many organic compounds,

mounting FA, etc., and is

leading the industry. The

exceeding conventional

technical concepts of JIS

(Japan Industrial Standard).

A certain amount of fine grains

film receives pressure on its

surface (it does not peel off

white grease, it is combined

with the grease and maintains

lubrication, so that it never

cleanliness is lowered. Even if

processing was implemented

can be kept from rust for

– Super precise class, thin

black rust-preventive film

resistance lasts more than

– No cracking and peeling

– No thermal influence to

materials because the film

is processed under low

preventive of individual

parts, semiconductor

manufacturing machines,

machines for export, etc.

even when bent up to a

The RAYDENT film shows

product with a RAYDENT treated

RAYDENT's Rust Resistance

powerful rust resistance

surface has maintained long-

term rust prevention for more

RAYDENT Film on the Contact

Side of Sliding Parts

come off when the RAYDENT

like plating). But by mixing into

happens that a dry piece of the

film scatters, nor that the film

RAYDENT Processing

(The effect of rust

10 years)

hairpin angle

temperature

– Suitable as thin film rust

RAYDENT and Raydent are registered trademarksof Raydent Industrial Co., Ltd.

RAYDENT Technology

Raydent technology offers

a method for designing

improved metal surface

properties.

high precision, and

superior rust resistance.

it is widely used in the

surface processing system,

As a next-generation

the side on which RAYDENT

the film comes off completely,

several years of normal use

because it is treated with a

long-term rust preventive.

RAYDENT's

amorphous diffusion

film is ultra thin, but

has super adhesion to

There is evidence to show that a

than 20 years, even with some

wear on the film surface.

mthickness 1µm-2µ

Raydent LSL (BL) Film

– Simply use as a joint

with plastics, rubber, etc.

aircraft, machine tools,

field of precision electrooptic

semiconductors, liquid crystal,

equipment including

can be called a landmark

Research and Development

achievement in this field,

based on its demonstrated

performance for more than

30 years.

RAYDENT technology,

established in Kyoto, Japan,

by Ken Ogawa in 1964,

broke new ground in Faraday's

electrolysis law and

RAYDENT Surface Treatment

Measure stop position of slide

block and halve the maximum

difference between obtained

ends of the stroke. The highest

measured value.

Feed the slide block, read test

indicator when it is slightly

moved and use the reading as

reference value. Move slide

block from this state in the

same direction at prescribed

load and measure difference

value. Perform this measure-

ends of traveling distance and

use maximum value among

measured value.

l1

l2

l3

ln

Backlash ∆ l

Return

Feed by feed screw

Load Displacement

value will be used as the

value of ln)]

readings.

at the center and both

Perform this measurement

± ½ [(max. value of ln)- (min. ∆ l

values so obtained as the

between reading of test indicator

Perform repeat positioning of

slide block in the same direction

seven times. ment at the center and both

without load and reference


Engineering SupportSLME Linear Actuators

Backlash Repeatability

Positioning Accuracy Traveling Parallelism

Fix indicator at center of slide

block and apply it to surface

plate equipped with guide rail.

Move slide block across the

guide and obtain the

maximum distance among

readings.

properly and use the position

as datum point. Then position

the slide block in the same

direction and measure the

difference between actual

traveling distance of slide

block from datum point and

the distance supposed to be

traveled by the slide block

from datum point. Perform this

measurement throughout the

stroke length and use the

Act

ua

l tr

av

eli

ng

dis

tan

ce

vs

Inst

ruct

ed

tra

ve

lin

g

∆ l

1

∆ l

2

∆ l

3

Traveling distance

∆ l

n

Traveling parallelism

(∆ ln)max

Position the slide block

maximum value among all

the values obtained.

Service Life

Bearing Guide Service Life

Nominal Life (Km) =Dynamic Load Rating

Applied Load

Nominal life is the total running distance that 90% of

identical SLME guide actuator units in a group, when

operated independently of each other, under the same

conditions, without external contamination, can achieve

without material fatigue failure.

)( x 503


Operating RecommendationsSLME Linear Actuators

Especially when there is the

is dangerous to the human

body, provide it with a

protective cover. When there

and the moving part of the

design the structure to prevent

the human body from touching

such load and moving part

directly.

Firmly tighten the fixed part

Take into consideration the

emergency by a person or by a

safety device in case of power

failure or system trouble, the

possibility that the actuator

and connection of the actuator.

is the possibility that the load

in an

behavior of the linear actuator

emergency. If the machine

the body and can

to prevent

actuator are hazardous,

is suddenly stopped in an

machine. Therefore design

the machine

and

motion of the actuator can

injure damage

the

injury

to the body damage

to the machine.

Design Selection Mounting Operating Environment

Check specifications. Be sure

specification.

to use a linear actuator

within the given

When connecting the linear

external support or guide, do

so in accordance with a proper

When mounting a load, do not

apply an excessive shock or

loosen and sliding resistance

will increase.

Do not start the system until it

is confirmed that the linear

perform an appropriate

functional test and make sure

that it is correctly mounted

Be careful not to damage

surface. The parallelism of

the mounting

sliding resistance.

surface will

ing the

guide and increasing

degrade, loosen

actuator to a load with an

receives external force

exceeding the permissible

moment, the guide will

actuator works properly. After

mounting the linear actuator,

the actuator body and mounting

perform centering satisfactorily.

connecting method and

moment. If the linear actuator

and works safely. Perform this

testing without fail before

starting the system.

containing corrosive gases,

chemicals, seawater, water

where it can be stained with

When using the linear

cutting, spatters, etc., fit a

protective cover or other

protector.

Festo.

Do not use the linear actuator


in an atmosphere

actuator in a place where

it is exposed to dust,


in a vibratory or shockable

When using the linear actuator

in an explosive atmosphere.

and vapor, and in a place

such materials.

a bad condition or breakdown.

place; this will cause

in such an environment, consult

Contact InformationName ___________________________________________________________________________________

Company _________________________________________________________________________________

Address _________________________________________________________________________________

City _____________________________________ State ____________ Zip Code ___________________

Phone ___________________________________ Fax ___________________________________________

Email ____________________________________________________________________________________

Application Information

Stroke Required________________ [in / mm]Loads/Forces

Weight [Fz] __________________ [lb/N]

Side Load [Fy] ________________[lb/N]

Pitch [My] ___________________ [in-lb/Nm]

Roll [Mx] ____________________ [in-lb/Nm]

Yaw [Mz] ____________________ [in-lb/Nm]

Load Externally Guided? [Yes/No] __________

If Yes, How?

__________________________________________________________________________________________

__________________________________________________________________________________________

Repeatability Required __________ [in/mm]

Switches or Sensors Required? [Yes/No] _______________________________________________________

End of Travel __________________ Home __________________

Brake Required [Yes/No] _________________

OrientationHorizontalVerticalInclined [angle from horizontal] [θ] ________ °

Motion Profile

Speed [Max] ___________________ [in/sec/mm/sec]

Total Cycle Time ________________ [sec]

Acceleration Time ______________ [sec]

Deceleration Time ______________ [sec]

Number of Cycles _______________

Move Distance _________________ [in/mm]


Application WorksheetSLME Linear Actuators (page 1 of 2)

For technical assistance from our team of expert automation engineers, please photocopy pages 24 and 25, fill in as much information as possible and fax to 1-800-96 FESTO.

Environmental Considerations

Ambient Temperature Range

Min. ________ [°F/°C] Max. ________ [°F/°C]

Contaminants [Yes/No] ____________________

Type ___________________________________

________________________________________

Conditions [Cleanroom, etc.] ________________

________________________________________

________________________________________

θ


Motor Information

Festo Motor Type: ______________________________________________

Third-party Motor Model Number: _____________________________________

If third-party, is motor drawing provided? [Yes/No] _____________________________

If no, please specify dimensions [inches/millimeters]:Shaft Diameter [U] _______________________________________________________

Shaft Length [AH] ________________________________________________________

Pilot Diameter [AK] _______________________________________________________

Flange Thickness [LA] ____________________________________________________

Bolt Hole Diameter [BH] ___________________________________________________

Bolt Circle [AJ] ___________________________________________________________

Pilot Length [T] ___________________________________________________________

Application WorksheetSLME Linear Actuators (page 2 of 2)

Notes:

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________

__________________________________________________________________________________________________


Design, documentation, assembly/testing

Single and multi-axis linear and rotary systems

Stepper controls, servo pneumatic and servo electric systems

Design, documentation, assembly/testing

Cabinets are designed, manufactured, assembled, and tested per NEMA, UL, and IEC standards

Standard and stainless steel enclosures

Festo Product Range

Integrated Systems Control Systems

ISO and NFPA cylinders

Linear and rotary actuators

Standard, precision, and micro grippers plus accessories

Pneumatic Actuators and Grippers

Belt and ball screw driven linear actuatorsHigh accuracy and repeatabilityHigh rigidity and speed

Electromechanical Actuators

ValvesIn-line/sub-base directional control valvesOSHA compliant lockout valvesProportional valves

Valve ManifoldsDirect, multi-pin, and fieldbus manifolds

Pneumatic Valves and Valve Manifolds

Inductive, optical, mechanical,pressure and vacuum sensors

PLCs and IPCs

Remote access panels [HMI]

Counters, timers and gauges

Sensors and Control Technology

Filters

Regulators

Lubricators

DryersCombination units

Air Preparation

Vacuum generators

Suction cups and suction grippers

A variety of suction cup typesand materials are available

Vacuum Components

Inch/metric fittings, hybrid fittings, and flow controls

Inch/metric tubing(various materials and colors)

Fittings and Tubing

Cylinders, manifolds, tubing and fittingsfor use in washdown environments

Linear/rotary actuators with and without a process valve; diaphragm valves, Namur valves

Industry Specific Solutions

For more information about the entire Festo product range, includingtechnical specifications, CAD models, product selection software,and access to our on-line store, visit us at www.festo.com/us.


While every effort is made to ensure that all dimensions and specifications are correct,any printing errors not rectifiedare outside the control of Festo, who cannot be held responsiblefor the same. For Liability andWarranty conditions, refer to our standard “Conditions ofSale”, available on request from your local Festo office.

All rights reserved. No part of this publication may be reproduced or transmittedin any form or by any means, electronic, mechanical, photocopying or otherwise, without the prior written permission of Festo. All technical data subjectto change according totechnical update.

© Copyright 2005, Festo Corporation

Length or Distancem > ft = x 3.281mm > inch = ÷ 25.4

Volumecm³ > in³ = x 0.061

Massg > lb = x 0.002kg > lb = x 2.2046

Pressurebar > psi = x 14.7

TemperatureC° > F° = x [1.8] + 32

Flowl/min > Cv = x 0.001l/min > scfm = x 0.0353

ForceN > lbf = x 0.2248kgf > N = x 9.80665

MomentNm > in-lb = x 8.8507Nm > ft-lb = x 0.7376

Moment of Inertiakg·cm² > lb-in² = x 0.3417kg·m > lb-ft = x 7.233kg·m² > oz-in² = x 5.4675

Conversion FactorsThe conversion table belowincludes the most commonly usedfor designing a system. They aregiven to enable the user to makenecessary calculations.

United States

For ordering and product assistance,

or to find your nearest Festo Distributor

in the USA, contact us via:

Phone: 1.800.99.FESTO

Fax: 1.800.96.FESTO

Email: [email protected]

www.festo.com/us

Customer Resource Center502 Earth City Expressway

Suite 125

Earth City, MO 63045

Call Toll-free: 1.800.993.3786

Fax Toll-free: 1.800.963.3786

Headquarters

Festo Corporation

395 Moreland Road

P.O. Box 18023

Hauppauge, NY 11788

Sales Offices

Boston120 Presidential Way

Suite 330

Woburn, MA 01801

Charlotte4301-S Stuart Andrew Blvd.

Charlotte, NC 28217

Chicago1441 East Business Center Drive

Mt. Prospect, IL 60056

Dallas1825 Lakeway Drive

Suite 600

Lewisville, TX 75057

Detroit1228 Kirts Blvd.

Suite 400

Troy, MI 48084

New York395 Moreland Road

Hauppauge, NY 11788

Silicon Valley

2800 Collier Canyon Road

Livermore, CA 94550

Festo North America

Design and Manufacturing Facilities

Canada

Headquarters Festo Inc.

5300 Explorer Drive

Mississauga, Ontario L4W 5G4

Phone: 1.905.624.9000

Fax: 1.905.624.9001

Email: [email protected]/ca

Mexico

HeadquartersFesto Pneumatic, S.A.

Av. Ceylán 3

Col. Tequesquinahuac

54020 Tlalnepantla

Edo. de México

Phone:011 52 [55] 53 21 66 00

Fax: 011 52 [55] 53 21 66 65

Email: [email protected]/mx

Festo Worldwide

Argentina Australia Austria Belarus Belgium Brazil Bulgaria Canada Chile China Colombia Croatia Czech Republic Denmark Estonia

Finland France Germany Great Britain Greece Hong Kong Hungary India Indonesia Iran Ireland Israel Italy Japan Korea Latvia

Lithuania Malaysia Mexico Netherlands New Zealand Norway Peru Philippines Poland Romania Russia Serbia and Montenegro Singapore

Slovak Republic Slovenia South Africa Spain Sweden Switzerland Taiwan Thailand Turkey Ukraine United States Venezuela

www.festo.com

Subject to change

East: 395 Moreland Road, Hauppauge, NY 11788

Central: 1441 East Business Center Drive, Mt. Prospect, IL 60056

West: 2800 Collier Canyon Road, Livermore, CA 94550

Catalog No.: 13039074 9.05

http://www.festo.com/INetDomino/us/en/company_portal_us.htm

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