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Outline - Introduction Interconnect Scaling in conventional CMOS - Distributed Amplifier Design Transmission Line Parameter Optimization Experimental Results - Distributed Oscillator Design One-stage R Experimenta - Conclusions ng Oscillator Results and Comparisons (c) IEEE 1999 1999 ISSCC Slide Supplement / Copyright IEEE

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Page 1: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Outline

- Introduction

Interconnect Scaling in conventional CMOS

- Distributed Amplifier Design

Transmission Line Parameter Optimization

Experimental Results

- Distributed Oscillator Design

One-stage R

Experimenta

- Conclusions

ng Oscillator

Results and Comparisons

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 2: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Microwave Engineer’s View of CMOS

Y2008, 10 layers

.m mYI 998, 5 layers

.--- 16P”

I

Bulk Si-

(VERY LOW RESISTIVITY)

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 3: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Lumped Amplifier Capacitance1000

G

u3

100

100 ●

C = 5pF+

\

50Q \

10■Frequency (GHz)

\

00■

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 4: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Traveling-Wave: Gain-Bandwidth-Delay

vin o 1

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 5: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Transmission Line Model

L line L line L line

r “ “ 0vout

cT

line cTline c

z Tline

bias

*, ---------- ----------- ------ma nn I nm1m

z 4/Lline :L L

n ,line line line ~ = G 1

‘+%-w

8 mI ,.............................

line

Tc

Tline c

Tline

‘ “1

4 erm

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 6: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

H-

Distributed Amplifier Model

L line L line L line

‘Iii

~vout

‘T. ‘;;3’ 1.‘;F’T!!gm=,..----=------.m t 1

Vin 1 1 mn n. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

0

c line

Tc

Tline c

Tline

T c T c T c““I4 erm

9 9 9

+ + + +

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 7: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Coplanar Lines in Top Level Metal

T I+W4S,Ox Ground Signal

4Ground

Si Substrate

Large Width, Space -+ small resistive line lossesWs

Tox Ground Signal Ground

/

Si Substrate

Small Width, Space +large resistive line losses

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 8: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Reduce Coupling Through Si Substrate

Large Width, Space -+ large coupling through substrateWs

Tox

/

Si Substrate

Small Width, Space -+ small coupling through substrate

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 9: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Coplanar Stripline in HP’s Process

M4M3M2Ml

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 10: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Measured Characteristic Impedance

90

80

G– 70

60

50

&I/V= 10~mS=l Opm

4 &T ox= 4m4pl?l.Unloaded CPS

1~

Ps

,---aa

Loaded C~. . . . . . . . . . . . . . .

P8510C1 . . . . . . . . . . . . . . . . . . .

,

0 5 10 15Frequency (GHz)

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 11: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

DiePhotoofDistributedAmplifier

Ro

R~ IN OUT R~

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 12: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Distributed Amplifier S-parameters

10

0

-20

, I , I ,

Unity Gain Bandwidth

v = 1 .5Vv ;:= 1.3V sI

11~~=60mA

HP8510C;

o 10 20 30Frequency (GHz)

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 13: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Distributed Oscillator Schematic

T

Lo ~-pj,,,. +j,’j’jjjjj

zbias zCps zCps zCps

‘! izCps i zCps v out

o

i $zCps

Feedback

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 14: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Ideal ~ Oscillator Layout

.ve

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 15: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

~bias

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 16: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

o

-20

-40

-60

-80

Oscillator Power Spectrum

16.6 GHz v ~i~~= 1 .3VI~ia~= 40mA

33.3 GHz

49.9 GHz

. . . . . . . . . . . . . . . . . . .

0 10 20 30 40 50Frequency (GHz)

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 17: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Oscillator Phase Noise Comparison

c1)(n.—0

z

c1)u)(Gcnufi.—

-170

-190

P=l mW, f~/fO

+ Razavi, (std. CMOS)Isscc 97

Ali, (bipolar)ISSCC 96

❑Wagemans, (Glass substrate)

~ ISSCC 98

Craninckx, (Bondwires)

o Isscc 95 ●

Hajimiri, (std. CMOS) This WorkA PhD Thesis, 98 (std. CMOS)

VAhrens, (Bondwires)Lo-Pow Symp, 98

0 5 10 15 20Frequency (GHz)

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE

Page 18: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and ...smirc.stanford.edu/papers/isscc99s-bendik.pdf · Title: Slide MP 4.3: Monolithic CMOS Distributed Amplifier and Oscillator

Conclusions

- Low-loss transmission lines in conventional CMOS

70-L2 CPS with 0.7dB/mm at 17 GHz

- Monolithic 50-Q CMOS distributed amplifier

UGBW: 23 GHz, -ldB compr: +5dBm, IP3: +15dBm

- First monolithic CMOS distributed oscillator

fO: 16.3-16.8 GHz, L: –110dBc/Hz at 1MHz offset

- CMOS will continue to scale into microwave region

(c) IEEE 19991999 ISSCC Slide Supplement / Copyright IEEE