single-material mems and nems using polycrystalline ...aslam/aslam_smm-tardec_9-14-09mod.pdf ·...

Single-Material MEMS and NEMS Using Polycrystalline DiamondUsing Polycrystalline Diamond

DEAN M. ASLAMELECTRICAL AND COMPUTER ENGINEERING, MICHIGAN STATE UNIVERSITY

www.egr.msu.edu/~aslamWork done by:Hoyin ChanZongliang CaoSTATE UNIVERSITY

E. LANSING, MI 48824 USAZongliang CaoMike VarneySean Hatch

CORNELL PRINCIPAL; 11/14/00NSFNSF--ERC For Wireless Integrated MicroSystems (WIMS)ERC For Wireless Integrated MicroSystems (WIMS)

TALK OVERVIEW

NATURE/MAN MADEMADE MEMS/NEMSSINGLE MATERIAL MEMS/NEMS

Michigan State U

EXAMPLES OF SMM

MEMS/NEMS

STATIC CHARGE ENERGY


Michigan State U CAMPUS

STATIC CHARGE ENERGY SCAVENGING

E Coli:senses food

NATURE MADE NANOSYSTEM senses food,

O2, Temp, PhNANOSYSTEM

MCP: Methyl-accepting ChemotaxisRed: Counterclockwise flagellar rotation

MOLECULAR SENSING & ACTUATIONy p g

Proteins, called chemoreceptors

Signaling Proteins: A – CheA;

B – CheB; Y – CheY; W - CheW

Green: Clockwise flagellar rotationRed: Counterclockwise flagellar rotation

AttractantGray: Inactive

htt // iki di / iki/http://en.wikipedia.org/wiki/Escherichia_coli

METHYLATION

John S Parkinson J Bacteriolohy

AFFECTS GENE BEHAVIOR


John S. Parkinson, J. Bacteriolohy, 85 (5), 21492–1494 (2003).

MAN MADE Cell Phone with ProjectionProjection Display

Drone

Remote Controlled Beatle


PROF. MAHARBIZ, UC Berkeley

WHAT IS NEEDED?MICRO AND NANO SYSTEM INTEGRATION

The sites are connected to the amplifiers by a parylene cable leading to the electronics module equipped with processor and wireless interface.

ENVIRONMENTAL SENSORS

WIRELESS

BIOLOGICAL SENSORS

CK

AG

ING64 electrode sites on 200 µm centers in 1

mm3 volume of tissue, containing a MOSIS chip with 16 1000x amplifiers for buffering the recorded signals. Ken Wise

T. Zellers

Cortical Micro-system with microprocessor, amplifier and Wireless Chips FLUIDIC

BATTERY

WIRELESS INTERFACE

MICROCONTROLLER

WIM

S PA

C

WIMS CUBE1 cc

ELECTRICAL

POLY CRYSTALLINE DIAMOND

Although a number diamond micro and nanostructures have been reported in the last 20 years, this work reports for the first time

CHALLENGES?REDUCTION IN COST AND SIZENEW MATERIALS & CONCEPTS


POLY-CRYSTALLINE DIAMOND SINGLE MATERIAL MEMS/NEMS

this work reports, for the first time, single material MEMS (SMM)

Protein Building Blocks: Amino Acids C sp2

∏-bond

Carboxyl Group

Amino Group

p

www.biochem.arizona.edu/classes/bioc462/462bh2008/462bh j t

R Variable Group

462bhonorsprojects/462bhonors2007/gsantarelli/Conclusion.htmlC

sp3

HC

Glucose O

FLEXIBLE BUILDING BLOCKS 2 3

http://www.nlm.nih.gov/medlineplus/ency/imagepages/19825.htm

Glucose O


• FLEXIBLE BUILDING BLOCKS sp, sp2, sp3

• ARE NATURE-MADE SYSTEMS SINGLE-MATERIAL?

CARBON IS UNIQUE2s2s 2py

2Mix one s and three p sp3

2

2px2pz

porbitals s1p3

sp2 Bond

sp3DiamondMethane


SEEDING USING DIAMOND LOADED

DIAMOND ON Si SEED (Diamond Powder) GROW DIAMOND TEST FILM MEMS/NEMS

Seeding/CatalystDIAMOND-LOADED

PHOTORESIST

PLASMA REACTORSi wafer

PRD ENERGY

H2CXHY H280μm

DPRHOT SUBSTRATE

HCH3

(400 - 1000 C, 0.1 - 150 torr)MPCVD

SiSiO2

FILM QUALITY•RAMAN

6000DIAMOND PEAK •RAMAN

•AFM•SEM

2000

3000

4000

5000

1200 1300 1400 1500 1600

Inte

nsity


1200 1300 1400 1500 1600Wavenumber Shift(1/cm)

Brief Review of Carbon Sensors, MEMS/NEMS

Swiss center for electronics and microtechnology, Inc. UV Sensor, quant. Eff. Near 1

COCHLEAR PROBE WITH DIAMOND SENSORS

Nanocrystalline diamond (Argonne)

DIAMOND MEMS AT MSU

DIAMOND AFM TIP

Diamond Nano Resonators

Swiss center for electronics and microtechnology, Inc.Torsional

Resonator

DIAMOND PIEZORESISTIVE RFMEMS, MSU‐ ADJUSTABLE OUTPUT IMPEDANCE‐ HIGH SENSITIVITY

OXYGEN SENSORHighest Q of 86,603 at

0.805 MHz for L = 30 μm


100 nm Resonator

SINGLE MATERIAL MEMS/NEMSWhat is Single Material MEMS (SMM)?

Basic Concept: Undoped Poly-C (1013 Ω·cm) Mechanical MaterialLightly-doped Poly-C (p, 1-10 Ω·cm) Sensor

p+ Poly-Cp Poly-C

Sensor Interconnect

What is Single Material MEMS (SMM)?

Lightly doped Poly C (p, 1 10 Ω cm) SensorHighly-doped Poly-C (p+, 10-3 Ω·cm) Interconnect Undoped

Poly-C

Mechanical/Substrate MaterialWhy Diamond SMM?

Unique Properties of Poly-C:

Electrochemical Potential Window = 3 V (-1 to +2) Eg= 5.5 eVDielectric Constant = 5.7 Chemical Inertness & Stability Young’s Modulus = 1012 PaBackground Current = 1 nA

Saturation Velocity = 2.7 x 107 cms-1

Breakdown Field = 10 MVcm-1

Resistant to Fouling µp= 1,600 cm2V-1s-1K = 20 WK-1cm-1

Example of Diamond SMM RFMEMS Resonator


CHALLENGES IN FABRICATION OF SMMFABRICATION INSULATING DIAMONDFABRICATION INSULATING DIAMOND: USING O2 IN THE GROWTH ENVIRONMENT ρ = 1013 Ω·cm

DRY ETCHING OF DIAMOND


EXAMPLES OF DIAMOND SMM STRUCTURES

NEURAL APPLICATIONS: BCI Electrical Chemical

NEURAL PROBE


ELECTRICAL AND CHEMICAL DETECTIONElectricalChemical

Electrochemical potential window


SMM CHEMICAL NEURAL PROBEEl

ectr

ode

Cou

nter

ctro

de

ctro

de

orki

ng E

lec

eren

ce E

le


Wo

Ref

e

OTHER SMM STRUCTURES UNDER STUDY

HOW TO POWER SMM?

ZERO-ENERGY SMM?


Zero-Energy SMM Systems

Khalil Najafi

y

Static Charge EnergyScavenging

How Much Energy gyis Available?


ZERO-ENERGY MEMS/NEMSEnergy Scavenging From Human Body

Energy Available Energy Scavenged


SMM Bio‐Probes for Sensing and Pathogen Detection

RESEARCH GOALS:GOALS:

MIGRAINE

HEADACHS

CANCER

EPILEPSI

DEPRESSION, ,

ANGER


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