silicon sensor module production for phenix focal s.h. lim yonsei university
TRANSCRIPT
Silicon sensor module production
for PHENIX FOCAL
S.H. Lim Yonsei University
Contents
• Introduction– PHENIX FOCAL– Silicon pad sensor
• Micro-module production– Components & Structure– Wafer dicing– Gluing process– Results
• Summary & Outlook
2Yonsei Nuclear Physics
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Contents
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PHENIX FOCAL
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Silicon pad sensor
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ground
-
p n
Sensor operation
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ground
--
+++
+++
++++ - -
---
-- --
Depletion
Region
PN diode
Leakage current
•IV measurement data
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Contents
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Micro-module schematics
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Components for micro-module
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Wafer Dicing
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IV characteristics after dicing
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Gluing Process
• Gluing process
– 3 Steps
– 1 day for each step
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2nd
1st
1st
3rd
Glue properties
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Araldite KE45 CW2400
Company HUNTSMAN(Swiss) ShinEtsu(Japan) CircuitWorks(USA)
Material EpoxySilicone Rubber
CompoundSilver epoxy
Color / appearance
Creamy liquidAmber liquid
White pasteBright silverGray silver
Specific gravity
1.17 /Resin0.92 /Hardener
1.05 2.85
Feature
Production results
•4 sample micro-module production has completed.•Mechanical and electrical issues have been checked
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IV characteristics after gluing
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Contents
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Summary & Outlook
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THE END
THANK YOU