semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/gregor... ·...
TRANSCRIPT
![Page 1: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/1.jpg)
Semiconductors as particle detectors
Ingrid-Maria Gregor, DESY
Thanksto:MarcWinter,LaciAndricek,CinziadaVia,PaulaCollins,UliKoetz,JimVirdee,CarstenNiebuhr,FrankSimon,FabianHügging,MarkusChrisDanzani,LutzFeld,RobertKlanner,ChristophedelaTaille,NorbertWermes
![Page 2: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/2.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Outline
MoDvaDonBasicsofSemiconductorDetectorsStripDetectorsPixelDetectorsPixelsforFutureExperimentsSummary
FieldofsemiconductordetectorsforparDcledetecDonisextremelylarge
Cangiveonlyaroughoverview
Myviewisbiased
alotofsilicon
morepixelsthanstrips
almostonlyHEP
Thefirsttransistor,inventedatBellLaboratories1947
2
![Page 3: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/3.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Motivation
Semiconductorshavebeenusedinpar?cleiden?fica?onformanyyears:
~1950:Discoverythatpn‐JuncDonscanbeusedtodetectparDcles.
Semiconductordetectorsusedforenergymeasurements(Germanium)
Since~30years:SemiconductordetectorsforpreciseposiDonmeasurements.
preciseposiDonmeasurementspossiblethroughfinesegmentaDon(10‐100μm)
mulDpliciDescanbekeptsmall(goal:<1%)
TechnologicaladvancementsinproducDontechnology:
developmentsformicroelectronics
ZEUSMVD2000
3
DELPHIVFT1996
![Page 4: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/4.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
CDFSVXIIa(2001‐)
~11m2siliconarea
~750000readoutchannels
DELPHI(1996)
~1.8m2siliconarea
~175000readoutchannels
Large Silicon Systems
CMSSiliconTracker(~2007)
~12,000modules
~223m2siliconarea
~25,000siliconwafers
~10Mreadoutchannels
4
![Page 5: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/5.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Basics of semiconductor Detectors
Ingr
id-M
aria
Gre
gor,
Sem
icon
duct
ors
as P
artic
le D
etec
tors
![Page 6: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/6.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Largegap:thesolidisaninsulator.
Nogap:itisaconductor.
Smallbandgap:semiconductor
Forsilicon,thebandgapis1.1eV,butittakes3.6eVtoionizeanatom.TherestoftheenergygoestophononexitaDons(heat).
Inagas,electronenergylevelsarediscrete.Inasolid,energylevelssplitandformanearly‐conDnuousband.
Semiconductor Basics I
6
![Page 7: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/7.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
n‐type:Inann‐typesemiconductor,negaDvechargecarriers(electrons)areobtainedbyaddingimpuriDesofdonorions(eg.Phosphorus(typeV))
DonorsintroduceenergylevelsclosetoconducDonbandthusalmostfullyionized=>FermiLevelnearCB
Electronsarethemajoritycarriers.
p‐type:Inap‐typesemiconductor,posiDvechargecarriers(holes)areobtainedbyaddingimpuriDesofacceptorions(eg.Boron(typeIII))
Acceptorsintroduceenergylevelsclosetovalencebandthus‘absorb’electronsfromVB,creaDngholes=>FermiLevelnearVB.
Holesarethemajoritycarriers.
Doping Silicon
7
![Page 8: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/8.jpg)
p‐andn‐dotedsemiconductorcombined
GradientofelectronandholedensiDesresultsinadiffusemigraDonofmajoritycarriersacrossthejuncDon.
MigraDonleavesaregionofnetchargeofoppositesignoneachside,calledthedepleDonregion(depletedofchargecarriers).
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
PN-Junction
ArDficiallyincreasingthisdepletedregionbyapplyingareversedbiasvoltageallowchargecollecDonfromalargervolume
with
8
![Page 9: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/9.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Principle of semiconductor Detectors
1. CreaDonofelectricfieldvoltagetodepletethicknessd
:dopingconcentraDon
2. Keepdarkcurrentlow
:chargecarrierlifeDme
3. IonisingparDclescreatefreechargecarrier
4. Chargecarrierdriltoelectrodesandinducesignal
9
![Page 10: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/10.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Material Properties
Si Ge GaAs CdTe Diamant SiC
bandgap 1.12 0.67 1.42 1.56 5.48 2.99
energyfore‐ppair[eV] 3.6 2.9 4.2 4.7 13.1 6.9
e‐forMIP(300µm) 24000 50000 35000 35000 9300 19000
Z 14 32 31+33 48+52 6 14+6
Siliconistheonlymaterialwhichcanbeproducedinlargerwafersinhighquality
comparetokT=0.026eVatroomtemperature‐>darkcurrentundercontrol
highdensitycomparedtogases:ρ=2.33g/cm3
goodmechanicalstability‐>possibletoproducemechanicallystablelayers
largechargecarriermobility
fastchargecollecDonδt~10ns
Whyissiliconusedmoreolen?
10
![Page 11: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/11.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Protons in Silicon
0.4keV/µm‐>3.6eVcreateselectronholepair =>~110electron‐holepairsperµm(meanvalue)most probably number: 80 electrons
11
![Page 12: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/12.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Radiation Damage
ImpactofRadiaDononSilicon:
SiliconAtomscanbedisplacedfromtheirlatceposiDon
Pointdefects(EMRadiaDon)
Damageclusters(NuclearReacDons)
Importantinthiscontext:BulkEffects:Latcedamage:GeneraDonofvacanciesandintersDDalatoms(NIEL:NonIonizingEnergyLoss)
Surfaceeffects:GeneraDonofchargetraps(Oxides)(byionizingenergyloss)
Fillingofenergylevelsinthebandgap➭directexcitaDonnowpossible➭higherleakagecurrent➭morenoise➭“Chargetrapping”,causinglowerchargecollecDonefficiency
Canalsocontributetospacecharge:Higherbiasvoltagenecessary. 12
![Page 13: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/13.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Consequences of Radiation Damage
n
n+
p+
n
n+
p+
++ +
+ ++
--
--
--
++ +
+ ++
--
--
--
) )
))
Chargetrappingindefects
Macroscopicconstant:leakagecurrentanddepleDonvoltage
CountermeasuresGeometrical:developsensorsthatcanwithstandhigherdepleDonvoltages
Thinnersensors(butFEelectronicswithhighersensiDvityneeded)
Environment:sensorcooling(~‐10C)
Slowingdownof“reverseannealing”
Lowerleakagecurrents13
![Page 14: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/14.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Some Words onFront-End Electronics
Ingr
id-M
aria
Gre
gor,
Sem
icon
duct
ors
as P
artic
le D
etec
tors
![Page 15: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/15.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Overview of readout electronics
Most front-ends follow a similar architecture
Verysmallsignals(fC)‐>needamplificaDon
Measurementofamplitudeand/orDme(ADCs,discriminators,TDCs)
Severalthousandstomillionsofchannels
example:ALICEPixeldetector
15
![Page 16: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/16.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Very Large Scale Integration
VLSIenables
highchanneldensity
pre‐amplificaDon,datastorageetc.veryclosetothedetector
reducednoise
lowpowerdissipaDon
industrialproducDon
integraDondensityisgrowingrapidly
16
![Page 17: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/17.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Industry Scaling Roadmap
New generation every ~2 years with α = √2from 1970 (8 µm) to 2009 (35 nm) (industrial application)End of the road ? Power dissipation sets limits HEP nowadays at 90nm and 130nmProblem: by the time a technology is ready for HEP -> “old” in industry standards
HEP
17
![Page 18: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/18.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Radiation effects on CMOS: ionizing
Decreaseoffeaturesize:higherradiaDontolerance:
PosiDvechargetrappedingateandfieldoxidesTrappedchargedissipatesbytunnellinginthin‐oxidetransistors
RadiaDontolerantlayouttechniquesdesignedbyCERNRD49in0.25µmtoavoidparasiDctransistorleakage
Source
Drain Gate
Guard
Bird’s beak
Field oxide
Parasitic MOS
Parasitic channel
Standarddevicelayout
EnclosedlayoutTID on IBM 130nm NMOS [F. Faccio CERN]
18
gateenclosesalln+regionsavoidinganythicktransistorrelevantoxidestructures
![Page 19: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/19.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Strip Detectors
Ingr
id-M
aria
Gre
gor,
Sem
icon
duct
ors
as P
artic
le D
etec
tors
![Page 20: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/20.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Strip Detectors
FirstdetectordevicesusingthelithographiccapabiliDesofmicroelectronics
FirstSilicondetectors‐>stripdetectors
Canbefoundinallhighenergyphysicsexperimentsofthelast20years
Principal:Siliconstripdetector
p+-strips
metallization (Al)
depletion voltage
n-siliconionizingparticle
n+-siliconmetallization (Al)
80 e-h/µm
ArrangementofstripimplantsacDngaschargecollecDngelectrodes.
Placedonalowdopedfullydepletedsiliconwafertheseimplantsformaone‐dimensionalarrayofdiodes
ByconnecDngeachofthemetalizedstripstoachargesensiDveamplifieraposiDonsensiDvedetectorisbuilt.
TwodimensionalposiDonmeasurementscanbeachievedbyapplyinganaddiDonalstriplikedopingonthewaferbackside(doublesidedtechnology)
20
![Page 21: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/21.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
First HEP Application: NA11
Alerdiscoveryofcharm(1974),τ‐lepton(1975)andbeauty(1977)withlifeDmescτ~100μm:needfast(ns),andprecise(μm)electronictrackingdetectors
stripdetectorforNA11in1981
1200strip‐diodes
20μmpitch
60μmreadoutpitch
24x36mm2acDvearea~0.01m2
posiDonresoluDon~5.4μm
8layeratthestart
precisetrackreconstrucDon
readoutelectronic:~1m2!
21
![Page 22: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/22.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Si Microstrip Detectors for LHC
Early1990’s:Atthe?meoftheConceptual
DesignoftheppExperiments
RadiaDondamagepoorlyunderstood
Cost/unitareawasprohibiDvelylarge
Largeno.ofchannelsrequired
Whatwasknown:
leakagecurrentincreasedlinearlywithfluence
typeinversion–higherandhigherbiasvoltage
lrequired
reverseannealing
What was doneHVbehaviourimprovedbycarefulprocessinganduseofmulDpleguardringsSidetectorshadtobekeptpermanentlycoldFastpre‐amplifiersdevelopedtocopewith25nscollidingbunchesLeakagecurrentdealtwithfastamplifiersCost/unitareasignificantlyreducedbygrowinglargerdiameteringots(6”insteadof4”),single‐sidedprocessing(p‐on‐n)ImplementaDonoffront‐endread‐outchipinindustrystandarddeepsub‐microntechnology
22
![Page 23: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/23.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
CMS Si-Tracker
Si‐Strip‐Detector:
~210m2Silicon
25000Sensors,9.6Mchannels
10barrellayers,2x9discs
Thelargesteverbuiltsilicontracker
23
![Page 24: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/24.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
CMS Si Barrel
Single and double sided layers
CMSInnerbarrelSiTracker:Single‐SidedSi‐Strip
24
![Page 25: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/25.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ATLAS SCT
ATLAS Si-Detector SCT: Si- strips: 4 Barrel-layer, 2 x 9 discs
25
![Page 26: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/26.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ATLAS SCT
SCT strips: 61 m2 silicon, ~6.2 M channels4088 modules, 2112 barrel (1 type), 1976 in the discs (4 different types)
26
![Page 27: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/27.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ATLAS SCT Module
barrel-module
27
![Page 28: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/28.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ATLAS SCT Module
barrel-module
disc-module27
![Page 29: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/29.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Pixel Detectors
Ingr
id-M
aria
Gre
gor,
Sem
icon
duct
ors
as P
artic
le D
etec
tors
![Page 30: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/30.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Limits of Strip Detectors
In case of high particle fluences ambiguities give difficulties for the track reconstruction
DerivingthepointresoluDonfromjustonecoordinateisnotenoughinformaDontoreconstructasecondaryvertex
PixeldetectorsallowtrackreconstrucDonathighparDcleratewithoutambiguiDes
GoodresoluDonwithtwocoordinates(dependingonpixelsizeandchargesharingbetweenpixels)
‣ Veryhighchannelnumber:complexread‐out
‣ ReadoutinacDveareaadetectorFirstpixels(CCDs)inNA11/NA32:~1983
29
![Page 31: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/31.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Hybrid Pixels – “classical” Choice HEP
chip
sensor
Theread‐outchipismounteddirectlyontopofthepixels(bump‐bonding)
Eachpixelhasitsownread‐outamplifier
Canchooseproperprocessforsensorandread‐outseparately
Fastread‐outandradiaDon‐tolerant
…but:
Pixelareadefinedbythesizeoftheread‐outchip
HighmaterialbudgetandhighpowerdissipaDon
HybridPixel(CMS)
CMSPixels:~65Mchannels150µmx150µm
ATLASPixels:~80Mchannels50µmx400µm(longinzorr)
Alice:50µmx425µmLHCb
Phenixupgrade
Fair
CBM
PANDA 30
![Page 32: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/32.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Apixelmodulecontains:1sensor(2x6cm)~40000pixels(50x500mm)16frontend(FE)chips2x8arraybumpbondedtosensorFlex‐hybrid1modulecontrolchip(MCC)Thereare~1700modules
ATLAS-Pixels
31
![Page 33: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/33.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ATLAS-Pixels
32
![Page 34: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/34.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Services!!
![Page 35: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/35.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Services!!
![Page 36: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/36.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Material Budget of LHC Experiments
Atlas
CMS&AtlasbothslippedconsiderableinkeepingX/X0originallyaimedfor!
OldargumentthatSiliconwouldbetoothickisnotreallytrue==>power&cooling
CMS
34
![Page 37: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/37.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Next Generation Pixel Detectors
Ingr
id-M
aria
Gre
gor,
Sem
icon
duct
ors
as P
artic
le D
etec
tors
![Page 38: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/38.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Current Challenges (ILC, sLHC)
Mainchallenge:idenDfycquarkandleptonjets
lifeDme~10‐12sec=>~100um
=>parDclesdecaywithinthevacuumbeampipe
reconstructdecayproducts
Alsohere:Trendintrackingdetectors:pixelliseddetectorsinstalledveryclosetothebeaminteracDonregion
MinimaldistancelimitaDons:
• beampiperadius
• beamassociatedbackgrounds
• densityofparDclesproducedattheIP
Consequencesonoccupancyandradia?onlevel
36
![Page 39: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/39.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Optimising = Compromising
ConflictbetweenphysicsperformancedrivenparametersandrunningcondiDonconstraints:
Physicsperformance:spaDalresoluDonandmaterialbudget(+distancetoIR)
RunningcondiDons:read‐outspeedandradiaDontolerance
Moreover:
➡ limitaDonsfrommaximumpowerdissipaDoncompaDblewithrunningcondiDonsandmaterialbudget
➡ limitaDonsfromhighestdataflowacceptablebyDAQ
UlDmateperformanceonallspecificaDonscannotbereachedsimultaneously
eachfacility&experimentrequiresdedicatedopDmizaDon(hierarchybetweenphysicsrequirementsandrunningconstraints
thereisnosingletechnologybestsuitedtoallapplicaDons
explorevarioustechnologicalopDons
moDvaDonforconDnuousR&D(opDmumisstronglyDmedependent)
37
![Page 40: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/40.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
physics or Running Conditions
Physicsperformancedriven:
thin(potenDallyundepleted)sensiDvevolume
ILC,RHIC,CLIC,SuperB,FAIR
CMOSsensors,CCDs,DEPFETs,VerDcallyintegrated(“3D”)
Runningcondi?onsdriven:
”thick”depletedsensiDvevolume
LHC&SLHC
Hybridpixelsensors,3Dsensors,VerDcallyintegrated(“3D”)
Future : 3D integrated pixel devices reduce the gap between the two main
optimization optionsTwotypesof3D:3Dsensors‐>CinziaDaVia3Dintergrateddevices‐>ChrisDanKiesling
38
![Page 41: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/41.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Harsh Running Conditions - SLHC
Improvement/evoluDonofhybridpixelsensors:SmallerCMOSfeaturesizemorecompactFEμcircuits
smallerpixelsoccupancy
ImprovedsensiDvevolumeradiaDonhardness
LargernumberofpixelspowerdissipaDonisanissue!
AlternaDvestohybridpixels:ParDcularlyinfashion:3Dsensors
Others:3Dintegrateddevices
300–400pile‐upeventsatstartoffill
wanttosurviveatleast3000�‐1datataking
B‐layerat37mm:
~30trackspercm‐2perbunchcrossing
>10161MEVn‐equivalentnon‐ionising
Few10sofMGray(10xLHC)
39
![Page 42: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/42.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ThinplanarpixelsfortheinnerlayersofthenewATLASpixelsystematSLHC:Atthesamevoltagethin(=overdepleted)detectorsareexpectedtohaveahigherelectricfieldthanthick(=parDallydepleted)detectors.Theycontributetokeepthematerialbudgetlow,whichisextremelyimportantintheinnerlayerstomaintaingoodtrackingperformances.
Results of a first characterization of the pixel structures on p-type wafers:
Lowleakagecurrents(<7nA/cm2for75μmstructures,<15nA/cm2for150μmstructures).DepleDonvoltagesaround20and80Vforthe75μmand150μmthickstructuresrespecDvelyHighVbreakforallthepixelstructuresproduced
Thin Planar Pixel Sensors
40
![Page 43: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/43.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
3D Sensors
3‐darrayofpandnelectrodesthatpenetrateintothedetectorbulkLateraldepleDon:
Max.drilanddepleDondistancesetbyelectrodespacingReducedcollecDonDmeanddepleDonvoltageThickerdetectorspossibleLowchargesharing
BUT:non‐standard(planar)technology
Bothelectrodetypesareprocessedinsidethedetectorbulkinsteadofbeingimplantedonthewafer'ssurface.
41
![Page 44: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/44.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
The Vertex Detector at the ILC
Need: Goodangularcoveragewithmanylayersclosetovertex:
|cosθ|<0.97.
Firstmeasurementatr~15‐16mm.5‐6layersouttor~60mm.
EfficientdetectorforverygoodimpactparameterresoluDon
Material~0.1%X0perlayer.
CapabletocopewiththeILCbeamstrahlungsbackground
ModestaveragepowerconsumpDon<100WSinglepointresoluDonbe�erthan3μm.
smallpixels,thinsensors,thinr/oelectronics,lowpower(gascooling)
Measureimpactparameter,chargeforeverychargedtrackinjets,andvertexmass.
FigureofmeritfortheVXD:
ImpactParameterResoluDon
(MarcWinter)
Accelerator a(µm) b(µm)
LEP 25 70
SLD 8 33
LHC 12 70
RHIC‐II 13 19
ILC <5 <10
42
![Page 45: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/45.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
The Vertex Detector at the ILC
Innerlayer1.6MPixelsensorsOnceperbunch=300nsperframe:toofast
Oncepertrain~100hits/mm2:tooslow
5hits/mm2=>50μsperframe:maybetolerable (Note:fastestcommercialimaging~1ms/MPixel)
FourdifferenttechnologiesunderstudyforILCvertexdetectorCCD,DEPFET,CMOS,and3DdifferentvariantsofeachtechnologyapproachunderinvesDgaDon
Themainsplitisbetweenthese2categories:conDnuousread‐outinsidetrainsdelayedread‐outinbetweenconsecuDvetrains
369 ns
x2625
0.2 s
~1 ms
BunchTrain
BunchSpacing
43
![Page 46: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/46.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
ILC: What's on the Pixel Market?
Accumula?onof~70‐150BX
1.cont.r/oduringtrain
CPCCD(LCFI)DEPFETMimosa(Strasbourgatal.)
2.storeandr/oinpause
CAPs(Hawaii)ISIS(LCFI)
Accumula?onofabout3000BX
FP‐CCD(KEK,JAXA/ISAS,TohokuUni)
single‐bunch?mestamping"hybridpixelsw/obumps"
3Dintegratedpixels(Fermilab)
SOI(Fermilab,LBNL)
ChronoPixels(Yale/Oregon)
DeepN‐WellMAPSSDR(INFNMilan,Pavia,RomaIIIUni.Bergamo,Insubria,Pavia)
Currentlythereareabout~10“candidates”fortheILCVTXDetector.
ThesetechnologieshavedifferentapproachestocopewithbeaminducedbackgroundattheILC
Allapproachesaimfor~3µmprecisionand<40mm2‐hitresoluDon
Targetmaterialbudgetis~0.1%X0perlayer
44
![Page 47: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/47.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
DEPFET
DePletedFeld Effect Transistor fullydepletedsensiDvevolume
fastsignalriseDme(~ns),smallclustersize
nochargetransferneeded
fasterreadout
be�erradiaDontolerance
internalamplificaDon
largesignal,evenforthindevices
r/ocap.independentofsensorthickness
charge‐to‐currentconversion:gq=dId/dq≈1nA/electron,scaleswithgatelength
ChargecollecDonin"off"state,readoutondemand
Rowwiseread‐out("rollingshu�er”):selectrowwithexternalgate,readcurrent,clearDEPFET,readcurrentagainthedifferenceisthesignal
onlyonerowacDvelowpowerconsumpDon
But:for40kHzframerate25nsperrowlDEPFETisbaselinetechnologyforthevertexdetectorofSuperBelle
45
![Page 48: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/48.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Monolithic Active Pixels (MAPS)
e.g.Mimosa(MinimumIonizingParDcleMOSAcDvePixelSensor)
h
AcDveareaunderneaththeelectronics(epi‐layer<20µmthick)providing100%fill‐factorChargegeneratedbyionizaDonintheepitaxiallayerthermallydiffusetowardlowpotenDaln‐wellregionStandard,cost‐effecDveCMOSprocess,nopost‐processing
<20µm
FeaturesoftheMIMOSA–detectors:
SinglepointresoluDon1µm–3µm
Pixel–pitch10‐40µm
Thinningachieved50‐120µm
S/NforMIPs20–40
DetecDonefficiency>99%
RadiaDonhardness:1MRad;2x1013neq/cm²
ProducedinvariouscommercialCMOS‐processes
MimosaisbaselinetechnologyforthevertexdetectorofSTAR
46
![Page 49: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/49.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
CCD based
Charge‐CoupledDevices(CCDs)Demonstratedinlargesystem(307Mpx)atSLD,butslow.
ColumnParallelCCDs(CPCCD)columnparallelreadout,withbump‐bondconnecDonson20µmpitchtoreadoutchipincludingamp,analogueCDS,ADCs,sparsificaDonandmemory
FPCCD(FinePixelCCD)–fullydepletedepi‐layertosuppressdiffusion
with5µmpixels,readoutoncepertrain;20Dmesfinerpixelgranularityinsteadof20Dmeslices
Image Sensor with In-Situ Storage (ISIS)Combines CCDs, active pixel transistors and edge electronics in one deviceCharge collected under a photo-gateCharge is transferred to 20-pixel storage CCD in situ, 20 times during the ~ 1 ms long bunch train
47
![Page 50: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/50.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
DoubleCMOSPixelMacro(50μmpitch)forDmingMicro(5μmpitch)forpreciseposiDonBufferdataduring~3000bunchesinatrainandreadoutbetweenbunchtrains
SOIdetectorsareafirststeptoward3DintegraDonsinceitusesmanyofthesameprocessesas3DintegraDon(oxidebonding,waferthinning,viaformaDon)
ThintoplayerwithsiliconislandsinwhichPMOSandNMOStransistorsarebuilt.Aburiedoxidelayer(BOX)whichseparatesthetoplayerfromthesubstrate.HighresisDvitysubstratewhichformsthedetectorvolume.DiodeimplantsareformedbeneaththeBOXandconnectedbyvias.
Chronopixel and SOI
48
![Page 51: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/51.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Silicon detector size 1981 - 2006[m
2 ]
Space
HEP
49
![Page 52: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/52.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Summary
Solidstatedetectorsplayacentralroleinmodernhighenergyandphotonphysics
UsedintrackingdetectorsforposiDonandmomentummeasurementsofchargedparDclesandforreconstrucDonofverDces(speciallypixeldetectors)
Byfarthemostimportantsemiconductor:Silicon,indirectbandgap1.1eV,however:3.6eVnecessarytoformehpair
AdvantagesSi:largeyieldingeneratedchargecarriers,finesegmentaDon,radiaDontolerant,mechanicallystable,…
Workingprinciple(general)diodeinreversebias(pnjuncDon)
Important:S/Nhastobegood.Noise~1/Cforsystemsthatmeasuresignalchargesmallerfeaturesizesaregood.Pixel!
PixeldetectorsareusedinmostmajorcurrentparDcledetectorsandareplannedforfutureexperiment
R&Dforsemiconductordetectorsalwayshastobeontheedgeoftechnology
50
![Page 53: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/53.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Noise
detectorcapacity
darkcurrent
serialresistor
SegmentaDonintomanychannels
Noise Sources
51
![Page 54: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/54.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Resolution of Tracking Detectors
DependingondetectorgeometryandchargecollecDon
Strippitch
Chargesharingbetweenstrips
Simple case: all charge is collected by one stripTraversing particle creates signal in hit stripFlat distribution along strip pitch; no area is pronounced
Probability distribution for particle passage:
Simplecase:allchargeiscollectedinonestrip
Thereconstructedpointisalwaysthemiddleofthestrip:
52
![Page 55: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/55.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Resolution of Tracking Detectors II
CalculaDngtheresoluDonorthogonaltothestrip:
ResulDnginageneralterm(alsovalidforwirechambers):
Forasiliconstripdetectorwithastrippitchof80µmthisresultsinaminimalresoluDonof~23µm
Incaseofchargesharingbetweenthestrip(signalsizedecreasingwithdistancetohitposiDon)
ResoluDonimprovedbycenterofgravitycalculaDon
53
![Page 56: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/56.jpg)
54
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Interactions of Particles with Matter
MaximumkineDcenergywhichcanbetransferredtotheelectroninasinglecollision
ExcitaDonenergy
DensitytermduetopolarizaDon:leadstosaturaDonathigherenergies
ShellcorrecDonterm,onlyrelevantatlowerenergies
![Page 57: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/57.jpg)
54
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Interactions of Particles with Matter
MaximumkineDcenergywhichcanbetransferredtotheelectroninasinglecollision
ExcitaDonenergy
DensitytermduetopolarizaDon:leadstosaturaDonathigherenergies
ShellcorrecDonterm,onlyrelevantatlowerenergies
“relaDvisDcrise”“minimumionizingparDcles”βγ ≈ 3-4
“kinemaDcterm”
![Page 58: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/58.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Landau Distribution Silicon
mostprobableenergyloss
meanenergyloss
Bethe‐Blochdescribesaverageenergyloss
CollisionsstochasDcnature,henceenergylossisdistribuDoninsteadofnumber.
FirstcalculatedforthinlayerswasLandau.HenceenergylossisLandaudistributed.
SignalproporDonaltoenergyloss
Example:MonolithicacDvepixelsensorsensiDvelayer14um
55
![Page 59: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/59.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Literature
SemiconductorDetectorSystems,
HelmuthSpieler,OxfordUniversityPress2005
PixelDetectors–FromFundamentalstoApplica?onsL.Rossi,P.Fischer,T.Rohde,N.Wermes,SpringerVerlag2006
Evolu?onofSiliconSensorTechnologyinPar?clePhysicsFrankHartmann,SpringerVerlag2009
56
![Page 60: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/60.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rsPlanar process
N-type siliconSiO2
BB
As
n+
P+
n‐typewafersareoxidizedat1030oCtohavethewholesurfacepassivated.
Usingphotolithographicandetchingtechniques,windowsarecreatedintheoxidetoenableionimplantaDon.Differentgeometriesofpadsandstripscanbeachievedusingappropriatemasks.
ThenextstepisthedopingofsiliconbyionimplantaDon.DopantionsareproducedfromagaseoussourcebyionisaDonusinghighvoltage.Theionsareacceleratedinanalectricfieldtoenergyintherangeof10keV‐100keVandthentheionbeamisdirectedtothewondowsintheoxide.P+stripsareimplantedwithboron,whilephosphorousorarsenicareusedforthen+contacts.
Anannealingprocessat600oCallowsparDalrecoveryofthelatcefromthedamagecausedbyirradiaDon.
ThenextstepisthemetallisaDonwithaluminium,requiredtomakeelectricalcontacttothesilicon.Thedesiredpa�erncanbeachievedusingappropriatemasks.
Al
ThelaststepbeforecutngisthepassivaDon,whichhelpstomaintainlowleakagecurrentsandprotectsthejuncDonregionfrommechanicalandambientdegradaDon.
57
![Page 61: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/61.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Sincethemicro‐stripdetectorprovidesonlyonecoordinatewithgoodprecision,thesegmentaDonofthebackplaneisanaturalwaytoprovideasecondcoordinateandthusaspacepointwithoutaddingmaterialonthetrajectoryoftheparDcles.
Theuseofdouble‐sidedmicro‐stripdetectorsallowsthecorrelaDonofsignalscollectedonthetwosides,whichapartfromthereadoutelectronicsnoiseandresponseisthesame,thusreducingmulD‐hitambiguiDes.
+ + + + + +- - - - - -
SiO2 Al
n+
Al
n+
Fixed oxide charge
R≈ few kΩ
n-type
R > few kΩSiO2
Subdividingsimplythen+contactsthepresenceofposiDvechargeattheSi‐SiO2interfaceinducesinthen‐typesubstrateanaccumulaDonlayerofelectrons,resulDnginalowresistancebetweenthestrips.Thereforethesignalspreadsovermanyelectrodes,makingthesubdivisionineffecDve.
backplane
backplane
Al Al Al
n+ n+p+n-type
+ + + + + + -
- - -
- -
Amethodusedtosolvethisproblemistoimplantap+blockingstripinbetweenthen+ones.TheblockingstripsarelelfloaDng,sincetheirfuncDonisjusttointerrupttheconducDonchannel.
Double-Sided Strip Detectors
58
![Page 62: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/62.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Tevatron: D0
Barrelanddisc:stripdetectors
840kchannels
OperaDonalsince2002
59
![Page 63: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/63.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
successfullylaunched11.June200816towermodules
37×37cm2acDvearea
2mminter‐towerseparaDontominimizetheinacDvearea
70m2ofSi(inspace!!!)
11500SSD8.95X8.95cm2,
384strips‐880,000channels
440μmthick
228μmstrippitch
GLAST Mission
60
![Page 64: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/64.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
diamond sensor
Polycrystallineandsinglecrystal
Lowleakagecurrent,lownoise
Lowcapacitance
RadiaDonhardmaterial
OperaDonatroomtemperaturepossible
Drawback:50%signalcomparedtosiliconforsameX0Butbe�erS/NraDo(nodarkcurrent)
growth
substrate
Grain size: ~100-150μm
SuccessfultestofscCVDdiamondpixelmodule
StableoperaDon
FullchargecollecDonat0.25V/µm
Goodefficiency: ε>99.9%
MeasuredResoluDon:σ=8.9µm(200V,normalincidence)
scCVDmoduleretains~80%ofiniDalchargecollectedalerirradiaDonto0.7x1015p/cm2
61
![Page 65: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/65.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Tevatron: CDF
Si‐stripdetector
specialfeature:Layer00directlyonbeampipe
720kchannels
OperaDonalsince2002
Inner Strip Layers (ISL):
62
![Page 66: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/66.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Bonding
63
![Page 67: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/67.jpg)
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
Large scale silicon systems
The most critical parts are the sensors, ASICs and system engineering (mechanics, power, cooling, assembly, etc)
To develop and buy silicon sensors for several hundreds of m2 silicon sensors is not an easy task:
Extend previous Multi-Geometry studies to substrate thickness less than or equal the pitch
Strip/Pixel capacitance (back-plane, inter-strip/pixel & total)Critical fields, depletion and break-down voltageSensor functionality (charge collection efficiency etc)Detailed design parameters for masks
Extend previous studies from LHC to SLHC fluence – large irradiation programs neededExtend previous studies to include n-on-pRe-produce complementary sets of measurements and simulationStudy biasing, guard rings, isolation methods
64
![Page 68: Semiconductors as particle detectorsheraeus-technology.desy.de/e8/e44905/Gregor... · 2018-08-16 · Semiconductors as particle detectors Ingrid-Maria Gregor, DESY Thanks to: Marc](https://reader034.vdocuments.mx/reader034/viewer/2022042212/5eb5771982f19470392e276b/html5/thumbnails/68.jpg)
65
100In
grid
-Mar
ia G
rego
r, Se
mic
ondu
ctor
s as
Par
ticle
Det
ecto
rs
The International Linear Collider
Parameters:
√s=500GeV,tunablefrom200to500GeV,upgradeableto1TeV
∫Ldt=500�‐1in4years(peakluminosity2∙1034cm‐2s‐1)
e‐‐e+collider:two11kmSClinacsat31.5MV/m
DualtunnelconfiguraDon(safetyandaccessibility)
SingleIR,crossingangle14mrad,twodetectorsinpush‐pulloperaDon
SC Nb Cavity