Promoting Innovation and Industrial Competitiveness through Nanotechnology

Lloyd WhitmanDeputy Director

APEC 2011, March 10, 2011

In the Minds of the USA Founding FathersIn the Minds of the USA Founding Fathers

“Uniformity in the currency, weights, and measures of the United States is an object of great importance, and will, I am persuaded, be duly attended to.””

George Washington, State of the Union Address, 1790

From the U. S. Constitution

National Bureau of Standards established by Congress in 1901Became the National Institute of Standards and Technology in 1988

Mission: To promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technologyin ways that enhance economic security and improve our quality of life.

Mission: To promote U.S. innovation and industrial competitiveness by advancing nanoscale measurement science, standards, and nanotechnology in ways that enhance economic security and improve our quality of life.

NIST At A GlanceNIST At A GlanceMajor Assets2,800 employees2,600 associates and facilities users1,600 field staff in partner organizations400 NIST staff serving on 1,000 national &

international standards committees

Major ProgramsNIST Laboratories and User FacilitiesBaldrige Performance Excellence ProgramManufacturing Extension PartnershipTechnology Innovation Program

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www.nist.gov

NIST October 2010 RealignmentNIST October 2010 RealignmentResearch consolidated in four Laboratories and two User Facilities

www.nist.govMetrology Laboratories Technology Laboratories User Facilities

NIST Director

Material Measurement

Laboratory

Physical Measurement

Laboratory

Engineering Laboratory

Center for Center for Nanoscale Nanoscale

Science and Science and TechnologyTechnology

NIST Center for Neutron

Research

Information Technology Laboratory

Associate Director for Innovation and Industry Services

Associate Director for Laboratory Programs (and Principal Deputy)

Associate Director forManagement Resources

NIST Overview

NIST 2010 BudgetNIST 2010 BudgetTotal Resources = $1027.3M

Appropriations = $856.6M

*Includes $10.5M congressionally-directed projects**Includes $47M congressionally-directed projects and

$20M for construction grants

$515MScientific & Technical Research & Services*

$147MConstruction

of Research Facilities**

$195MIndustrial

Technology

Services

$122MOther Fed.AgencyRes.

$50MOther

$91.6M Nanotech.

$22.8M

$22.4MFundamental Phenomena &

Processes

$22.5MNanoscale Devices &

Systems

$19.1MInstrument Research, Metrology, & Stand.’s

$27.2MNano-

manufacturing

$11.2MMajor Research

Facilities & Instr.

Acquisition

$8.4MNanomaterials

$3.6MEnvironmental Health & Safety

Nanotechnology = $114.4M(by “Program Component Area”)

NIST Nanotechnology StrategyNIST Nanotechnology StrategyPerform NIST’s traditional roles

Discipline oriented laboratory researchWorkshops to identify industry needsStandards setting (physical & documentary)Calibrations

Form public-private partnershipsNanoelectronics Research InitiativeCollege of Nanoscale Science and Engineering, University at Albany, NYOperate a multidisciplinary user facility, including a shared resource for nanofab.

Support nanotechnology through research & construction grantsCoordinate and collaborate with industry stakeholders, other US federal Agencies and international partners

NIST Nanotechnology WorkshopsNIST Nanotechnology WorkshopsNIST regularly holds workshops to identify industry needs

The New Steel? Enabling the Carbon Nanomaterials Revolution: Markets, Metrology, Safety, and Scale-up (2/28-3/1/11)NIST Workshop on Wires, Whiskers andWalls: Energy Applications at theNanoscale (9/10)The 4th Carbon Nanotube Workshop:Measurement & Control of Chirality (9/10)Washington Metro Region Nanotech Partnership Forum (9/10)Grand Challenges for Advanced PV Technologies & Measurements (5/10)Nano-Optics Plasmonics (4/10)Calibrations & Standards for Nanomechanical Measurements (6/09)Frontiers of Characterization & Metrology for Nanoelectronics (5/09)Global Workshop on Nanoscale Measurement Challenges for Energy Applications (4/09)NIST-ERDC Joint Workshop on Nano-Silver (4/09)

NIST Nanotechnology StandardsNIST Nanotechnology StandardsNIST develops and evaluates nanoscale reference materials and metrology standards, including:

Gold nanoparticle reference materials available(10, 30, 60 nm)Polystyrene nanoparticles (60, 100 nm)Nanoparticulate titanium dioxideNanoporous controlled-pore glass (18 nm pores)SWCNT nanotube reference materials (2011)

Powder (in raw soot), length-sorted suspension, “bucky” paper

Silver nanoparticles (under development)Ref. standards for lithography, electron microscopyReference materials and components for quantitativeAFM measurements (dimensional metrology and force)

NIST Nanotechnology LeadershipNIST Nanotechnology LeadershipNIST provides leadership and technical expertise to standards development

International Organization for Standardization (ISO)Technical Committee 229 (TC 229)—Nanotechnologies

International Electrotechnical Commission (IEC) Technical Committee 113 (TC 113)—Nanotechnology standardizationfor electrical and electronic products and systems

ASTM Committee E56 on Nanotechnology

IEEE Nanotechnology Council Standards Committee

Organisation for Economic Cooperation and DevelopmentWorking Party on NanotechnologyWorking Party for Manufactured Nanomaterials

US National Nanotechnology Initiative Working Groups

NIST International GoalsNIST International Goals

Measurement and standards infrastructure that enables global market access for U.S. products

Global leadership in measurement science as a foundation for emerging technologies

Harmonized standards and transparent regulatory regimes

Support for US Foreign Policy Objectives

These goals all apply to NIST’s nanotechnology program.

Extramural Nanotechnology SupportExtramural Nanotechnology SupportTechnology Innovation Program

$22.8M in 2009 grants, primarily to small companies to further advances in commercial-scale processes for manufacturing nanomaterials and nanocompositesAdditional $3M nano-related award made in 2010See www.nist.gov/tip

ARRA Construction Grants Program (2009-2010)NIST awarded >$65M to seven U.S. universities to help fund

construction of nanotechnology research facilities•

U. of Michigan, Ann Arbor

•

U. of California, Los Angeles•

U. of Pittsburgh

•

U. of Maine•

U. of Maryland, College Park

•

U. of Nebraska, Lincoln•

Georgetown U.

NIST Nanotechnology ResearchNIST Nanotechnology ResearchDiscipline oriented research flows aslogical extension of responsibility formeasurement on larger scales:

Milli → micro → nano

Strong nano programs in:Characterization & metrology ▪ ElectronicsEnergy* ▪ MagneticsPhotonics & Plasmonics ▪ MechanicsMaterials and Chemistry ▪ Fabrication and Manufacturing*Environmental, Health & Safety* ▪ BiotechnologyTheory & modeling ▪ Simulation & visualization

meter → nanometer

*Program growth areas

NIST Program in Nanomaterial NIST Program in Nanomaterial Environmental, Health, and SafetyEnvironmental, Health, and Safety

NIST funding for Nano-EHS:FY2009: $3.5 MFY2010: $3.6 MFY2011: $7.6 M total request

NIST focus is on measurement methodologies and models forDetermining dynamic physico-chemical and toxicological properties of key nanomaterials in relevant media (air, water, soil, bio)Release of these nanomaterials during manufacturing processes and from products throughout full product life cycles

Expected outputs:Reference materials, reference data, documentary standards, methodologies, analytical tools, and instruments

The NIST CNST

Established in 2007 to develop nanoscalemeasurement and fabrication methodsspecifically to advance nanotechnology“from discovery to production”

Operates a national, shared resource, theNanoFab, with world-class nanoscale fabrication and measurement capabilities easily accessible to all,

including industry

Conducts multidisciplinary research to create the next generation of nanoscale measurement instruments, made available through collaboration

Serves as a hub linking the external nanotechnologycommunity to the nanotechnology-related measurement expertise at NIST (nano@nist.gov)

photo courtesy HDR Architecture, Inc./Steve Hall © Hedrich Blessing photo courtesy HDR Architecture, Inc./Steve Hall © Hedrich Blessing

The CNST in Brief

The CNST provides industry, academia, NIST, and other government agencies access to world-class nanoscale measurement and fabrication methods and technologyA User Facility with a unique, hybrid design

The NanoFab is a shared resourcewith commercial state-of-the-art toolsfor nanofabrication, open to all

Research staff advance nanotechnology bydeveloping new measurement solutions, andsupport the NanoFab with expert consultation

Budget: $23M (FY2010)

Staff: Currently 97 (87 technical)

Cooperative Agreement with the University ofMaryland Nanocenter

Contributes to all phases of the CNST mission

Like NSF‐

supported,university 

nanocenters

Like DOEnanocenters

The CNST NanoFab

A national, state-of-the-art, shared resource for the fabrication and measurement of nanostructures60,000 ft2 (5600 m2) of labs and cleanroom

19,000 ft2 (1800 m2) cleanroom;8,000 ft2 (750 m2) at class 100

Over 65 tools (~$30M), including advancedlithography and microscopy

Talented staff to train users or operate the tools240+ staff-years of process development experience

Links to extensive measurement resources in the NISTLaboratories and Centers

Leverages the expensive tools needed fornanotechnology through cost sharing

Using the CNST NanoFab

The Nanofab is available for nanofabrication and nanoscale measurementPart of the CNST User FacilityBased on highly successful, fee-based NNIN Nanocenter model

Open to all, including industry, government, and academiaA simple application is all that is requiredAssociation with a NIST project or staff member is not required

Hourly rates based on operating costs; similar to those at universitiesResearchers may apply for reduced rates

If project advances CNST and NIST missions, net charges similar to university “academic”rates; CNST pays the balance from its research budget.

The NanoFab will train researchers in tool useAlternatively, work can performed by staff at additional cost

Users maintain IP rights for sole and joint inventionsFor more info, contact the NanoFab Manager, Vincent Luciani (Vincent.Luciani@nist.gov)

Nanoscale Measurement Needs of the Future

New measurement technologies are needed to address:Post-CMOS Electronics

Extend the electronics enterpriseNanophotonics

Enhance communications, lighting, and inspection

Nano-enhanced energyOptimize the first step in conversion, storage, transport

NanomanufacturingAllow industry to capitalize on discovery

Nano-biotechnology and nano-medicineNew diagnostics and therapeutics to improve outcomes and reduce cost

Nano-EHSScience-based regulation to protect the population and reduce risk for commercial innovation

18Research

Research Expertise

Developing measurement and fabrication capabilities, with current priorities in:

Future Electronics: Nanoscale devices, architectures, interconnectsNanomanufacturing and Nanofabrication: Top-down and bottom-up fabrication and assemblyEnergy: Conversion, storage, and transport at nanostructured interfaces

Provides access to beyond state-of-the-commercial-art equipment and measurement through collaboration

Designed to be agile: priority areas will change with NIST and national nanotechnology needs

Integrated tightly with the NanoFab, providing expert consultation and beyond-state-of-the-art measurement capabilities

Complements and supports the NIST Laboratory programs

Core Measurement ExpertiseAtomic Scale Characterization and Manipulation

Fabrication & measurement of geometric &electronic structure of materials with atomic resolution using UHV cryogenic/high magnetic field STM (Joe Stroscio)

Electro-fluidic Control of NanoparticlesFeedback control-based techniques using electrically-drivenfluid flows for controlling the position, and orientation of nanoparticles (Ben Shapiro)

Environmental Transmission Electron MicroscopyDevelopment of environmental cell S/TEM, combining atomic-scale resolution with dynamic chemical analysis (Renu Sharma)

Laser-atom ManipulationLaser control of atomic motion and its application to new nanofabrication and nanoscale measurement methods (Jabez McClelland)

Modeling and Simulation of NanofabricationModeling, simulation, and analysis of the physics and metrology of both lithographic and self-assembly based nanofabrication methods (Gregg Gallatin)

NanofabricationMethods to create & characterize processes in both top-down & bottom-up nanofabrication, from high-fidelity resists, to template-driven self-assembly (J. Alexander Liddle)

Nanomagnet Dynamics Dynamic measurement methods and supporting modeling for characterization of magnetic properties and spin polarized transport in magnetic nanostructures. (Bob McMichael)

Core Measurement ExpertiseNanomagnetic Imaging (SEMPA)

Development and application of scanning electron microscopy with polarization analysis (SEMPA) for measuring magnetic structure from mm to nm length scales (John Unguris)

Nanomaterials for Energy Storage and ConversionCharacterization of charge and matter transport in electrochemical energy storage and conversion devices based on novel nanomaterials and nanostructures (Alec Talin)

NanophotonicsFabrication of optical nanostructures and development of near-field probes and microphotoluminesence systems to measure light-matter interactions (Kartik Srinivasan)

Nanoplasmonics Design/fab. of plasmonic systems that confine and control light at the nanoscale for deep sub-wavelength metrology, spectroscopy, lithography, & info. processing (Henri Lezec)

Nanoscale Electronic and Ionic TransportNovel probes for characterizing light-matter interaction and charge and energy transfer at the nanoscale, and their application to electronic and ionic transport (Nikolai Zhitenev)

Fluctuations and Nanoscale ControlMeasurement techniques for characterizing and controlling fluctuations in nanoscale systems (Andrew Berglund)

Nanotribology and Nanomanufacturing Techniques to quantify nanoscale frictional energy dissipation and tailor interactions between nano-objects for nanomanufacturing devices and systems (Rachel Cannara)

Core Measurement ExpertiseOptical Micro/Nanoelectromechanical Systems

Integrated optical MEMS with nanoscale elements (NEMS) for novel imaging, metrology, manipulation, and assembly techniques (Vladimir Aksyuk)

Theory, Modeling, and Simulation of NanostructuresFundamental calculations that broadly elucidate the properties of nanostructures, ranging from magnetic materials and devices, to superconductors, to graphene (Mark Stiles)

Theory and Modeling of Nanomaterials for Renewable EnergyCalculations of electric, thermal, and ionic transport for materials and nanostructures used in energy-relevant applications, such as photovoltaics and thermoelectrics (Paul Haney)

Thermoelectrics and Photovoltaics Characterization of charge and phonon transport in nanostructured thermoelectrics, and the impact of defects on transport and conversion in inorganic photovoltaics (Fred Sharifi)

Nanomaterials for Solar Fuels and Artificial PhotosynthesisMethods to correlate structure and performance of nanocatalysts for solar fuels, and biotemplated approaches to artificial photosynthesis and nanofabrication (Veronika Szalai)

Vibrational Spectroscopy and Microscopy Development and application of new spectroscopic methods, including infrared imaging with nanoscale spatial resolution, for characterizing nanomaterials with infrared and Raman spectroscopy (Andrea Centrone)

Number of Research Participants Growing Rapidly

FY2010 Institutions Represented (210)Companies:

53Universities:

133Gov. Labs:

24States Represented: 38 plus DC

FY2010 Research ParticipantsResearch Participant Growth

Now over 1000 RPs.

192

396524

970

0

200

400

600

800

1000

1200

2007 2008 2009 2010

Academia, 439

NIST, 311

Other Gov., 105

Industry, 115

Ways to Work with NIST

Informal collaborations: joint peer-reviewed papers, short-term visits to NIST laboratories, sharing of research methods

User Facilities: The Center for Nanoscale Science and Technology (CNST) and the Center for Neutron Research (NCNR) are unique national facilities available for both proprietary and non-proprietary research

Guest Researcher Arrangements: Opportunities for qualified individuals to work at NIST with NIST staff on projects of mutual interest

Cooperative Research and Development Agreements (CRADAs): Formal partnering agreement that allows federal laboratories to work with U.S. companies, academic institutions, and other organizations

Summer Undergraduate Research Fellowship (SURF) Program: Students majoring in science, mathematics, and engineering are invited to apply to spend a summer working at NIST

Other Agency Agreements: Measurement science in support of other agency missions

Thank you for your attention! whitman@nist.gov www.nist.gov/cnst