Product Catalogue 2021

Vacuum Systems Technologies

V.S.T. (Services) Ltd. www.vacuumltd.com sales@vstser.com

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Global Provider of Tailor-Made Solutions, Maximizing Client ROI.

Specializing in Aerospace, Defense, Research,

Educational Institution and Laboratory Applications

Implementing Semiconductors, Renewable Energy,

Optical Coatings, Medical Devices and more

About UsVST is a leading provider of Vacuum Systems Technologies and Services

for over 35 years

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Table of Contents• Vacuum Ovens & Process Chambers

• Environmental Test Chambers

• Aeronautic and Aerospace Simulation Chambers

• Gloveboxes

• Physical Layer Deposition (PVD)

• ARC-Melting Furnaces

• Chillers

• Leak/Flow Detection

• Ellipsometry

• Deposition Sources

• Integrated Solutions & Production Lines

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Vacuum OvensDegassing and Processes

VST Thermal Chambers (TCH) series • TCH-340 Process Chambers

• TCH-400 Degassing Systems

• TCH-864 Yael MSD Dryers

• TCH-880 Hydrogenation Furnaces

• Environmental Test Chambers

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TCH-340General Purpose, High-Vacuum, High-Temperature Ovens

with Gas-Purging and RGA

• Heated-shelf high-vacuum oven

• Outgassing at high vacuum in the range of 10-7 Torr

• Temperature 350ºC or higher

• Purging with Nitrogen or Argon

• Automated, touch panel, vacuum and temperature control

• Programmable temperature profiles

• US FED STD 209E class 1,000 compatible

• Residual Gas Analyzer (RGA) option

HMI touch panel for full visibility and full control

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Fully Automated, High-Vacuum, Heated Degassing System

with option for QCM

• Hot-wall, rugged high-vacuum oven

• Outgassing at high vacuum in the range of 10-7 Torr

• Temperature from 40ºC to 120ºC or higher

• Vacuum, heating and venting

• ISO 14644-1 cleanroom standard class ISO7 compatible

• US FED STD 209E class 10,000 compatible

• Totally dry pumping system

• Integrated Quartz Crystal Microbalance (QCM) option for Contamination Control

• Suitable air-to-water cooling chiller

TCH-400

⁻ PC controlled HMI

⁻ Operator, User and Admin modes

⁻ Full Visibility and Control

⁻ Operation Recording

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TCH-864 Yael Moisture Sensitive Devices Vacuum Dryer (MSDVD)

• Developed with Motorola’s Material Quality Department

• Prevents Popcorn Effect (MSD Popcorn)

• Unerring uniformity through entire batch of reels

• Allows drying loaded reels, no need to unreel and bake

• Reduces process time

• Eliminating coplanarity and electrostatic discharge (ESD)

• Cylindrical chamber with up to 30% more space utilization

• Fully automated vacuum and temperature control

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Hydrogenation Furnace

TCH –880

• Consists of two separate similar vacuum-tube furnaces one above the other

• Divided into 3 heating zones

• Placed on mobile carrier allowing easy movement along quartz tube for fast cooling

• Systems working pressure < 1x10-6 Torr

• Heating 800°C or higher

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Aerospace testing Aeronautics and Aerospace Simulation Chambers

• TCH-447

• TCH-499

• Customized Solutions

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Aerospace Simulation and Testing

for Airplane and Satellite

• Altitude range from sea-level to space, for airplanes and satellites

• High redundancy for 1-year test with no interruptions

• Hundreds of electrical, optical and RF feedthroughs

• Over 40 temperature probes

• Vacuum chamber volume - 320 liter

• Ultimate pressure less than 4x10-8 torr

• Temperature range from -50ºC to +100ºC

• User programmable tests

• Logging, statistical analysis and test recording

TCH-447

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Altitude Test Chamber for Mid-altitude

• Flight environment simulation

• Altitude simulation up to 70,000 feet

• Several ports with custom configuration for client use

• Chamber size 500 mm W x 360 mm H x 500 mm D

• Pressure range from Atmosphere to 0.1 torr

• Temperature range from -60ºC to +130ºC

• User programmable tests

• Logging, statistical analysis and test recording

TCH-499

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GloveboxStandalone, Integrated, Production lines

VST Glovebox Solution includes :• 2, 3, 4 gloves Standalone Inert Glovebox

• Integrated Glovebox and Vacuum Ovens

• Integrated Glovebox and PVD System

• Integrated Glovebox with various production and measurements tools

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VST Customized Inert Glovebox Series

VST Inert Glovebox Series with customized features:

• 2, 3 or 4 Gloves

• Nitrogen or Argon

• Customized shelves for accessories, saving workspace

• Purifier – moisture and O2 removal down to < 0.1 ppm, easily accessible for maintenance

• Touch Control modes – Automated, Manual and Service

• Pedals – for manual pressure control

• Big antechamber, small antechamber or both

• Customized load locks to connect to PVD systems

• Many extra ports for future extensions, quick access ports

GB-200, 300, 400

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VST Glovebox Features & Customization Options

EXRA Large 500 mm x 500 mm Quick Access port, customized quick ports and flanges

Pedals – for manual Gas In/Out control

Glovebox Features

Customized shelves and niches for accessories, e.g. plasma box, saving important workspace

Option for Load lock to connect to PVD System

Touch Control – Automated, Manual and Service modes

Many extra ports, allowing numerous future extensions

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Integrated Glovebox and Vacuum Ovens

TCH - 440

• VST Glovebox with all customization options

• 1, 2 or 3 Process Vacuum Ovens

• 6 heated stainless-steel shelves per oven, 300W each

• Back doors, opened from atmosphere side

• Front doors, opened into the glove box

• Base pressure of 1 Torr

• All vacuum valves and gates are stainless steel bellow sealed, pneumatic operated

• 7” touch screen control

• Logging and test recording

• Logging and test recording

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Integrated Glovebox and Thin Film Deposition System

TFDS –870

• VST Glovebox with all customization options

• Thin Film Deposition process – Thermal, EB-Gun or Sputtering

• Stainless Steel Chamber , 500 mm W x 500 mm H x 500 mm D

• Front sliding door opens into the glove box

• Side door opens from atmosphere side

• Pressure less than 2x10-7 Torr

• All vacuum valves and gates are stainless steel bellow sealed, pneumatic operated

• 7” Touch Screen Control with Manual and Automatic modes

• Logging and test recording

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PVDPhysical Deposition Systems, Evaporation and Sputtering

Fully Customized PVD systems• TFDS 482 – Compact

• TFDS 462 – Versatile

• TFDS 462U – Large multiple chambers systems

• Hundreds of Customization Options

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Tailor-Made Versatile PVD Systems

TFDS Series

• Fully Customized

• Medium, large and extra-large chamber scale

• Thermal, LTE, EB-gun, DC/RF sputtering, Ion gun and plasma sources with option to mix types of sources

• Organic / metal / dielectric targets

• Custom shape heated / cooled substrate holder

• Chamber walls heating / cooling

• Crystal and resistivity deposition rate controllers

• Gridded / gridless ion assist, thermal assist

• Customized load locks, windows, etc.

• Customized HMI, unlimited number of programs

Start here

Dimensions

Evaporation Source

TargetsSubstrate

holder

Additional Features

System is defined !

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Compact PVD System with Medium Size Chamber

With / Without Load Lock

TFDS-840 , TFDS-842

Thermal, EB-gun, DC & RF sputtering

TFDS 840 with Load Lock :

• Manual, Precision Magnetic Manipulator (PMM)

• Wafer transfer systems

• Robotic load lock with or without cassette

TFDS 842 without Load Lock :

• Fully customizable

• Best footprint in class, only 80 cm x 80 cm

• PC or PLC operated both with touch-screen HMI TFDS-842 TFDS-840

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Versatile PVD system with single large chamber

TFDS-462

• Optimal through-the-wall design for minimal footprint in clean room

• ISO 14644-1 cleanroom standard class ISO5

• D-shaped stainless still chamber 600 mm W x 540 mm D x 720 mm H

• Welded water circulation channels

• Fully opening door with viewports

• Gate valve / Throttle valve with downstream or upstream control

• Up to 5 process gases

Configuration examples :

• EB-gun + Ion Gun + Thermal/LTE sources

• EB-Gun + Sputtering magnetron sources

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Large PVD System with 2 Process Chambers

TFDS-462U

• 2 Large D-shaped stainless process chambers

• 1 small robotic transfer station / load lock

• Fully opening doors with viewports

• ISO 14644-1 cleanroom standard class ISO5

• Fully customizable

• Configuration example:

Chamber 1 Chamber 2

Evaporation Module Thermal source + LTE +

EB-Gun + Ion source

Sputtering ModuleMagnetron sources

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VST Customized Holders for PVD Systems

Substrate holders

• Heated / Cooled

• Static / Rotating

• Samples from 1 x mm2 to any size

• Wafer holders from 1” to any size

• Multi sample holders

• Rotating / Linear shutters

• Manual / Robotic loading

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Customized Sources for PVD Systems –– All Combinations are supported !

Ion-Beam Source

LTE, Thermal, EB-Gun Thermal with EB-Gun

Deposition Sources

Thermal assisted EB-Gun and Sputtering Magnetron in one chamber

3 sputtering magnetron sources with Ion assist

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All System Elements are Scalable and Customizable

Subsystems

View ports Mass Flow controllers Water subsystem

Load lock / Transfer chamber Vacuum subsystem

Agile, scalable, fully-customized SCADA software

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We use a variety of best brands to provide our customers with the best value

Partners

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ARC MeltingTurnkey Compact Vacuum ARC Melting Furnace

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• AM 133 – Compact

• AM 134 – Vacuum Suction Casting

Customization Options Available

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Turnkey Compact Vacuum ARC Melting Furnace

For Various Processes up to 3000oK

AM-133

Intended for following processes :

• Metallic and Non-Metallic Buttons

• Material Densification and purification

• Powder Melting

• Annealing

Main characteristics :

• Stainless steel water-cooled cylindrical processing chamber

• Easy opened bottom hearth for fast loading/unloading

• Viewports with removable shield + integrated HD video camera

• Reactive and inert gas-controlled atmosphere

• Compound Synthesis

• Experimental alloys

• Thermal treatment

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Compact Vacuum ARC Melting Furnace with Vacuum Suction Casting

Processes up to 3000oK

AM-143

• Vacuum arc-melting furnace with vacuum suction casting mechanism

• Produce cast products – 6mm diameter, rod shape, up to 30g and more

• Cold copper casting mold

• Casting in fast movement by vacuum suction force

• Rapid solidification of the melt – ideal for reducing the shrinkage cavity defects

• Stainless steel water-cooled cylindrical processing chamber

• Easy opened bottom hearth for fast loading/unloading

• Viewports with removable shield + integrated HD video camera

• Reactive and inert gas-controlled atmosphere

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Leak TestingNon-Destructive Leak/Flow Testing Systems

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ATEQ based leak/flow testing systems for assembly lines or laboratories

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Compact Leak-Testing System

Fully Integrated with ATEQ Leak-Testing Devices

LTS-100

• Non-destructive air-pressure testing

• Air-pressure range from vacuum - 20 bar

• Differential sensor sensitivity of 0.1 pascal (1e-6 bar)

• Slider & two-bottom operation for safety

• IP67, IP68 waterproof standard compatible

• Vacuum mode supported

• Testing cycle of 20-30 seconds on average

• Up to 128 testing programs

• Chained test supported

• Support different devices by replacing cradle only

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Integrated SolutionsIntegrated Solutions for Research Centers and Production Lines

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Integrated Solutions and PVD Clusters for Research-Centers

and Production-Lines

Integrated Solutions

• Customized end-to-end solutions

From concept to productive working systems

• Evaporation & sputtering deposition

• Vacuum ovens

• Process chambers

• Gloveboxes, back-to-back gloveboxes

• Loading stations

• Robotic arms

• Full Software integration

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Thank YouVST Sales

+972 3 9247710

sales@vstser.com

www.vacuumltd.com

33V.S.T. (Services) Ltd. www.vacuumltd.com