· process for horizontal copper metallization with features: excellent stability of the ionic...

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Page 1:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 2:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 3:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 4:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 5:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 6:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 7:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 8:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 9:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 10:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 11:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 12:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 13:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 14:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 15:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside
Page 16:  · process for horizontal copper metallization With features: Excellent stability of the ionic cata yst and tartrate-based e ectroless Cu baths — Good e ectroless Cu coverage inside