polymumps george kwei mirela cunjalo gary lu. overview zpolymumps technology description zour...
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PolyMUMPS
George KweiMirela Cunjalo
Gary Lu
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Overview
PolyMUMPS Technology Description
Our Designs, ideas and problems First-Half Second-Half
Questions
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PolyMumps
Technology Processes Designed to be as General as Possible
3 polysilicon layers + 1 metal layerOxide – sacrificial layerHoles – removes PolysiliconAnchors – removes OxideDimples
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First-Half [Stepper Motor]
Stepper Motor using Heatuators What are
Heatuators?
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First-Half [Stepper Motor]
SolidWorks – Heatuator Array
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First-Half [Stepper Motor]
Problem with existing design Placement of pads No dimples Remove staple More Heatuators required
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First-Half [Stepper Motor]
New Adjustments
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First-Half [Stepper Motor]
SolidWorks – Stepper Motor Animations
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First-Half [Stepper Motor]
Variations in New Designs
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Second-Half [Initial Design]
Switch via a Gear Train … Too ambitious!
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Second-Half [Alternating Switch]
Simplifications
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Second-Half [Alternating Switch]
SolidWorks – Alternating Switch Animation
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Second-Half [Regulated Motor]
Basic Idea
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Second-Half [Regulated Motor]
Problems to consider
High Tension of SpringNeed more HeatuatorsNeed longer Spring
Spacing of Teeth
Length of the bar
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Second-Half [Regulated Motor]
Calculations: Spring/Tension
Compliance : C = L3 / (E * I) * (N/12 + 1/48)
L - length of the barsE - Young’s ModulusN - # of barsI - 2nd moment of the bars
Moment:
I = 1/12 * w * h3 w - width of the barsh - thickness.
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Second-Half [Regulated Motor]
Calculations: Number of Heatuators
F = k * x * µx - distance the spring is stretchedK - spring constant (C-1) µ - coefficient of static friction between polySilicon and polySilicon (4.9 ± 1.0)
d = do*N + C / N * F
d - deflectiondo – no-load deflection for one heatuator
N - number of heatuatorsF - opposing force
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Second-Half [Regulated Motor]
Solutions – variation 1 Pull-Ring
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Second-Half [Regulated Motor]
Solutions – variation 2 Longer Spring
(Pull-Ring)
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Second-Half [Regulated Motor]
SolidWorks – Pullring Animation
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Second-Half [Regulated Motor]
Solutions – variation 3 Linear Stepper-Motor
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Ratchet Motor
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Ratchet Motor
Calculations: Flexture
a1
a2
d1d2
1
2
1
2
a
a
d
d
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Ratchet Motor
SolidWorks – Animation
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Conclusion
What we learned: use lots of instances for Cadence
make sure snap to grid is at 1.0 micron
make sure all geometries are uniform numbers
carefully go over design rules first, minimum distances, etc.
Fix all the errors on one design before proceeding to the next
Discuss designs with TAs before making them in Cadence
Designs should correspond to at least 3x the calculations, to make sure everything will work
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Questions?
PolyMUMPS
Mirela CunjaloGeorge Kwei
Gary Lu