photoresists, solvents, etchants, wafers, and yellow light ......az ® p4000 bleached absorbance...

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Page 1: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 2: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 3: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 4: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 5: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 6: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 7: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 8: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 9: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 10: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 11: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 12: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 13: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 14: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 15: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 16: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 17: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 18: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 19: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 20: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 21: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 22: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 23: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref

BU Electronic Materials

AZ P4000 Series resist(s)Ellipsometrc Absorbance

Normalized to 1/µm

0.00

0.50

1.00

1.50

2.00

2.50

3.00

3.50

4.00

4.50

5.00

175 200 225 250 275 300 325 350 375 400 425 450 475 500

Wavelength (nm)

Abs

orba

nce

('k')

'k' ellipsometric: P4000

AZ® P4000 Bleached Absorbance Curve

Page 24: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref

BU Electronic Materials

AZ® P4000 Unbleached Absorbance Curve

AZ P4000 Series resist(s)Ellipsometrc Absorbance

Normalized to 1/µm

0.00

0.50

1.00

1.50

2.00

2.50

3.00

175 200 225 250 275 300 325 350 375 400 425 450 475 500

Wavelength (nm)

Abs

orba

nce

('k')

'k' ellipsometric: P4000

Page 25: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 26: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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Page 27: Photoresists, Solvents, Etchants, Wafers, and Yellow Light ......AZ ® P4000 Bleached Absorbance Curve BU Electronic Materials AZ® P4000 Unbleached Absorbance Curve ... % PS vs. Ref
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