Photonics & MICROELECTRONICS

ILKKA TITTONEN

professor, Finnish CoordinatorHelsinki University of Technology

Northern Lights in Lapland Bonfire on the Midsummer Night

Contents

• Photonics business and future expectations• Map of Finland including major research areas• Some potential collaboration fields from the

Finnish point of view

PhotonicsPhotonics is the science of the harnessing of light. Photonics encompasses the generation of light, the detection of light, the management of light through guidance, manipulation, and amplification, and most

importantly, the utilization of light as a tool for thebenefit of mankind.

Photonics21European Technology PlatformTowards a Bright Future for Europe, Strategic Research Agenda in Photonics

Research• Many Nobel prices• Funding increasing• Strong countries: USA, Japan, Germany, France, Russia• Short time from basic research to commercial products• Basic research generates and supports business opportunities

University of Oulu and VTT

University of Joensuu

University of Turku and Åbo Akademi

Helsinki Univ. of Technology, University of Helsinki, VTT

Tampere University of Technology

MAP of FINLAND

Research groups

• Wave-optical engineering• Materials science• Spectral Color research• Didactical Physics

University of Joensuu

State of the art e-beam: Leica EPG 5000+ES

MICRONOVA

MICRONOVA – TKK & VTT

Leading center for microtechnology R&D. Advanced facilities and processing lines.

Research areas: Nanotechnology Microsystems (MEMS) Photonics Sensors and Detectors Electronic materials

Clean room 2611 m2

class 10 550 m2

class 100-1000 875 m2 Other lab space 2619 m2

Office space 8038 m2

MICRONOVA10

Gallium nitride technology

Blue LED Blue laser Metal-oxide-vapour-phase-epitaxy fabrication method (MOVPE)

Photonic crystal fibresSupercontinuum generation

Sensing applications long optical path with good field overlap only a tiny amount of gas needed

~ 100 fs -1 ns

frequency

pump

PB

F

11

MICRONOVA

SOI-nanowaveguides – VTT/TKK

Integration with polymer materials; e.g. with magneto-optic polymers Integrated optical isolator !

Waveguide bridge Photonic Crystal waveguide

12

Atomic Layer Deposition (ALD)

13

Vapors

Liquids

Doped nano-

particlesMass flow controllers

Real time computer control

Burner

enables thin conformal coatings of a large number of materials

• Oxides (e.g. Al2O3, TiO2, ZrO2 , Y2O3)• Nitrides (e.g. AlN, TiN, WxN)• Sulfides (e.g. ZnS, CaS)• Fluorides (e.g. ZnF2, SrF2)• Metals (e.g. Pt, Ir, Pd)• Doped materials (e.g. ZnS:Mn, ZnO:Al)• Polymers (polyimides)• Biocompatible thin films (hydroxyapatite)

MICRONOVA

Nanoelectronics: Mesoscopic Physics

• Physics and Applications of Superconducting Devices• Electronic Cooling in Superconducting Junctions• Controlled Manipulation of Single Electrons

MICRONOVA

TEACHING AT MICRONOVA

Extensive teaching in Micro- and Nanotechnologies.

International Master’s and Post Doctor Programme for Micro- and Nanotechnology.

Laboratory courses Include processing in MICRONOVA’s cleanrooms.

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Tampere: Optoelectronics Research Centre (ORC)

• 65 employees (May 2008) • Investments in scientific equipment: € 17-18 million• Total funding = € 25M during 2000-2008• 23 research projects in 2008, revenue 5.5 million (2007)• Co-operation with 40 international and 20 national partners

ORC has two divisions (i) Semiconductor physics & technology (ii) Ultra-fast & intense laser optics

+ Commercialization of research results

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What else can we expect from ORC toward the end of this decade?

1.Nano-imprint lithography

2. Ultra-short laser pulse technology

3. Supercontinuum laser

-80

-70

-60

-50

-40

-30

-20

Inte

nsity

, 10d

B/d

iv.

Wavelength, nm

1819/04/23

Corelase Fibre lasers

Modulight Telecom/Industrial diode lasers

Coherent Finland Non-telecom diode lasers

Laser manufacturing industry has spun out from academic research

Total revenue €22 – 24 M in 2006

Building a factory in 2008-2009

University of Turku

• Biophotonics• Atom optics, Quantum optics• Photoacoustic gas sensing, interferometry

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VTT KNOWLEDGE CLUSTERS VTT KNOWLEDGE CLUSTERS

Microtechnologies and sensors

Materials and building

Biotechnology

Energy and pulp and paper

Digital information

systems

Tele-communications

Industrial systems

21

VTT MEMS and Heterogeneous VTT MEMS and Heterogeneous IntegrationIntegration

Volume: ~30 man-years (Espoo) Revenue: ~4 M€

Expertise in MEMS technologySensorsRF-MEMSBio-MEMSDetectors

Research teamsSOI MEMS Surface MEMS Wafer-scale heterogeneous integrationPhotonics and microfluidics Pixel detectors

Silicon microresonator

MEMS magnetometer

MEMS altimeter

22

VTT Printed Electronics and VTT Printed Electronics and OpticsOptics

Towards flexible low-cost Towards flexible low-cost large-area electronicslarge-area electronics

Volume: ~50 man-years (Oulu/Espoo) Revenue: ~5,0 M€

Expertise in Flexible low cost large are electronicsMicro and nanoscale large area patterningMaterial engineeringOrganic TFT, LED and photovoltaics, sensorsLarge area roll-to-roll

Research teamsOptoelectronics componentsBiomicrosystemsMass production technologies and materialsPolymer electronicsPrinted systems

0 1 2 3 4 5 6 7 8 9 100

1

2

3

4

5

Cur

rent

den

sity

[mA

/cm

2 ]

Voltage [V]

PEDOT Modified PEDOT

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VTT MicromodulesVTT MicromodulesSmart Systems IntegrationSmart Systems Integration

Volume: ~30 man-years (Oulu) Revenue: ~3,5 M€

Multidisciplinary IntegrationPackaging and Integration for Photonics and

ElectronicsMultidisciplinary system-on-package

approachPhotonics, RF-to-MM modules, Sensor

modules Plastic optics and embedded optical systemsNanophotonics

Research teamsPackaging and interconnectionsPhotonic MicromodulesEmbedded optics solutions

24

VTT Optical InstrumentsVTT Optical Instruments

One-stop-shopOne-stop-shop Volume: ~60 man-years (Oulu, Espoo, Kuopio) Revenue: ~6,5 M€

Wide-ranging expertise and experienceOptical measurement technologies and

instrumentationSpectroscopy and Machine visionElectronics, optics, high precision mechanics

and software

Research teamsOptical Engineering; Optical Analysers;Optical Sensors and Space Instruments;Industrial Machine Vision Systems;Process Measurements Technologies; Applied Industrial Measurements; High Precision Mechanics

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Roll-to-Roll Printing Technologies Pilot Facilities

4 replaceable printing units- Direct and reverse gravure, rotary

screen, and flexography units Corona and lamination units Drying units (air, UV, IR) Web width 300 mm Max. web velocity 10 m/min Possibility to print in inert gas

2 gravure printing units R2R hot embossing unit Corona and lamination units Drying units (air, UV, IR) Web width 200 mm Max. web velocity 100 m/min Installed in clean room (ISO7)

PICO 2003 ROKO 2007

(1) Valtion Teknillinen Tutkimuskeskus (Finland)(2) Interuniversity Micro-Electronics Centre (Belgium)(3) Commissariat à l’Energie Atomique (France)(4) Politechnika Warszawska (Poland)(5) UMICORE S.A. (Belgium)(6) Coatema Coating Machinery GmbH (Germany)(7) Suntrica Oy (Finland)

Consortium

(1)

(2)

(3)(4)

(5)

(6)

(7)

The general objectives of this project are following: manufacture efficient organic solar cells (OSC) and a thin film battery (TFB) on flexible substrate using commercially available materials and cost efficient roll-to-roll (R2R) mass production techniques, printing, as well as integrate a control transistor circuitry on a foil.

The ultimate goal is to integrate these three structures to a single assembly resulting in a flexible, fully autonomous energy source. In this assembly organic solar cells harvest the solar energy and charge the thin film batteries, which provide the electricity for an external load. The Si-based transistor circuitry integrated on the foil controls the charge operation.

More information

Jukka Hast (VTT)phone: +358 40 587 0069e-mail: jukka.hast@vtt.fi

Flexible Autonomous Cost Efficient energy Source and StorageFACESS is funded under the 7th EU-Framework programme (FP7-ICT-1-215271). The project duration is from 1. January 2008 to 31. December 2010

http://www.vtt.fi/proj/facess/

Possible common items

• semiconductor lasers, LED’s, THz generation

• plasmonics components and circuits

• organic photovoltaics and LED’s – including roll-to-roll– chlorophyll onto semiconductors

• biophotonics

• gas sensing

• diffractive optics

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Research Programme inPhotonics and Modern Imaging Techniques

• Academy of Finland 4 year Research Programme– Calls 2009, Funding of projects 2010-2013– Bilateral international cooperation in preparation

Themes:1. Optical materials and interaction processes2. Modern imaging techniques3. Applications in bio- and medical research

Joint research fitting within these themes can be funded from the programme.

OBRIGADO!