photo lithography positive and negative resist. what? resist (photosensitive material) comes in two...

Photo lithography Positive and negative resist

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Photo lithography

Positive and negative resist

What?Resist (photosensitive material) comes in two forms – positive and negative

Material to be patterned

Fotomask

Fotoresist

Light source

Negative resistPositive resist

Exposure

Page 4: Photo lithography Positive and negative resist. What? Resist (photosensitive material) comes in two forms – positive and negative

Developement

Material to be patterned

Fotoresist

Developer (solution)

Page 5: Photo lithography Positive and negative resist. What? Resist (photosensitive material) comes in two forms – positive and negative

Compare result

Fotomask

Material to be patterned

Patterned Fotoresist

Page 6: Photo lithography Positive and negative resist. What? Resist (photosensitive material) comes in two forms – positive and negative

Reflections

• In which aspects are positive and negative resist similar?

• In which aspects do they differ?• What happens in a positive resist during

exposure to UV-light?• What happens in a negative resist during

exposure to UV-light?

Positive/Negative V

Positive&Negative Logic

One is positive, the other is negative one is positive, the other is negative both are positive both are positive both are negative both are negative both

P Proocessingg iimmaagee rrevveerssaall reesisstts · PProocessingg iimmaagee rrevveerssaall reesisstts ... positive resist image reversal resist image reversal resist. MicroChemicalsGmbHUlm

Positive & Negative design

Positive & Negative Space Reversal Collage€¦ · 2016-11-05 · Positive & Negative Space Reversal-visually switching back & forth between the positive & negative space. Positive

Positive & Negative Integers

Exposure Dose Optimization for a Positive Resist Containing ...w.lithoguru.com/scientist/litho_papers/1991_20_Exposure...Exposure Dose Optimization for a Positive Resist Containing

Positive/Negative Space

Positive Examples Negative Examples Flute Positive Examples Negative Examples Trombone Flute

Positive and Negative Letters

COR™ Audit Tool - IHSA„¢ Audit Tool Positive Negative Positive Negative Positive Negative Positive Negative Positive Negative A score of 51% must be achieved to …

4XDOLÛFDWLRQV 2016 X757/75/02 Physics Section … on particle Charge on plate Q Charge on plate R A negative positive negative B negative negative positive C no charge negative positive

From positive to negative

Exposure Dose Optimization for a Positive Resist Containing ...ww.w.lithoguru.com/scientist/litho_papers/1991_20...Exposure Dose Optimization for a Positive Resist Containing Poly-functional

Energy Analyzer€¦ · QUADRANT-4 => Q => positive => negative & capacitive CosØ => capacitive PF => positive QUADRANT-3 negative => negative & inductive inductive negative S P

Negative and positive

Selective etching of PDMS: etching as positive resist

Positive & Negative space pendant

DIVIDING RATIONAL NUMBERS LESSON 9. Dividing Integers ► Positive ÷ Positive = Positive ► Positive ÷ Negative = Negative ► Negative ÷ Negative = Positive

False-positive and false-negative test results in clinical ... · PDF file‘False-positive’ and ‘false-negative ... ‘False-positive’ & ‘false-negative’ test results in

Adjectives: Positive or Negative?

Positive Effects of Negative Publicity: Can Negative ...sorensen/papers/Negative_Publicity2.pdf · Positive Effects of Negative Publicity: Can Negative Reviews Increase ... this may

one is positive, the other is negative both are positive both are negative

Positive and negative right

Positive and negative selections

Negative versus Positive Space

Positive and negative numbers

The Positive Psychology of Negative Thinking.homepages.se.edu/.../12/The-Positive-Psychology-of-Negative-Think… · The Positive Psychology of Negative Thinking Julie K. Norem Wellesley

Positive Effects of Negative Publicity: When Negative

MULTIPLYING RATIONAL NUMBERS LESSON 8. Multiplying Integers Positive x Positive = Positive Positive x Negative = Negative Negative x Negative =

Negative/Positive Space

Negative ions are positive

23124819 Positive Negative Politeness

Positive Negative