parts reapir service
TRANSCRIPT
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No.
Eyok Technology Inc
Parts Overhaul (Repair)
147 1 F
TEL : 03-5323560
FAX : 03-5323570
E-Mail : [email protected]
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No.
Wafer Transfer
0010-76000 AMAT P5000 Robot Assy, 150MM0010-13221 AMAT P5000 Robot Assy, 200MM
0240-75093 AMAT HP/HP+ Motor Assy, 150MM/200MM
853-012123-00X LAM Harmonic Arm Driver Assy, 150MM/200MM
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Wafer Transfer
Turn Table Assy, 150MM
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Wafer Lift Mechanism / Cylinders
0010-00510 AMAT Bearing Assy, 150MM/200MM
853-032776-002 Lam TCP-9600 Paddle Lift,150MM
16-144643-00 Novellus Pedestal Lifter , 300MM
AMAT Wafer Lift, 200MM
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No.
Wafer Lift Mechanism / Cylinders
0010-09341 AMAT P5000 Wafer Lift Assy,150MM
0010-09340 AMAT P5000 Susceptor Lift Assy,150MM
3870-03605 AMAT HDP Gate Cylinder, 300MM
0010-00525 AMAT P5000 Lifter Actuator150MM/200MM
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No.
Wafer Lift Mechanism / Cylinders
CY1B15H-180-X SMC Pin Table Cylinder300MM
NCDQ2B40 SMC Cylinder, 300MM
95-RF-NL540482 DNS Scrubber Brush Cylinder, 300MM
95-RF-NL540481 DNS Scrubber Brush Cylinder, 300MM
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No.
Wafer Lift Mechanism / Cylinders
0520-01043 AMAT Rotation Cylinder, 200MM MXU16-25-F9N SMC Open/Close Cylinder, 300MM
REAS10-R2423-100 SMC Slider Cylinder, 300MM CKD Cylinder, 300MM
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Wafer Lift Mechanism / Cylinders
NOVELLUS COOLING CHAMBER CYLINDER
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No.
Throttle Valve Housing / Driver
AMAT P5000SA Throttle Valve, 150MM/200MM 253B MKS Throttle Driver, 200MM
253B MKS Throttle Valve Assy, 200MM/300MM 153D MKS Throttle Valve Assy, 200MM/300MM
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No.
Throttle Valve Housing / Driver
MDVX-100B Millipore Throttle Valve Assy, 200MM
MDVX Millipore Throttle Driver, 200MM
MDVX-018S01 Millipore Throttle Valve Assy, 200MM
653B-21801 MKS Throttle Valve Assy, 200MM/300MM
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Throttle Valve Housing / Driver
3870-01000 AMAT P5000 Throttle Valve Assy, 150MM/200MM
AMAT P5000 Throttle Driver, 150MM/200MM
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No.
Isolation Valves
839-032123-002 LAM ISO Valve, DSQ Chamber, 150MM/200MM
0015-09204 AMAT P5000 Modification Valve, 150MM/200MM
LPV-25 MKS ISO Valve, 200MM/300MM
L2-40-AK/L2-40-SP1 MKS ISO Valve, 150MM/200MM
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No.
Isolation Valves
LPV-50 MKS ISO Valve, 150MM/200MM MDC ISO Valve, 200MM/300MM
ESVP-2002-NWB-98 NOR-CAL ISO Valve, 150MM/200MM
0190-23498 AMAT DPS ISO Valve, 200MM
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No.
Isolation Valves
0190-19090 AMAT DPS Dual Manometer Valve,200MM/300MM
60-680027-00 Novellus ISO Valve (MDC), 200MM/300MM
853-032983-001 LAM 9400 Turbo ISO Valve, 150MM/200MM
853-360073-001 LAM 9400 Turbo Bypass Valve, 150MM/200MM
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No.
Isolation Valves
853-013521-001 LAM 4xxx ISO Valve, 150MM/200MM
853-013542-002 LAM 4xxx ISO Valve, 150MM/200MM
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Gate / Slit Valves
VAT-07 Rectangular Gate Valve, 200MM/300MM VAT-03 Rectangular Insert MONOVAT Valve, 300MM
AMAT P5000 Gate Valve (VAT), 150MM/200MM VAT-021 Rectangular Gate Valve, MONOVAT, 300MM
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No.
Gate / Slit Valves
VAT-031 Rectangular Gate Valve, MONOVAT, 200MM
VAT-065 Pendulum Valve, 150MM/200MM/300MM
VAT-14 HV Gate Valve, ISO-100, 200MM/300MM VAT-14 HV Gate Valve, ISO-63, 200MM/300MM
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No.
Gate / Slit Valves
VAT-204 VATTERFLY Valve, 300MM VAT-108 Gate Valve, 200MM/300MM
VAT-108 Gate Valve, 200MM VAT-065 Pendulum Valve, 300MM
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No.
Gate / Slit Valves
AMAT DPS Gate Valve, 200MM IKC Koslarze-II Gate Valve , 300MM
TEL V-TEX Gate Valve, 300MM TEL DRM Gate Valve, 150MM/200MM
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No.
Gate / Slit Valves
SMC L-Motion Gate Valve (200MM) SMC L-Motion Gate Valve (300MM)
0010-20021 AMAT Centura Slit Valve, 200MM 0010-22609 AMAT Slit Valve, 300MM
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Gate / Slit Valves
VAT-03 Special Designed Slit Valve, 150MM 0190-02855 AMAT ZA Slit Valve, 150MM/200MM
853-012200-00X LAM Inner Gate Assy, 150MM/200MM
0010-70089 AMAT P5000 Slit Valve, 150MM/200MM
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No.
Gate / Slit Valves
20340-PA24-AFL1/0064 4" Vatterfly Isolation Butterfly Vacuum Valve, Pneumatic
KITZ SCT PNEUMASTIC VALVE
2L80-000083-14 V-TEX DOOR VALVE
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No.
Others
0010-09935 AMAT P5000 Monochromator Meter, 150MM/200MM
0190-14140 AMAT ESC Power Supply, 200MM/300MM
0190-09769 AMAT Magnetron Head Assy, 150MM/200MM
0190-70060 AMAT Magnet Driver Assy, 150MM/200MM
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No.
Metal Bellow Repair / New Bellow for Sale
16-128855-00 Novellus Bellow, Argon Dump, 300MM
16-118351-01 Bellow Assy, Pedestal, 300MM PVD
3422001501 Jusung Bellow, O3 Chamber Pedestal Lifter, 300MM
34220012 Jusung Bellow, Tin Chamber Pedestal Lifter, 300MM
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No.
19-100586-00 Novellus Bellow, Pedestal Cylinder, 300MM
001-9093-05 Jusung Bellow, 300MM
0040-64362 Bellow, Lifter, A3 Anneal, ECP, 300MM
Metal Bellow Repair / New Bellow for Sale
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No.
LAM Electrical Static Chuck
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No.
LAM Electrical Static Chuck