oskar süẞ (suess) 11 2017.pdfoskar süẞ (suess) che 2 384t / 323 blue print chemistry. che 384t...
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![Page 1: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/1.jpg)
ChE 384T / 323
Lecture 11Chemical Engineering for Micro/Nano Fabrication
Oskar Süẞ (Suess)
![Page 2: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/2.jpg)
ChE 384T / 3232
Blue Print Chemistry
![Page 3: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/3.jpg)
ChE 384T / 323
![Page 4: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/4.jpg)
ChE 384T / 3234
![Page 5: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/5.jpg)
ChE 384T / 323
MeyerBaekeland
The History of Novolac
C.H. Meyer and L.H. Baekeland Discovered Novolac ca. 1900
OH
CH3
![Page 6: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/6.jpg)
ChE 384T / 323
![Page 7: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/7.jpg)
ChE 384T / 323
Novolac Resin Production!!
Workers at Albert Co. in Wiesbaden, Germany
“zerkleinert das Harz von Hand” (ca. 1910)
![Page 8: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/8.jpg)
ChE 384T / 323
Oskar SüẞDer Diazo König
N2
O
SO3R
![Page 9: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/9.jpg)
ChE 384T / 323
![Page 10: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/10.jpg)
ChE 384T / 323
Novolac/DNQ Photoresists
Develop
OH
CH3
Inhibited Novolac (I)
LogR
Novolac
UV
Coat
Expose
Substrate
II
I
I
I
I
I
I
I
I
I I
Substrate
II
I
I
I
I
I IP
PP
P
P
P
Substrate
I
I
I
II
I I
I
N2
O
SO3R SO3R
OOH
UV
OH
CH3
Photoproduct (P)
365-nm exposureAdd DNQ
I
P
![Page 11: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/11.jpg)
ChE 384T / 323
DNQ – Novolac Resists
![Page 12: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/12.jpg)
ChE 384T / 323
Wolff Rearrangement and Reaction of the ketene with water
![Page 13: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/13.jpg)
ChE 384T / 323
![Page 14: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/14.jpg)
ChE 384T / 323
Polyphotolysis
I → S
I-I → S-I → S-S
I-I-I → S-I-I → S-S-I → S-S-S
This contributes to a threshold like
dissolution rate response to exposure
![Page 15: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/15.jpg)
ChE 384T / 323
![Page 16: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/16.jpg)
ChE 384T / 323
I
No Swelling!!!!
![Page 17: Oskar Süẞ (Suess) 11 2017.pdfOskar Süẞ (Suess) ChE 2 384T / 323 Blue Print Chemistry. ChE 384T / 323. ChE 4 384T / 323. ChE 384T / 323 Baekeland Meyer The History of Novolac](https://reader034.vdocuments.mx/reader034/viewer/2022042405/5f1ce09abb46e86db5515c2d/html5/thumbnails/17.jpg)
ChE 384T / 323
Quantifying Resist Performance
•Sensitivity• Intrinsic radiation sensitivity•Lithographic Sensitivity
•Contrast• Etch resistance
• Adhesion
• Shelf life
• Etc, etc, etc.
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ChE 384T / 323
Threshold like Response of ArF Resist
0.01
0.1
1
10
100
1000
10000
100000
1.0 10.0 100.0
DOSE(mJ/cm2)
dis
so
lutio
n r
ate
(A/s
ec)
total
surface
middle
bottom
E0
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ChE 384T / 323
Fundamental Measure of Resist Response
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ChE 384T / 323