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Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

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Page 1: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Optimum design of optical filters and deposition monitoring methods

Dimitris Kouzis - Loukas

Supervisor: S. MaltezosSupport: M. Fokitis

Page 2: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Contents

• Multilayer Notch Optical Filters• Applications• Optimum design• Deposition processes• Monitoring techniques• Conclusion and future work

Page 3: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Why is this an interesting technology?

• It requires knowledge of several different sciences– Optics– Electronics and computer science– Automatic control– Mathematics and optimization algorithms

• Relevant methods also apply– Deposition of Integrated Circuits

• Interesting commercial applications• Lack of knowledge in Greece and

worldwide

Page 4: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Multilayer Notch Optical Filters

• Their structure• Mathematical models

Page 5: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Categories

• Multi layer thin films• Rugate filters

Page 6: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Rugate filters

Page 7: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Multi layer thin films

Page 8: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Mathematical models

b

b

E EM

1 2 3... nM M M M M

cos( ) sin( ) /

sin( ) cos( )q q q

qq q q

i NM

iN

2cos( )q q q qn d

cos( )sq q qN n

cos( )qp

qq

nN

11 12

21 22

m mM

m m

0 11 12E m Nm

*0 0 0 0 0 0

*0 0 0 0 0 0

( )( )

( )( )

N E H N E HR

N E H N E H

0

*0 0 0 0 0 0

4 ( )

( )( )

N real NT

N E H N E H

0 21 22H m Nm

Page 9: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Applications (1/2)

• Remote Sensing• Avionics• Gas Analysis• Emission Analysis• Environmental Monitoring • Forgery detection

Page 10: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Applications (2/2)

• Spectroscopy• Machine Vision • Raman Spectroscopy• Space Based Research & Astronomy• Medicine - Biology• Colour Correction• Optics and ophthalmic lenses

Page 11: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Dense Wavelength Division Multiplexers

Page 12: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Optimum design

Page 13: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

The problem that has to be solved

Page 14: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Local and global minimum/maximum

Page 15: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Trapped in a local maximum

Page 16: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Complexity of multiple dimensions

Page 17: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Optimization techniques for multivariable functions• Gradient • Simplex • Needle • Damped lest-squares • Fuzzy logic• Genetic algorithms• Simulated annealing

Page 18: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Simulated annealing (1/2)

• Problem independent algorithm

• Inspired from the equivalent physics problem

• Monte Carlo technique

( / )E Te

Algorithm• Better solutions get immediately

accepted• Worse solutions get accepted

according to the metropolis criterion:

Page 19: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Simulated annealing (2/2)

Page 20: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Results

50 layer bandpass filter (SiO2 και TiO2)

Page 21: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Other applications of these algorithms

• Alignment of set-ups• Financial sciences• Pattern matching - recognition• Image recognition• Fit of complex models – parameters

estimation• Optimum route for VLSI design and

CAD

Page 22: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Deposition Methods

Page 23: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Sputtering deposition schematic

Page 24: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Sputtering deposition system

Page 25: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Sputtering techniques

• Thermal Evaporation (Soft Films)– Old fashioned technology

• Electron Bombardment– Widely accepted technology

• Ion-Assisted Bombardment– Cold evaporation– Can be applied to lenses

Page 26: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Control techniques

• What has to be monitored• Control methods and evaluation• Experimental setup• Experiment’s results

Page 27: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

What has to be monitored

• Real - time control– Optimization of coating process– Feedback – control– Early error detection and possible

repair• Post product control

– Evaluation of the product– Life-cycle estimate– Physical characteristics

Page 28: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Control methods and evaluation (1/2)

• Indirect control– “Blint” method– Sensors have to be calibrated often

• Pressure control– Dangerous– Less reliable

• Quartz crystal– Limited precision– Crystals need to be replaced after some

depositions

Page 29: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Control methods and evaluation (2/2)

• Single band monitoring– Average precision– Good results

• Wide band monitoring– Best precision – High quality filters– Direct monitoring of spectrum

characteristics

Page 30: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Experimental setup

Page 31: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Photodiode array

Page 32: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Ηλεκτρονικά της διάταξης

Page 33: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Data acquisition software

• Matlab version

• LabVIEW version

Page 34: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Monitoring algorithm

Page 35: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

High quality optical filters

• Telecommunications• Highest Energy Cosmic Ray

Experiments– AUGER– EUSO

• Trigger of fast scintillators

Page 36: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Experimental setup

Page 37: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Spectrum of a single laser beam (used for calibration)

Page 38: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Demo spectrums

Page 39: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Conclusions

• Design and deposition of high quality optical filters for special applications is feasible

• It can be further improved by simulating and monitoring the forces of the substrate

Page 40: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Future work

• Integration of the setup into a single compact design

• Use the setup to certify – evaluate commercial deposition machines

• Development of state of the art commercial applications

Page 41: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Thank you

Page 42: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Appendix

Page 43: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

ITU Frequency Grid

ITU: International Telecommunication Union

Page 44: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Multidimensional optimization

Page 45: Optimum design of optical filters and deposition monitoring methods Dimitris Kouzis - Loukas Supervisor: S. Maltezos Support: M. Fokitis

Block diagram