octiv range
DESCRIPTION
Slight changes in power, as a plasma input parameter, can affect the quality of a substrate. Monitoring the voltage, current, phase and harmonic information can result in better process stability. The Octiv range provides a set of diagnostic tools that give highly accurate insights to RF parameters.TRANSCRIPT
OCTIV | RANGE
“The Octiv Range of inline RF power delivery and plasma diagnostic systems
provide versatility along with micro-second resolution”
Real Power
Forward Power
Reflected Power
Impedance Voltage Current PhaseAngle
HarmonicsSimultaneous
Measurements Ion Flux
Waveform Reconstruction
Mono • • • •
VI • • • • • • • •
Poly • • • • • • • • •
Suite • • • • • • • • • • •
OCTIV | RANGE
OCTIV | RANGE
Hardware
Electronics and SoftwareStandalone intelligent RF power delivery and plasma
diagnostic system.Optional benchtop RF power meter display unit.
Operating ParametersPower Range: 0 – 12 kW
Standard Calibration Frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz
Hardware SpecificationsConnector Types: N-Type, 7/16 or custom
ConnectivityUSB
Serial RS232
OCTIV | MONO
The Octiv Mono is an in-line RF power meter and RF power sensor
measurement system. It measures a single fundamental frequency and has an accuracy rating of 1% and a time
resolution of 1µs.
Plasma Diagnostics MeasuredReal Power
Forward PowerReflected Power
Impedance
Measurement FunctionalityTime AveragedTime Resolved
Time TrendSmith Chart Measurements
OCTIV | MONO
Installation Setup
Generator Match Plasma Reactor
Computer
Octiv Mono
OCTIV | VI
The Octiv VI probe system is an in-line RF measurement system. It can measure a single fundamental
frequency and its harmonics at 1% accuracy and 1µs time resolution.
Plasma Diagnostics MeasuredVoltageCurrentPhase
HarmonicsImpedance
Measurement FunctionalityTime AveragedTime Resolved
Time TrendSmith Chart Measurements
OCTIV | VI
Installation Setup
Generator Match Plasma Reactor
Computer
Octiv VI Probe
OCTIV | POLY
The Octiv Poly is a multi-frequency in-line RF measurement system. It can
measure multiple fundamental frequencies and harmonics
simultaneously and has an accuracy of 1% with 1µs time resolution.
Plasma Diagnostics MeasuredVoltageCurrentPhase
HarmonicsImpedance
Measurement FunctionalityTime AveragedTime Resolved
Time TrendSmith Chart Measurements
OCTIV | SUITE
The Octiv Suite is an in-line multi-frequency RF system with plasma diagnostic and complex waveform
analysis with an accuracy of 1% and 1µs time resolution.
Plasma Diagnostics MeasuredVoltageCurrentPhase
HarmonicsImpedance
Ion Flux
Measurement FunctionalityTime Averaged • Time Resolved
Time Trend • Smith Chart MeasurementsWaveform Reconstruction
OCTIV | RANGE
Applications
As effective tools for plasma measurement, Octiv systems excel at extracting power delivery information and plasma parameters for better
process stability.
The Octiv Systems can be used in the following applications:Atmospheric
Dusty PlasmaPlasma Etching
PECVD Space Plasma
Plasma Sputtering
OCTIV | RANGE
For further infromation on the Octiv Range visitwww.impedans.com/octiv_range
As effective tools for plasma measurement, Octiv systems excel at extracting power delivery information for better process stability.
To request a quote visitwww.impedans.com/contact
Chase HouseCity Junction Business Park
Northern CrossMalahide Road
Dublin 17Ireland
Ph: +353 1 842 8826Fax: +353 1 891 6519
Web: www.impedans.comEmail: [email protected]