NNCI Mid-Atlantic Nanotechnology Hub (MANTH) for

Research, Education, & Innovation, Award 1542153Mark G. Allen, PI, Scientific Director, Singh Center for Nanotechnology,

Engineering School of Engineering and Applied Science

Kevin Turner, co-PI, School of Engineering and Applied Science

Cherie Kagan, co-PI, School of Engineering and Applied Science

and School of Arts and Sciences

George P. Watson, Director of User Programs

University of Pennsylvania

• Singh Center for Nanotechnology: Enabling researchers in the industry-dense and academically-rich environment of Philadelphia and the surrounding mid-Atlantic region by providing access to a state-of-the-art fabrication and characterization facility and the associated intellectual nanotechnology expertise– Over 400 researchers from academia and industry use the facility, resulting in over 250 conference talks and

papers in the past year– 10,000 sq. ft. characterization lab space

• TEM, SEM, FIB, and ion beam scattering characterization• SPM, AFM, Raman/NSOM, TIRF/AFM probe techniques• Low temperature electron transport characterization

– 10,000 sq. ft., class 100/1000 cleanroom• Advanced lithography: ebl, laser direct-write, nano-imprint, and contact photolithography• 4 plasma etch tools with F2 and Cl2 chemistries• 10 deposition tools including PVD, ALD, PEALD, PECVD, plus LPCVD and oxidation furnaces• Microfluidics fabrication• Dicing, wire bonding, wafer bonding• Laser micromachining

• Outreach– Created the Innovation Seed Grant Competition, designed to encourage individuals and companies from all

around the Mid-Atlantic Region to design or prototype a wide range of technologies from many different disciplines, but all utilizing nanotechnology related tools and equipment. Winners are awarded $5k to $10 grants for Singh Center equipment use.

– Created and hosted the Nanoweek Conference at Upenn in order to bring together individuals from academia, government, industry and investment around the Mid-Atlantic Region to discuss and showcase the current work being produced at the Singh Center.

– Host of the Nanoday@Penn for over 160 high school students with presentations, activities, and hands-on demonstrations. More than 150 Penn students assisted.

– Hosted 6 REU students conducting research in nanotechnology this year.– Cleanroom staff published over 60 fabrication technical notes online with 5800 downloads worldwide.– Initiated the semi-annual Mid-Atlantic Cleanroom Managers workshop with 21 academic and government

laboratories attending, and hosted the first 2 meetings in order to establish contacts, share process/equipment strengths, and exchange best practices.

– Exploring efficacy of an Associates Degree with a Nanotechnology emphasis with partner Community College of Philadelphia for workforce development.

Affiliation Breakdown of Singh Users

USAGE BY USER AFFILIATION AND DISCIPLINE

Local Site Academic

Other Academic

Large Company

Small Company

Disciplinary Breakdown of Singh Users

MaterialsLife Science and Medicine

Physics

MEMS/Mechanical Eng.

Other Research

Process

Optics

25% Outside

Users25% Life

Sciences

NanoelectronicsWearable Sensors

Microfluidics Mechanics