next generation hbled tools
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TOOLS & TECHNIQUES
DECEMBER 2010 | VOLUME 13 | NUMBER 1250
Bruker acquires Metrology & Instrumentation GroupBruker Corporation, a leading provider
of instruments for molecular and
materials science for research and
industry, recently acquired the
Metrology & Instrumentation Group
of Veeco Instruments Inc. This group
includes the Scanning Probe Microscopy
(SPM), Optical Industrial Metrology
(OIM) and Stylus Profiler product lines
of Veeco.
Acquired at a cost of $229 million,
the new purchase is expected to
contribute over $130 million to
Bruker in 2011. The Metrology &
Instrumentation Group is now part of
Bruker’s new Nano Surfaces Business,
and is compromised of all of the
group’s former assets, such as its
facilities in California and Arizona,
and the worldwide service support
departments.
Contact: www.bruker-nano.com
Extreme high-aspect ratio AFMCarbon Design Innovations,
manufacturers of carbon nanotube
devices, has recently announced an
atomic force microscope (AFM) probe
with an extreme high-aspect ratio,
designed for life science imaging.
Using CDI’s patented techniques,
the company is able to produce
incredibly straight probes, which can
be precisely aligned. The Carbon Core
BioProbes (CCB) have a total length
of up to 5 μm, with an exposed
nanotube length of <500 nm. The
CCB AFM probes are able to provide a
high-aspect ratio, stability and superb
resolution.
The probe also offers a lifetime which
is ten-fold longer than silicon probes,
by exploiting the strength of carbon
nanotubes. The probes consist of
multiwall carbon nanotubes, which
are securely attached, meaning that
the tip can withstand forces that
silicon or amorphous carbon probes
cannot. The CCB probe is designed to
be suitable for most non-contact mode
operations; however custom coatings
and processes are available, if the
standard CCB is not ideal. The probe is
also available on the user’s choice of
cantilever.
Contact: www.carbondesigninnovations.com
Customised SiliconAgar Scientific, a major supplier of consumables and
equipment for microscopy, has announced that their
partners TEMwindows will offer a wafer fabrication
service. TEMwindows has experience in ultrathin films
and MEMs processes, and so will be able to support
customers who require unique solutions to their
microscopy problems. They will offer design, etching and
inspection of novel supports and films constructed from
silicon, silicon dioxide and silicon nitride. Features as
small as two microns can be etched into membranes, and
metal deposition with a thickness of fifty to two hundred
nanometres can be performed. Custom packaging will
also be arranged to ensure that the tailor-made products
arrive in the desired condition.
Contact: www.agarscientific.com
Novel desktop x-ray instrumentA new system for angle-dispersive x-ray diffraction
(ADXRD), energy-dispersive x-ray diffraction (EDXRD)
and x-ray fluorescence (XRF) measurements is now
being offered by Bruker AXS. The D2 PHASER uses the
XFlash detector, which provides an energy resolution
of less than 180 eV at 100 000 counts per second. The
detector is a silicon drift type device, and thanks to its
high energy resolution, it is able to provide superior
peak-to-background intensity ratios.
The energy of the D2 PHASER can be moved throughout
the copper emission spectrum, allowing the Kα doublet
or the Kβ line to be selected. Such an approach
overcomes the overlap problem associated with using
Kα radiation. The XRF data can be collected during other
measurements, allowing elements and concentrations to
be identified. Such a measurement is incredibly valuable
when the possibility of separate phases arises, or when
doubt surrounds the sample composition.
Contact: www.bruker.com
Next generation HBLED toolsOxford Instruments is, among other titles, the world
leading supplier of high volume bath plasma tools for
the production market. Now the company is launching
the PlasmaPro™ NGP®1000 HBLED range of plasma
etch and deposition tools, which the company hopes
will prove to be invaluable for high-brightness LED
(HBLED) manufacturers. The new tools offer a much
higher throughput than previously available, as well as
aiming to be reliable and easy-to-service products.
The range includes the PlasmaPro™ NGP1000 PECVD
system, designed to deposit SiO2 and SiNx layers over
large areas, and the PlasmaPro™ NGP1000 etch system,
designed for GaN, AlGaInP and Sapphire etching. By using
the new 60MHz Viper™ plasma source it is possible to
obtain uniformity over a wider area than conventional
sources, while still performing at an industry leading rate.
Contact: www.oxford-instruments.com
Small but able mass spectrometerA new compact mass spectrometer, the QGA, is now being
offered by Hiden Analytical. The benchtop spectrometer
can provide real-time multi-species analysis of gases and
vapors between 2 bar and 100 mbar. The sample insert
can be heated up to 200 °C, and the device will adjust the
consumption rates to meet the processing requirements.
By using available adaptors and extensions it is possible
to study pressures up to 30 bar and extract gases from
environments at 1000 °C. The device uses the QGA
operating system, and can analyze 16 gases or vapors.
Several advanced modes are available, which allow the
analysis of complex organic molecules using soft ionization,
and the selective ionization of many gas species.
Contact: www.HidenAnalytical.com
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