CCCC---- WG WG WG WG

STRJ WS: March 3, 2003, T.Fukushima 2222

CoECoECoECoE

STRJ WS: March 3, 2003, T.Fukushima 3333

1111----

aaaa

STRJ WS: March 3, 2003, T.Fukushima 4444

bbbb

STRJ WS: March 3, 2003, T.Fukushima 5555

1111----

aaaa highhighhighhigh----kkkk

bbbb

2001200120012001 2002200220022002 2003200320032003 2004200420042004 2005200520052005 2006200620062006 2007200720072007 2008200820082008 2010201020102010 2011201120112011130 115 100 90 80 70 65 70 45

MPU/ASICMPU/ASICMPU/ASICMPU/ASIC 1.3–161.3–161.3–161.3–16 1.2–1.51.2–1.51.2–1.51.2–1.5 1.1–1.61.1–1.61.1–1.61.1–1.6 0.9–1.40.9–1.40.9–1.40.9–1.4 0.8–1.30.8–1.30.8–1.30.8–1.3 0.7–1.20.7–1.20.7–1.20.7–1.2 0.6–1.10.6–1.10.6–1.10.6–1.1 0.5–0.80.5–0.80.5–0.80.5–0.8LOPLOPLOPLOP 2.0-242.0-242.0-242.0-24 1.8-2.21.8-2.21.8-2.21.8-2.2 1.6-2.01.6-2.01.6-2.01.6-2.0 1.4-1.81.4-1.81.4-1.81.4-1.8 1.2-1.61.2-1.61.2-1.61.2-1.6 1.1-1.51.1-1.51.1-1.51.1-1.5 1.0-1.41.0-1.41.0-1.41.0-1.4 0.8-1.20.8-1.20.8-1.20.8-1.2

LSTPLSTPLSTPLSTP 2.4-2.82.4-2.82.4-2.82.4-2.8 2.2-2.62.2-2.62.2-2.62.2-2.6 2.0-2.42.0-2.42.0-2.42.0-2.4 1.8-2.21.8-2.21.8-2.21.8-2.2 1.6-2.01.6-2.01.6-2.01.6-2.0 1.4-1.81.4-1.81.4-1.81.4-1.8 1.2-1.61.2-1.61.2-1.61.2-1.6 0.9-1.30.9-1.30.9-1.30.9-1.3DRAMDRAMDRAMDRAM 5555 4.54.54.54.5 4.14.14.14.1 3.63.63.63.6 3.33.33.33.3 3333 2.72.72.72.7 1.551.551.551.55

(nm) (nm) (nm) (nm)

EOTEOTEOTEOT(nm)(nm)(nm)(nm)

2001200120012001 2002200220022002 2003200320032003 2004200420042004 2005200520052005 2006200620062006 2007200720072007 2008200820082008 2010201020102010 2011201120112011130130130130 115115115115 100100100100 90909090 80808080 70707070 65656565 70707070 45454545

MPU/ASICMPU/ASICMPU/ASICMPU/ASIC <2.7<2.7<2.7<2.7 <2.7<2.7<2.7<2.7 <2.7<2.7<2.7<2.7 <2.4<2.4<2.4<2.4 <2.4<2.4<2.4<2.4 <2.4<2.4<2.4<2.4 <2.1<2.1<2.1<2.1 <1.9<1.9<1.9<1.9DRAMDRAMDRAMDRAM 4.14.14.14.1 3.0–4.13.0–4.13.0–4.13.0–4.1 3.0–4.13.0–4.13.0–4.13.0–4.1 3.0–4.13.0–4.13.0–4.13.0–4.1 3.0-4.13.0-4.13.0-4.13.0-4.1 2.6–3.12.6–3.12.6–3.12.6–3.1 2.6–3.12.6–3.12.6–3.12.6–3.1 2.3–2.72.3–2.72.3–2.72.3–2.7

(nm)(nm)(nm)(nm)

k

STRJ WS: March 3, 2003, T.Fukushima 6666

PXLPELIPL

PXL PXL PXLPEL PEL PELIPL IPL IPLML2 ML2 ML2

PXL EPL EPL EPL EPLPEL EUV EUV EUV EUVIPL F2 + PSMF2ArF + PSM

ArFKrF + PSM

2001 2004 2007 2010 2013 2016(130nm) (90) (65) (45) (32) (22)

EUV = extreme ultravioletEPL = electron projection lithographyML2 = mask less lithographyIPL = ion projection lithographyPXL = proximity x-ray lithographyPEL = proximity electron lithographyPSM=phase shift mask

PELPELPELPELIPLIPLIPLIPL

157157157157nmnmnmnm

PXLPXLPXLPXL

2000 2000 2000 2000 01010101 02 02 02 02 03030303 04 04 04 04 05050505 06 06 06 06 07070707 08 08 08 08 09 09 09 09 10 10 10 10 11111111 12 12 12 12 13131313 14 14 14 14 15151515 2016201620162016Node Node Node Node 130 90 65 4130 90 65 4130 90 65 4130 90 65 45 32 22 5 32 22 5 32 22 5 32 22 nmnmnmnm

EUV(13nm)EUV(13nm)EUV(13nm)EUV(13nm)

ML2ML2ML2ML2

KrFKrFKrFKrF(248nm)(248nm)(248nm)(248nm)

ArFArFArFArF(193nm)(193nm)(193nm)(193nm)

EPLEPLEPLEPL

NGLNGLNGLNGL

PELPELPELPELIPLIPLIPLIPL

157157157157nmnmnmnm

PXLPXLPXLPXL

2000 2000 2000 2000 01010101 02 02 02 02 03030303 04 04 04 04 05050505 06 06 06 06 07070707 08 08 08 08 09 09 09 09 10 10 10 10 11111111 12 12 12 12 13131313 14 14 14 14 15151515 2016201620162016Node Node Node Node 130 90 65 4130 90 65 4130 90 65 4130 90 65 45 32 22 5 32 22 5 32 22 5 32 22 nmnmnmnm

2000 2000 2000 2000 01010101 02 02 02 02 03030303 04 04 04 04 05050505 06 06 06 06 07070707 08 08 08 08 09 09 09 09 10 10 10 10 11111111 12 12 12 12 13131313 14 14 14 14 15151515 2016201620162016Node Node Node Node 130 90 65 4130 90 65 4130 90 65 4130 90 65 45 32 22 5 32 22 5 32 22 5 32 22 nmnmnmnm

EUV(13nm)EUV(13nm)EUV(13nm)EUV(13nm)

ML2ML2ML2ML2

KrFKrFKrFKrF(248nm)(248nm)(248nm)(248nm)

ArFArFArFArF(193nm)(193nm)(193nm)(193nm)

EPLEPLEPLEPL

NGLNGLNGLNGL

STRJ WS: March 3, 2003, T.Fukushima 7777

1111----3333

STRJ WS: March 3, 2003, T.Fukushima 8888

2222----1111 ////

0

20

40

60

8019

78

1980

1982

1984

1986

1988

1990

1992

1994

1996

1998

2000

0

20

40

60

80

1978

1980

1982

1984

1986

1988

1990

1992

1994

1996

1998

2000

STRJ WS: March 3, 2003, T.Fukushima 9999

2222----2222

85 86 87 88 89 90 91 92 93 94

85858585 64KDRAM64KDRAM64KDRAM64KDRAM 256KDRAM256KDRAM256KDRAM256KDRAM

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91919191

95 96 97 98 99 00

SA(Suspension Agreement)SA(Suspension Agreement)SA(Suspension Agreement)SA(Suspension Agreement) ))))

(((( 20%20%20%20% ))))

96969696

96969696

97979797 WSCWSCWSCWSC

98989898 WSCWSCWSCWSC

99999999 WSCWSCWSCWSC

99999999

0

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78

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1984

1986

1988

1990

1992

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2000

STRJ WS: March 3, 2003, T.Fukushima 10101010

0

20

40

60

80

1978

1980

1982

1984

1986

1988

1990

1992

1994

1996

1998

2000

STRJ WS: March 3, 2003, T.Fukushima 11111111

0

20

40

60

80

1978

1980

1982

1984

1986

1988

1990

1992

1994

1996

1998

2000

STRJ WS: March 3, 2003, T.Fukushima 12121212

STRJ WS: March 3, 2003, T.Fukushima 13131313

2222----3333

EUEUEUEU (((( ))))EU EU

• EU••

STRJ WS: March 3, 2003, T.Fukushima 14141414

2222----4444

1975 19761975 LSI1976 LSI

1994 19981994 (SIRIJ)1995 (STARC)1996 (Selete)1996 (ASET)1998 (STRJ JEITA)

20012001 2001 MIRAI2001 HALCA

STRJ WS: March 3, 2003, T.Fukushima 15151515

19971997199719971 WSC

300mmI300I Selete I300I J300 300mm

19981998199819982 WSC SIA• 6

19991999199919993 WSC SIA Communication Cooperation

Collaboration Collaboration2000200020002000

3 IFST2000 11ESH Collaboration

• ISMT– Red Brick Wall 20 30 5––

11 Selete ISMTCollaboration11 IMEC Selete STARCSoC++

STRJ WS: March 3, 2003, T.Fukushima 16161616

3333----1 1 1 1

1994199419941994SEMATECHSEMATECHSEMATECHSEMATECH

Microtech 2000 Workshop(1991Microtech 2000 Workshop(1991Microtech 2000 Workshop(1991Microtech 2000 Workshop(1991 )))) 300300300300mmmmmmmm

SEMATECH

19951996 : 300mm I300I

1 WSC(1997 4 ) 300mm I300ISelete I300I J300(300mm ) 300mm

STRJ WS: March 3, 2003, T.Fukushima 17171717

3333----2 2 2 2

IMECIMECIMECIMEC Interuniversity Microelectronics CenterInteruniversity Microelectronics CenterInteruniversity Microelectronics CenterInteruniversity Microelectronics Center

2002 20• 2002 IMEC 45

Intel TI Motorola National Semiconductor

MEDEA+MEDEA+MEDEA+MEDEA+ MicroMicroMicroMicro----Electronics Development for European ApplicationsElectronics Development for European ApplicationsElectronics Development for European ApplicationsElectronics Development for European Applications

•

•

LetiLetiLetiLeti ((((Laboratoire d'ElectroniqueLaboratoire d'ElectroniqueLaboratoire d'ElectroniqueLaboratoire d'Electronique dededede TechnologieTechnologieTechnologieTechnologie etetetet InstrumenttationInstrumenttationInstrumenttationInstrumenttation

Leti CEA

• CEA Leti

STRJ WS: March 3, 2003, T.Fukushima 18181818

((((EIAJ (EIAJ (EIAJ (EIAJ ( JEITA)JEITA)JEITA)JEITA) 0

0 @ 100

0

NIST:NIST:NIST:NIST: 100

0

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35 (SRC) 2510 ×6 25

055 110 27

600 100

LetiLetiLetiLeti 45100

060 50

090 60

18 70

ASET'98 Intel

Equal ContributionI-SEMATECH

collaboration? (cooperation?)

(ITRS)

ISMT Consortia CooperationSEMATECH

200

R&D

99 50 7

86

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STRJ WS: March 3, 2003, T.Fukushima 19

4-1

• ITRS 12 IP 14

• 136

• : : : : :• 100 75 50 25 0

STRJ WS: March 3, 2003, T.Fukushima 20

4-2

JEITA

1 1 2 1 11 0 2 1 11 1 2 1 11 2 2 1 11 1 2 1 11 1 1 1 11 1 0 1 11 1 1 0 11 2 1 1 11 1 2 1 21 0 1 1 1

11 11 16 10 12

SEAJ

8 17 10 17 11

SEAJ

EDA

Model/Sim

1 1 1 1 1 11 1 1 1 1 11 1 1 1 1 10 1 0 1 1 21 1 1 1 1 11 1 0 0 1 11 0 0 0 1 11 1 0 1 0 11 1 0 1 1 11 1 1 3 1 11 1 1 1 1 1

10 10 6 11 10 12119

Mod /Sim

3 1177

( )

STRJ WS: March 3, 2003, T.Fukushima 21

STRJ WS: March 3, 2003, T.Fukushima 22

STRJ WS: March 3, 2003, T.Fukushima 23

IMEC

ISMTSelete STARC

IMEC

STRJ WS: March 3, 2003, T.Fukushima 24

STARC HALCA

1

( )

IT

STRJ WS: March 3, 2003, T.Fukushima 25

IP IP

/

OPC

STRJ WS: March 3, 2003, T.Fukushima 26

R&D

( )

R&D ,ITRS

•••

6-1

STRJ WS: March 3, 2003, T.Fukushima 27

6-2

R&D

/

STRJ WS: March 3, 2003, T.Fukushima 28

6-3 (Focus) (Cross Cut)

(Focus) Cross Cut

STRJ WS: March 3, 2003, T.Fukushima 29

6-4

STRJ WS: March 3, 2003, T.Fukushima 30

CoE

CoECoE

TVTVTV

CoE

STRJ WS: March 3, 2003, T.Fukushima 31

C No.14 2002 10 25

300

STRJ WS: March 3, 2003, T.Fukushima 32

450 2,000

1.3% 0.1%

70% 80%

1,000 2