Size Nano Colloids Precisely and Quickly

Liquid Nanoparticle Sizer (LNS) SystemModel 9310

NANOPARTICLE MEASUREMENT SOLUTIONS

• 6 – 360 nm measurement range in under 5 minutes

• Actual quantitative concentrations

• Any particle, any shape, any composition, any distribution (including multimodal)

• Great for CMP slurry, resin rinse, bio-pharma, and filter characterization, monitoring, and control

Industry Recognition• C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems• C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems

CMP Slurry Characterized with the LNS System

Multi-Mode CMP Slurry Measurement

Particle Diameter (nm)

Diffe

rent

ial V

olum

e Co

ncen

trat

ion

d(n

m3 /m

L/d

log

(DP)

2.0e+16

1.8e+16

1.6e+16

1.4e+16

1.2e+16

1e+16

8e+15

6e+15

4e+15

2e+15

010 20 30 40 50 60 70 80 90 100

Multi-mode colloids are easily distinguished

30 nm Rated Water FilterChallenged with 2E8 #/ml (6 ppm) 30 nm Particles

Fractional Coverage (Monolayers)

Rete

ntio

n (%

)

100

80

60

40

20

00.000 0.025

SilicaPSLGold

0.050 0.075 0.100 0.125 0.150 0.175 0.200

Filter retention depends on the challenge particle

UPW Rinse of Ion Exchange Resin

Flush Volume (Liters UPW)

Cum

mul

ativ

e Pa

rtic

le C

once

ntra

tion

Adde

d (#

/mL

>10

nm

)

1e+9

1e+8

1e+7

1e+6

1e+51 10 100 1000

Resin AResin BResin CResin DResin EResin FSpool

Resin rinse times vary widely

Filter Performance Testing Resin Rinse Benchmarking

Data prepared and presented by CT Associates to the SEMI Ion Exchange Task Force on 02/27/2014

Van Schooneveld et. al., American Filtration Society Spring Conference, Minneapolis, MN, 2013

Van Schooneveld et. al., Nanotech 2011: Technical Proceedings of the 2011 Nanotechnology Conference and Expo

Kanomax FMT, Inc. 4104 Hoffman Road White Bear Lake, Minnesota 55110-3708 USA Phone +1 (651) 762-7762 Fax +1 (651) 762-7763 www.KanomaxFMT.com

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Specifications Particle size range: 6-360 nmParticle size resolution: 64 channels per decade of sizeMeasurement time: <5 minutesInspection volume rate: 0.2-1.0 μL/minTotal liquid sample flow rate (online): 50-280 mL/minNebulizer flow rate: 0.5-3.0 mL/min (direct injection)Dilution factor range: 50-20,000Colloid concentration range (post dilution): 3E7-3E11 number/mLResponse time to concentration change: <90 secondsInlet water pressure (online): 140-300 kPa (20-45 psig)Compressed air flow rate/pressure: 2.5 std L/min CDA or Nitrogen 2.8 bar (50 - 60 psi)Wetted surfaces (before nebulization): PFA, PTFE, sapphire, 316L stainless steel, PEEKCPC working fluid: n-butyl alcohol (butanol)I/O Communications: Ethernet, internal memoryPower requirements: 100/115/220/240 VAC; 50-60 HzOperating temperature: 10-35°COperating humidity: 0-90% RH non-condensingStorage temperature: 5-35°CDimensions: 9.5 × 8 × 36 inches (D/W/H)Software – computer operating system: Windows 10

Refer to individual product sheets for component details.Computer not included.

Specifications subject to change without notice. The LNS System was developed in collaboration with CT Associates, Inc. The LNS System uses a soft X-ray charge conditioner.

Particle Diameter

Conc

entra

tion

Aerosolization Particle Size Distribution Measurement

Colloid Sample

EngineeredNebulization

CondensationParticle Counter

Evaporation Charge Conditioning, Electrical Mobility-based

Particle Size Classification

Integrated Software Platform - Kanolysis• All-in-one control of the LNS system• Automated sampling sequence• Real-time data analysis

Patent Protected• Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax. • Kanomax has applied for additional domestic and international patents for technology contained within the LNS System. • Patent number 7,852,465 has been issued to Kanomax.

Principle of Operation

View Analysis

Kanolysis - View AnalysisK

500

400

300

200

100

01 2 5 10 2

Geometric MeanDiameter (nm)

StatisticsGSD Total Concentration

(#/ml)D10 (nm) D50 (nm) D90 (nm)

Diameter (nm)

Conc

entr

atio

n (#

/ml)

5 100 2 5 1000

Plot

Example

Measured Data 40.7 2.32 2.91e+4 14.4 34.5 132

44.3 2.14 2.72e+4 16.2 41.9 120

27.9 1.80 2.08e+4 12.9 26.2 61.0

114 1.54 6.75e+3 64.3 112 194

Single Mode Curve Fit

Mode 1 Curve Fit

Mode 2 Curve Fit