Nano/Micro Fabrication Research Methods

B. K. Paul

Archetypal Papers

• These papers provide a model for your research– Structure– Methods– Presentation of results

• Answers these questions– What results are needed to convince the peer

audience of conclusions?– What methods are appropriate for what research

objectives?

NMF Reseach

• Micro/nanosystems Development– New Platforms/Architectures– New Microsystem Components

• Fabrication Research– New Processes/Methods– Identifying failure modes