MICROMACHINING TECHNOLOGY

Introduction

• Micromachining is used to create parts of size in the order of

10-6 meters.

• Materials on a micrometer-scale possess unique properties

• It is used to create Micro Electro-mechanical systems (MEMs

devices), Integrated circuits etc.

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Micromachining

• Micromachining is derived from traditional machining

processes such as turning, milling, laser machining etc., by

judicious modification of these machines.

• Unit metal removal and equipment precision are the key

factors to micro machining.

• Micromachining is used for fabricating micro-channels, drug

delivery systems and micro-probes in biotechnology

applications.

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Micromachining Processes

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Machining Phenomena

Micromachining Process

Materials

Mechanical Force Micro milling , Micro grinding

Ceramics, metals, Si

Ablation Excimer Laser, Femto Second Laser

Ceramics, Polymers

Dissolution Etching, ECM Glass, Quartz SiCeramics, Polymers

Micro Milling • Used to create 3D features

in the range of a few

microns to a few hundred

microns.

• Micro milling is capable of

the fabricating holes several

tens of micrometers in size

for practical applications.

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Micro Milling Capabilities

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LASER Micromachining

• Uses a power source (FS laser, Excimer laser) that emits a

beam with very high quantum energy.

• Non-contact machining ,Very high resolution, repeatability

and aspect ratios.

• Localized heating, No pre/post processing of material

• Wide range of materials: fragile, ultra-thin and highly

reflective surfaces

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Setup of LASER Micromachining

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Chemical Etching

• The removal mechanism is based on ionic reaction on the

work piece surface.

• Machining force is almost zero and the surface after

machining is free from any damage, residual stress or heat

effects.

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10µm Cavity produced by chemical Etching

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Application of Micromachining

• Inertia measurement devices.

• Micro-fluidic devices like inkjet nozzle and flow controllers.

• Optical switches used in display devices and optical

communication.

• Used in medical diagnosis such as blood pressure sensors.

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Conclusion

As regards micro machining, dimensions of the product is one of the good indicator of the levels of technology and request. However, the level of request from the industry varies widely.

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