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  • Integrating Micro Nano Technology

    James Wylde, PhD

    Applications Engineer

    Micro Nano Breakthrough ConferenceJuly 27, 2005

  • Outline

    Introduce Zyvex

    Government & University Collaborations

    Nanotechnology

    Microtechnology

    NanoKids

  • Corporate Overview

    Privately held company founded in 1997

    Located in Richardson, Texas (near Dallas)

    20 Products

    5 active government grants

    Aggressive IP strategy - 18 issued patents, 46 in process

    Headcount: 60 and increasing 15 Ph.D.s, 7 M.S.

    33 Engineers, scientists, technical management

    44,000 sq. ft. facility

    Equipment: SEMs (with nano-manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station

  • Science Technology Development

    Molecularly

    Precise

    Manufacturing

    Molecular

    Assembler

    Molecular

    Devices &

    Materials

    Molecular

    Manipulation

    Nanotube

    Dispersion

    Control &

    Automation

    Patterned

    Atomic Layer

    Epitaxy Nanotube

    Super

    Fibers

    Molecularly

    Precise

    Tips

    Mechano

    Chemistry

    Molecular

    Binding

    Sites

    Potential

    Products

    Control &

    Automation

    MEMS

    Devices

    MEMS

    Design

    Tools

    MEMS

    Assembler

    MEMS

    Parallel

    Assembler

    Nano

    Assembler

    Nano

    Fabrication

    Process

    NIST-ATP

    Nano-

    manipulator

    Nano

    Parallel

    Assembler

    1998 2000 2002 2004 2006 2008 20122010

    Top Down

    Bottom Up

  • Government Programs

    NIST-ATP, Five-year (Oct 2001-Dec2006),

    $25M research award

    Title: Assemblers for Nanotechnology

    Applications and Manufacturing: Enabling the

    Nanotechnology Era

    Zyvex and partners will develop low-cost,

    computer controlled, microscale assemblers

    that operate in parallel to assemble three-

    dimensional, microscale components.

    Team consists of Honeywell as our Joint

    Venture Partner; University of Texas at

    Dallas, and University of Virginia as sub-

    contractors.

  • Nanomanipulator Systems

    3-Dimensional control

    Illuminated keypad

    Control software runs on Windows

  • Nanomanipulator Systems

    Install in an Scanning Electron Microscope, Focused Ion Beam System, or Optical Microscope

    Collaboration with UTD to add life science capability

    Assembly by TSTC interns

  • Integrated Circuit Probing

  • Silicon Microgrippers

    Actuation ~ 14 m

    In-Plane per Arm:

    Gripper Stiffness ~ 400 N/m

    Gripping Force ~ 5.6 mN

    Mechanical Potential~3.9e-8 J

    Allowable Deflection ~ 20 m

    Out-of-Plane per Arm:

    Gripper Stiffness ~ 450 N/m

    Allowable Deflection ~ 15 m

  • Assembled Systems

    Examples:

    Miniature SEM

    column

    Variable optical

    attenuator

    Variable inductor

    Linear micromotor

    MechTiles

  • TEM Coupon Lift-Out

  • Core Competence - Functionalizing

    Two distinct functions:

    Non-damaging binding

    Customizable

    Binding applicable to CNMs (SWNTs, MWNTs, CNFs)

    Functionality may be customized for different applications:

    Dispersion in solvents

    Adhesion to composites

    Other chemical functionalityFunctionalization

    technology

  • CNT Manipulation

    Attaching a

    CNT to a

    MEMS

    Actuator

  • Nano-Wire Electrical Probing

  • Mechanical Resonance

  • Life Sciences: Collagen Fiber

    Loose collagen pulled taut by the nanomanipulator using a MEMS gripper and Tungsten probe as end-effectors. The collagen is

    grasped by the probe from the left and is super glued to the probe on the right. Both end effectors are free to move to apply the

    tension. This fiber snapped at the kink shown in the bottom left image.

  • For more information:

    t: 972.235.7881 ext. 226

    e: jwylde@zyvex.com

    www.zyvex.com