micro-machining by ekkard brinksmeier, and werner preuss philosophical transactions a volume...
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![Page 1: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/1.jpg)
Micro-machining
by Ekkard Brinksmeier, and Werner Preuss
Philosophical Transactions AVolume 370(1973):3973-3992
August 28, 2012
©2012 by The Royal Society
![Page 2: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/2.jpg)
Classification of micro-machining processes.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 3: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/3.jpg)
Schematic of the vertical axis large optics diamond turning machine (courtesy of LLNL).
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 4: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/4.jpg)
Diamond turning of an electroless nickel-plated hyperbolic mirror for a LIDAR system.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 5: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/5.jpg)
Electroless nickel-plated mould for an F-theta lens.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 6: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/6.jpg)
(a) A white-light interferometric image and (b) a schematic of a hologram diamond turned into a copper–nickel–zinc substrate with a nanometre stroke ultra-fast tool servo system [17].
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 7: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/7.jpg)
Scanning electron microscope images of retro-reflective prisms.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 8: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/8.jpg)
A scanning force microscope image of a diamond-turned electroless nickel surface.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 9: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/9.jpg)
A scanning force microscope image of a diamond-turned OFHC copper surface.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 10: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/10.jpg)
Scanning force microscope images of the cutting edge of a diamond tool after cutting (left) iron and (right) copper.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 11: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/11.jpg)
Precision grinding of a tungsten carbide mould with a fine-grained diamond wheel (courtesy of Moore Nanotechnology Systems).
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 12: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/12.jpg)
The principle of electrolytic in-process dressing (courtesy of RIKEN).
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 13: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/13.jpg)
Truing of coarse-grained diamond wheels within the abrasive layer.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 14: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/14.jpg)
Crack formation in silicon observed in plunge-cut experiments with a negative rake diamond tool with and without applying hydrostatic pressure [31].
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 15: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/15.jpg)
Magneto-rheological finishing of an aspheric calcium fluoride lens (courtesy of QED Technologies).
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 16: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/16.jpg)
Molecular dynamics simulation of orthogonal micro-cutting of monocrystalline copper.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society
![Page 17: Micro-machining by Ekkard Brinksmeier, and Werner Preuss Philosophical Transactions A Volume 370(1973):3973-3992 August 28, 2012 ©2012 by The Royal Society](https://reader036.vdocuments.mx/reader036/viewer/2022062309/56649f145503460f94c29681/html5/thumbnails/17.jpg)
Molecular dynamics simulation of diamond polishing with a pairing of two {110} faces sliding along the 〈 100 〉 direction with a speed of 30 ms−1 and a pressure of 10 GPa.
Ekkard Brinksmeier, and Werner Preuss Phil. Trans. R. Soc. A 2012;370:3973-3992
©2012 by The Royal Society