micro electro mechanical systems: scaling beyond the...
TRANSCRIPT
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Micro Electro Mechanical Systems: Scaling Beyond
the Electrical Domain
Micro Electro Mechanical Systems: Scaling Beyond
the Electrical DomainClark T.-C. NguyenClark T.-C. Nguyen
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Smaller Is BetterSmaller Is Better
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Surface MicromachiningSurface Micromachining
Silicon Substrate
SacrificialOxide Structural
PolysilconIsolationOxide
NitrideInterconnectPolysilicon
Hydrofluoric Acid Free Standing
Beam
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Surface MicromachiningSurface Micromachining
[UCLA]
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Integrated CMOS/MEMS DeviceIntegrated CMOS/MEMS DeviceVibrating Mechanical
Element
Integrated CMOS
Electronics
[Analog Devices]
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MEMS Technology RoadmapMEMS Technology RoadmapN
umbe
r of T
rans
isto
rs
100
101
102
103
104
105
106
107
108
109
More Advanced???
Number of Mechanical Components100 101 102 103 104 105 106 107 108 109
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MEMS Technology RoadmapMEMS Technology RoadmapN
umbe
r of T
rans
isto
rs
Number of Mechanical Components
100
101
102
103
104
105
106
107
108
109
100 101 102 103 104 105 106 107 108 109
Integrated FluidicSystems
Terabit/cm2
Data Storage
Weapons,Safing, Arming,
and Fusing
Majority ofEarly MEMS
Devices(mostly sensors)
ADXL-50
Digital MicromirrorDevice (DMD)
ADXL-278
MEMS Integration LevelsSince DARPA Prog. Start
Enabled ApplicationsADXL-78
CPU’s
Pentium 4
ADXRS
DisplaysPhased-ArrayAntenna
AdaptiveOptics
Optical Switches& Aligners
OMM 32x32
i-STAT 1Caliper
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Fully-Integrated AccelerometerFully-Integrated AccelerometerN
umbe
r of T
rans
isto
rs
Number of Mechanical Components
100
101
102
103
104
105
106
107
108
109
100 101 102 103 104 105 106 107 108 109
ADXL-78[Analog Devices]
Mechanical Proof Mass
Mechanical Proof Mass
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Microfluidic ChipMicrofluidic ChipN
umbe
r of T
rans
isto
rs
Number of Mechanical Components
100
101
102
103
104
105
106
107
108
109
100 101 102 103 104 105 106 107 108 109
ADXL-78
Integrated FluidicSystems
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Probe-Based Data StorageProbe-Based Data StorageN
umbe
r of T
rans
isto
rs
Number of Mechanical Components
100
101
102
103
104
105
106
107
108
109
100 101 102 103 104 105 106 107 108 109
ADXL-78
Integrated FluidicSystems
Terabit/cm2
Data Storage
[IBM]
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Optical MEMSOptical MEMSN
umbe
r of T
rans
isto
rs
Number of Mechanical Components
100
101
102
103
104
105
106
107
108
109
100 101 102 103 104 105 106 107 108 109
ADXL-78
Integrated FluidicSystems
Digital MicromirrorDevice (DMD)
Displays
Movable Micromirror
Movable Micromirror
TI Digital Micromirror Device
[UCLA]
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Scaling Guitar StringsScaling Guitar StringsVibrating “A”
String (440 Hz)Vibrating “A”
String (440 Hz)Micromechanical Free-
Free Beam (92 MHz)Micromechanical Free-
Free Beam (92 MHz)58,000X
Size Reduction
58,000X58,000XSize Size
ReductionReduction
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Diamond Micro-Disk ResonatorDiamond Micro-Disk Resonator• Frequency = 1.5 GHz, Q = 11,555• Frequency = 1.5 GHz, Q = 11,555
PolysiliconElectrode
Diamond Disk
[Univ. of Michigan]
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Change In Communication Architecture?
Change In Communication Architecture?
MEMSTechnology
MEMSTechnology
Single-ChipTransceiverSingle-ChipTransceiver
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Chip-Scale Atomic Clock (CSAC)Chip-Scale Atomic Clock (CSAC)
NIST- F1NIST- F1HP 5071AHP 5071A
CSACCSAC
VolVol: 1 cm: 1 cm33
Power: 30 Power: 30 mWmWAcc: Acc: 11××1010––1111
VolVol: ~3.7 m: ~3.7 m33
Power: ~500 WPower: ~500 WAcc: Acc: 3.83.8××1010––1515
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Size Versus PowerSize Versus Power133Cs vapor at 10–7 torr
Large Vapor CellLarge Vapor Cell
50,000X Size 50,000X Size ReductionReduction
VolVol: ~500 cm: ~500 cm33
Power: ~30 WPower: ~30 W
VolVol: ~0.01 cm: ~0.01 cm33
Power: ~10 Power: ~10 mWmW
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CSAC-Enabled EnhancementsCSAC-Enabled Enhancements
GPS Free
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Micro Power GenerationMicro Power Generation
00 22 44 66 88 1010 1212 1414
Specific Energy Density (kW-hr/kg)Specific Energy Density (kW-hr/kg)
PropanePropane
MethaneMethane
GasolineGasoline
DieselDiesel
EthanolEthanol
MethanolMethanol
ConventionalLi Battery
ConventionalLi Battery
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Formic AcidFuel Cell
Formic AcidFuel Cell
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Solid Oxide Micro Fuel CellSolid Oxide Micro Fuel Cell
~ 8 cm~ 1 cm
0.7 cm
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Miniature Wankel EngineMiniature Wankel Engine
4 watts of power output4 watts of power output
[UC Berkeley][UC Berkeley]
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Micro Gas AnalyzersMicro Gas Analyzers
Separation Analyzer
Species A
B
A
B15 min.15 min.
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Micro Gas AnalyzersMicro Gas Analyzers
separation time < 4 secseparation time < 4 sec
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Micromechanical CircuitMicromechanical Circuit
A few µm A few µm
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Nanomechanical ResonatorNanomechanical ResonatorFrequency: 1.029 GHzFrequency: 1.029 GHz
75 nm
1.1µm
120 nm
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