micro- and nano-technology - uni-jena.deand+nano... · micro- and nano-technology..... for optics...
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U.D. ZeitnerFraunhofer Institut für Angewandte Optik und Feinmechanik
Jena
Micro- and Nano-Technology...... for Optics
1. Introduction
Micro- and Nano-Technology...... for Optics
1. Introduction
NGC 6744NGC 6744
GAIA (ESA)launched in Dec. 2013
RVS
230mm
GAIA’s effective medium grating
Micro-Structured Optics in Nature
2µm
Nano-structures with anti-reflection properties on moth‘s-eyes
Lens-arrays as insects eyes
100µm
Colors of butterflies by diffraction gratings
4µm
Different Approaches
Nature Technology
!?!?
“Bottom-Up” “Top-Down”
Lithography
huge variety of high resolution structures
The field of micro-structured optics
1mm
1µm
10nm
10µm
100µm
100nm
characteristic feature size
micro-lenses, micro-prisms
lens-arrays,refractive beam-shaper
diffractive beam-shaper,Fresnel-lenses,diffraction gratings
effective media,sub-λ-gratings,photonic crystals,meta-materials
hybride elements
Size scale of micro-optical effects
Size-Scale of Optical Structures
1Å
1nm
1µm
1mm
1m
law of refraction and reflection
light diffraction
effective medium
spontaneous and stimulated emission
astronomic mirrors
lenses
micro-lenses
antireflection pattern, polarizers, phase retarder photonic crystals
miniaturized lenses
paraxial beam splitters
non paraxial beam splitter
spectroscopic gratings
mic
ro o
pti
cs
λλλλλλλλ
(atomic size) light sources
optical elementsoptical elementsoptical effectsoptical effects
Effects of Size-Scaling
1mm 100µm 10µm 1µm 100nm
refraction diffraction
influence of physical effects on optical functionsis changing if characteristic feature sizes are scaled
focus:f=5mm
125µm
Strukturgröße
artificial dichroitic materials
physical effect:effective material-properties
disturbing useful !
diffractive beam splitter
2µm
wire-grid-polarizer
Milestones of optical engineering
Maxwell
1831 - 1879
electromagnetic wave theory
Fresnel
1788 - 1827
wave theory of the light
Hertz
1857 - 1894
exp. confirm. of Maxwell
Fourier
1768 - 1830
Fourier expansion
Abbe
1840 - 1905
theory of opt. image
Basics in physics and mathematicsAnalytical and numerical
evaluation of physical optics
Personal Computer
Demands on micro- and
nanomachining
18
00
19
00
20
00
Fundamental understanding
of optics
Zuse
1910 - 1995
1941 1st calculator
Fabrication Technologies for Micro-Optics
common micro-optics fabrication methods are
• lithography (photo-, e-beam-, laser-)
• ultra precision micro-machining
• melting / reflow technology
• more elaborated technologies
different size and functionalitydifferent fabrication methods
for micro-optical components compared to classical (macro) optics
High resolution lithography
ASML-Stepper
Fabrication of microelectronic chips on Si-wafers
Lithography Roadmap
Lithography for Optical Applications
Lithography tools are developed for micro-electronics fabrication!
Demands of optics on lithography:
• arbitrary lateral contours (often radially symmetric)• several 100mm size of single elements with sub-micron features• thick substrates for elements with low wave-front error• non-planar substrates possible• …
steady development along semiconductor road-mapJJJJ
vanishing versatility for other applications LLLL
Typical Optical Surfaces and Contours
Contours Profiles
lens prism beam shaper
binary grating blazed grating
subwavelength gratings
complex surface profiles
>> λλλλ
< λλλλ
> λλλλ
>> λλλλ> λλλλ< λλλλ
characteristic detail
Courtesy of E.-B. Kley