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  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    U.D. U.D. ZeitnerZeitner Fraunhofer Institut fFraunhofer Institut füür Angewandte Optik und Feinmechanikr Angewandte Optik und Feinmechanik

    JenaJena

    Micro- and Nano-Technology... ... for Optics

    3.1 Layer Deposition

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    2. Resist exposure with e-beam lithography

    Typical Micro-Structuring Process

    3. Resist development

    4. Chromium etching (RIE)

    5. Deep etching into substrate (ICP)

    resist

    Cr-layer

    SiO2-Substrate

    radiation1. Substrate coating

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Thin Film Deposition Techniques

    layer deposition

    from vapor / gaseous phase from liquid phase

    CVD PVD

    thermal activation

    plasma activation

    sputtering thermal evaporation

    • dip coating • spray coating • spin coating • galvanic layer

    deposition

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    CVD – Thermal Activation

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    CVD – Plasma Enhanced (PECVD)

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    CVD – Plasma Enhanced (PECVD)

    anode

    cathode

    HF-electrode

    ground

    reactor chamber

    gas inlet

    gas outlet

    substrate

    plasma

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    PVD Techniques

    Source: Donald M. Mattox, SVC Educational Guides to Vacuum Coating Processing

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Sputtering

    anode

    cathode

    HF-electrode

    ground

    reactor chamber

    gas inlet

    gas outlet

    substrate

    plasma

    target (layer material)

    target atom

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Thermal Evaporation

    typical evaporation sources

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Electron Beam Evaporation

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Particle movement in vacuum

    pressure [Pa]

    m ea

    n fr

    ee p

    at h

    le ng

    th [m

    ] atmospheric pressure: 101 kPa ≈ 105 Pa

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Liquid Phase Layer Deposition: Dip Coating

  • INSTITUTE of APPLIED PHYSICS Friedrich-Schiller University Jena

    Liquid Phase Layer Deposition: Spin Coating

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