mems exchange benard
TRANSCRIPT
Fabrication of High Aspect RatioMEMS Devices for DoD Applications
using Hot Embossing Technology
William BenardMEMS Exchange
www.mems-exchange.org
Tank-automotive & Armaments COMmand
Safing and Arming Device
Safing and Arming Device
www.mems-exchange.org
• LIGA high-aspect-ratio MEMS fabrication
• 10-mm x 10-mm substrate dies
• About 36 dies fit on a 4” wafer
LIGA (nickel) micro-parts are micro-assembled intoLIGA-formed“frames”
‘Frame’ die
Safing and Arming Device
Flight Test Data
• 300-m range to target
• 490 RPS spin
• Soft Catch (fiberboard)
• Rounds recovered
• All S&As armed
Recovered Assembly
Armed S&A!
Mann Barreland Target
Currently being Transitioned to Production
Safing and Arming Device
www.mems-exchange.org
Problems:•Cost - parts to be made in high volume with aggressive price goals.•Assembly – tolerances are tight and parts are awkward to handle.
Solution:•Alternative fabrication, hot embossing offers several avenues for reducingfabrication and possibly assembly costs.
Mold InsertPolymer
Heat and applyforce
Cool and de-mold
Jenoptik Hex-03
Embossing tool selected for performanceand flexibility:
• Design
• Software
• Capabilities:• Large substrates (up to 150mmdiameter)• High Force (200kN)• High Temperature (500 degreesCelsius)
www.mems-exchange.org
Results
www.mems-exchange.org
SEMs of OICW S&A embossed parts
Material: PolycarbonateDepth: 280umMinimum feature resolved: in the nanometer range (surface textures transfer)Aspect ratio: 14 to 1 (20um x 20um freestanding pillars resolved 280um tall).
LIGA Mold Inserts
Currently using mold inserts fabricated using LIGA technology:
Benefits:
Excellent feature resolution
Vertical smooth sidewalls
Tapered profiles possible
Disadvantages:
Cost
Lead Time
www.mems-exchange.org
Alternative Mold Inserts
Machined mold inserts:
•Fine geometries possible, butnot closely spaced due to tooldiameters
•Good selection of substratematerials.
•Excellent cost and turnaround
www.mems-exchange.org
Accessibility
www.mems-exchange.org703-262-5368
•Turn-key hot embossing services
•Prototyping through production