mems electrostatic acoustic pixel - comsol multiphysics® carreno_presentation.pdfintroduction...
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MEMS Electrostatic Acoustic Pixel BY ARPYS AREVALO
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• Introduction
• Digital Sound Reconstruction
• Design and Simulation
• Future Work & Conclusions
Outline
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• The world has evolved to a point where digital media and electronics play an important role in everyday life.
• Improvements on components such as speakers, microphones, sensors and cameras among others are in high demand.
• These components require improved characteristics (i.e. smaller dimensions, low power consumption and better quality) in order to keep up with the technological evolution.
Introduction
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Same transducer design
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
References 1-5
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Digital Sound Reconstruction
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1cm
Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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Design & Simulation
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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Design & Simulation
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
FIRST 6 MODES – EIGENFREQUENCIES [Hz]
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Design & Simulation
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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Design & Simulation
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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Design & Simulation
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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Conclusions
• COMSOL helped us to have a better
understanding of the proposed system.
• We are currently characterizing the
fabricated chips.
• Future steps is the simulation of the full
chip with the array of membranes
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Digital Sound Reconstruction Future Work & Conclusions Introduction Design & Simulation
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[1] H. Olson, Music, physics and engineering, vol. 1769. Dover Publications, second edition ed., 1967.
[2] By Martin Möller Talk (Classical Guitar two views.jpg) [CC-BY-SA-2.0-de (http://creativecommons.org/licenses/by-sa/2.0/de/deed.en)], via Wikimedia Commons.
[3] By Helihark (Own work) [CC-BY-SA-3.0 (http://creativecommons.org/licenses/by-sa/3.0)], via Wikimedia Commons
[4] V. Dickason, The Loudspeaker Design Cookbook. Audio Amateur Press, 2006.
[5] F. A. Everest and K. Pohlmann, Master Handbook of Acoustics. McGraw- Hill/TAB Electronics, May 2009. [1] F. A. Everest and K. Pohlmann, Master Handbook of Acoustics. McGraw- Hill/TAB
Electronics, May 2009.
[6] B. Chittka L, “Anatomy of the human ear,” February 2009.
[7] E. Byas, Development of a Multi-User Polyimide-MEMS Fabrication Process and its Application to MicroHotplatesThesis. PhD thesis, King Abdullah University of Science and Technology, EMPIRe
Laboratory, May 2013.
[8] L. Marnat, A. Arevalo Carreno, D. Conchouso, M. Galicia Martinez, I. Foulds, and A. Shamim, “New Movable Plate for Ecient Millimeter Wave Vertical on- Chip Antenna,” IEEE Transactions on
Antennas and Propagation, 2013.
[9] A. Alfadhel, A. Carreno, I. G. Foulds, and J. Kosel, “Three-axis Magnetic Field Induction Sensor Realized on Buckled Cantilever Plate,” EEE Transactions on Magnetics 2013, 2013.
[10] A. A. Carreno, E. Byas, and I. G. Foulds, “uheater on a buckled cantilever plate for gas sensor applications,” in COMSOL Milan 2012, Dec. 2012.
[11] A. Ar ́evalo Carren ̃o, D. Conchouso, and I. G. Foulds, “Optimized cantilever- to-anchor configurations of buckled cantilever plate structures for transducer applications,” in COMSOL Milan 2012, Dec.
2012.
[12] L. Lutterotti, Ferroelectrics and piezoelectrics for MEMS. University of Trento.
[13] C. Boyer and U. Merzbach, A history of Mathematics. Wiley, 1991.
[14] R. B. Lindsay, Acoustics, vol. 2. Dowden - Hutchingon Books Publishers, 1973.
[15] B. R. John William Strutt, The Theory of Sound, vol. 1. Dover Publications, dover edition ed., 1945.
[16] B. M. Diamond, “Digital sound reconstruction using arrays of cmos-mems mi- crospeakers,” Master’s thesis, Carnegie Mellon, 2002.
[17] G. Strang, Wavelets and Filter Banks. Wellesley - Cambridge Press, 1994.
[18] H. Olson, Music, physics and engineering, vol. 1769. Dover Publications, second
edition ed., 1967.
[19] D. Self, B. Duncan, I. Sinclair, R. Brice, J. Hood, A. Singmin, D. Davis, E. Pa- tronis, and J. Watkinson, Audio Engineering: Know It All. Newnes Know It All, Elsevier Science, 2009.
REFERENCES
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Thank you! ANY QUESTIONS?
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