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AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1 EQUIPMENT DATASHEET Tool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson – Aspen II

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Page 1: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1

EQUIPMENT DATASHEET

Tool ID AC02 OEM/Model Mattson Aspen II

Serial Number 1010 Process ETCH - ASHING

Vintage JANUARY, 2001 Wafer Size 200 mm

Mattson – Aspen II

Page 2: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 2

EQUIPMENT DATASHEET

Page 3: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 3

EQUIPMENT DATASHEET

Page 4: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 4

EQUIPMENT DATASHEET

Page 5: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 5

EQUIPMENT DATASHEET

Page 6: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 6

EQUIPMENT DATASHEET

Page 7: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 7

EQUIPMENT DATASHEET

Page 8: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 8

EQUIPMENT DATASHEET

Page 9: Mattson Aspen II - AG · PDF fileTool ID AC02 OEM/Model Mattson Aspen II Serial Number 1010 Process ETCH - ASHING Vintage JANUARY, 2001 Wafer Size 200 mm Mattson

AG Semiconductor Services • [email protected] • www.agsemiconductor.com 9

EQUIPMENT DATASHEET


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