Matthew Goeckner Abbreviated Administrative Curriculum Vita

June 2017

Address: Matthew Goeckner Associate Dean of Natural Sciences and Mathematics, Professor of Physics Office Ph: 972 883-4292/3 Cell: 214-454-4609 Email: goeckner@utdallas.edu; mgoeckner@gmail.com URL: http://www.utdallas.edu/~goeckner

Educational History: 90 Ph.D. in Physics, University of Iowa, Iowa City, IA

“LIF Measurements and Modeling of Magnetron and Filament Discharges.” Supervised by Prof. John A. Goree

84 M.S. in Physics, University of California at Los Angeles 83 B.S. in Mathematics, Southern Illinois University at Carbondale

Membership Mathematics Honor Society (Pi Mu Epsilon) 82 B.S. in Physics, Southern Illinois University at Carbondale

Membership Physics Honor Society (Sigma Pi Sigma) William C. Ballowe Sr. Award (Top senior in physics) President, Society of Physics Students SIU-C 1979-81

Major Administrative responsibilities and related positions: Building continuous improvement processes into the core of the School of Natural Sciences and Mathematics.

15- Associate Dean for Operations and Special Projects, School of Natural Sciences and Mathematics

• Beginning strategic review (via SWOT analysis) of graduate student education and research

• Beginning strategic review (via SWOT analysis) of school-wide processes. • Beginning rollout of recommended changes from 2015-16 AY strategic review

(via SWOT analysis) of undergraduate student recruitment and retention. • Worked with Dean on SACS review of school. • Working with other Associate Deans to improve back office processes in UG

student advising. • Overseeing the revitalization of our freshman orientation course. • Programming of new Math and Physics Building – Executive committee member. • Assisting in setting up new capital campaign

Rebuilt a struggling Mathematical Sciences department into a now rapidly growing program. 11-15 Head, Mathematical Sciences, School of Natural Sciences and Mathematics,

University of Texas at Dallas. • Oversaw internal strategic review of department – Fall 2011 • Oversaw the writing of a strategic plan for department – Spring 2012 • Doubled number of t/tt faculty in department (15 in Fall 2011- 32 in Fall 2014)

• Approximately doubled the number of TAs in the department (33 in Fall of 2011 – 55 in Spring 2015.)

• Approximately quadrupled the number of RAs in department (2 in Spring 2012 - 8 in Summer 2015)

• Approximately quadrupled research funding in department (Fall 2011-Spring 2015)

• Approximately doubled number of student credit hours taught by department. [Incoming freshman class increased from ~1500 in Fall 2011 to ~2600 in Fall 2014.]

• Improved passing rates in departmental courses without lowering standards. • Worked to create strong core research groups (multi-faculty member) in the

department with links to other programs. • Developed external advisory council. • Raised funding ($75k/3 years) to recruit graduate students from regional schools

to the department. • Working with other departments to improve academic links to department

(teaching and research). • Supported a series of STAT and MATH research conferences at UTD. • Supported graduate student attendance at national and international conferences. • Worked to strengthen academic committees. • Oversaw external review of department for spring 2015.

Built a very successful Mechanical Engineering department from the ground up. I started the department in 2008 and helped it become accredited in 2012. It now has >900 students and continues to thrive.

09-11 Associate Head, Department of Mechanical Engineering, Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas.

• Oversaw UG and Grad curriculum development and optimization. • Finished development and building full suite of teaching labs. • Wrote initial draft of ~1/2 of successful ABET self-study (fall 2011). • Member of 5xME workshop to improve education of Mechanical Engineers.

(http://umich.edu/~ulsoy/5XME.htm) • UTD representative on THECB committee on “2+2” Mechanical Engineering.

08-09 Interim Head, Department of Mechanical Engineering, Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas.

• Started new department (first official faculty member in department). • Developed basic curriculum (with Cy Cantrell and Andrew Blanchard). • Developed freshman course specifically targeted at student success. It worked so

well, a version of this course is now used in all schools on campus. • Started external advisory council. • Began development and building of full suite of teaching labs. • Began hiring first permanent faculty.

Major Employment History: Principal positions since the Ph.D. degree: 16- Professor in Physics, School of Natural Sciences and Mathematics, University of Texas at

Dallas.

11-16 Professor in Mathematical Sciences, School of Natural Science and Mathematics, University of Texas at Dallas.

08-16 Professor in Mechanical Engineering, Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas. (Department started August 2008)

08-16 Professor in Electrical Engineering, Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas.

99-08 Associate Professor in Electrical Engineering, Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas. (Tenure September 02)

98-99 Research Engineer, Varian Central (Ginzton) Research Center, Varian Associates (Later Varian Semiconductor Equipment Associates)

94-97 Research Physicist I, Princeton Plasma Physics Lab, Princeton University. 91-94 Research Associate, Engineering Research Center for Plasma Aided Manufacturing,

University of Wisconsin at Madison 91 Research Associate, Physics Department, University of Iowa 86-90 Research Assistant, Physics Department, University of Iowa

Publications: Citations: 1020; documents: 77, h-index: 17 (Per Science Citation - July 2017) Citations: 1735; documents: 186 h-index: 23 (Per Google Scholar – July 2017) 41 Invited talks 7 US patents 94 peer reviewed publications 159 non-refereed publications

Other Major items: Advisor for: 13 PhD students, (+6 current); 14 MS students; 6 BS Honors thesis Member of the American Physical Society Fellow of the American Vacuum Society (2016) 2013 University of Texas Regents’ Outstanding Teaching Award. (Also invited to speak to the

Regents - http://tinyurl.com/Goeckner-Regents-talk. Fifth slide from the end.) 2012 UTD President’s Teaching Excellence Award. 2007 Erik Jonnson School of Engineering and Computer Science Outstanding Service Award 1982 William C. Ballowe Sr. Award, SIUC (Top senior in physics) 1982 Membership Physics Honor Society (Sigma Pi Sigma) 1982 Membership Mathematics Honor Society (Pi Mu Epsilon)

Matthew Goeckner School of Natural Sciences and Mathematics School of Engineering and Computer Science

University of Texas at Dallas May 2017

Address: Matthew Goeckner Associate Dean of Natural Sciences and Mathematics, Professor of Physics Affiliated Professor of Electrical Engineering, Mechanical Engineering, Material

Sciences, Science Education. 800 W Campbell Rd University of Texas at Dallas Richardson, TX 75080 Office Ph: 972 883-4292/3 Email: goeckner@utdallas.edu URL: http://www.utdallas.edu/~goeckner

Educational History: 91-94 Research Associate, Engineering Research Center for Plasma Aided Manufacturing,

University of Wisconsin at Madison Supervised by Dr. Robert Breun and Prof. Noah Hershkowitz

91 Research Associate, Physics Department, University of Iowa Supervised by Prof. John A. Goree

90 Ph.D. in Physics, University of Iowa, Iowa City, IA “LIF Measurements and Modeling of Magnetron and Filament Discharges.” Supervised by Prof. John A. Goree

84 M.S. in Physics, University of California at Los Angeles 83 B.S. in Mathematics, Southern Illinois University at Carbondale

Membership Mathematics Honor Society (Pi Mu Epsilon) 82 B.S. in Physics, Southern Illinois University at Carbondale

Membership Physics Honor Society (Sigma Pi Sigma) William C. Ballowe Sr. Award (Top senior in physics) President, Society of Physics Students SIU-C 1979-81

Administrative positions: 15- Associate Dean for Operations and Special Projects, School of Natural Sciences and

Mathematics 11-15 Head, Mathematical Sciences, School of Natural Sciences and Mathematics, University

of Texas at Dallas. 09-11 Associate Head, Department of Mechanical Engineering, Erik Jonsson School of

Engineering and Computer Science, University of Texas at Dallas. 08-09 Interim Head, Department of Mechanical Engineering, Erik Jonsson School of

Engineering and Computer Science, University of Texas at Dallas.

Employment History: Principal positions since the B.S. degree: 16- Professor in Physics, School of Natural Sciences and Mathematics, University of Texas at

Dallas. (I moved my tenure line 100% into Physics.) 16- Affiliated Professor in Electrical Engineering, Erik Jonsson School of Engineering and

Computer Science, University of Texas at Dallas. 16- Affiliated Professor in Mechanical Engineering, Erik Jonsson School of Engineering and

Computer Science, University of Texas at Dallas. 11-16 Professor in Mathematical Sciences, School of Natural Science and Mathematics,

University of Texas at Dallas. 10-16 Affiliated Professor in Physics, School of Natural Sciences and Mathematics, University

of Texas at Dallas. 08-16 Professor in Mechanical Engineering, Erik Jonsson School of Engineering and Computer

Science, University of Texas at Dallas. (Department started August 2008) 08-16 Professor in Electrical Engineering, Erik Jonsson School of Engineering and Computer

Science, University of Texas at Dallas. 08- Affiliated Professor in Material Science & Engineering, Erik Jonsson School of

Engineering and Computer Science, University of Texas at Dallas. 06- Affiliated Professor in Science and Mathematics Education, School of Natural Science

and Mathematics, University of Texas at Dallas. 99-08 Associate Professor in Electrical Engineering, Erik Jonsson School of Engineering and

Computer Science, University of Texas at Dallas. (Tenure September 02) 12/06 Visiting Professor, Sungkyunkwan University, Suwon, South Korea 98-99 Research Engineer, Varian Central (Ginzton) Research Center, Varian Associates (Later

Varian Semiconductor Equipment Associates) 94-97 Research Physicist I, Princeton Plasma Physics Lab, Princeton University. 91-94 Research Associate, Engineering Research Center for Plasma Aided Manufacturing,

University of Wisconsin at Madison 91 Research Associate, Physics Department, University of Iowa 86-90 Research Assistant, Physics Department, University of Iowa 85-86 Research Assistant, Physics Department, UCLA 83-85 Teaching Assistant, Physics Department, UCLA 82-83 Teaching Assistant, Physics Department, Southern Illinois University 82 Teaching Assistant, Math Department, Southern Illinois University

Employment History: concurrent temporary or visiting appointments, consultantships: 06-07 Consulting, Subsurface Consultants (Maute), Richardson, TX 97 Consulting, Princeton Textile Research Institute, Princeton, NJ 97 Consulting, Veeco Inc., Woodbury, NY

Professional recognitions, honors, memberships etc., (study, teaching, research service): 16 Fellow of the American Vacuum Society 16 Co-chair of the AVS Texas Chapter Conference, August 3rd - 4th, 2016, University of

Texas at Dallas 15 Chair of the proto committee to formally restart the AVS Texas Chapter 13 University of Texas Regents’ Outstanding Teaching Award.

(See - http://tinyurl.com/Goeckner-ROTA)

(Also invited to speak to the Regents - http://tinyurl.com/Goeckner-Regents-talk. Fifth slide from the end.)

12 UTD President’s Teaching Excellence Award. (One professor is awarded each year - http://tinyurl.com/Presidents-Award-Goeckner)

10-13 Chair-elect, Chair, Past-Chair, Plasma Science and Technology Division, American Vacuum Society • Developed funding to support graduate student travel to conference. Initial year from

NSF and industry. Industry continued supporting all of this after I stepped down. 08-16 Member American Society of Mechanical Engineers 08- Program Evaluator – ABET (Via ASEE) 12/07 Chair, Trans-pacific workshop of Flexible electronics, Dallas, TX 2007 Erik Jonnson School of Engineering and Computer Science Outstanding Service Award 12/06 Visiting Professor, Sungkyunkwan University, Suwon, South Korea 06-08 Member of the American Chemical Society 02-16 Member of the American Society for Engineering Education (Break from 04-06) 06-08 Local organizing committee, GEC Dallas TX 08 2006 Local Organizing Committee - ICMI Conference Austin, TX 05-06 Local organizing committee, ICMI Austin TX 06 05-06 Program committee Plasma Science Div. AVS Conf. 06 04-16 Senior Member of the IEEE 02-03 Local organizing committee, International Plasma Based Ion Implantation Conference 03 2000 The Greater-Southwest Implant Users Group Executive Committee. 2000 Host of The Greater-Southwest Implant Users Group meeting Aug. 15, 2000 at UTD. 98-01 Executive Committee member Plasma Science and Technology Division, AVS 88 Student Prize - AVS, Plasma Science and Technology Division 88-16 Member of the IEEE 86-98,16- Member of the American Physical Society 86- Member of the American Vacuum Society (AVS) 82 Membership Physics Honor Society (Sigma Pi Sigma) 82 William C. Ballowe Sr. Award (Top senior in physics) 82 Membership Mathematics Honor Society (Pi Mu Epsilon)

University Committees (Non-dissertation / thesis / qualifying exam) State wide 09-11 THECB committee on “2+2” Mechanical Engineering University wide 08-10 Committee on Effective Teaching (co-Chair) 08-10 Undergraduate curriculum alignment committee (Chair) 08-11 Gateways to Excellence in Math and Science (GEMS) committee 07-08 Quality Enhancement Program (=> GEMS) committee 02-04 Safety Committee (Chair) 02-04 Faculty Senate Erik Jonsson School wide

08-11 Academic Affairs Committee - Dean’s representative 08-09 Strategic Plan – Undergraduate Education subcommittee (Chair) 08-11 Joint program Undergraduate curriculum committee (Organizer) 02-04 Clean room committee Mathematical Sciences 11-12 Developed a Strategic plan for the Department 12- Developed and implemented a Tactical plan for the Department Mechanical Engineering 08-11 Undergraduate curriculum/steering committee (Nominal chair) 08-11 Mechanical Engineering Hiring Committee 2011 Helped write multiple sections of successful ABET report Electrical Engineering 08-10 Faculty Search Committee (Chair Engineering Education subcommittee) 06-09 Electrical Engineering Undergraduate curriculum committee (Chair) 03-04 Graduate Admission Committee (Chair) 01-06 Honors Committee 01-04 Faculty Search Committee (03-04 Chair Microelectronics subcommittee) 00-02 Clean room committee 00-02 Graduate Admissions Committee 99-00 Undergraduate Education Committee

UT System Louis Stokes Alliance for Minority Participation and UTD/Mexico exchange Cuen Alberto Electrical Eng. Senior 2006 UTEP Quintanilla Ismael Electrical Eng. Junior 2006 UT Pan Am Austin Susan Electrical Eng. Senior 2007 UT San Antonio Garica Benito Electrical Eng. Senior 2007 UT San Antonio Vázquez Uriel 2007 Mexico Carrol Sylvia Electrical Eng. Freshmen 2008 UTEP Shearman Hannah Mech Eng. Junior 2011 UTEP

Anson L. Clark Program, PISD/Hi-TECCC Program, Nano-Explorer Students Weng Jack 2007 Self Daniel 2008 Kollaja Alex 2009 Yun Stuart 2009 Yun Stuart 2010 Li Maxwell 2010 Taylor Shanoya 2011

Material Science REU and UTD CCCC, DCCCC STEP programs Hernandez Keith Collin College 2012 Calcagno Bryan U Houston 2012

Shams Umar Richland CC 2015 Martinez Angel Richland CC 2015 Schneider Hope Arkansas Tech 2015 Torres Marlyn UTEP 2016 Shield Ariell Northwestern State 2016

Visiting Graduate Students from Japan (via Nagoya University) Li Jia Spring 2010 Takeuchi Takuya Spring 2010 Shimoeda Hironao Spring 2011 Suzuki Toshiya Spring 2011 Igawa Takuto Spring 2012 Kondo Yusuke Spring 2012 Noda Tomonori Fall 2012 Liu Zecheng Spring 2013

Academic Advisor to Student Groups Automotive Club at UTD (Past) Battle Robot Club (Current) American Society of Mechanical Engineering student chapter at UTD (Past)

Dissertation / Thesis Committees and other advisement Ph.D. Students

1. Marwan H. Khater (L. Overzet chair, Dec 00). 2. S. Pas (W. Frensley chair, Dec 00). 3. Siva Kanakasabapathy (L. Overzet chair, May 01). 4. Konstantin Lioko (W. Frensley Chair, Dec. 02) 5. Bourree, Loig (R. Glosser Chair, May. 03) 6. Bao Zhou (MJ Goeckner Chair/advisor, Dec 04)

Title: Study of gas phase, surface phase chemistries and plasma – surface interactions in fluorocarbon plasmas in an inductively coupled modified gaseous electronics conference (mGEC) reactor

7. David Park (JB Lee Chair, 2004) 8. Ming-Yih Kao, (Bill Frensley Chair, 2004) 9. E.A. Joseph (MJ Goeckner Chair/advisor, May 05)

Title: The characterization of plasma – surface interactions using the inductively coupled gaseous electronics conference reference cell platform

10. KZ Inowa (Anvar Zakidov Chair, August 05) 11. Masa Asahara (W Frensley Chair April 06) 12. Anand Chandrashekar (LJ Overzet Chair, June 06)

13. Brandon Pillas (JB Lee Chair, June 06) 14. Rayan Alassaad (Dale Bynre Chair, June 06) 15. Yonghua Liu (MJ Goeckner Chair/advisor, LJ Overzet co-Chair, May 06)

Title: Metalorganic chemical vapor deposition of aluminum from methylpyrrolidine alane complex

16. Sanket Sant (MJ Goeckner Chair/advisor, August 06) Title: Understanding the complex chemistry of fluorocarbon plasmas in a long residence time ICP reactor

17. Neal Skinner (Dale Bynre Chair, Nov 06) 18. Ashish Jindal (MJ Goeckner Chair/advisor, May 07)

Title: Investigations into the polymerization mechanism of a pulsed 1,3-Butadiene discharge in an ICP GEP Platform

19. Drew Hartman (G Earle Chair, Mar 07) 20. Karthik Colinjivadi (JB Lee Chair, Nov 07) 21. Seetharaman Ramachandran (LJ Overzet Chair April 08) 22. Caleb Nelson (MJ Goeckner Chair/advisor, LJ Overzet co-Chair, August 10)

Title: Gain And Loss Mechanisms In Fluorocarbon Plasmas 23. Gabriel Padron-Wells (MJ Goeckner Chair/advisor, LJ Overzet co-Chair, August 11)

Electron Beam Exciter For Optical Emission Spectroscopy And Optical Excitation Cross Section Analysis In Processing Systems

24. Iqbal Saraf (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, Dec 11) Fundamentals of deep silicon etch

25. Robert Haaser (G Earle Chair, Jan 12) 26. Kyunghwan Lee (G Lee Chair, Jan 12) 27. I. Cristina Estrada-Raygoza (MJ Goeckner Chair/advisor, LJ Overzet co-Chair, March

12) Polymerization Processes in a Chloro-P-Xylene Plasma

28. Daisuke Ogawa (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, March 12) The Investigations Of Direct Liquid Injection In Low-Pressure Plasmas

29. Robert Bates (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, May 14) Correction Of Aspect Ratio Dependency In Deep Silicon Etch Using SF6/C4F8/Ar Gas Mixture

30. Seyedeh Negin Mortazavi (F Hassanipour, Chair, March 15) Bio-Transport Phenomena In Human Lactating Breast

31. David Urrabazo (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, May 15) Ion Induced Electron Emission From Semiconductors: The Effects Of Conduction Band Electrons And Surface Density Of States

32. John Poulose (MJ Goeckner Chair, LJ Overzet co-Chair/co-advisor, July 16) Temporally, Spatially and Spectrally Resolved Studies of Pulsed Capacitively Coupled Plasmas

33. Nandini Sundaram (G Lee Chair, Oct 16) Study and Optimization of PECVD Films Containing Fluorine and Carbon Layered with Diamond Like Carbon films as Ultra Low Dielectric Constant Interlayer Dielectrics

34. Yanping Chen (John Zweck Chair, MJ Goeckner co-Chair/co-advisor, Dec 16) Deterministic Computation Of The Low Probability Tail Of The Velocity Distribution Due To Particle Collisions In Spatially Homogeneous Plasmas Current students

1. Keith Hernandez (MJ Goeckner Chair, LJ Overzet co-Chair/co-advisor, Anticipated May 19)

2. Alex Press (MJ Goeckner Chair, LJ Overzet co-Chair/co-advisor, Anticipated May 19) 3. Shivam Patel (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, Anticipated May 19) 4. Alex Gemshiem (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, Anticipated May

19) 5. Zhengyang Wang (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, Anticipated

May 19) 6. Sonam Lama (John Zweck Chair, MJ Goeckner co-Chair/co-advisor, Anticipated May

19)

M.S. Students 1. Jeremy Marquis (MJ Goeckner Chair/advisor, May 02)

Title: Inductively coupled plasma source geometry and plasma uniformity 2. Yu Lei (MJ Goeckner Chair/advisor, August 02)

Title: Study of pulsed plasma doping by Langmuir probe diagnostics 3. Keith Jarreu (MJ Goeckner Chair/advisor, May 02)

Title: Plasma process-induced defects of CZ-silicon during oxide over-etch 4. Sunil Srinivasan (LJ Overzet Chair, Goeckner co-chair/co-advisor August 02)

Title: Inductively coupled plasma sources with azimuthal symmetry despite a current node

5. Lakshmijyothi Pratti (LJ Overzet Chair, Goeckner co-chair/co-advisor Dec. 02) Title: Experimental Investigation on scalability of inductively coupled plasma sources and an improved model for characterization of ICP sources

6. Sanket Sant (MJ Goeckner Chair/advisor, May 03) Title: Study of plasma-surface interactions

7. Anand Chandrashekar (L.J. Overzet Chair, Fall 03) 8. Ashish Jindal (MJ Goeckner Chair/advisor May 04)

Title: Analysis of Downstream etch chemistry in ion-ion and electron-ion chlorine discharges

9. Neal Skinner (Dale Bynre Chair Oct 04) 10. Caleb Nelson (MJ Goeckner Chair/advisor December 06)

Title: Surface Kinetics of Common Semiconductor Materials in FC Plasmas 11. Seetharaman Ramachandran (LJ Overzet Chair October 06) 12. Ron Christan (JB Lee Chair, November 06) 13. Karthik Colinjivadi (JB Lee Chair, October 06) 14. Chuck Sanna (W Frensley Chair, Jan 07) 15. Daisuke Ogawa (LJ Overzet/MJ Goeckner co-Chairs/co-advisors, Febraury 08)

Title: The Use of Direct Liquid Injection in Plasma Enhanced Chemical Vapor Deposition

16. Iqbal Saraf (LJ Overzet/MJ Goeckner co-Chairs/co-advisors, November 08) Title: Modeling Direct Liquid Injection into Low Pressure Environments and Plasmas

17. Raja Mir (W Frensley Chair, March 09) 18. Monali Mandra (LJ Overzet Chair, Goeckner co-chair/co-advisor July 09)

Title: Fabrication and RF impedance measurements of High Pressure Microplasmas 19. Gabriel Padron-Wells (MJ Goeckner Chair/advisor, Dec 09)

Title: Organic Plasma Systems: Versatile Approach for Design, Development and/or Improvement of Bio-interfaces

20. Richard Pierce (A Blanchard Chair, Apr 11) 21. Chen Cheng (H Lu Chair, July 11) 22. David Urrabazo (MJ Goeckner Chair/advisor, LJ Overzet co-Chair, March 12)

Title: Development of Plasma Fluid Models in COMSOL 23. Caroline Liu (LJ Overzet Chair, April 14) 24. Keith Hernandez (LJ Overzet Chair, MJ Goeckner co-Chair/co-advisor, Nov 16)

Title: Observations While Attempting To Fabricate A Micro-Electron Detection System

Post Doctoral advisement/direction: Dr. Stephan Thamban September 2007 – 2013 Hollow cathode discharges and optical emission spectroscopy Bachelors honors thesis advisement/direction:

1. Aaron Lyles, May 2001 Development of a Point Plasma Source

2. Ashish Jindal, May 2001 Langmuir Probe Measurements in Pulsed Discharges

3. Arun Radhakrishnan, December 2003 Study in Plasma Chemistry: Study of variation in density of gas phase species with Temperature in CF4 Plasma

4. Caleb Nelson, May 2005 Plasma Deposition of Polymer like films

5. Yared Melese, Dec 2005 RFID design

6. Vaishal Shah, Dec 2005 RFID design

Senior Project/independent study advisement/direction: 1. Brent Markham, Spring 2000 2. Ky Ma Spring 2001 3. Sachin Babu May 2003 4. Jason Koesters May 2003 5. Debbie Prestridge August 2003 6. Adam Prengler (NSF REU) May 2003 7. Daryl Schellinger (NSF REU) May 2003 8. Becky Laughlin May 2003 9. Cheng Lee May 2003 10. John Stadler Dec 2004 11. Cody Gilland Dec 2004 12. Brandon Jarvis Dec 2004 and Dec 2006 13. Marvin Wrich May 2004 14. Megan Creasey May 2005 15. Matthew Kessler May 2005 16. Daniel Pruessner August 2006 17. Gabriel Padron-Wells- December 2006 18. Richard Pierce – 2007-08 19. David Urrabazo Jr – 2009 20. Alex Kollaja – 2009-12 21. Stuart Yun – 2009-12 22. Velta Ayivi – (NSF REU) 2010-12 23. Cass Figioli – (NSF REU) 2010-12 24. Matthew Mcintosh – 2010-11 25. Shanoya Taylor – (NSF REU) 2011 26. Nicole Preisler – 2016- 27. Jamale Benitez-Porch – 2016-

Other (often as secondary advisement) Damien Lenoble (Ph.D. student CNET/France Telecom - Varian), Ce Li, Jaeyoung Park, Z.H. Wang (Ph.D. students - Princeton), Len Mahoney, Dan Beale, Jeff Tobin (Ph.D. students – U. Wisconsin), Amy Matthews, Robert Speth (Undergraduate – U. Wisconsin), Michael Henderson (REU student – U. Wisconsin)

Invited talks: I41 AV Walker and M.J. Goeckner

What Surface Analysis Can Tell Us About Plasma Chemistry Department of Physics, University College London, April 29, 2016

I40 M.J. Goeckner and A.V. Walker Developing a better understanding of low-temperature plasmas Department of Physics, University College London, April 29, 2016

I39 M.J. Goeckner Gas-phase chemistry and plasma surface interactions AVS Texas Chapter Conference 2015 August 5th and 6th, 2015 University of Texas at Dallas

I38 MJ Goeckner, Gas-Phase Chemistry and Plasma Surface Interactions Invited Paper PS2-FrM5 American Vacuum Society 61st International Symposium, Baltimore MD, Nov 10-14, 2014

I37 L. Overzet (presenting), M. Goeckner, I. Saraf, C. Nelson, R. Bates, R. Dussart, P. Lefaucheux, and T. Tillocher, Plasma-Surface Interactions: Etching. Atelier - Fonctionnalisation de Surfaces par Plasma: Techniques et Applications, Orleans, France, June 12-14, 2013

I36 M.J. Goeckner, Understanding the Fluorocarbon Cycle in Plasma Environments Department of Chemistry, University of Texas at Dallas, April 5, 2013

I35 M.J. Goeckner, Understanding the Fluorocarbon Cycle in Plasma Environments Centre Recherche Public - Gabriel Lippmann, Luxembourg, March 11, 2013

I34 M.J. Goeckner, Understanding the Fluorocarbon Cycle in Plasma Environments LAM Research Corp, Freeport CA, Feb 2, 2013

I33 L. Overzet (presenting) I.R. Saraf, C. Nelson and M. Goeckner, Fundamental Aspects of High Aspect Ratio (Si) Etching. 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials. ISPLASMA. Nagoya, Japan, 01/27 – 02/1/2013.

I32 M.J. Goeckner, G. Padron-Wells, P.L. Stephan Thamban, J. Hosch, A. Kueny, K. Harvey and M. Whelan Controllable Electron Beam Exciter for Optical Emission Studies in Real-Time Process Plasmas 5th International Conference on plasma-nano technology & science, Aichi, Japan, March 9-10, 2012

I31 Matthew Goeckner, Cristina Estrada-Raygoza, Gabriel Padron-Wells, P.l. Stephan Thamban, l.J. Overzet, Makoto Senike and Masaru Hori Plasma chemistry and film growth in a complex organic system 4th International Symposium on advanced plasma science and its applications, Nagoya, Japan, March 4-8, 2012

I30 M.J. Goeckner, C Nelson, LJ Overzet

Plasma Surface interactions. 3rd International Symposium on advanced plasma science and its applications, Nagoya, Japan, March 6-10, 2011

I29 M.J. Goeckner, Plasma Surface interactions. 2nd International Symposium on advanced plasma science and its applications, Nagoya, Japan, March 12-14, 2010

I28 M.J. Goeckner, Plasma Surface interactions, energy considerations. American Vacuum Society, Boston MA Nov, 2009

I27 M.J. Goeckner, Plasma Surface interactions. Gaseous Electronics Conference, Albany NY Oct, 2009

I26 L. Overzet (presenting), D. Ogawa, I. Saraf, M.J. Goeckner and C.W. Chung Direct injection of liquid precursors into low-pressure plasmas. XXIX Intl. Conf. on Phenomenon in Ionized Gases, Cancun, Mexico, July 2009.

I25 M.J. Goeckner, Plasma Surface interactions. Ohio-region Section of the APS (OS/APS), Ada OH, April 24-25, 2009

I24 M.J. Goeckner, Plasma Surface interactions. 1st International Symposium on advanced plasma science and its applications, Nagoya, Japan, March 8-10, 2009

I23 M.J. Goeckner, CT Nelson, SP Sant, AK Jindal, EA Joseph, BS Zhou, G Pardon-Wells, B Jarvis, R Pierce and LJ Overzet Plasma-Surface interactions. 24th Symposium on the Physics of Ionized Gases, Novi Sad, Serbia, August 25-29, 2008

I22 M.J. Goeckner, D Ogawa, I Saraf and LJ Overzet Progress report: Direct injection of liquids into low-pressure plasmas. 2nd International Workshop on Nonequilibrium Processes in Plasma Physics and Studies of Environment, Belgrade and Novi Sad, Serbia, August 23-26, 2008

I21 LJ Overzet, D Ogawa, I Saraf and M.J. Goeckner Directly injecting liquids into low pressure PECVD environments. 1st International Conference on Microelectronics and Plasma Technology, Jeju, Korea, August 18-20, 2008

I20 M.J. Goeckner, Unraveling the Complex Process Known as 'Plasma Chemistry'. Applied Materials, Sunnyvale, CA, June 25, 2007

I19 M.J. Goeckner, G. Pardon-Wells, B Jarvis, A,K. Jindal Controlling gas chemistry in process tools for control of surface processes, 5th International Symposium on Advanced Plasma Processes and Diagnostics, Suwon, Korea, April. 6-7, 2007

I18 L. Overzet, M. Goeckner, D. Ogawa, I Saraf, R. Timmons and S. Sanchez Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites. SPRING IV Conference, U. Houston, Houston TX Feb. 2007.

I17 M.J. Goeckner, S. Sant, C. Nelson, E. Joseph, B. Zhou and L.J. Overzet Unraveling the Complex Process Known as 'Plasma Chemistry'. Baylor University, Waco, TX, Feb 9, 2007

I16 M.J. Goeckner A short study of Plasma Science (4 total lectures) Sungkyunkwan University (SKKU) Suwon, Korea, December 2006

I15 M.J. Goeckner, S. Sant, C. Nelson, E. Joseph, B. Zhou and L.J. Overzet In-situ studies of gas-phase chemistry in CF4/C4F8 plasmas in the modified Gaseous Electronics Conference (mGEC) system. Sungkyunkwan University, Suwon, Korea, May 2006

I14 M.J. Goeckner, S. Sant, C. Nelson, E. Joseph, B. Zhou and L.J. Overzet In-situ studies of gas-phase chemistry in CF4/C4F8 plasmas in the modified Gaseous Electronics Conference (mGEC) system. 6th International Workshop on Fluorocarbon Plasmas Grenoble (Villard de Lans), France, March 2006

I13 L. Overzet, M. Goeckner, E. Joseph, B. Zhou S. Sant and C. Nelson, In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma. Dry Process Symposium (International), Jeju Island Korea, Nov. 2005

I12 A. Chandrashekar, J.S. Lee, J. Schafers, R. Glosser, G.S. Lee, B.-M. Park, M. Goeckner, K. Parikh, K. Cattanach, S. Manohar and L. J. Overzet Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test Pohang University of Science and Technology, Pohang Korea, Nov. 2005.

I11 L. Overzet, M. Goeckner, E. Joseph, B. Zhou, S. Sant and C. Nelson, In-Situ Study Of Plasma-Wall Interactions In Inductively Coupled Fluorocarbon Plasma. Kyungpook National University, Daegu Korea, Nov. 2005.

I10 A. Chandrashekar, J.S. Lee, J. Schafers, R. Glosser, G.S. Lee, B.-M. Park, M. Goeckner, K. Parikh, K. Cattanach, S. Manohar and L. J. Overzet Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test DMS, Suwon-Si, Gyeonggi-Do Korea, Nov. 2005.

I9 M.J. Goeckner and L.J. Overzet Unraveling the complex processes in a fluorocarbon plasma. NCCAVS Plasma Etch Users Group, National Semi, Sunnyvale, CA, June 9, 2005

I8 M.J. Goeckner Unraveling the complex process known as ‘plasma chemistry’. Invited Paper PS1-MoA3 American Vacuum Society 51st International Symposium, Anaheim CA, Nov 14-19, 2004

I7 L. Overzet, M. Goeckner and G.-S. Lee Plasma Science Research at UTD: From Fluorocarbons to CNTs. University of Orleans - GREMI seminar. Orleans, France May 2004.

I6 MJ Goeckner, Plasma Doping for Shallow Junctions Greater Southwest Implant User Group Dallas Texas, August 16, 2000

I5 MJ Goeckner, SB Felch, Z Fang, et al., Plasma doping for shallow junctions, 1st International Conference on Advanced Materials and Processes for Microelectronics, San Jose CA, March 15-19, 1999.

I4 SB Felch MJ Goeckner Z Fang, Gc-F Yeap D. Bang M-R Lin Plasma Doping for Shallow Junctions American Vacuum Society, 46th International Symposium, Seattle WA Oct 25-29,1999

I3 M.J. Goeckner, S.B. Felch, J. Weeman, S. Mehta and J.S. Reedholm, Evaluation of Charging Damage Test Structures for Ion Implantation Processes, Greater Silicon Valley Implant Users Group, March 1999.

I2 M.J. Goeckner, S.B. Felch, J. Weeman, and J. Erhardt Evaluation of Tests to Examine Charging Damage in Ion Implantation and Plasma Processes, National Ion Implant Users Group meeting, Austin TX, Oct. 21, 1999.

I1 M.J. Goeckner Fourier Transform Infrared Spectroscopy in processing plasmas, Swarthmore, Department of Physics and Astronomy Colloquium, Oct 6, 1995.

Peer Refereed Publications: Citations: 1015; documents: 77, h-index: 17 (Per Science Citation - June 2017) Citations: 1730; documents: 187 h-index: 23 (Per Google Scholar – June 2017) 96 Jonathan Tennyson, Sara Rahimi, Christian Hill, Lisa Tse, Anuradha Vibhakar, Dolica

Akello-Egwel, Daniel Brown, Anna Dzarasova, James Hamilton, Dagmar Jaksch, Sebastian Mohr, Keir Wren-Little, Johannes Bruckmeier, Ankur Agarwal, Klaus Bartschat, Annemie Bogaerts, Jean Booth, Matthew Goeckner, Khaled Hassouni, Yukikazu Itikawa, B Braams, E Krishnakumar, ; Annarita Laricchiuta, Nigel Mason, Sumeet Pandey, Zoran Petrovic, Yi-Kang Pu, Alok Ranjan, Shahid Rauf, Julian Schulze, Miles Turner, Peter Ventzek, J Whitehead, Jung-Sik Yoon, QDB: a new database of plasma chemistries and reactions" Accepted to: Plasma Sources Science and Technology, Article reference: PSST-101569.R1

95 Cassius J. F. Fagioli, David Urrabazo, and Matthew J. Goeckner Fourier Transform Infrared Spectroscopy of Trifluoroiodomethane Under Plasma Conditions Submitted to JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, JVST A Paper Number: JVSTA-A-15-548

94 Caroline Liu, Matthew J Goeckner, Amy V Walker Plasma polymerization of poly (3, 4-ethylenedioxyethene) films: The influence of plasma gas phase chemistry JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 35, 021302 DOI: 10.1116/1.4968017 Mar 2017

93 N. Sundaram, S. Ramachandran, L.J. Overzet, M. Goeckner, G.S. Lee Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low

dielectric constant interlayer dielectric applications JOURNAL OF MATERIALS RESEARCH 31, pp: 1027-1037 DOI: 10.1557/jmr.2016.97 Apr 2016

92 D Urrabazo, JF Veyan, MJ Goeckner, LJ Overzet Ion induced electron emission from chemically cleaned Si and Ge JOURNAL OF PHYSICS D: APPLIED PHYSICS 48, 405201 DOI:10.1088/0022-3727/48/40/405201 SEPT 2015

91 N. Sundaram, G.S. Lee, M. Goeckner, L.J. Overzet, Study and optimization of PECVD films containing fluorine and carbon as ultra low dielectric constant interlayer dielectrics in ULSI devices JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 33, 042202 DOI: 10.1116/1.4922258 JUL 2015

90 Robert L. Bates, Matthew J. Goeckner and Lawrence. J. Overzet Correction of aspect ratio dependent etch disparities JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 32, 051302 DOI: 10.1116/1.4890004 SEP 2014

89 Robert L. Bates, P. L. Stephan Thamban, Matthew J. Goeckner and Lawrence. J. Overzet. Silicon etch using SF6/C4F8/Ar gas mixtures JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 32, 041302; http://dx.doi.org/10.1116/1.4880800 July 2014

88 Matthew Goeckner, John Sibert, Dave Galley, Kory Goldammer The Dallas STEM Gateways Collaborative: Initial analysis of course grade data vs. external test scores Hawaii University International Conferences - Math & Engineering Technology, ISSN: 2166-420X Jun 9-12, 2013

87 M.J. Goeckner, G. Burnham, C. Ledbetter, R.C. Hilborn A Matrix Map Method for Coordinated Undergraduate Curriculum Improvement in Electrical Engineering and Other Programs Hawaii University International Conferences - Math & Engineering Technology, ISSN: 2166-420X Jun 9-12, 2013

86 John Sibert, Matthew Goeckner, Dave Galley, Kory Goldammer Lowering Barriers to Enhance 2 + 2 Transfer Student Success, Persistence and Retention: The Dallas STEM Gateways Collaborative Proceeding of the ASEE GSW Annual Conference March 21-23, 2013, http://www.asee.org/papers-and-publications/papers/section-proceedings/gulf-southwest/GSW-2013-Conference-Proceedings.pdf March 21-23, 2013

85 GP Wells, IC Estrada-Raygoza, PLS Thamban, CT Nelson, CW Chung, LJ Overzet, MJ Goeckner, Understanding the Synthesis of Ethylene Glycol Pulsed Plasma Discharges PLASMA PROCESSES AND POLYMERS 10, pp 119-135 DOI: 10.1002/ppap.201200066 Feb 2013

84 IR Saraf, MJ Goeckner, BE Goodlin, KHR Kirmse, CT Nelson, LJ Overzet, Kinetics of the deposition step in time multiplexed deep silicon etches JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, DOI: 10.1116/1.4769873 JAN, 2013

83 P. L. Stephan Thamban, Gabriel Padron-Wells, JW Hosch, MJ Goeckner

Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopy JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30, DOI: 10.1116/1.4756694 Nov, 2012

82 Caleb T. Nelson, Lawrence J. Overzet, Matthew J. Goeckner Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30, DOI: 10.1116/1.4746411, Sep 2012

81 P. L. Stephan Thamban, Gabriel Padron-Wells, Stuart Yun, JW Hosch, MJ Goeckner Electron beam excitation method to study gas phase during etch processes JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 30, DOI: 10.1116/1.4718724 JUL 2012

80 Caleb T. Nelson, Lawrence J. Overzet, Matthew J. Goeckner Role of surface temperature in fluorocarbon plasma-surface interactions JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30, DOI: 10.1116/1.3679408, JUL 2012

79 Caleb T. Nelson, Lawrence J. Overzet, Matthew J. Goeckner Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30, DOI 10.1116/1.3679408 FEB 2012

78 Daisuke Ogawa, MJ Goeckner, LJ Overzet, Optical Observation of Nitrogen Propagation in Argon Plasma IEEE TRANSACTIONS ON PLASMA SCIENCE 39, 2544-2545, 2011.

77 I. Saraf, MJ Goeckner, B Goodlin, K Kirmse, LJ Overzet, Mask undercut in deep silicon etch APPLIED PHYSICS LETTERS 98, Article Number: 161502 DOI: 10.1063/1.3579542, 2011.

76 C. P. Tang, M. Goeckner and M. W. Spong, Robotic Project-based Pre-training for In-coming Undergraduate Mechanical Engineering Students Proceedings of the ASME International Design Engineering and Technical Conference, Montreal, Quebec, Canada, August 15-18, 2010.

75 R Dussart, LJ Overzet, P Lefaucheux, T Dufour, M Kulsreshath, MA Mandra, T Tillocher, O Aubry, S Dozias, P Ranson, JB Lee and M Goeckner Integrated micro-plasmas in silicon operating in helium European Physical Journal D 60, 601-608 (2010)

74 LJ Overzet, D. Jung, MA Mandra, M Goeckner, T Dufour, R Dussart and P Lefaucheux RF impedance measurements of DC atmospheric micro-discharges European Physical Journal D 60, 449-454 (2010)

73 D. Ogawa, C. Chung, M. Goeckner and L. Overzet Transient effects caused by pulsed gas and liquid injections into low-pressure plasmas. Plasma Sources Sci. and Technol. 19, Article number 034013 (2010).

72 A.K. Jindal, L.J. Overzet, and M. J. Goeckner Time Resolved Microwave Interferometry Measurement of the Electron Density in a

Pulsed 1,3-Butadiene Discharge Plasma Chemistry and Plasma Process 30, DOI 10.1007/s11090-010-9213-z (2010).

71 P.L.S. Thamban, J. Hosch, and M. J. Goeckner Controllable optical emission spectroscopy diagnostic system for analysis of process chemistries Review Of Scientific Instruments 81, 013502 (2010).

70 M. J. Goeckner, D. Ogawa, I. Saraf and L. J. Overzet Progress report: Direct injection of liquids into low-pressure plasmas. Second International Workshop On Non-Equilibrium Processes In Plasmas And Environmental Science - Journal Of Physics: Conference Series 162, 12014-12014 (2009).

69 S. P. Sant, C. T. Nelson, L. J. Overzet and M. J. Goeckner Relationship Between Gas-Phase Chemistries And Surface Processes In Fluorocarbon Etch Plasmas: A Process Rate Model. Journal of Vacuum Science and Technology A 27, 631-642 (2009).

68 D. Ogawa, I. Saraf, A. Sra, R. Timmons, M. Goeckner and L. Overzet The direct injection of liquid droplets into low pressure plasmas, Journal of Vacuum Science and Technology A 27, 342-351 (2009).

67 S. P. Sant, C. T. Nelson, L. J. Overzet and M. J. Goeckner Chemistry In Long Residence Time Fluorocarbon Plasmas. Journal of Vacuum Science and Technology A 27, 193-208 (2009)

66 G. Padron-Wells, Brandon. C. Jarvis, A.K. Jindal and M.J Goeckner Understanding the Synthesis of DEGVE Pulsed Plasmas for application to ultra thin biocompatible interfaces. Colloids and Surfaces B: Biointerfaces 68, 163-170 (2009)

65 R. G. Pierce, G. Padron-Wells, and M. J. Goeckner, Gas-phase chemistry of pulsed n-hexane discharge Plasma Chemistry and Plasma Processing 29, 1-11 (2009)

64 M.J. Goeckner, CT Nelson, SP Sant, AK Jindal, EA Joseph, BS Zhou, G Pardon-Wells, B Jarvis, R Pierce and LJ Overzet Plasma-Surface interactions. 24th Summer School And International Symposium On The Physics Of Ionized Gases - Journal Of Physics: Conference Series 133, 12010-12010 (2008)

63 T. Dufour, R. Dussart, P. Lefaucheux, P. Ranson, L. J. Overzet, M. Mandra, J.-B. Lee, and M. Goeckner, Effect of limiting the cathode surface on direct current microhollow cathode discharge in helium Applied Physics Letters 93, 071598 (2008)

62 Li Tao, Caleb. T. Nelson, Seetha Ramachandran, Michel Lin, L.J. Overzet, M.J. Goeckner, G.S. Lee, Wei Wu, C.G. Wilson, and Walter Hu, Durable DLC molds for uv nanoimprint lithography Nanotechnology 10, 105302 (2008)

61 MJ Goeckner, C.T. Nelson and L.J. Overzet, Electronegative plasma structure, IEEE Trans on Plasma Science 36, 996-997 (2008)

60 E.A. Joseph, S.P. Sant, L.J. Overzet and M.J. Goeckner,

The Role of Chamber Dimension in Fluorocarbon Based Etching of Silicon Dioxide and its Effects on Gas and Surface-Phase Chemistry, Journal of Vacuum Science and Technology A 26, 545-554 (2008)

59 C.T. Nelson, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Surface kinetics with low ion energy bombardment in fluorocarbon plasmas, Plasma Sources Science & Technology 16, 813-821 (2007)

58 E.A. Joseph, S.P. Sant, M.J. Goeckner and L.J. Overzet, H.G. Peng and D.W. Gidley, B.E.E. Kastenmeier The Effects of Pore Morphology on the Diffusive Properties of a Porous Low-K Dielectric, Journal of Vacuum Science and Technology B 25, 1684-1693 (2007).

57 Y. Liu, L.J. Overzet and M.J. Goeckner Effect of substrate on the nucleation and growth of aluminum films deposited from methylpyrrolidine alane Thin Solid Films 515, 6730-6736 (2007).

56 S Ramachandran, L Tao L, TH Lee, S Sant, LJ Overzet, MJ Goeckner, MJ Kim, GS Lee, W Hu Deposition and patterning of diamond like carbon as antiwear nanoimprint templates Journal of Vacuum Science and Technology B 24 2993-2997 Sp. Iss. SI, NOV-DEC 2006

55 A. Chandrashekar, JS Lee, GS Lee GS, MJ Goeckner MJ, and LJ Overzet Gas-phase and sample characterizations of multiwall carbon nanotube growth using an atmospheric pressure plasma Journal of Vacuum Science and Technology A 24, 1812-1817 SEP-OCT 2006

54 Y. Liu, L.J. Overzet and M.J. Goeckner Chemical vapor deposition of aluminum from methylpyrrolidine alane complex Thin Solid Films 510 (1-2): 48-54, July 3, 2006

53 A.K. Jindal, A.J. Prengler, L. J. Overzet, and M. J. Goeckner, In-situ FTIR characterization of the plasma chemistry in varying pulsed cycles of a 1,3 Butadiene discharge in a Gaseous Electronics Conference (GEC) Cell Journal of Vacuum Science and Technology A 24, 126-132 (2006).

52 B.S. Zhou, E. A. Joseph, S. P. Sant, L. J. Overzet, and M. J. Goeckner Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference (mGEC) reactor, Journal of Vacuum Science and Technology A 24, 114-125 (2006).

51 Baosuo Zhou, E. A. Joseph, L. J. Overzet, and M. J. Goeckner, Spectroscopic study of gas and surface phase chemistries of fluorocarbon plasma in an inductively coupled modified gaseous electronics conference (mGEC) reactor, Journal of Vacuum Science and Technology A 23, 1657-1667 (2005).

50 M. J. Goeckner, L. J. Overzet, G. Earle and J Maynard Electron confinement on magnetic field lines IEEE Transactions on Plasma Science 33 (2 I), 436-437 (2005).

49 J. Frautschi, L. Overzet, M. Goeckner and A. Jindal. Surebond Polymers Chemically Bond to Metal SurFACTS in Biomaterials 9, 3-4 (2004).

48 E. A. Joseph, B. Zhou, S. P. Sant, L. J. Overzet, and M. J. Goeckner, Investigation and modeling of plasma-wall interactions in inductively coupled

fluorocarbon plasmas, Journal of Vacuum Science and Technology A 22, 689-697 (2004).

47 M. J. Goeckner, J.M. Marquis, B.J. Markham, A.K. Jindal, E.A. Joseph, B.-S. Zhou, A modified Gaseous Electronics Conference Reference Cell for the study of plasma-surface-gas interactions, Review of Scientific Instrumentation 75, 884-891 (2004).

46 E.A. Joseph, M.J. Goeckner, L.J. Overzet, D.W. Gidley and B.E.E. Kastenmeier, Correlation of pore structure to integration issues for low- k interconnects Proceedings of the Advanced Metallization Conference 2003 (AMC 2003). Warrendale, PA, USA: Mater. Res. Soc, 2004 – pp 537- 541.q

45 S. Srinivasan, J. Marquis, L. Pratti, M.H. Khater, M.J. Goeckner and L.J. Overzet The effects on plasma properties of a current node on inductively coupled plasma sources, Plasma Sources Science Technology 12, 432–442 (2003).

44 Z. Fang, B-W Koo, S.B. Felch, Y. Lei, L.J. Overzet and M.J. Goeckner, Study of pulsed plasma doping by Langmuir probe and ion mass-energy analyzer, Proceedings of the 14th International Conference on Ion Implantation Technology, Taos, New Mexico, Oct. 2002 – pp 403-406.

43 Zhehui Wang, Samuel A. Cohen, David N. Ruzic, M. J. Goeckner, Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron, Physical Review E 61, 1904-1911 (2000).

42 M.J. Goeckner, S.B. Felch, Z. Fang, A. Oberhofer, V.K.F. Chia, G.R. Mount, M. Poulakos and W.A. Keenan Profiling of Ultra-Shallow Junctions, Journal of Vacuum Science and Technology B 18, 472-476 (2000).

41 M.J. Goeckner, S.B. Felch, J. Weeman, and J. Erhardt, Evaluation of tests to examine charging damage in ion implantation and plasma processes: using controlled stress environments, Proceedings of the 13th International Conference on Ion Implantation Technology, Alpbach, Austria, Sept. 17-22, 2000 – pp 596-599.

40 D. Lenoble, J. Alieu, A. Grouillet, M, Haond, S.B. Felch, M.J. Goeckner, Z. Fang, Ultra-shallow extensions for industrial 0.15 µm CMOS technology fabricated using plasma doping Proceedings of the 29th European Solid-State Device Research Conference. (ESSDERC '99) Neuilly sur Seine, France: Editions Frontieres, 1999, pp. 392-395.

39 M. J. Goeckner, S. B. Felch, Z. Fang, D. Lenoble, J. Galvier, A. Grouillet, G.C.-F. Yeap, D. Bang, and M.-R. Lin, Plasma doping for shallow junctions. European Semiconductor 21, 40-42 (1999).

38 M.J. Goeckner, S.B. Felch, Z. Fang, A. Oberhofer, V.K.F Chia, G.R. Mount, M Poulakos and W.A Keenan Plasma doping for shallow junctions, Journal of Vacuum Science and Technology B 17, 2290-2293 (1999).

37 M.J. Goeckner and N.A. Goeckner Fourier-Transform Infrared Measurements of CHF3/O2discharges in an electron cyclotron resonance reactor,

Journal of Vacuum Science and Technology A 17, 2586-2592 (1999). 36 D. Lenoble, J. Alieu, A. Grouillet, R. Gwoziecki, A. Halimaoui, T. Skotnicki, S.B. Felch,

M.J. Goeckner, Z. Fang, S. Mehta and M. Haond Enhanced performance in 0.15 µm pMOSFET fabricated using plasma doping, 1999 IEEE Symposium on VLSI Circuits Japan June, 17-19 1999.

35 M.J. Goeckner, S.B. Felch, J. Weeman, S. Mehta and J.S. Reedholm Evaluation of Charging Damage Test Structures for Ion Implantation Processes, Journal of Vacuum Science and Technology A 17, 1501-1509 (1999).

34 M.J. Goeckner, S.B. Felch, Z. Fang, and J. Weeman Evaluation of charging damage in a plasma doping system, Proceedings of the 4th International Symposium on Plasma Process-Induced Damage Monterey, CA, May 9-11, 1999, pp 112-115.

33 J.M. Ha, J.W. Park, W.S. Kim, W.S. Song, H.J. Song, K. Fujihara, H.K. Kang, S. Felch, M.J. Goeckner, D.H. Ko and G.C. Lee High performance pMOSFET with BF3 plasma doped gate/source/drain and S/D extension, 1998 IEEE International Electron Devices Meeting (IEDM) San Francisco, CA December 6-9, 1998, pp. 639-642.

32 T.E. Sheridan, M.J. Goeckner and J. Goree Electron velocity distribution functions in a sputtering magnetron discharge in the ExB direction, Journal of Vacuum Science and Technology A 16, 2173-2176 (1998).

31 D. Lenoble, M.J. Goeckner, S.B. Felch, Z. Fang, J. Galvier and A. Grouillet Evaluation of plasma doping for sub-0.18 µm devices, Proceedings of the 12th International Conference on Ion implantation Technology ’98 Kyoto, Jp, June 22-26, 1998, pp 1222-1225.

30 M.J. Goeckner, T.K. Bennett and S.A. Cohen A source of hyperthermal neutrals for materials processing, Applied Physics Letters 71, 980-982 (1997).

29 J. Park, T.K. Bennett, M.J. Goeckner and S.A. Cohen Plasma-neutral interaction in thermally collapsed plasma, Journal of Nuclear Materials 241-243, 489-493 (1997).

28 M.J. Goeckner, T.K. Bennett, Jaeyoung Park and S.A. Cohen Reduction of residual charge in surface-neutralization-based neutral beams, Proceedings of the 2nd International Symposium on Plasma Process-Induced Damage Monterey, CA, May 12-14, 1997, pp. 175-178.

27 T.E. Sheridan, M.J. Goeckner and J. Goree Electron distribution functions in a sputtering magnetron discharge, Japanese Journal of Applied Physics 34, 4977-4982 (1995).

26 T.E. Sheridan and M.J. Goeckner Collisional sheath dynamics, Journal of Applied Physics 77, 4967-4972 (1995).

25 M.J. Goeckner, R.P. Fetherston, W.N.G. Hitchon, N.C. Horswill, E.R. Keiter, Shamim M. M., R.A. Breun, J.R. Conrad and T.E. Sheridan Dynamics of a collisional pulsed planar sheath,

Physical Review E 51, 3760-3763 (1995). 24 L. Zhang, J.H. Booske, R.F. Cooper, J.L. Shohet, J.R. Jacobs, F.S.B. Anderson, M.J.

Goeckner, E.B. Wicksberg and G. Was Plasma-immersed oxygen ion implantation of iron-doped glass for nonmetallic magnetic hard disk, Journal of Vacuum Science and Technology B 12, 3342-3346 (1994).

23 M.J. Goeckner, M.A. Henderson, J.A. Meyer and R.A. Breun Fourier transform infrared absorption spectrometry measurements of a CF4 discharge in an electron cyclotron resonance reactor, Journal of Vacuum Science and Technology A 12, 3120-3125 (1994).

22 E.R. Keiter, W.N.G. Hitchon and M.J. Goeckner A kinetic model of pulsed sheaths, Physics of Plasmas 1, 3709-3712 (1994).

21 R.R. Speth, G.A. Emmert, and M.J. Goeckner The influence of the high voltage pulse shape on the plasma source ion implantation process, Applied Physics Letters 65, 2272-2274 (1994).

20 L. Zhang, J.L. Shohet, D. Dallmann, J.R. Booske, R.R. Speth, K. Shenai, M.J. Goeckner, J.B. Kruger, P. Rissman, J.E. Turner, E. Perez-Albuerne, S. Lee and N. Meyyappan Low-energy separation by implantation of oxygen structures via plasma source ion implantation, Applied Physics Letters 65, 962-964 (1994).

19 M.J. Goeckner, Shamim M. Malik, J.R. Conrad and R.A. Breun Laser-induced fluorescence measurement of the dynamics of a pulsed planar sheath, Physics of Plasmas 1, 1064-1074 (1994).

18 M.J. Goeckner, J.A Meyer, G-H. Kim, J.S. Jenq, A. Matthews, J.W. Taylor and R.A. Breun Role of contaminates in electron cyclotron resonance plasmas, Journal of Vacuum Science and Technology A 11, 2543-2552 (1993).

17 M.J. Goeckner and R.A. Breun Using Fourier transform infrared absorption spectrometry to probe the injected neutral gas in a plasma having a high ionization fraction, Journal of Vacuum Science and Technology A 11, 689-693 (1993).

16 M.J. Goeckner, J. Goree and T.E. Sheridan Saturation broadening in laser-induced fluorescence from plasma ions, Review of Scientific Instruments 64, 996-1000 (1993).

15 J.A. Meyer, G-H. Kim, M.J. Goeckner and N. Hershkowitz Measurements of the presheath in an electron cyclotron resonance etching device, Plasma Sources Science and Technology 1, 147-150 (1992).

14 M.J. Goeckner, J. Goree and T.E. Sheridan Measurements of ion velocity and density in the plasma sheath, Physics of Fluids B 4, 1663-1670 (1992).

13 M.J. Goeckner, J. Goree and T.E. Sheridan Ion impact etch anisotropy downstream from diffusion plasma sources, Journal of Vacuum Science and Technology A 9, 3178-3180 (1991).

12 T.E. Sheridan, M.J. Goeckner and J. Goree

Observation of two-temperature electrons in a sputtering magnetron plasma, Journal of Vacuum Science and Technology A 9, 688-700 (1991).

11 M.J. Goeckner, J. Goree and T.E. Sheridan Laser-induced fluorescence characterization of ions in a multidipole confined filament discharge, Physics of Fluids B 3, 2913-2921 (1991).

10 M.J. Goeckner, J. Goree and T.E. Sheridan Monte Carlo simulation of ions in a magnetron plasma, IEEE Transactions on Plasma Science 19, 301-308 (1991).

9 T.E. Sheridan, M.J. Goeckner and J. Goree Pressure dependence of ionization efficiency in sputtering magnetrons, Applied Physics Letters 57, 2080-2082 (1990).

8 M.J. Goeckner, J. Goree and T.E. Sheridan Laser-induced fluorescence characterization of ions in a magnetron plasma, Journal of Vacuum Science and Technology A 8, 3920-3924 (1990).

7 J.E. Miranda, M.J. Goeckner, J. Goree and T.E. Sheridan Monte Carlo simulation of ionization in a magnetron plasma, Journal of Vacuum Science and Technology A 8, 1627-1631 (1990).

6 T.E. Sheridan, M.J. Goeckner and J. Goree Electron and ion transport in magnetron plasmas, Journal of Vacuum Science and Technology A 8, 1623-1626 (1990).

5 T.E. Sheridan, M.J. Goeckner and J. Goree Model of energetic electron transport in magnetron discharges, Journal of Vacuum Science and Technology A 8, 30-37 (1990).

4 M.J. Goeckner and J. Goree Comment on ‘Optical carriage for laser-induced fluorescence in a magnetized plasma’, Review of Scientific Instruments 60, 3830 - 3831 (1989).

3 M.J. Goeckner, J. Goree, and T.E. Sheridan Laser-induced fluorescence measurement of plasma ion distribution functions: correcting for spatially inhomogeneous laser intensities, Advances in Laser Science IV: Proceedings of the Fourth International Laser Science Conference, Atlanta, GA, Oct. 1988 (American Institute of Physics, 1989), pp. 761-766.

2 M.J. Goeckner and J. Goree Laser-induced fluorescence measurements of plasma ion temperatures: corrections for saturation broadening, Journal of Vacuum Science and Technology A 7, 977-981 (1989).

1 J. Goree and M.J. Goeckner Laser-induced fluorescence measurement of plasma ion distribution functions, Proceedings of the NATO Advanced Study Institute on Plasma Surface Interactions and Plasma Processing of Materials, Alicate, Spain, Sept. 1988 (Martinus Nijhoff Publishers, Netherlands, 1989).

Other writings (not including abstracts): Patents Issued

7 Ziwei Fang and Matthew J. Goeckner, Dose monitor for plasma doping system

US Patent number: US6528805 Issued: 2003

6 Matthew J. Goeckner and Ziwei Fang, Hollow cathode for plasma doping system US Patent number: US6500496 Issued: Dec. 31, 2002 Filed: Oct. 25, 2000

5 Matthew J. Goeckner and Charles E. Van Wagoner, Method and apparatus for eliminating displacement current from current measurements in a plasma processing system US Patent number: US6433553 World Intellectual Property Organization number: WO0131681 Issued: Aug. 13, 2002 Filed: Oct. 27, 1999

4 Matthew J. Goeckner and Ziwei Fang, Method and apparatus for low voltage plasma doping using dual pulses US Patent number: US6335536 World Intellectual Property Organization number: WO0131682 Issued: Jan. 1, 2002 Filed: Oct. 27, 1999

3 Ziwei Fang and Matthew J. Goeckner, Dose monitor for plasma doping system US Patent number US6300643 World Intellectual Property Organization number: WO0141183 Issued: Oct. 9, 2001 Filed: Dec. 6, 1999

2 Matthew J. Goeckner and Ziwei Fang, Hollow cathode for plasma doping system US Patent number: US6182604 World Intellectual Property Organization number: WO0131683 Issued: Feb. 6, 2001 Filed: Oct. 27, 1999

1 Reuel B. Liebert, Bjorn O. Pedersen, and Matthew J. Goeckner, Dose monitor for plasma doping system US Patent number: US6020592 World Intellectual Property Organization number: WO0008670 Issued: Feb. 1, 2000 Filed: Aug. 3, 1998

Patent Applications/Disclosures

Un-refereed publications, abstracts and/or oral presentations at professional meetings: 1 J. Goree and M.J. Goeckner

Laser-induced fluorescence measurements of ion temperature in multidipole plasmas, American Physical Society - Division of Plasma Physics, San Diego, CA, Oct./Nov. 1987 Bulletin of the American Physical Society 32, 1941 (1987)

2 M.J. Goeckner and J. Goree Laser-induced fluorescence measurement of plasma ion distribution functions: corrections for power saturation, American Vacuum Society 35th National Symposium, Atlanta, GA, Oct. 1988

3 M.J. Goeckner and J. Goree Laser-induced fluorescence measurement of plasma ion distribution functions: correcting for spatially inhomogeneous laser intensities, Fourth International Laser Science Conference, Atlanta, GA, Oct. 1988 Bulletin of the American Physical Society 33, 1658 (1988)

4 M.J. Goeckner and J. Goree Pulsed laser fluorescence measurement of ion distribution functions: avoiding saturation broadening, American Physical Society - Division of Plasma Physics, Hollywood, FL, Nov. 1988 Bulletin of the American Physical Society 33, 2052 (1988)

5 M.J. Goeckner, J. Goree and T.E. Sheridan Laser-induced fluorescence characterization of ions in a magnetron plasma, American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

6 T.E. Sheridan M.J. Goeckner and J. Goree Ion limited transport in magnetron plasmas, American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

7 J.E. Miranda, M.J. Goeckner, J. Goree and T.E. Sheridan Ionization distributions in a magnetron plasma, American Vacuum Society 36th National Symposium, Boston, MA, Oct. 1989

8 M.J. Goeckner, J. Goree and T.E. Sheridan LIF and probe characterization of sputtering magnetron discharges, American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989 Bulletin of the American Physical Society 34, 2029 (1989)

9 J. Goree, M.J. Goeckner and T.E. Sheridan Sputtering magnetron discharges, American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989 Bulletin of the American Physical Society 34, 2029 (1989)

10 T.E. Sheridan, M.J. Goeckner and J. Goree Monte carlo simulation of sputtering magnetron discharges, American Physical Society - Division of Plasma Physics, Anaheim, CA, Nov. 1989 Bulletin of the American Physical Society 34, 2029 (1989)

11 M.J. Goeckner, J. Goree and T.E. Sheridan LIF characterization of a dc multidipole discharge, Gaseous Electronics Conference, Champaign, IL, Oct. 1990 Bulletin of the American Physical Society 36, 215 (1991)

12 J. Goree, M.J. Goeckner and T.E. Sheridan Magnetron plasma transport simulation, Gaseous Electronics Conference, Champaign, IL, Oct. 1990 Bulletin of the American Physical Society 36, 199 (1991)

13 M.J. Goeckner, J. Goree and T.E. Sheridan Monte Carlo simulation of ions in a magnetron plasma, American Vacuum Society 37th National Symposium, Toronto, Canada, Oct. 1990

14 J. Goree, M.J. Goeckner, T.E. Sheridan, Sputtering magnetron experiments and modeling IEEE International Conference on Plasma Sciences (ICOPS), 1990. p. 202.

15 T.E. Sheridan, M.J. Goeckner and J. Goree Observation of two-temperature electrons in a sputtering magnetron plasma, American Vacuum Society 37th National Symposium, Toronto, Canada, Oct. 1990

16 M.J. Goeckner, J. Goree and T.E. Sheridan LIF characterization of a multidipole filament discharge, American Physical Society - Division of Plasma Physics, Cincinnati, OH, Nov. 1990 Bulletin of the American Physical Society 35, 2016 (1990)

17 T.E. Sheridan, M.J. Goeckner and J. Goree Planar probe characterization of a sputtering magnetron plasma, American Physical Society - Division of Plasma Physics, Cincinnati, OH, Nov. 1990 Bulletin of the American Physical Society 35, 2016 (1990)

18 M.J. Goeckner, J.A Meyer, G-H. Kim, J.S. Jenq, A. Matthews and R.A. Breun The influence of contaminates during the seasoning of an ECR etcher, American Vacuum Society 39th National Symposium, Chicago, IL, Oct. 1992

19 D. Beale, A. Wendt and M.J. Goeckner Spatially resolved optical emission of a methyl methacrylate deposition, American Vacuum Society 39th National Symposium, Chicago, IL, Oct. 1992

20 M.J. Goeckner, Shamim M. Malik, J.R. Conrad and R.A. Breun Laser-induced fluorescence measurement of ion dynamics of a pulsed plasma sheath, International Workshop on Plasma-Based Ion Implantation, Madison, WI, Aug. 1993

21 M.J. Goeckner, Shamim M. Malik, J.R. Conrad and R.A. Breun LIF measurement of the dynamics of pulsed planar sheaths, American Physical Society - Division of Plasma Physics, St. Louis, MO, Oct. 1993 Bulletin of the American Physical Society 38, 1890 (1993)

22 R. Breun, M. Goeckner, J. Meyer, G.H. Kim, R.P. Harvey, N. Hershkowitz, N. Hitchon, Characterization of an ECR etching plasma with a microwave interferometer, Langmuir probes and a FTIR IEEE International Conference on Plasma Sciences (ICOPS), Vancouver, BC, Canada, June 1993, p. 141.

23 L.J. Mahoney, S.G. Yulke, J.L Shohet, and M.J. Goeckner FTIR spectroscopy measurements of CF4 And C2F6 concentrations in a planar rf inductively-coupled plasma, IEEE International Conference on Plasma Science (ICOPS), Santa Fe, NM, June 1994, p 109.

24 J.H. Booske, L. Zhang, R.F. Cooper, J.L. Shohet, K. Shenai, D. Dallman, M.J. Goeckner, R Breun, W.N.G. Hitchon, E.B. Wicksberg, R. Speth, J.R. Jacobs and G. Was Buried ceramic layer in glass and silicon using plasma source ion implantation, IEEE International Conference on Plasma Science, Santa Fe, NM, June 1994, p 166.

25 S.A. Cohen, T. Bennett, D. Carroll, T.K. Chu, M.J. Goeckner, P. Lucas, J Park and Z. Wang An undergraduate laboratory course taught in the concentrated-study format, American Physical Society - Division of Plasma Physics, Louisville, KY, Nov. 1995 Bulletin of the American Physical Society 40, 1689 (1995)

26 M.J. Goeckner and S.A. Cohen A plasma-based source of hyperthermal neutral atoms, American Physical Society - Division of Plasma Physics, Louisville, KY, Nov. 1995 Bulletin of the American Physical Society 40, 1773 (1995)

27 M.J. Goeckner, J Park, T.K. Bennett and S.A. Cohen Ashing of photoresist with a plasma-based source of hyperthermal neutral atoms, American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

28 Z.H. Wang M.J. Goeckner and S.A. Cohen Development and measurement of hyperthermal neutral beams, American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

29 J Park, T.K. Bennett, M.J. Goeckner and S.A. Cohen Formation of a steep electron temperature gradient and radiation zone in a high density linear plasma device, American Vacuum Society 43rd National Symposium, Philadelphia, PA, Oct. 1996

30 S.A. Cohen, Jaeyoung Park, T. Bennett and M.J. Goeckner Particle and heat transport on thermally collapsed plasmas in a linear divertor simulator, American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996 Bulletin of the American Physical Society 41, (1996)

31 Jaeyoung Park, S.A. Cohen, T. Bennett and M.J. Goeckner Studies of emission spectroscopy on thermally collapsed plasmas in a linear divertor simulator, American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996 Bulletin of the American Physical Society 41, (1996)

32 Z.H. Wang, S.A. Cohen and M.J. Goeckner Detection of hyperthermal neutral beams, American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996 Bulletin of the American Physical Society 41, (1996)

33 M.J. Goeckner, Jaeyoung Park, T.K. Bennett, Z. Wang and S.A. Cohen Characterization of a plasma-based source of hyperthermal neutrals, American Physical Society - Division of Plasma Physics, Denver, CO, Nov. 1996 Bulletin of the American Physical Society 41, (1996)

34 Zhehui Wang, S. A. Cohen and M. J. Goeckner Measurements of velocities of energetic neutral atoms in a dc magnetron, American Physical Society - Division of Plasma Physics, Pittsburgh, PA, Nov. 1997 Bulletin of the American Physical Society 42, (1997)

35 Ce Li, S. A. Cohen and M. J. Goeckner Ashing of photoresist with a plasma-based source of hyperthermal neutral atoms, American Physical Society - Division of Plasma Physics, Pittsburgh, PA, Nov. 1997 Bulletin of the American Physical Society 42, (1997)

36 M.J. Goeckner, T.K. Bennett, S.A. Cohen and J. Park Plasma characteristics in a surface-neutralization-based neutral beam, American Vacuum Society 44th National Symposium, San Jose, CA, Oct. 1997

37 D. Lenoble, M.J. Goeckner, S.B. Felch, J. Galvier and A. Grouillet Evaluation of plasma doping for sub-0.18 µm devices, 12th International Conference on Ion implantation Technology ’98, Kyoto, JP, June 1998

38 M.J. Goeckner, S.B. Felch, J. Weeman, S. Mehta and J.S. Reedholm

Evaluation of charging damage test structures for ion implantation processes, American Vacuum Society 45th National Symposium, Baltimore, MD, on November 2-6, 1998.

39 S. Felch, A. Oberhofer, M. Goeckner, V. Chia, M. Poulakos, W. A. Keenan, and B. Gordon Electrical profiling of ultra-shallow junctions, Fifth International Workshop on the Measurement, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, Research Triangle Park, NC, on March 28-31, 1999.

40 S.B. Felch, M.J. Goeckner, Z. Fang, D. Lenoble, J. Galvier, A. Grouillet, G.C-F. Yeap, D. Bang, M-R. Lin Plasma doping for shallow junctions, 1st International Conference on Advanced Materials and Processes for Microelectronics, San Jose, CA, on March 15-19, 1999.

41 M.J. Goeckner, S.B. Felch, J. Weeman, and J. Erhardt, Evaluation of tests to examine charging damage in ion implantation and plasma processes: using controlled stress environments, Proceedings of the 2000 International Conference on Ion Implantation Technology, Alpbach, Austria, Sept. 17-22, 2000

42 M.J. Goeckner, J.M. Marquis, B.J. Markham and A.K. Jindal, A modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions, Gaseous Electronics Conference, Houston, TX October 24-27, 2000 Bulletin of the American Physical Society 45 (2000).

43 A.K. Jindal, J.M. Marquis, B.J. Markham and M.J. Goeckner, A flexible plasma system for the study of plasma-surface-gas interactions, Gaseous Electronics Conference, Houston, TX October 24-27, 2000 Bulletin of the American Physical Society 45 (2000).

44 J.M. Marquis, S. Srinivasan, M.H. Khater, L.J. Overzet and M.J. Goeckner, Inductively coupled plasma source symmetry in the presence of a current node, Gaseous Electronics Conference, Houston, TX October 24-27, 2000 Bulletin of the American Physical Society 45 (2000).

45 E.A. Joseph, S.P. Sant, L.J. Overzet, M. Goeckner and M.J. Kushner, Investigation and Modeling of Plasma-Wall Interactions in Inductively Coupled Fluorocarbon Plasmas and the Effects of Chamber Dimension American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 – Nov 2, 2001.

46 A.K. Jindal, S.K. Kanakasabapathy, M.J. Goeckner and L.J. Overzet, A Novel Approach to Time Resolved Langmuir Probe Measurements American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 – Nov 2, 2001.

47 S. Srinivasan, L.J. Overzet and M.J. Goeckner ICP Source Designs with Azimuthal Field Symmetry Despite a Current Node American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 – Nov 2, 2001.

48 L.J. Pratti, J.M. Marquis, M. Goeckner and L.J. Overzet,

Scalability of Innovative ICP Source Geometries American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 – Nov 2, 2001.

49 Y. Lei, E.A. Oakes, M. Goeckner, S.B. Felch, Z. Fang and B.-W. Koo, Study of Pulsed Plasma Doping by Experimental Diagnostics and HPEM Simulations American Vacuum Society 48th National Symposium, San Francisco, CA, on Oct 28 – Nov 2, 2001.

50 S. Srinivasan, L. Pratti, L. Overzet, M.J. Goeckner Current Nodes on Inductively Coupled Plasma Sources Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 45, 2002.

51 Ashish Jindal, M.J. Goeckner, L.J. Overzet FTIR Analysis of Etch Products in Ion-Ion and Electron-Ion Cl2 Discharges Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 21, 2002.

52 M.J. Goeckner, E.A. Joseph, Y. Liu, L.J. Overzet, S. Sant, B. Zhou The modified Gaseous Electronics Conference (mGEC) research reactor Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

53 Yu Lei, L.J. Overzet, S.B. Felch, Ziwei Fang, B.-W. Koo, M.J. Goeckner, Langmuir probe diagnostics of pulsed plasma doping system Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 42, 2002.

54 B. Zhou, E.A. Joseph, Y. Liu, L.J. Overzet, M.J. Goeckner Studies of plasma chemistry in a modified Gaseous Electronics Conference (mGEC) research reactor Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

55 S. Sant, E.A. Joseph, Y. Liu, L.J. Overzet, B. Zhou, M.J. Goeckner Simulation of plasma chemistry in a modified Gaseous Electronics Conference (mGEC) research reactor Gaseous Electronics Conference, Minneapolis, MN, Oct 14-18, 2002. Bull. American Phys. Soc. 47, No. 7, page 19, 2002.

56 A.K. Jindal, A.J. Prengler, L.J. Overzet, M.J. Goeckner, Analysis of Downstream Etch Chemistry in Ion-Ion and Electron-Ion Cl2 Discharges, American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003 AVS Technical Program, page 83.

57 S.P. Sant, E.A. Joseph, Y. Liu, B. Zhou, L.J. Overzet and M.J. Goeckner Influence of chamber geometry on electronegative and electropositive plasmas. Indian National Plasma Symposium” BIT Ranchi, India, 7 -12 Dec. 12, 2003.

58 E.A. Joseph, L.J. Overzet, M.J. Goeckner, D.S. Park, M.Tinker and J.B. Lee, Optical Characterization of Poly-Dimethyl Siloxane (PDMS) during Inductively Coupled Plasma Processing for Implementation in a PDMS-based Photonic Crystal, American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003 AVS Technical Program, page 90.

59 B. Zhou, E.A. Joseph, S.P. Sant, L.J. Overzet and M.J. Goeckner,

Study Of The Gas Phase Fluorocarbon Chemistries In A Modified Gaseous Electronics Conference Plasma Reactor Using Fourier Transform Infrared Spectroscopy And Ellipometry, American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003 AVS Technical Program, page 152.

60 E.A. Joseph, B. Zhou, S.P. Sant, L.J. Overzet, M.J. Goeckner and B.E. Gnade The Role of Chamber Dimension in Fluorocarbon Etchng of SiO2 and its Effects on Gas and Surface-Phase Chemistry, American Vacuum Society International Symposium, Baltimore, MD, Nov 2-7, 2003 AVS Technical Program, page 152.

61 E. A. Joseph, B. Zhou, S. P. Sant, M. J. Goeckner and L. J. Overzet, Characterization of Fluorocarbon Plasma-Surface Interactions Using in-situ Fourier Transform Infrared Spectroscopy and in-situ Spectroscopic Ellipsometry. 5th International Workshop on Fluorocarbon Plasmas, Col de Porte 38700 Sarcenas – France, March 8-12 (2004).

62 E. A. Joseph, M. J. Goeckner and L. J. Overzet, D.S. Park, M. Tinker and J.B. Lee, D. Gidley, B. E. E. Kastenmeier Characterization of Plasma-Substrate Interactions as a Function of Feedgas Composition Using In-Situ Spectroscopic Ellipsometry, 5th International Workshop on Fluorocarbon Plasmas, Col de Porte 38700 Sarcenas – France, March 8-12 (2004).

63 E. A. Joseph, M. J. Goeckner, L. J. Overzet, D. Gidley, and B. E. E. Kastenmeier, Correlation of Nano-Pore Structure to Integration Issues for Low-k Interconnects. UTD’s January Graduate Student Presentations, Jan 12 (2004).

64 A.K. Jindal, A.J. Prengler, J.R. Frautschi, L.J. Overzet, M.J. Goeckner, In-Situ FTIR Characterization of Gas Phase Chemistry in Continuous and Pulsed Inductively Coupled 1,3-Butadiene Discharges in a Gec Cell, Cross-Correlated Paper PS-MoP8 American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

65 B.S. Zhou, E.A. Joseph, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Spectroscopic Study of Effect of Wall Conditions on Gas Phase and Surface Phase Chemistries in Inductively Coupled Fluorocarbon Plasmas Paper PS-TuP3 American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

66 E.A. Joseph, M.J. Goeckner, L.J. Overzet, D.W. Gidley, and B.E.E. Kastenmeier The Effects of Pore Morphology on the Diffusive Properties of a Porous Low-K Dielectric Paper PS1-MoM5 American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

67 S.P. Sant, E.A. Joseph, B.S. Zhou, L.J. Overzet, M.J. Goeckner Langmuir Probe Measurements of Change in Plasma Parameters with Change in Chamber Geometry in Electronegative Plasmas Paper PS2-WeM1 American Vacuum Society 51st International Symposium, Anaheim CA, Nov 2004

68 E.A. Joseph, M.J. Goeckner, L.J. Overzet, D.W. Gidley H.G. Peng B.E.E. Kastenmeier, Reducing Fluorine in-diffusion during CF4 plasma processing of porous low-k dielectrics

15th International Colloquium on Plasma Processes (CIP 05) Grenoble, France, June 2005 69 Y. Liu, L.J. Overzet, M.J. Goeckner

Low temperature Al Atomic layer deposition using Methyl prollidiene Alane American Vacuum Society International Topical Conference on Atomic Layer Deposition, San Jose CA, August 2005

70 A.K. Jindal, L.J. Overzet, M.J. Goeckner FTIR characterization of the gas phase chemistry in pulsed 1,3-butadiene discharges in a Gaseous Electronics Conference (GEC) Cell Paper: DM2.00002 58th Gaseous Electronics Conference, San Jose, CA, October 2005

71 S.P. Sant, E.A. Joseph, B.S. Zhou, L.J. Overzet, M.J. Goeckner, Influence of chamber scaling on different level polymerizing processing gases Paper: DM2.00003 58th Gaseous Electronics Conference, San Jose, CA, October 2005

72 MJ Goeckner, D Ogawa, R Timmons, LJ Overzet and S Sanchez Direct injection of liquids into low pressure plasmas Paper: FPT1.00005 59th Gaseous Electronics Conference, Columbus, OH, October 2006

73 C Nelson, SP Sant, LJ Overzet and MJ Goeckner Influence of Ion Flux, Ion Energy, Fluorine Availability, and Surface Temperatures on SiO2 Etch Rates in FC Plasmas Paper: VF1.00002 59th Gaseous Electronics Conference, Columbus, OH, October 2006

74 MJ Goeckner, AK Jindal and LJ Overzet in-situ FTIR characterization of the plasma chemistry as functions of the plasma duty cycle and peak power in a 1,3-butadiene discharge in an inductively coupled Gaseous Electronics Conference (GEC) Cell. Paper: FPT2.00018 59th Gaseous Electronics Conference, Columbus, OH, October 2006

75 L. Tao, S. Ramachandran, C. T. Nelson, T. H. Lee, L. J. Overzet, M. J. Goeckner, M. J. Kim, G. S. Lee and W. Hu, Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography, Materials Research Society (MRS) Fall meeting, J13.4, Boston MA, Nov. 27-Dec. 1, 2006.

76 S. Ramachandran, L. Tao, T.H. Lee, L. J. Overzet, M. J. Kim, M. J. Goeckner, G. S. Lee, and W. Hu, "Diamond-Like-Carbon Coating on Nanoimprint Templates to Increase Wear Resistance", 50th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), May 2006.

77 Krutarth Trivedi, Caleb Nelson, Li Tao, Mathew Goeckner, Walter Hu, “High-density organic light emitting diodes by nanoimprint technology”, International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2007, Denver, CO.

78 L. Tao, C. T. Nelson, K. Trivedi, S. Ramachandran, M. Goeckner, L. Overzet, and Walter Hu, “Sub-50 nm scratch-proof DLC molds for reversal nanoimprint lithography”, International conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) May 2007, Denver, CO.

79 M.J. Goeckner, G. Pardon-Wells, B Jarvis, A,K. Jindal Controlling gas chemistry in process tools for control of surface processes, Proceedings of the 5th International Symposium on Advanced Plasma Processes and Diagnostics, Suwon, Korea, April. 6-7, 2007 Note the final 3 authors were accidentally dropped from the final manuscript by the publisher

80 M. Mandra, R. Dussart, J.-B. Lee, M.J. Goeckner, T. Dufour, P. Lefaucheux, P. Ranson, L. Overzet Fabrication process and electrical characterization of direct current parallel micro-discharges in helium, Paper: FTP1.00008 60th Gaseous Electronics Conference, Arlington, VA, October 2007

81 D. Ogawa , M. Goeckner, A. Sra, R. Timmons , L. Overzet Direct liquid droplet injection for PECVD, Paper: SRP1.00008 60th Gaseous Electronics Conference, Arlington, VA, October 2007

82 I. Saraf, M. Goeckner , L. Overzet Modeling the direct injection of liquid droplets into low-pressure environments and plasmas, Paper: SRP1.00009 60th Gaseous Electronics Conference, Arlington, VA, October 2007

83 S. Ramachandran, L. Overzet, W. Hu , L.S.N. Tao, G.-S. Lee, C. Nelson , M. Goeckner Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges, Paper: ET1.00006 60th Gaseous Electronics Conference, Arlington, VA, October 2007

84 L. Tao, C. Nelson, S. Ramachandran, L. Overzet, M. Goeckner, G.S. Lee, and W. Hu, Stability of nanostructured DLC molds for nanoimprint lithography, Materials Research Society (MRS) Fall meeting, Boston, Nov. 2007.

85 M.J. Goeckner. The fundamentals of surface deposition and etch for flexible materials. 2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

86 Gabriel Padron-Wells, Brandon Jarvis and M.J. Goeckner Development of films for bio-compatible electronics 2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

87 D. Ogawa, I. Saraf, M.J. Goeckner, A. Sra and L.J. Overzet Direct liquid droplet injection for PECVD of flexible thin films. 2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas at Dallas, Richardson, Texas, December 3, 2007

88 Gabriel Padron-Wells, Brandon Jarvis, Ashish K. Jindal, Matthew Goeckner Development of Films for Bio-Compatible Electronics UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

89 Richard Pierce, Gabriel Padron-Wells, Brandon Jarvis, Matthew Goeckner

Preliminary Results From A Pulsed Hexane Plasma UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

90 D. Ogawa, I. Saraf, M.J. Goeckner, A. Sra and L.J. Overzet. Direct liquid droplet injection for PECVD of organic thin films. UT Metroplex Day, UT Southwestern, Dallas TX February 15, 2008

91 J. Hosch, Stephan Thamban, Matthew Goeckner (Names not all listed on abstract – but they are on the talk) New Technique for Generating OES Emissions for Semiconductor Process Control AEC/APC Symposium XX Salt Lake City, Utah, USA 4-8 October 2008 International SEMATECH Manufacturing Initiative, Curran, 2011

92 Thierry Dufour, Monali Mandra, Matthew Goeckner, Philippe Lefaucheux, Pierre Ranson , Jeong-Bong Lee, Remi Dussart , Lawrence Overzet Ignition of parallel Micro Hollow Cathode Discharges in He without ballasts 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

93 Daisuke Ogawa, Iqbal Saraf, M. Goeckner, L. Overzet The affects of micro-droplet injection on low pressure plasmas 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

94 Caleb Nelson, Sanket Sant, Lawrence Overzet, Matthew Goeckner Surface Control as a Function of Processing Conditions in an FC Plasma Environment 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

95 G. Padron-Wells, Brandon Jarvis, Ashish K. Jindal, M.J. Goeckner Development of Bio-Compatible Films for Implantable Electronics 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

96 Iqbal Saraf, Daisuke Ogawa, Matthew Goeckner, Lawrence Overzet Modeling the direct injection of binary liquid droplets into low-pressure environments and plasmas 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

97 PL Stephan Thamban, Daniel Self, Jimmy Hosch, Matthew Goeckner, An e-Beam Source for Optical Emission Spectroscopy 61st Annual Gaseous Electronics Conference, Dallas, Texas, October 13–17, 2008

98 G. Padron-Wells, I.C. Estrada-Raygoza, L.J. Overzet, M.J. Goeckner Pulsed plasma polymerization of Ethylene Glycol for development of ultra thin biocompatible interfaces 62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

99 Matthew Goeckner Plasma surface interactions in fluorocarbon systems 62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

100 Caleb Nelson, Iqbal Saraf, Lawrence Overzet, Matthew Goeckner (C. Nelson won “Best Student Paper” Prize of the conference.) Temperature Impact on Plasma-Surface Interactions in an FC Plasma Environment 62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

101 Iqbal Saraf, Matthew Goeckner, Lawrence Overzet Initial Studies of Deep Silicon Etch

62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

102 Daisuke Ogawa, Lawrence Overzet, Matthew Goeckner Plasma parameter variations during liquid droplet injection into low pressure plasmas 62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

103 Monali Mandra, Lawrence Overzet, Matthew Goeckner, Thierry Dufour, Remi Dussart, Philippe Lefaucheux Electrical characterization of Direct Current atmospheric pressure micro discharges using Radio frequency signal in Argon 62nd Annual Gaseous Electronics Conference, Saratoga Springs, New York, October 20–23, 2009

104 M. Mandra, L. Overzet (presenting), M. Goeckner, J.-B. Lee, T. Dufour, R. Dussart, P. Lefaucheux, P. Ranson. Recent work on Atmospheric Pressure MHCD at UTD in collaboration with GREMI. 2nd Workshop on Radio-Frequency Discharges, Presquile-de-Giens France, May 2009.

105 I. Saraf, M. Goeckner, L. Overzet Fundamentals of Deep Silicon Etch GRC Analog and Mixed Signal Devices Review, Austin, TX, June 2009.

106 T. Dufour, R. Dussart, L. Overzet, M. Mandra, J.B. Lee, M. Goeckner, P. Lefaucheux, P. Ranson Ignition and characterization of Micro Hollow Cathode Discharges in Helium., 17th International Colloquium on Plasma Processes, Marseille France, June 2009.

107 I. Saraf, M. Goeckner, L. Overzet Fundamentals of Deep Silicon Etch (Presentation and Poster) SRC TECHCON 2009, Austin, TX, Sept. 2009.

108 R. Dussart, T. Dufour, L. Overzet, M. Mandra, J.B. Lee, M. Goeckner, L. Pitchford, N. Sadeghi, P. Lefaucheux, P. Ranson Experiment and Simulation Results of Limited Cathode Area MHCDs Operating in He, AVS 56th International Symposium & Exhibition, San Jose CA, Nov. 2009.

109 Iqbal Saraf , Matthew Goeckner , Lawrence Overzet The Etch Step in MEMS Deep Silicon Etch 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive, October 4–8, 2010; Paris, France Plasmas Bulletin of the American Physical Society 55, Number 7

110 Remi Dussart , Mukesh Kulsreshath, Lawrence Overzet, Laurent Schwaederle, Thomas Tillocher , Julien Ladroue, Olivier Aubry , Philippe Lefaucheux, Matthew Goeckner , Pierre Ranson Micro Hollow Cathode Discharge Arrays in silicon devices 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive, October 4–8, 2010; Paris, France Plasmas Bulletin of the American Physical Society 55, Number 7

111 Daisuke Ogawa, Lawrence Overzet, Matthew Goeckner Droplet Measurements in Misty Plasmas 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive, October 4–8, 2010; Paris, France

Plasmas Bulletin of the American Physical Society 55, Number 7 112 Caleb Nelson, Lawrence Overzet , Matthew Goeckner

Interpreting Broadband Infrared Spectra with Variable Gas Temperatures in Fluorocarbon Plasmas 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, October 4–8, 2010; Paris, France Bulletin of the American Physical Society 55, Number 7

113 M.K. Kulsreshath, T. Dufour, P. Lefaucheux, O. Aubry, S. Dozias, P. Ranson, J.-B. Lee, M.J. Goeckner, L.J. Overzet, R. Dussart Micro-discharge Plasma using Silicon Platform AVS 57th International Symposium & Exhibition, Albuquerque, NM Nov. 2010.

114 R. Dussart, M.K. Kulsreshath, T. Dufour, L.J. Overzet, P. Lefaucheux, T. Tillocher, O. Aubry, S. Dozias, P. Ranson, M.J. Goeckner, J.-B. Lee Ignition and Extinction of a Micro Hollow Cathode Discharge Operating in DC Regime AVS 57th International Symposium & Exhibition, Albuquerque, NM Nov. 2010.

115 G. Padron-Wells, P.L.S. Thamban, J. Hosch, M.J. Goeckner Controllable Electron Beam for Optical Emission Studies in Real-Time Process Plasmas, AVS 57th International Symposium & Exhibition, Albuquerque, NM Nov. 2010.

116 D. Urrabazo, M.J. Goeckner, S. Thamban, G. Padron-Wells, Computer Simulation of a Controllable Electron Beam Exciter AVS 57th International Symposium & Exhibition, Albuquerque, NM Nov. 2010.

117 I.C. Estrada-Raygoza, P.L.S. Thamban, G. Padron-Wells, L.J. Overzet, M.J. Goeckner, Pulsed Plasma Polymerization of 2-Chloro-p- xylene, AVS 57th International Symposium & Exhibition, Albuquerque, NM Nov. 2010.

118 I. Saraf, M. Goeckner and L. Overzet Fundamentals of Deep Silicon Etch. (Oral and Poster, Awarded “Best in session.”) SRC TECHCON 2011, Austin TX, Sept. 2011.

119 I. Saraf, M. Goeckner, L. Overzet Fundamentals of Deep Silicon Etch GRC Analog and Mixed Signal Devices Review, Richardson, TX, Oct. 2011.

120 Robert L. Bates, Lawrence Overzet, Matthew Goeckner, David Urrabazo Jr. Hydrocarbons Global Model Using MATLAB 64th Annual Gaseous Electronics Conference, November 14–18, 2011; Salt Lake City, Utah Bulletin of the American Physical Society BAPS.2011.GEC.FTP1.39

121 Lawrence Overzet, Iqbal Saraf, Matthew Goeckner, Deposition Step in MEMS Time Multiplexed Etch 64th Annual Gaseous Electronics Conference, November 14–18, 2011; Salt Lake City, Bulletin of the American Physical Society BAPS.2011.GEC.NR1.4

122 Daisuke Ogawa, Matthew Goeckner, Lawrence Overzet, Study of evaporating droplet temperature in low pressure plasma 64th Annual Gaseous Electronics Conference, November 14–18, 2011; Salt Lake City, Bulletin of the American Physical Society BAPS.2011.GEC. QRP1.103

123 IC Estrada-Raygoza, G. Padron-Wells, P.L.S. Thamban, LJ Overzet, M.J. Goeckner Pulsed Plasma Studies of 2-chloro-p-xylene,

AVS 58th International Symposium & Exhibition, Nashville, TN Nov. 2011. 124 P.L.S. Thamban, G. Padron-Wells, J Hosch, M.J. Goeckner

Controlled Electron Beam Excitation Method to Study Process Chemistries, AVS 58th International Symposium & Exhibition, Nashville, TN Nov. 2011.

125 G. Padron-Wells, P.L.S. Thamban, J Hosch, LJ Overzert, M.J. Goeckner Fundamental Overview on a Controllable Optical Emission Spectroscopy Diagnostic System for Analysis of Process Chemistry, AVS 58th International Symposium & Exhibition, Nashville, TN Nov. 2011.

126 D Urrabazo, G. Padron-Wells, P.L.S. Thamban, M.J. Goeckner Fluid Model Simulation of Controllable E-beam, AVS 58th International Symposium & Exhibition, Nashville, TN Nov. 2011.

127 I. Saraf , M. Goeckner, L. Overzet Etch Step in MEMS Deep Silicon Etch SRC Publication ID: P060347, (2011) (4 pp.)

128 I. Saraf, M. Goeckner, L. Overzet Etch Step in MEMS Deep Silicon Etch SRC Publication ID: P060926, (2011) (16 slides)

129 I. Saraf , M. Goeckner, L. Overzet Fundamentals of Deep Silicon Etch SRC Publication ID: P061757, (2011) (39 slides)

130 L. Overzet, M. Goeckner, I. Saraf Report on the Understanding of Causes Behind Various Changes in Etch Profile Along with Recommendations on How to Improve and Optimize an Etch Process Based on This Understanding SRC Publication ID: P062259, (2011) (4 pp)

131 Robert L. Bates, Matthew Goeckner, Lawrence Overzet Seeking Methods to Reduce the Aspect Ratio Dependence in Deep Silicon Etch 65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TX Bulletin of the American Physical Society BAPS.2012.GEC. NW1.00028

132 Cassius Fagioli, David Urrabazo, Matthew Goeckner, Fourier Transform Infrared Spectroscopy of Trifluoroiodomethane ICP Discharge 65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TX Bulletin of the American Physical Society BAPS.2012.GEC. NW1.00071

133 David Urrabazo, Stephan Thamban, Jimmy Hosch, Matthew Goeckner Optimization of an electron beam exciter via plasma fluid model simulation 65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TX Bulletin of the American Physical Society BAPS.2012.GEC. PR1.00034

134 Daisuke Ogawa, Lawrence Overzet, Matthew Goeckner. The technique to measure the internal temperature of particulates/droplets: Two-color laser induced fluorescence 65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TX Bulletin of the American Physical Society BAPS.2012.GEC. PR1.00080

135 David Urrabazo, Matthew Goeckner Links between vortex formation and ambipolar flow in 2D ICP fluid simulations 65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, TX Bulletin of the American Physical Society BAPS.2012.GEC. SR1.00005

136 John Sibert, Matthew Goeckner, Dave Galley, Kory Goldammer Easing The Transfer Pathway: The Dallas STEM Gateways Collaborative 11th Annual Conference of the National Institute for the Study of Transfer Students, Jan 30 – Feb 1, 2013; Frisco, TX

137 John Poulose, Caroline Liu, Daisuke Ogawa, Matthew Goeckner, Lawrence Overzet, Vapor trapping of evaporated liquids during injection into low pressure plasma 66th Annual Gaseous Electronics Conference, Sept 30–Oct 4, 2013; Princeton, NJ Bulletin of the American Physical Society ISSN: 0003-0503

138 Caroline Liu, John Poulose, Daisuke Ogawa, Matthew Goeckner, Lawrence Overzet Injection of micron size droplets into vacuum 66th Annual Gaseous Electronics Conference, Sept 30–Oct 4, 2013; Princeton, NJ Bulletin of the American Physical Society ISSN: 0003-0503

139 David Urrabazo, Matthew Goeckner, Lawrence Overzet Secondary electron emission yield dependence on the Fermi level in Silicon 66th Annual Gaseous Electronics Conference, Sept 30–Oct 4, 2013; Princeton, NJ Bulletin of the American Physical Society ISSN: 0003-0503

140 Isabel C. Estrada-Raygoza, Stephan L. Thamban, Lawrence Overzet, Matthew Goeckner, Plasma polymerization of 2-chloro-p-xylene to produce a crystalline plasma parylene C film 66th Annual Gaseous Electronics Conference, Sept 30–Oct 4, 2013; Princeton, NJ Bulletin of the American Physical Society ISSN: 0003-0503

141 D. Ogawa, M.J. Goeckner, L.J. Overzet, Direct Liquid Injection into Low-Pressure Plasmas, AVS 60th International Symposium & Exhibition, Long Beach, CA Oct-Nov. 2013.

142 L. Overzet, R. Bates and M. Goeckner, Task ID: 2261.001 – Reduction of Aspect Ratio Dependency in Silicon Trench Etch, SRC DS Analog and Mixed-Signal Devices Review, Richardson, TX, 10/2013.

143 D. Ogawa, M. Goeckner and L. Overzet Technique of Liquid Injection into Low-Pressure Plasmas, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials. ISPLASMA. Nagoya, Japan, 01/2013.

144 D. Ogawa, M. Goeckner and L. Overzet, Internal Temperature of Ethanol Droplets in Low-Pressure Argon Plasmas, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials. ISPLASMA. Nagoya, Japan, 01/2013.

145 David Urrabazo, M.J. Goeckner, L.J. Overzet, Ion induced electron emission from semiconductors: The effect of conduction band electrons and surface electric fields, 5th International Symposium on Advanced Plasma Science and its Applications for 67th Annual Gaseous Electronics Conference, November 2–7, 2014; Raleigh, North Carolina BAPS.2014.GEC.FT1.3

146 David Urrabazo, M.J. Goeckner, L.J. Overzet, Ion Induced Electron Emission from Semiconductors: An Investigation into Fermi Level and Surface Electric Field Effects, American Vacuum Society 61st International Symposium, Baltimore MD, Nov 10-14,

2014 147 John Poulose, L.J. Overzet, M.J. Goeckner,

Temporally and Spatially Resolved Optical Emission Spectroscopy of Capacitively Coupled Pulsed Plasmas, American Vacuum Society 61st International Symposium, Baltimore MD, Nov 10-14, 2014

148 Robert Bates, M.J. Goeckner, P.L.S. Thamban, L.J. Overzet, Volumetric and Surface Chemistry of SF6/C4F8/Ar Gas Mixture, American Vacuum Society 61st International Symposium, Baltimore MD, Nov 10-14, 2014

149 K. Hernandez, A. Press, D. Urrabazo, M. Goeckner, L. Overzet A MEMS Approach to Making Quantitative Measurements of IIEE Yields in the Presence of Moderate Electric Fields AVS Texas Chapter Conference 2015 August 5th and 6th, 2015 University of Texas at Dallas

150 H.E. Schneider, A.G. Martinez, P.L.S. Thamban, A.V. Walker, M. J. Goeckner Plasma Polymerization of 3,4 - Ethylenedioxythiophene AVS Texas Chapter Conference 2015 August 5th and 6th, 2015 University of Texas at Dallas

151 J. Poulose, L.J. Overzet, M.J. Goeckner Spatial Oscillations and Frequency Shifts in Pulsed Capacitively Coupled Plasmas AVS Texas Chapter Conference 2015 August 5th and 6th, 2015 University of Texas at Dallas

152 Keith Hernandez, A. Press, D. Urrabazo, M.J. Goeckner, L.J. Overzet, A MEMS Approach to Making Quantitative Measurements of IIEE Yields in the Presence of Moderate Electric Fields, American Vacuum Society 62nd International Symposium, San Jose, CA, Oct 18-23, 2015

153 John Poulose, L.J. Overzet, S. Shannon, D. Coumou, M.J. Goeckner Spatial Oscillations and Frequency Shifts in Pulsed Capacitively Coupled Plasmas, American Vacuum Society 62nd International Symposium, San Jose, CA, Oct 18-23, 2015

154 L. Overzet, J. Poulose and M.J. Goeckner Impedance measurements of RF pulsed plasmas: Technique and results. AVS Texas Chapter Conference, August 3rd - 4th, 2016, University of Texas at Dallas

155 J. Poulose, L. Overzet, M.J. Goeckner Pulsed Capacitively Coupled Plasma Ignition: PROES and RF-IV Diagnostics AVS Texas Chapter Conference, August 3rd - 4th, 2016, University of Texas at Dallas

156 Marlyn G. Torres, Ariell Shield, Keith V. Hernandez, P.L. Stephan Thamban, Amuy V. Walker, Matthew J. Goeckner Adding Nanoparticles to Plasma Polymerized 3, 4-ethylenedioxythiophene (EDOT) AVS Texas Chapter Conference, August 3rd - 4th, 2016, University of Texas at Dallas

157 S. Patel, A. Gemsheim, L. Overzet, M. Goeckner Plasma Sterilization AVS Texas Chapter Conference, August 3rd - 4th, 2016, University of Texas at Dallas

158 John Poulose, M.J. Goeckner, L.J. Overzet,

Pulsed Capacitively Coupled Plasma Ignition: PROES and RF-IV Diagnostics, American Vacuum Society 63rd International Symposium, Nashville, TN, Nov 6-11, 2016

159 John Poulose, Lawrence Overzet, M.J. Goeckner, S. Shannon, D. Coumou, Nonlinear Frequency Pull in Pulsed Capacitively Coupled Plasmas, American Vacuum Society 63rd International Symposium, Nashville, TN, Nov 6-11, 2016

External funding for original investigations: (Total External funding ~$6,528,371 as of Dec 2016) (Total Internal funding w/o startup ~$607,563 as of Dec 2016) Projects when I am listed as “contributor” are not included.

Title: EQUIPMENT DONATION CVD tool (Operational) (Prototype of Unaxis tool) Temescal e-beam Evaporation tool (Operational) Assorted vacuum fitting and flanges Assorted electronic measure tools Assorted power supplies

Funding agent: Varian Semiconductor Equipment Associates 09/01/99, >$250,000 (est. based online resale price of CVD and e-beam tools at that time. Other parts might have been worth additional $50,000) Title: HIGH DENSITY PLASMA SOURCE TECHNOLOGY PI: Lawrence J Overzet, Co-PI: Matthew Goeckner Funding agent: Texas Coordinating Board Applied Technology Program 01/01/00•12/31/01, $78,805 (Additional support: $30,000 from UTD) Title: RESEARCH RELATED TO PLASMA DOPING (PLAD) PI: Matthew Goeckner Funding agent: Varian Semiconductor Equipment Associates 10/1/00-12/31/01, $63,000 Title: A STUDY OF THE INTERACTIONS BETWEEN SURFACES, NEUTRAL GAS AND THE PLASMA IN LOW-TEMPERATURE DISCHARGES. PI: Matthew Goeckner, Co-PI: Lawrence J Overzet (Mark J Kushner – unfunded) Funding agent: National Science Foundation/Department of Energy 8/1/00-7/31/03, $419,000 01/15/03, REU Supplemental $10,000 (Additional support: $2,000 from UTD) Title: ACQUISITION OF A PLASMA SCIENCE RESEARCH AND RESEARCH TRAINING LABORATORY AT UTD PI: Lawrence J Overzet, Co-PIs: Matthew Goeckner, Austin Cunningham, Rod Heelis and Greg Earle Funding agent: National Science Foundation 08/01/00-7/31/02, (no cost extension to 7/03) $579,898 (Additional support: $260,656 from UTD) Title: EQUIPMENT DONATION

Dry pump Oil pump 450 L turbo pump Large vacuum chamber Small vacuum chamber

UTI mass spec Rack of electronics Shelf of electrical components Chiller Other Equipment

Funding agent: Varian Semiconductor Equipment Associates 09/01/02, $115,000 (Varian est.) Title: PLASMA ENHANCED CHEMICAL DEPOSITION OF MEDICALLY USEFUL THIN FILMS PI: L. J. Overzet (PI) and M. J. Goeckner (Co-PI). Funding Agent: Western Life Sciences, 09/02 – 08/03: $35,500 Title: MULTIBEAM LASER CVD PI: Matthew Goeckner, Co-PI: Lawrence J Overzet Funding agent: Lockheed Martin 03/01/03-09/28/04, $125,000 Title: MEASUREMENT OF OPTICAL PROPERTIES. PI: L. J. Overzet (PI) and M. J. Goeckner (Co-PI). Funding Agent: Honeywell Inc. 09/09/03: $350 Title: HELP IN DETERMINING THE OPTICAL PROPERTIES OF VARIOUS LAMPS. PI: L. J. Overzet (PI) and M. J. Goeckner (Co-PI). Funding Agent: Raytheon Systems Company 08/04: $1000 Title: EQUIPMENT DONATION

About 50 boxes of 4”, 5”, 6” and 8” wafers. ~5 Reactor chamber tops (RIE and Ashing systems), 3 RF power supplies (not operational), and 3 matching networks. Placed in the clean room and used with the MRI grant.

PI: L. J. Overzet (PI) and M. J. Goeckner (Co-PI). Funding Agent: Photronics Inc., 08/04: Estimated value unknown. Title: HELP IN GROWTH OF THIN ORGANIC FILMS, PI: L. J. Overzet (PI) and M. J. Goeckner (Co-PI). Funding Agent: Western Life Sciences, 11/04 – 03/05: $24,200 Title: EQUIPMENT DONATION

2 MagLev Turbo Pumping systems PI: Matthew Goeckner, Funding agent: Novellus

05/01/05, $50,000 (Novellus est.) Title: SUMMER UNDERGRADUATE RESEARCH FELLOWSHIP PROGRAM Contract 70NANB5H1054 PI Matthew Goeckner Funding agent: NIST 6/05 – 8/05 $2500 Title: PULSED PLASMA SYNTHESIS OF NEW NANOSTRUCTURED INORGANIC/ORGANIC COMPOSITE MATERIALS PI: Lawrence J Overzet, Co-PI: Matthew Goeckner (with Richard Timmons at UTA) Funding agent: Spring (Air Force) 6/05-6/07 – extended to 6/08, $120,000 (Additional support: $40,000 from UTD and additional funds at UTA) Title: STUDENT SUPPORT FOR OPTICAL EMISSION SPECTROSCOPY OF FEEDGAS INJECTION PI: Lawrence J Overzet, Co-PI: Matthew Goeckner Funding agent: Entegris 9/05-3/06: $11,264 Title: LITERATURE AND PATENT SEARCH OF PLASMA EXCITER TECHNOLOGIES FOR VERITY INSTRUMENTS PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 3/07-6/07: $20,100 (Additional support: $6,700 from UTD.) Title: DEVELOPMENT OF A PLASMA EXCITER PRODUCT FOR VERITY INSTRUMENTS PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 7/07-8/08: $126,570 (Additional support: $42,000 from UTD.) Title: EQUIPMENT DONATION

60 MHz Power Supply 60 MHz Match System

PI: Matthew Goeckner, Funding agent: Applied Materials 06/01/08, $25,000 (AMAT est.) Title: GIFT FOR UNDERSTANDING PLASMA-WALL INTERACTIONS IN VERY HIGH FREQUENCY (VHF) CAPACITIVELY COUPLED (CC) ETCH PLASMAS PI: Matthew Goeckner, Funding agent: Applied Materials 06/01/08, $74,800 (Cash gift)

Title: OPTIMIZATION OF A PLASMA EXCITER PRODUCT FOR VERITY INSTRUMENTS Part 2 PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 7/08-8/09: $131,908.50 (Additional support: $20,000 from UTD.) Title: FUNDAMENTALS OF DEEP SILICON ETCH PI: L.J. Overzet, co-PI Matthew Goeckner Funding agent: SRC 8/08-12/11: $165,000 Title: DALLAS STEM GATEWAYS COLLABORATIVE PI: Robert Hilborn, co-PI Matthew Goeckner, J Sibert, Martha Hogan (Richland CC), David Galley (Collin College) Funding agent: NSF 9/09-8/14: $2,498,876 Title: PROPOSAL OF SHORT-TERM ACCEPTANCE OF JAPANESE YOUNG RESEARCHERS TO INTERNATIONAL CENTER FOR ADVANCED MATERIALS PROCESSING, UNIVERSITY OF TEXAS AT DALLAS, PI: Matthew Goeckner, Funding agent: Plasma Nanotechnology Research Center (PLANT), Nagoya University 9/09- : Student exchange Title: MICROMISTED PLASMAS, PI: LJ Overzet, co-PI Matthew Goeckner, Funding agent: DOE 8/09-07/12: $399,000 Title: MICROMISTED PLASMAS EQUIPMENT SUPPLEMENT, PI: LJ Overzet, co-PI Matthew Goeckner, Funding agent: DOE 11/09-02/11: $78,000 Title: OPTIMIZATION OF A PLASMA EXCITER PRODUCT FOR VERITY INSTRUMENTS Part 3 PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 8/09-7/10: $64,323 Title: MRI: DEVELOPMENT OF A CONTROLLABLE OPTICAL EMISSION SPECTROSCOPY DIAGNOSTIC SYSTEM FOR USE IN ATOMIC AND MOLECULAR SCIENCES PI: Matthew Goeckner, Funding agent: NSF (with UTD and Verity match) 8/09-7/12: $481,150 + 206,207 match

Title: GIFT for OPTIMIZATION OF A PLASMA EXCITER PRODUCT FOR VERITY INSTRUMENTS Part 3 PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 8/09-7/10: $14,700 (cash) Title: GIFT for OPTIMIZATION OF A PLASMA EXCITER PRODUCT FOR VERITY INSTRUMENTS Part 3 PI: Matthew Goeckner, Funding agent: Verity Instruments (Dr. Jimmy Hosch) 8/11-7/12: ~$40,500 (Equipment) Experiences in Applied Low Temperature Plasmas: Student Travel Support to Attend the 2011 American Vacuum Society International Symposium in Nashville, TN PI Matthew Goeckner Funding Agent: NSF 8/11-6/12: $5,000 Collaborative proposal: NSF I/UCRC Joining "Center for Lasers and Plasmas for Advanced Manufacturing" PI Matthew Goeckner, co-PIs LJ Overzet, Steve Shannon (NCSU) Funding Agent: NSF 8/11-7/11: $23,000 ($13,000 to UTD) (Following the I/UCRC model, this will end up with ~$200,000+/year in funding. Start date ~ Jan 2013) Reduction of Aspect Ratio Dependency in Silicon Trench Etch. PI: L. Overzet, Co-PI M. Goeckner. Funding Agent: Semiconductor Research Corporation – Texas Instruments, 03/12–01/13, $45,000 Title: Materials World Network: Visible Light Nanocomposite Photocatalysts PI: Amy Walker co-PI: Matthew Goeckner Funding agent: NSF 7/12-6/15: $385,761 Matching portion funded by Fonds National de la Recherche (Luxembourg) to PI Damien Lenoble (CRP-GL Luxembourg) Subcontract via UIUC: I/UCRC Center for Lasers and Plasmas for Advanced Manufacturing" NSF: IIP1338917 PI Matthew Goeckner, co-PIs LJ Overzet Funding Agent: NSF and funding from LAM and AMAT 8/13-9/14: $70,000 9/14-9/15: $70,000

Subcontract via UIUC: I/UCRC Center for Lasers and Plasmas for Advanced Manufacturing" NSF: IIP 1540030 PI Matthew Goeckner, co-PIs LJ Overzet Funding Agent: NSF and funding from LAM and AMAT 9/15-9/16: $63,000 9/16-9/17: $63,000

External donations for university programs/operations: Title: The Pioneer Partnership with UT Dallas Department of Mathematical Sciences Funding agent: Pioneer Natural Resources (Member of External Advisory Council) Purpose: “To help recruit graduate students who have abilities that are on par with, or stronger than, UT Dallas’ undergraduate student population, e.g. among the best in the US” 1/14-12/16: $75,000

Classroom teaching: All class reviews after Summer 2001 are on the web at:

http://provost.utdallas.edu/coursebook/evaluationsearch Prior Teaching Summers 1995-97 Princeton University (Unpaid) Lecturer and Laboratory Teacher Historically Black Colleges and Universities Summer Program National Undergraduate Fellowship Program 1999 Fall Advanced Mathematics II, EE 4300, Enrollment 47

The course as whole was: 2.32/5 The textbook overall was: 1.60/5 The instructor overall was: 2.12/5 The instructor’s contrib. to your understanding: 2.17/5

Spring 2000 Electromagnetism I, EE4301, Enrollment 25

The course as whole was: 2.92/5 The textbook overall was: 1.60/5 The instructor overall was: 3.14/5 The instructor’s contrib. to your understanding: 3.25/5

Fall 2000 Electromagnetism I, EE4301, Enrollment 43

The course as whole was: 3.13/5 The textbook overall was: 3.13/5 The instructor overall was: 3.30/5 The instructor’s contrib. to your understanding: 3.15/5

Spring 2001 Plasma Sciences, EE6318/Phys6383 (EE6383 in new catalog), Combined enrollment 23

The course as whole was: 3.63/5 The textbook overall was: 3.42/5 The instructor overall was: 3.67/5 The instructor’s contrib. to your understanding: 3.88/5

Administration and curricular development, etc: - Develop new plasma classes and laboratories (2000-2001) - Seek funding to develop new micro-devices processing lab (2000 and 2001) - Undergraduate curriculum committee (1999-2000) - Graduate admissions committee (2000-2004) - Chair Graduate admissions committee (2004) - Faculty Senate (2003-2004) - Cleanroom committee (2000- 2006) - Jan Van der Ziel equipment disposal committee (2001)

- Undergraduate honors track committee (2001-2007) - Microelectronics Faculty Search committee (2000-2003) Note this committee hired the faculty needed to start the Mat Sci program - Jan Van der Ziel fellowship committee (2005 - 07) - Chair EE Undergraduate curriculum committee (2006 - 2008) Note this committee completely redid the EE UG curriculum - Quality Enhancement Program (2007-2008) - Gateways to Excellence in Math and Science (2008- 11) - Interim Head, Mechanical Engineering (2008-2009) - Associate Head, Mechanical Engineering (2009-2011) - Head, Mathematical Sciences (2011-2015) - Associate Dean, Natural Sciences and Math (2015- )

Service – reviewing, refereeing and administrative work with professional societies and organizations; departmental, college, university committees; community service, etc - Chair, Proto committee to rewrite the bylaws and reestablish the Texas Chapter of the

American Vacuum Society (2015-16) [The chapter was re-establish in January 2016 with the newly elected board taking over.]

- Past Chair, Plasma Science and Technology Division of American Vacuum Society (2012-13)

- Chair, Plasma Science and Technology Division of American Vacuum Society (2011-12) - Chair Elect, Plasma Science and Technology Division of American Vacuum Society (2010-

11) - Co-Local Secretary: 61st Gaseous Electronics Conference, Addison Texas, Oct, 2008 - Local Chair: 2008 Trans-Pacific Workshop on Flexible Electronics, The University of Texas

at Dallas, Richardson, Texas, Oct, 2008 - Local Chair: 2007 Trans-Pacific Workshop on Flexible Electronics, The University of Texas

at Dallas, Richardson, Texas, December 3, 2007 - Member: International Organizing committee 5th International Symposium on Advanced

Plasma Processes and Diagnostic & 1st International Symposium on Flexible Electronics April 2007 – Suwon, Korea

- Member: Local Organizing committee Gaseous Electronics Conference 2008 – Dallas TX - Reviewed SBIR proposals for NSF - Reviewed ‘DoE Lab’ proposals for DoE - Reviewed papers for Plasma Sources Science and Technology - Reviewed papers for IEEE Transactions on Plasma Sciences - Reviewed papers for J. Vacuum Science and Technology A - Reviewed papers for J. Vacuum Science and Technology B - Elected Member: Executive Committee of Plasma Science and Technology Division of

American Vacuum Society (1998-2001) - Member: Abstract selection committee Plasma Science and Technology Division of

American Vacuum Society (Most years after ~96) - Member: Abstract selection committee Manufacturing Science and Technology Division of

American Vacuum Society (2000)

- Member: Local organizing committee Plasma Based Ion Implantation Conference 2002 (San Antonio, TX).

- Coordinated Plasma Science and Technology Seminar series, Princeton Plasma Physics Lab (1995-97)

- Coordinated Plasma Science Seminar series, University of Texas at Dallas (2000-2001) - Session moderator: Gaseous Electronics Conference, Houston TX 2000 - Member: Program committee Plasma Science and Technology Division of American

Vacuum Society (2005) - Member: Local Organizing committee ICMI 2005 (for ICMI in Austin in 2006) - Founder and coordination board: Texas Semiconductor Processing Users Group (2005 -

2007) - Member UTD Quality Enhancement Plan committee (2007 - 2008)