mapping atomic structure at epitaxial interfaces€¦ · mapping atomic structure at epitaxial...
TRANSCRIPT
![Page 1: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/1.jpg)
Mapping Atomic Structure at Epitaxial Interfaces
Roy Clarke, University of Michigan,
Ann Arbor, MI
ERL X-ray Science Workshop: Almost Impossible Materials Science, June 16, 2006
Opportunities for interface science at the ERL
![Page 2: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/2.jpg)
Outline
At nanoscale, interfaces are everything
• Possible now: -3D maps of static thin-film/interface
structure with atomic resolution -Some dynamic information,including strain, phonons,domain walls…
• Opportunities for ERL:- ultrafast imaging at atomic scale- tracking growth, deposition processes- local probe of nano-structures
DeCamp, Reis et al. Nature, PRL
![Page 3: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/3.jpg)
Surface nano-patterning
Stransky-Krastanov mixed growth
Epitaxial Nanostructures
Volmer-Weber island growth
Van der Merwe layer-by-layer growth
Quantum dots,self-assembly
Quantum wells,Superlattices,
Tunneling devices
![Page 4: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/4.jpg)
Nosho, Barvosa-Carter, Yang, Bennett,WhitmanSurf. Sci. 465, 361 (2000).
NRL XSTM Results
InAs-on-GaSb:
...Sb-Ga-Sb-Ga-As In-As-In-As...
GaSb
InAs
GaSb-on-InAs:(“inverted interface”):…As-In-As-In-Sb-Ga-Sb-Ga...
No-common-atom superlattices
Epitaxial Nanostructures(example: “6.1Å system”)
Band-gap tunability 0.2eV to 1.3eV for IR applications– but difficult to control growth
![Page 5: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/5.jpg)
Band-gap tuning
Haugen et al. J. Appl. Phys. 96 (2004)
InAs
GaSb
Type II band alignment
InAs layer width (Å)
![Page 6: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/6.jpg)
EpitaxyEpitaxy and 2and 2D periodicityD periodicity
H
L
Reciprocalspace
Bragg Rods
2D periodic structure coherent with the substrate (aka “epitaxial film”)
measure I(q) alongeach rod
FILM
SUBSTRATE
If film and substrate are coherent then get interference fringes along the rods: Coherent Bragg Rod Analysis (COBRA)
![Page 7: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/7.jpg)
-31L Bragg Rod Profile for sample 811 (InAs on GaSb)
Log x-rayIntensity
L (reciprocal lattice units)
Weak fringescontain infoon film and interfacestructure
- large dynamic range: 14 orders!
(APS, undulatorbeam line ~ 2hrs/rodneed ~ 10 rods)
![Page 8: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/8.jpg)
S(q)
S(q+Δq)T(q)
T(q+Δq)
Approximation: U(q)= U(q+Δq)
In the complex plane
U(q)
S(q)
T(q)
T(q)= S(q) + U(q)
reference (substrate)
Unknown (film)total
Scattering factor
know only lengthof T(q)from intensity
Fourier transform of T(q)=> electron density
COBRA METHODSowwan et al. Phys. Rev. B 66, 205311 (2002).
![Page 9: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/9.jpg)
COBRA MAP of Group III (In,Ga) plane
InAs GaSb
Angstroms
9ML of GaSb on InAs• very coherent interface• surface roughness ~ 3ML
![Page 10: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/10.jpg)
As4
As4As2
Monolayer number
GaSb
InAs
GaSb
GaSb
Composition profilesdetermined from COBRA electron density maps
GamIn1-mSbnAs1-n
Assumes quaternary system:
InAs(4)
InAs(2)
o: m* : n
![Page 11: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/11.jpg)
5.85
5.9
5.95
6
6.05
6.1
6.15
20 30 40 50 60 70 80 90 100 110
Position(A)
Latti
ce s
paci
ng (A
)
Gr.V, site1
Gr.V, site2
Gr.III, site1
Gr.III, site2
Theory
GaSb on InAs lattice spacing
indicates GaAs -like interface
GaSbInAs
(Determined from Gaussian fit to electron density peaks)
![Page 12: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/12.jpg)
TEM of MBE TEM of MBE SuperlatticesSuperlattices
Jiang et al., APL 74, 2851 (1999).
Ferroelectric nanostructure
![Page 13: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/13.jpg)
+
-
[(BaTiO3)6/(SrTiO3) ]5 20
Ferroelectrics: Superlattice- Strain Effect
bulk BaTiO3
HRTEM image
strained BaTiO3
![Page 14: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/14.jpg)
COBRA MAP OF COBRA MAP OF FERROELECTRIC INTERFACEFERROELECTRIC INTERFACE
SrTiO3 PbTiO3
PbSr TiO(1) O(2)
a
b
EP
Sample made by MOCVD, Stephenson group –in-situ facility, APS
![Page 15: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/15.jpg)
COBRA results on ultrathin film of PbTiO3
Fong, Cionca, Yacoby, Stephenson, Eastman, Fuoss, Streiffer, Thompson, Clarke, Pindak, Stern, PRB 2005
Interface polarization reversal ?
![Page 16: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/16.jpg)
Towards the EFL…
Smaller and faster→ nm : fs
High rep-rate and tunability aregreat features!!
![Page 17: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/17.jpg)
ERL characteristics for in-situ materials dynamics studies
kW average power (fiber) lasers on the horizon (mJ/pulse at 1MHz)
USING EVERY X-RAY PHOTON
![Page 18: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/18.jpg)
UltrafastUltrafast Laser Deposition Laser Deposition
Xela
mp
RHEED: crystal phaseRHEED: crystal phase
Ellipsometry: thickness & n,kEllipsometry: thickness & n,k
MultiMulti--Target SelectorTarget Selector(4 targets with rotation)(4 targets with rotation)
22”” Substrate Holder:Substrate Holder:•• temperature: liquid Ntemperature: liquid N22 to 1000to 1000°°CC•• rotation & translationrotation & translation
Laser: 100 fs, 780 nm @ 10 HzLaser: 100 fs, 780 nm @ 10 Hz
Electrostatic AnalyzerElectrostatic Analyzer(charge state & energy)(charge state & energy)
e -
LoadLoad--Lock forLock forSubstrate TransferSubstrate Transfer
Plasma Plume Imaging & SpectroscopyPlasma Plume Imaging & Spectroscopy
Discharge Ring: +500 to +1500 VDischarge Ring: +500 to +1500 VVacuum: 10Vacuum: 10--99 TorrTorrNN22 backfill: 10backfill: 10--44 TorrTorr
![Page 19: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/19.jpg)
041706C_35kx 3.5 x 3.5 micron area 40mW
0
20
40
60
80
100
120
0 50 100 150
Diameter (nm)
Num
ber
35kx
Co nano-disks on Siultrafast laser deposition
810nm, 50 fs, 1mJ/pulse 1 kHz
spin vortex state
200nm
SIZE DISTRIBUTION
![Page 20: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/20.jpg)
Probing the initial stages of ultrafast ablation
Timescale of ERL matches simulationLaser pump – x-ray (diffraction/XAFS) at high rep rates
![Page 21: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/21.jpg)
Detectors !Detectors !
Investment lags source developmentInvestment lags source developmentNeed fast, gated area detectors Need fast, gated area detectors ––badly!badly!
-- efficient direct detection efficient direct detection PADsPADs-- x2 from crossx2 from cross--scan, more from // channelsscan, more from // channels-- ≤≤ n sec gatingn sec gating-- 101055 dynamic rangedynamic range-- multiple read architecturemultiple read architecture-- modularmodular-- ……....
![Page 22: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/22.jpg)
Summary• ERL source could enable dynamic imaging of atomic/spin motions associated with collective phenomena (e.g. fast switching with laser impulse)
• deposition processes also, esp. for nanostructures
• combination of fast rep-rate and short pulse matches well to laser pump development(high average power fiber lasers)
![Page 23: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/23.jpg)
Crystal with buried film
Substrate film x0
- 5 0 - 4 0 - 3 0 - 2 0 - 1 0 0 1 0 2 0 3 0 4 0 5 0- 2 0
- 1 5
- 1 0
- 5
0
5
1 0
1 5
2 0
2 5
- 5 0 - 4 0 - 3 0 - 2 0 - 1 0 0 1 0 2 0 3 0 4 0 5 00
0 . 5
1
1 . 5
- 5 0 - 4 0 - 3 0 - 2 0 - 1 0 0 1 0 2 0 3 0 4 0 5 00
0 . 5
1
1 . 5
- 5 0 - 4 0 - 3 0 - 2 0 - 1 0 0 1 0 2 0 3 0 4 0 5 0- 1 5
- 1 0
- 5
0
5
1 0
1 5
2 0
2 5
Real space Reciprocal space
U
Filmsubstrate
Electron density
This choice of origin satisfies the COBRA approximation: slowly varying U(q)
S(q) U(q)
![Page 24: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/24.jpg)
Integrated MBE/RHEED/STM/MOScapabilities:
MBE Growth and In-situ Analysis
RHEED: Real-time surface structure characterization(annealing)STM: surface morphology,roughness, coarsening
MOSS: curvaturemapping givesmismatch straininformation.
![Page 25: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/25.jpg)
Typical Growth Conditions
Combined MBE growth chamber and STM chamber. Mirecki Millunchick Lab, University of Michigan
GaSb on InAs Tsub= 450C
GaSb 9ML MBE (30sec)
Ga/Sb 1ML/1ML MEE (3s/2s)
Sb 1ML MEE (2s)
In 1ML MEE (2s)
InAs 0.2 micron
In-situ: k-Space Associates KSA 400 and MOSS
![Page 26: Mapping Atomic Structure at Epitaxial Interfaces€¦ · Mapping Atomic Structure at Epitaxial Interfaces Roy Clarke, University of Michigan, Ann Arbor, MI ERL X-ray Science Workshop:](https://reader031.vdocuments.mx/reader031/viewer/2022013010/5f0f57997e708231d443af35/html5/thumbnails/26.jpg)
0 100 200 300 400 500 600 700-0.01
0
0.01
0.02
0.03
0.04
0.05Group III, site 2
Position(point#)
Group III electron density
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
0.04Group V, site 2
Group VAccumulation ofAs at interface
Sample 814 GaSb on InAs
As = 33Sb = 51
In = 49Ga = 31
Exp ratio ~ 1.6Ideal = 1.6
Exp ratio ~ 1Ideal = 0.65