lee koong leng - camline · 26.08.2016 · lineworks stargate version 3.0.0 ... tions. exciting new...
TRANSCRIPT
© camLine GmbH • forum 201612 - 1
LineWorks STARGATE Version 3.0.0
You will learn how GLOBALFOUNDRIES has been using LineWorks STARGATE for the past decade and how it has become a critical system in running their day to day opera-tions. Exciting new features and improvements made in Version 3.0.0 will be also be intro-duced.
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Lee Koong LengDeputy Director Quality Systems EngineeringGLOBALFOUNDRIES Inc., Singapore
Working Experiences Background
Deputy Director – GLOBALFOUNDRIES. (Quality System Engineering)
More than 25 years of experience in implementing, maintaining & improving quality systems such as FMEA, Control Plan, MSA, SPC, MRB, Process Change, Corrective Action Request systems, Problem Solving methodologies (eg : 8D, KT methods, . . ) and etc
Expert in applied statistics (SPC, Hypothesis Testing, DOE, Taguchi, Regression . . .) & quality tools (8D, KT, 3x5 Whys, FMEA, Fault Tree Analysis, . . etc) applications in semiconductor environments
Constantly provide quality tool training such as SPC, DOE, 8D, FMEA, . . etc in GLOBALFOUNDRIES for last 20 years
As an industrial supervisor to the project team who consist of students from local university in Singapore (NUS) on several projects with GLOBALFOUNDRIES (Refer to below few examples of the projects)
Cpk Calculation on Highly Correlated Data (https://www.ise.nus.edu.sg/beng_students/posters/sdp1314/docs/Group12.pdf)
Wafer Profile Indicator (https://www.ise.nus.edu.sg/beng_students/posters/sdp1213/docs/Group11.pdf)
Certified as Six Sigma Black Belt since 1999
Education Background
Master's Degree in Quality and Reliability Engineering from Industrial & Engineering department of NUS (Singapore) since 1998
Bachelor degree in Statistics & Operational Research from Statistics & Operational Research department of University Science of Malaysia since 1990
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Stargate Reporting System in
GLOBALFOUNDRIES
Contents
GLOBALFOUNDRIES Confidential 2
GLOBALFOUNDRIES Overview GLOBALFOUNDRIES Stargate & SPACE Major Milestones GLOBALFOUNDRIES Stargate Evolution Stargate 2 vs Stargate 3 GLOBALFOUNDRIES Stargate Reporting System
• Overview• SPC Management• SPC Engineering, Tool Matching, Summary Statistics• Proper Chart • SPC Maturity• Other key features
Stargate 3 Key Features Stargate 3 Demo
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GLOBALFOUNDRIES Overview
REVENUE
Company Highlights
GLOBALFOUNDRIES Confidential 4
East Fishkill
Singapore
DresdenMalta
Burlington
300mm
200KWafers/Month
200mm
133KWafers/Month
MORE THAN
FAB LOCATIONS FAB CAPACITY
~6B* 25,000Patents &
Applications
2ndLargestFoundry
TrustedFoundry
*Based upon analysts’ estimates
250
Customers
18,000
Employees
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Acquires Chartered Semiconductor
The GLOBALFOUNDRIES Story
GLOBALFOUNDRIES Confidential 5
Creating an Industry Leader
• New York fab delivers initial silicon first time right
• 100% ownership by Mubadala
• Dresden fab ships 250,000th 32nm HKMG wafer
Launches 14nm FinFET Technology
• Collaborates with Samsung on global 14nm manufacturing
• AMD spins out fab operations
• Mubadala (ATIC) acquires majority stake
• GLOBALFOUNDRIES created
• Construction begins on New York fab
2012 2013 2014
Over $15B invested in CAPEX to date
Largest privately held semiconductor company
~8X capacity increase since 2009
• Acquires IBMMicroelectronics business
• Launches 22nm FD-SOITechnology
20152009 2010 2011
Manufacturing Capacity
TECHNOLOGY NODES
90–22nm 28, ≤ 14nm 350–90nm 45–22nm 180–40nm
CAPACITY (WAFERS / MONTH)
14,000(300mm)
Up to 60,000(300mm)
40,000(200mm)
60,000(300mm)
68,000 (300mm)93,000 (200mm)
East Fishkill, New York Malta, New York Burlington, Vermont Dresden, Germany Singapore
~7,000,000 Wafers / Year200mm equivalents 6
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INTERNET OF THINGS
INDUSTRIAL
COMMUNICATIONS & DATA CENTERS
Key Markets Driving Growth
MOBILITY
AEROSPACE & DEFENSEAUTOMOTIVE
• Factory automation• Machine-type communications
• Safety systems• Body and powertrain control• Infotainment
• Commercial & governmentapplications
• Next-generation / 5G mobile• 5G infrastructure / small cells• DAS / FAS• Hyper-scale data centers
• Connected home • Building management• Consumer medical
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GLOBALFOUNDRIES Stargate & SPACE Major Milestones
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Year Stargate & SPACE Systems Major Milestones (Chartered Semiconductor Manufacturing)
2003 Corporate Stargate (Joint development) Offline SPACE (Transfer inline SPC data to offline SPACE for SPC reporting) 200mm Fabs ET SPACE
2004 300mm (Fab7) Inline & ET SPACE & Stargate
2005 200mm (Fab6) Inline & Equipment Input (eSPC) SPACE & Stargate Supplier Quality Management (SQM)
2006 200mm (Fab3 & 5) Inline & Equipment Input (eSPC) SPACE & Stargate
2007 300mm (Fab7) Equipment Input SPACE
2008 200mm (Fab2) Inline & Equipment Input (eSPC) SPACE & Stargate Facilities SPACE for SGP site & Stargate
2009 GLOBALFOUNDRIES (acquisition of Chartered Semiconductor Manufacturing)
2010 300mm (Fab1) ET SPACE & Stargate
2011 GLOBALFOUNDRIES-CamLine SPACE Partnership 300mm (Fab1) Inline SPACE & Stargate
2012
300mm (Fab1) Inline & ET eCAP 300mm (Fab8) Inline, ET SPACE, eCAP & Stargate 300mm (Fab7) Defect SPACE with defect map & Stargate 200mm (Fab3E) Inline, ET, Defect, Equipment Input (eSPC) SPACE & Stargate SQM extension to Fab1 & Fab8 & SQM eCAP
Major Milestones of Stargate & SPACE in GLOBALFOUNDRIES
August 26, 2016 9Confidential
GLOBALFOUNDRIES Stargate Evolution
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August 26, 2016 11Confidential
STARGATE Evolution in GLOBALFOUNDRIES
Time1987 -2003 2003 – 2016 (Fab1,2,3,5,6,7,8,SQM,Facilities) Beyond 2016
Human errors Inefficiencies &
ineffective Limited coverage
Eliminate human errors Improve efficiencies & effectiveness Improve SPC reporting coverage Improve SPC analysis capabilities
Eliminate human errors Report generation
performance improve Flexible & robust reporting
systems
Manual reporting generation (Limited reports)
Different mechanism for report generation
Generalized data, difficult to access
Accessibility unfriendly
Pre STARGATE Era Automated report (OOC, Cpk, SPC
Maturity, Matching, . .etc)
Same mechanism for report generation
Easy to access
Require maintenance to include/exclude channel/CKC from reporting system
Report generation performance challenges
STARGATE 1 & 2 Era
Report generation performance improve
Significantly reduce the maintenance of include/ exclude channel/CKC from reporting system
More flexible & Configurable features
STARGATE 3 Era
Stargate 2 vs Stargate 3
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August 26, 2016 13Confidential
STARGATE 2 vs 3 Reporting System
StarGate Reporting 2.X, AS-IS constraint
StarGate Reporting 3.0, TO-BE improvement
Usage constraint
Huge effort to maintain the report Query.
Difficulty in managing Report Cycle
Report generation process failure due to bottleneck.
System constraint
Report Servers is directly connected to Inline SPACE production database.
Report Servers is loading directly into Stargate production database.
Complication system configuration
Usage improvement Report setup flexibility. Offline Analysis with
Raw data. (eg: TtTM design ride-on) Easier maintenance of report Query Improve web interface query speed (2 to 3x
faster).
System improvement Reporting Servers decoupled from SPACE
boxes Improve performance to allow multiple
SPACE to load data to one StarGate. 3 to 5 times faster
Restructured to conventional data warehousing design
Current StarGate 2.X Reporting (AS-IS)
StarGate Reporting 2.x and 3.0 Architecture
StarGate DWH
SPACE instance network e-Biz network
Load
SPACE ServerStarGate Web
Apps 2.7Report
InstanceSPACEInstance
Extract
N e w S t a r G a t e 3 . 0 R e p o r t i n g ( T O – B E )
SPACE Server
SPACEInstance
New StarGate
Holding DB
New StarGate DWH 3.0
SPACE instance network e-Biz network
LoadStarGate Web
Apps 3.0Extract
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GLOBALFOUNDRIES Stargate Reporting System
Report Type Description
Customer Reports
Specific customer report on SPC indices (eg : Cpk, %OOC). Typically used in monthly basis
Mea Plan Measurement Plan (similar to control plan) which indicates information of the chart setting (eg : Parameter Name, Chart filter keys, Spec limit, Control limit, OOC rules, Control limit strategy, . .etc)
SPC Mgmt SPC charts with %OOC<target & Cpk>Target reports. Typically is used by module or individual engineer to view what are the performance of stability & capability
SPC Eng SPC %OOC. Typically is used by module or individual engineer to view what are the charts OOC since yesterday morning until today morning.
SPC Maturity Evaluation of the health of SPC chart which cover number of min OOC rules turned on, control limit quality, stability (%OOC) & capability (Cpk) performance over time. Typically is used by module or management to view the overall status of the SPC health within a module or Fab
Proper Charts
Evaluation of the SPC chart control limit quality by checking latest performance of the control limits with control limits that set on the chart
Matching Rpt Assessment & evaluation of the tools (ckc) matched against the baseline or spec target
Limit Chg Tracking of the control limit changes over time for each SPC/ckc channel
StarGate Overview
Tree
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StarGate Overview
Example3.1 Click on “SPC Management”3.2 Web Tree of SPC Management will be displayed at left
Web Tree (Most Common use)
Setup : All setup charts (non D0) indices
D0 : All D0 (Particle) charts indices
Inline Module : Inline product charts indices by module
Inline Product : Inline product charts indices by Technology
ET : ET charts indices
EQPT : All input parameters (eg : Temperature, pressure) indices
Tree
StarGate Overview – SPC Management
Criteria
Cpk & %OOC performance over time
Cpk & %OOC Categories
Drill down available to the detail page
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StarGate Overview – SPC Management
StarGate Overview – SPC Management
%OOC performance over time
Cpk performance over time
1st level Pareto by module on # of charts with %OOC>10%
2nd level Pareto by Parameter on # of charts with %OOC>10%
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StarGate Overview – SPC Engineering
Drill down available to the detail page
Used by engineers to view their daily OOC chart
StarGate Overview – SPC Engineering :Tool Matching Reports
Identify statistically different performing tools Evaluated for 2 tools: process tools and metrology tools ANOVA test is performed to detect chart with mismatched tool Identify mismatched tool comparing the delta median of individual tools and all tools.
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StarGate Overview – SPC Engineering :Summary Statistics
Derive Statistics which available in Summary Statistics Report which cover below charts ;
Raw
xBar
Sigma
Range
MS
MA
EWMA(xBar)
EWMA(R)
EWMA(S) charts
StarGate Overview – Proper Chart Report
Detail report
Summary of Control Limit Quality check report over time
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StarGate Overview – SPC Maturity
Detail report
Summary of SPC maturity performance over time
StarGate – Other Key Features
Stargate Dashboard which allow individual user design the reports that he/she would like to view in periodic basis. It is based on individual login
Allow multiple filtering & sort in detail reports
Allow to export to excel and xml format
Allow to add bookmark to report with fix date or current date
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Stargate 3 Key Features
StarGate 3 – Key Features
Easy configuration to map different SPACE LDS based on extractor, data & customer fields keys across different SPACE instances.
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StarGate 3 – Key Features
1. Allow to configure different report generation for different Categories (tree)
2. Allow to configure report generation up to 3 levels grouping. (Current SPACE report definition only allow 1 level grouping)
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StarGate 3 – Key FeaturesAllow to configure different SPACE LDS with different SPC Maturity criteria
Available SPC Maturity Criteria
Assigned SPC Maturity Criteria
SPACE LDS
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StarGate 3 – Key FeaturesFlexible filtering criteria. Allow Stargate administrator to add, remove and edit easily.
StarGate 3 – Key Features
Allow to multi select the areas & display the indices
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StarGate 3 – Key FeaturesAllow to calculate the control limit & apply it directly to SPACE chart
StarGate 3 – Sample commentAllows to append violation comment to SPACE.