laser processing & micro machining - pmdi · laser processing & micro machining ......
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Laser Processing &Micro Machining
Polaris Motion Control System Hardware Setup
Galvoscanner, Machine Vision & Laser Height Sensing
20 Micron Etching on Aluminum withInfrared Nanosecond Laser
Polaris Motion is dedicated to delivering advanced motion control solutions provid-ing accuracy, quality, throughput and ease of use.
Many areas are served including: laser mate-rial processing; optics, semiconductor, flat panel, and mobile device manufacturing; automotive, aerospace, military, medical devices and sustainable energy.
A Polaris motion system synchronizes multi-axis mo-
tion with pulse laser firing to tolerances of nanosec-
onds and nanometers. An integrated Polaris system
for laser applications controls stage motion and Galvo
motion synchronously. The drives are optimized for
both long stroke BLDC motors and for high bandwidth
Galvo motors. Manufacturing is made easy with stan-
dard G-code part programs.
A Polaris motion system includes a powerful Intel/
Linux based controller for path generation and pro-
cess execution, a wide variety of drives for different
high performance actuators and powerful easy to use
software.
Polaris capabilities for laser manufacturing include:
F-theta lens calibration; stage, Galvoscanner and laser
synchronization with ease of use made possible with
Polaris CNC operator interface and machine setup
software.
Galvoscanners are very fast devices, deflecting and
focusing a laser source for cutting, marking, drilling, re-
surfacing or ablation of a material. However, their field
of view (FOV) is limited to less than 100mm most of
the time and often to less than 50mm. In many appli-
cations the work piece is larger than the Galvoscanner
FOV. A solution is to move the Galvoscanner assembly
with a stage to a number of stationary locations until
the entire part is machined. However, this is slow and
each processed area must be "stitched" together,
©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, [email protected], www.pmdi.com
Polaris System Architecture for Laser CNC Applications
ControllerPolaris CNC Operator Interface
Laser
Gx, Gy
Z
YX1, X2
3Ø PWMDrives forBLDC Motors
1Ø LinearDrives for GalvoMotors
PWM Drivefor BLDC Motor &Linear Drive forVoice Coil
leading to "stitching errors" where the borders from
one area to another are misaligned. A Polaris system
employs advanced algorithms to move a Galvoscanner
continuously and smoothly with a stage. The stage and
Galvoscanner motions are accurately synchronized,
thus greatly reducing stitching errors. Furthermore
throughput increases because stop-start motion se-
quences are eliminated.
Precise on/off control of a laser source coordinated
with motion trajectories is a must for the creation of
accurate laser micro machined parts. Polaris solves this
with detailed timing designs executed in high speed
digital logic with timing control into the nanoseconds.
Many different triggering and timing schemes are of-
fered to handle a wide range of lasers.
The optical path from laser source to the work piece is
invariably distorted. Polaris provides software to com-
pensate for these distortions. The Galvoscanner creates
a grid of fiducial marks which are measured with a ma-
chine vision system. The experimental data is passed to
an algorithm that generates the correction matrix.
The combination of stage, Galvo and laser synchroni-
zation combined with optical calibration and easy to
use software gives what is needed in a control system
to create a high precision laser material processing
platform. Many applications are supported using ma-
terials such as glass, metals, polymers and crystals.
Polaris provides a comprehensive list of technologies
to help deliver desired laser manufacturing outcomes.
©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, [email protected], www.pmdi.com
Polaris Laser CNC Research Platform
• X,Y, Z air bearings• Gx, Gy Galvoscanner• Optional theta axis
• Granite & ceramic construction
• High grade sin/cos analog scale encoders• Digital Galvoscanner position sensors• The platform is calibrated for sub-micron accuracy
• Laser source / beam delivery
• Machine vision system
• Polaris Control System CNC operator interface Easy to use Gcode part programming Synchronized stage and Galvoscanner motion Synchronized laser triggering Wide variety of laser trigger schemes Limited jerk setpoint generation Infinite field of view (IFOV) Machine axes calibration F-theta lens calibration
20 Micron Etching on Aluminumwith Infrared Nanosecond Laser
Technologies for LaserManufacturing
•Synchronizedlasertriggeroutput•Fixedpitchtriggering•Infinitefieldofview(IFOV)•ServoandGalvosynchronization•Machinegeometry&opticscalibration•SupportdigitalGalvos
Machine Control Technologies
•Standardandcustomizablefeedbackfilters•Cascadedbi-quadfilters•Digitalservoratesupto200kHz•Forwardandinversekinematics•XYZ,ABC,UVWG-Code•Simulationmode•CNCoperatorinterface•Realtimedatacollection•Integratingmotionandgauging•Systemwide64bitdoublefloatcomputations•GHzmotioncontrolnetwork
Fixed pitch laser triggering
©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, [email protected], www.pmdi.com
Command DescriptionG00 Rapid Traverse Positioning modeG01 Linear Interpolation modeG02 Arc Clockwise (2D) modeG03 Arc Counter-Clockwise (2D) modeG04 Dwell mode. Time in milliseconds specified in P or F register.G05 Position Velocity Time (PVT) interpolation mode. Time in seconds
specified in F register.G17 XY Plane SelectionG18 ZX Plane SelectionG19 YZ Plane SelectionG20 Inch programming modeG21 Metric programming modeG28 Return to preset position #1, through intermediate (safety) point.G30 Return to preset position #2, through intermediate (safety) point.G40 Turn off cutter radius compensationG41 Turn on cutter radius compensation to the left of the partG42 Turn on cutter radius compensation to the right of the partG49 Clear tool offsetG53 Reset Work Coordinate System (WCS) to machine zero
G54-G59G59.1-G59.3
Select up to 9 different Work Coordinate Systems
G70 Set GCode program position units to inchesG71 Set GCode program position units to millimetersG90 Set GCode program dimension mode to absolute.G91 Set GCode program dimension mode to relative.G92 Preset position. Set or clear a GCode offset based on current position.
G108 Enable path mergingG109 Disable path merging
Command DescriptionM00 Pause until user resumesM02 End of Program. Reset internal state of GCode interpreterM03 Primary spindle on (clockwise rotation).M04 Primary spindle on (counter clockwise rotation).M05 Primary spindle stop.M07 Coolant on (mist).M08 Coolant on (flood).M09 Coolant off.M20 Channel 0 laser trigger onM21 Channel 0 laser trigger offM22 Channel 1 laser trigger onM23 Channel 1 laser trigger offM24 Advanced laser trigger onM25 Advanced laser trigger offM30 End of Data. Reset internal state of GCode interpreterM33 Secondary spindle on (clockwise rotation).M34 Secondary spindle on (counter clockwise rotation).M35 Secondary spindle stop.M60 Enables fixed pitch triggering
M60.01 Sets the pulse width for fixed pitch triggeringM60.02 Sets the minimum valid count for fixed pitch triggeringM60.03 Sets the pitch for fixed pitch triggering.
M61 Disables fixed pitch triggeringM62 Output signal on channel 0M63 Output signal on channel 1M66 Enable toggle modeM67 Pause triggeringM68 Un-pausetriggering
M954-M959 Set current position to offsets for WCS 1 - 6
400200
Lens Distortion in X Direction
0
Y-200
-400400200
X
0-200
-10
10
5
0
-5
-400
Dist
orti
on i
n X
G-CodePartProgrammingforEaseofUse&Manufacturing
F-Theta Lens Correction Surfaces
Application Areas
•Flatpaneldisplaypatterning•Solarcellscribing•Micro-optics•Inkjetnozzledrilling•Fuelinjectionnozzledrilling•Microlasersintering•Pulsedlaserablationdirectwrite•PCBmarking•Surfacetexturing•Ceramicanddiamondcutting•2Dand3Dhermeticwelding•Lasermicromachining•Semiconductortrimmingandrepair
©Polaris Motion, Tel. 250-382-7249, Toll Free 866-548-5639, [email protected], www.pmdi.com