largest u.s. producer of electronics grade cvd graphene and hbn · 2020. 5. 1. · bae et al nat....
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‘Graphene-rolling-technologies’
Largest U.S. Producer of Electronics Grade CVD Graphene and hBN
April 30, 2020
La Jolla ShoresGrolltex is a UCSD
Spinout
Bae et al Nat. Nanotechnol. 2010, 5, 574–578.
Breakthrough: Large-scale graphene synthesis via CVD
2010
New Production Process!
➢CVD (Chemical Vapor Deposition) is used to
make sheet graphene
➢Enables high quality, large area production on
copper substrate
➢No single layer process before this
Problem: Graphene Removal is Impractical
1. Etching Cu; very slow, Cu substrate destroyed
2. Solution based; very slow, modified Cu not
practically reusable
3. Neither technique well suited for quality
control or mass production
Critical breakthrough in single layer synthesis but ‘transfer problems’ prevent implementation
• Process re-uses copper, not destroyed
• Reused Cu = better quality graphene
• Orders of magnitude faster throughput:
Minutes vs. Hours
• Equipment needed is off the shelf
Grolltex/UCSD Patent
Solution: Patented Grolltex Transfer Process
GROLLTEX PROCESS UNLEASHES MASSIVE GRAPHENE PRODUCTION AT LOW COST
Step 1:CVD Graphene synthesis
Step 2:Graphene metallization
Step 3:Graphene transfer and patterning
Proof of concept CVD system:• 3” reactor• 1 sq. ft. of graphene per day
Proof of concept system:• 4” thermal evaporator• 1 sq. ft. of graphene per day
Proof of concept:• Manual exfoliation• 1 sq. ft. of graphene per day
Synthesis reactor 1 (GRETA):• 18” reactor• 40 sq. ft. of graphene per day• 12.3K sq. ft. of graphene per year
Synthesis reactor 2 (TITAN):• 18”x18”x24” reactor• 1500 sq. ft. of graphene per day• 547,500 sq. ft. of graphene per year (8.3
million iPhone screens)
Synthesis reactor 3 (multi-unit shuttle system):• 24”x24”x48” reactor (10x in the system)• 315K sq. ft. of graphene per day• 115M million sq. ft. of graphene per year (1.74 billion iPhone screens)
Metallization chamber 1 (EVA):• 24” thermal evaporator• 20 sq. ft. of graphene per day• 7.3K sq. ft. of graphene per year
Metallization chamber 2 (ATS-27C):• 27” in-line e-beam evaporator• 5K sq. ft. per day• 1.8M sq. ft. per year
Exfoliation/lamination system (Rollo):• 10” rolls, manual feed• 200 sq. ft. per day• 73K sq. ft. of graphene per year
Exfoliation/lamination system (PEMS):• 16” rolls, 3 m/min automatic feed• 11K sq. ft. per day• 4M sq. ft. per year
Metallization chamber 3 (custom):• 48” in-line e-beam evaporator• >350K sq. ft. per day• >127M sq. ft. per year
Exfoliation/lamination system (custom):• 48” rolls, 3 m/min automatic feed• >350K sq. ft. per day• >127M sq. ft. per year
2016 2017 2021 2023< $5/sq. meter< $50/sq. meter< $500/sq. meter$80K /sq. meter
Science is done for low priced CVD graphene…
…need only $$ and engineering
All equipment shown exists in industry today
Graphene as ITO replacement on roadmap, but 2 nodes into the future = Grolltex too early
PATENTED GROLLTEX PROCESS ADDRESSES THESE CONSTRAINTS
TCE Industry, Future Display Materials Roadmap: Circa 2015
Grolltex Two Phase Business Plan
Phase I: Start research materials business
• Set up lab and ‘Alpha’ toolset
• Service university, biotech, research market demand
• Study early use case needs and volumes
Phase II: Based on market needs, roll out products
• Unique value, high margins
• X-ray windows, flexible displays, solar cells,
biosensors, CMOS photo-sensors, etc.
• Leverage unique value, patent portfolio
Highest quality US graphene available
- Grolltex inspects all of its materials on industry leading advanced equipment such as Renishaw Raman spectroscopy tools and Zeiss optical and SEM microscopes- Our products are synthesized in an atmosphere free environment, then double vacuum wrapped in a nitrogen box for optimum shelf life
CVD Graphene on Copper CVD Graphene on Si/SiO2 CVD Graphene on Your Substrate
CVD hBN on Si/SiO2CVD hBN on Copper CVD hBN on Your Substrate
Grolltex Customers: Today
This section: List of prior competitors that are now
Grolltex customers
Grolltex Customers: Today
This section: List of prior competitors that are now
Grolltex customers
Sensing = 40% of Phase I revenue to date
Sensor customers ramping factories
Bio-sensors largest share of that activitySensors
Very high margins, TAM: >$3B
Sensors
X-ray windows
Lens coatings
Hydrogen cracking
Heater: wing de-icing
Heat sink
Surface enhancement
Proton exchange membrane
Micro electrodes for energygeneration
Flexible, unbreakable displays
Advanced OLED’s
Solar cells
Grolltex biosensors, materials and applications*
‘Crispr Chip’ Cas 9:DNA sensing
Cardio/BP monitor: watch type
Cardio/BP monitor: Skin patch
Label free assay G-FET: Drug discovery
Mobile food allergen sensor
Glucose sensor: sweat based
Shipping materials or finished devices for three years: No longer theoretical applications
* Generic images; products protected
Glucose sensor: saliva based
DNA/protein biomarker detection
Materials supplier Device maker/Foundry
Grolltex: Graphene biosensors on plastic vs. silicon
Plastic substrate
Reference
electrodes
Graphene
sensor strip
Contact pads
Removable
probe
electrodes
Blister
encapsulation
Preserved
environment
in the blister
Pipette tip
punctures
the blister
Break-out sensor blister array
On Plastic = >100x cost reduction, near limitless form factors: Grolltex as foundry or designer
Configurable Graphene Digital Biosensors
Plastic substrate
Reference
electrodes
Graphene
sensor strip
Contact pads
Removable
probe
electrodes
Blister
encapsulation
Preserved
environment
in the blister
Pipette tip
punctures
the blister
Break-out sensor blister arrayProtect sensor environment
Pre-charge with functionalizing chemistry Three form factors available:
1) Blister Pack 2) ‘96 well plate’, micro-well format 3) Multiplexed microfluidic array chip
Small molecule - DNA detection – glucose – pathogens - protein receptor – allergens - bacterial sensing – virus detection
Graphene multiplexed, microfluidic array chip; cost…pennies each
✓ Genomics✓ Transcriptomics✓ Proteomics✓ Metabolomics
Answers in minutes, <$1.00
per result
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2
3
Solution: Grolltex Process Reuses CopperSummary
▪ Grolltex is ready to support CVD graphene transfer at high volumes
➢ Equipment, characterization, recipes; all are in place
▪ Science done for <$5/sq. meter: Just $$ and execution needed
▪ Industry says: “Great, but not needed yet”
▪ Last three years of Grolltex ‘retail’ sales shows ‘biosensing’ is leading
application
▪ Grolltex Progression:
➢ Research materials – sensor materials – biosensor foundry on plastic
Contact: [email protected]
Thank you
Back Up Materials
Single layer graphene transfer at industrial scale
1. Grow single layer graphene on copper
by CVD
2. Metallize graphene 3. Apply transfer/resist tape 4. Exfoliate metallized 2D material
Metallic film (Ni, Co, alloys, composite films)
2D material on growth substrate Transfer/photoresist film
5. Laminate metallized 2D material to PET with or without removal of
transfer tape
PET sheet
Substrate is available for new 2D material synthesis
Pattern the resist
or
7a. Continuous 2D material on plastic 6. Etch metal
Metal etchant solution
or
7a. Continuous 2D material on plastic with
patterned metallic features
US Patent #9,418,839 B2
<$10/sq meter easily attainable with
today’s equipment
Why use ‘large-area, monolayer’ (CVD) graphene?
Monolayer graphene is the ultimate sensor material for the following reasons:
A) Thinnest material (lowest surface-to-volume ratio – electron density changes upon molecule
absorption)
B) Highest conductivity (smallest currents/voltages required)
C) Highest electron mobility (high sensitivity, fast response)
D) Transparency (allows optical manipulations)
E) Easy to functionalize, bio-compatible (can be used for thousands of different analytes)
No other material -including alternate forms of graphene - offers this combination of sensing performance capability with practical manufacturability
Graphene synthesis methods
1) Top Down: Reduce existing carbon structure; use for mechanical strength
2) Bottom Up: Assemble carbon atoms in lattice via synthesis; use to make electronic devices
Grolltex Focus: Electronic devices
Sample Product Specifications
Customer testimonials:“Grolltex provides very high-quality graphene wafers. Grolltex has better "processability" than the competitors.”
“Other vendors do not seem to understand how electronics is manufactured in batches of wafers. Grolltex has designed their process appropriately for batch production.”
“Best price and performance we have found to date.”