large substrate inspection microscopes

Large Substrate Inspection Microscopes

Improving Inspection and Review Station Performance

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www.leica-microsystems.com

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• Agenda– Design and Development Criteria

• Target Markets

– The DM8000 & DM12000• Hardware Configurations

• Key Features and Solutions

– Leica Applications Suite• Integrated Image Capture and Post

Processing

• Microscope Remote Control

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• Design and Development Criteria

– Research Level Compound Microscope• World Class “Leica” Optics and Image quality

– Unparalleled Contrast and the highest resolution

• Capable of Handling Substrates up to 12 X 12 inches

• Macro Imaging to “See more faster”

• Utilize solid state technology for operational efficiency

• Fully Integrated with the Leica Application Suite

– Completely coded for automatic reproducibility of archived images

• Easy to Use and Ergonomically correct for all users

• LED Illumination for long life and low power consumption

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• Validated Market Segments

– Semiconductor - R&D and Manufacturing

• Process Development, Process Control, Test and Assembly, MEMS, NanoTech, Etc

– TFT LCD’s - R&D and Manufacturing

• Process Development, Process Control, Test and Assembly

– Solar - R&D and Manufacturing

• Process Development, Process Control, Test and Assembly

– Metallographic – Research and Quality Control

• Process Development, Process Control

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• Target Markets

– The DM8000 & DM12000• Hardware Configurations • Key Features and Solutions


Processing

• Microscope Remote Control

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The DM8000 & DM12000

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Hardware Configuration Highlights

• DM8000 up to 8” / 200mm substrate

• DM12000 up to 12” / 300mm substrate

– Motorized 6 fold Objective Nosepiece, 4 fold Turret and 17 position Aperture Diaphragm

• Includes Light Manager (Motorized aperture/intensity).

– Manual X-Y-Z Motion• Optional Motorized Z motion and X-Y Stages

– Required for motor focus and joystick X and Y movement

– Recommended when Image Stacking or Stitching

– Motorized version Includes Contrast Manager

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Microelectronics

Materials

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Configuration Highlights

• Key Features– Macro to Micro Function

• 0.7x to 150x

– New Contrasting Techniques• Oblique Illumination

– Including Oblique UV (365nm) for extreme contrast

• Advanced Optics – Increased Brightness and double the working distance

– Ergonomic design for comfort and flexibility

– Clean LED Illumination• Reflected Light or Reflected and Transmitted Light bases

• Environmentally friendly and maintenance free for years

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• Macro to Micro Inspection– Larger substrates require longer inspection times

• A larger field of view will reduce inspection times

– With our 0.7x Macro objective you get a remarkable FOV of ~40mm in a Inspection Microscope

– Reduce inspection times by ~ 30%

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Switch to Micro and continue inspection

BF10x DF10x DIC10x

• Macro to Micro Inspection

• Get a fast overview using the Macro function to scan the entire substrate surface

• See ca. 40mm onto the sample surface with a single glance

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Macro to Micro Inspection

20x

5x

Macro

50x

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Macro to Micro Inspection

50x

5x

Macro

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5x BF

10x BF

20x BF

• Macro to Micro Inspection0.7x BF

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The Macro Summary

• Quickly scan the entire surface for macro defects and immediately switch to high magnification to review and classify

• The perfect solution to “bridge the gap” between Bright Light inspection and Microscopic inspection

• Increases performance and efficiency of inspection and review station

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• 0.7x to 150x



• Advanced Optics– Increased Brightness and double the working distance


– Clean LED Illumination• Reflected Light or Reflected and Transmitted Light bases• Environmentally friendly and maintenance free for years

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Oblique IlluminationHigh resolution from every angle

Fully Integrated in every DM8000 M or DM12000 M stand

150x BF 150X OBL

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20x BF 20x OBL

Bright Field Oblique Illumination

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UV Inspection• Five contrast mode 150x /0.90 objective for Zero pixel shift contrast change

during inspection. (BF, DF, DIC, UV, OUV)

150x BF 150x UV

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BF 150x UV 150x

UV Inspection• Switching from VIS to UV automatically changes illuminator and camera port

– Switch in less than 1 second from VIS to UV

• Single objective increases efficiency and reduces overall cost

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Oblique Ultra Violet IlluminationOUV for maximum contrast and resolution

Multi-functional 150x objective: BF, DF, DIC, UV and OUV

150x BF 150x UV

150x OUV

Dual Camera port to support VIS, UV and OUV automatically

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Oblique UV for increased contrast and resolution

Bumps with 150x BF

Bumps with 150x UV

Bumps with 150x OUV

Multi-functional PL APO 150x objective: BF, DF, DIC, UV and OUV

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Advanced OpticsMicroelectronic Inspection Solutions

In-Depth Darkfield

• Increased intensity and higher resolution over standard Darkfield objectives

– Increases image contrasting and feature resolving power

• Long Working Distance – Nearly double the working distance of

conventional DF objectives– Increased working distance improves safety for

substrate handling• Works in conjunction with newly developed

Dark Field cube• Focus Finder for reflective surfaces

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Oblique IlluminationSolar Cells

Surface morphology

Dimensions of metal contacts

Dimensions and continuity of insulation trenches

150x BF 150x OBL

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TFT and LCD InspectionSwitch between or combine Transmitted and Reflected Light

10x TL Only 10x RL Only 10x BF BF

50x TL Only 50x BF BF50x RL Only

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• 0.7x to 150x




– Ergonomic design for comfort and flexibility– Clean LED Illumination

• Reflected Light or Reflected and Transmitted Light bases• Environmentally friendly and maintenance free for years

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ErgonomicsThe Basics

Change contrast modes or objectives with a single button clickErgo-tube with

upright imageHeight adjustable focus knobs

LED Display for ContrastXYZ movement coarse/finefocus settings

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ErgonomicsStage Control

• Joystick – Includes 4 variable function keys

• Leica Smart Move– X-Y Stage and Z Focus control

• Includes 4 variable function keys

• Leica STP6000– X-Y Stage and Z Focus control

• Includes 10 variable function keys

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• Contrast Manager– If a contrast mode is selected by the operator the intensity adjustment, the

aperture position or the objective selection are performed by the Microscope.• Illumination Manager

– If the objective is changed the previous settings of light intensity and aperture for that specific objective are restored

• No need to readjust aperture or illumination intensity

• Memory functions– 9 separately programmable “hot” keys to customize operation and efficiency at

every inspection station– Single Keys can programmed for Multi Function operation

ErgonomicsIntegrated Functions

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• 0.7x to 150x





– Clean LED Illumination• Reflected Light or Reflected and Transmitted Light bases

• Environmentally friendly and maintenance free for years

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LED Illumination

Fully Integrated for VIS and UV Light

Low Power consumption

Long Life LED

Optimum Airflow

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• Target Markets

– The DM8000 & DM12000• Hardware Configurations

• Key Features and Solutions


Processing• Microscope Remote Control

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The Leica Applications Suite

Highly sophisticated image processing and analysis combined with Microscope control.

Unites the scope, camera, image processing and analysis into an easy to use fully integrated

Inspection, Measurement and Reporting system.

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Leica Application Suite = Remote Control

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Imaging Post Processing

Stitching

3D

Stacking

Measurement

Reporting

As simple as selecting an image and clicking an export location

• Exports to Excel–Data–Histograms–Pre Programmed –Completely Customizable

Print, Send, Display, Archive

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Reporting Data

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• Available Accessories– Cameras

• From 2 to 12 Meg

– Stage Inserts• For Wafers, Photomask, TFT Display, Glass or Metal,

with or without Vacuum

– Motorized Stages• 8 inch and 12 inch models

– Wafer Loaders• Several completely integrated 3rd party solutions for

wafer sizes of 3 to 8 inch

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Summary

– Reduce Inspection time• Macro View

– Increase Resolution• Oblique Illumination• Oblique UV

– Comfort and ease of use• Ergonomic Design

– Clean and maintenance free Illumination

• LED Light Sources

– Image analysis and post processing

• Leica Applications Suite

Thank You!

Questions?

large substrate inspection microscopes

Technology

live uv inspection

live macro

x oblwww

x uvwww

joystick x

efficiency of inspection

live design

bright light inspection