kobe university repository : thesis · 2017-12-19 · kobe university repository : thesis...
TRANSCRIPT
Kobe University Repository : Thesis学位論文題目Tit le
高周波アナログ・デジタル混載LSIのための基板結合解析と評価技術に関する研究
氏名Author 小坂, 大輔
専攻分野Degree 博士(工学)
学位授与の日付Date of Degree 2007-09-25
資源タイプResource Type Thesis or Dissertat ion / 学位論文
報告番号Report Number 甲4075
権利Rights
URL http://www.lib.kobe-u.ac.jp/handle_kernel/D1004075
※当コンテンツは神戸大学の学術成果です。無断複製・不正使用等を禁じます。著作権法で認められている範囲内で、適切にご利用ください。
Create Date: 2017-12-20
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Figure 3.8: G#<W n&’k]1CH=$NbGjs0
Figure 3.9: G#<W n &’k,<Ijs0=$NbGjs0
,<Ijs0rMCHj9HG==9k?aK (Fig. 3.7(b))"S3KX"
9k3liN]<H (S3inner"S3outer"S3bottom) O"H6&LFL Cper"
ZSH6lLFL Cbtm rp7F S3top K\35lk#
Figure 3.8O"G#<W n &’k]1CH=$NbGk=j!G"k#
3Nlg"=LbGkN S3 N n+NQ,@Ohj|+l"5iK&’k
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|9k#l"S3outer N]<HO"G#<W n&’k]1CH~ONQ,
@r;m7FjA5lk#p Pk/bGkGO"S3 OG#<W n &’k
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=7F"FjA5l?G#<Wn&’kN S3]<HOS3outer HS3bottom
K\35l"5iK"G#<W n&’k]1CHr=9?aK (Fig. 3.8)"
34 h 3 O IjNhpDkgrO
Table 3.1: rO39H
h ~V (s)
Q,@[V 300
FTsi;"F-YQ9 1800
Q,@N;m?o|"5VbGkkg 30
7_el<7gs (SPICE) 30-120
S3bottom O S1]<HNlLNs8FLrp7F S1K\35lk#
Figure 3.9O"G#<W n&’k,<Ijs0=$NbGk=j!G"
k#bGk=j!O n+,<Ijs0=$H1M@,"=L?&’k>
NbGkG S3bNQ,@r|n7"S3inner H S3outer r8.9k#>N
bGkGS3top rFjA7"33GOG<tNp?Pk/bGkGS3bottom
rjA9k#5iK"G#<Wn&’k,<Ijs0rMCHj9HG==
9k?aK (Fig. 3.9(b))"S3KX"9k]<H (S3inner"S3outer"S3bottom)
O"FLG S3top K\35lk#
3.2.7 pDyAs)bGk8.39H
3liNFo,<Ijs0NdoC->AK++kW;39HO"0
n~Ht 750MHz"g-1 2GBNo</9F<7gs (Ultra SPARC III)
rHQ7?H-"H%7? F Tsi;Um<rQ$?F9H=$NyA
s)8.K?Qs 30 ,"SPICEKhk SQia<?7_el<7gsK
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3.3. 7_el<7gsKhk>A&rO 35
Figure 3.10: (a) w%M8-"(b)LQM8-
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36 h 3 O IjNhpDkgrO
Figure 3.11: F,<Ijs0=$Nq3(4HNzL (10Ωcm)
QoiJ$,"G#<W n &’k,<Ijs0=$GOb~HhN.f
KP9kdo-,g-/~e9k3H,o+k#
3.3.3 G#<Wn&’k=$NfS
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3.4. k@ 37
Figure 3.12: F,<Ijs0=$Nq3(4HNzL (100Ωcm)
@d!P@H7FQ,@,,WG"k#=3G"Q,@rF9HQ?<s
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38 h 3 O IjNhpDkgrO
Figure 3.13: F,<Ijs0=$Nq3(4HNzL (1kΩcm)
3.4. k@ 39
Figure 3.14: XJkg,J$H-NF,<Ijs0=$NzL
40 h 3 O IjNhpDkgrO
Figure 3.15: G#<W n &’k=$NfS#(a)100MHz"(b)2GHz
41
h4O
ACWlYkpD(;,[rO
4.1 o@
0OGO"1mmQJ<NIj*JNhK*1k 2@VNpDkg"J
iSK,%=$NzLr>A7?#=Nj!H7F"FTsi;j!Kp
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hkH6AuN==;Q"ZS?XQXbGjs0Khk7j3spD
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7"LSI_WT,aakbNOIj*JpDkg/Y@1GOJ/"AC
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QD<k,+/5lF$k#7+7"=NIlb,~V*J39HL""
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Figure 4.1: G8?ks)N<|E0n
Figure 4.2: TSDPC bGk
4.2 ACWlYkpDkgbGjs0
\aGO"F9HACWKBu5lF$kN$:; (TCNS)KP~9k"
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Figure 4.3: TCNS s)H TSDPC bGkNP~
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Figure 4.4: >hNpDkgbGk8.Um<
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JeNh&JM!+i"Fig. 4.2G(5lkTSDPCbGk,MF5l
F$k#g,OJG8?ks)K*1k~V4eN@0nrlj~V
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lYk"^?OHis89?lYkNMCHj9HrQ$F~OY/?
hK~"3N7_el<7gsrT&3HG8.9k#
TSDPCbGkOs8FLH9$CAK^^lkq3.,N_G==5
lkNG"g,OJG8?ks)KD$Fb7_el<7gs~Vrg
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b"His89?lYkG7_el<7gsrT&lgH[\1yG"
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F9HACWNTCNSs)O"TSDPCbGkN6r=N^^s)=
7?bNG"k (Fig. 4.3)#TCNSO"l$uK[V5l?(;;fKC
H (NSU)H?j(C88.s)G=.5lF$k#NSUOPO<KMOS
G=.5l?FLr\37?$sP<?"l$Hn0s)G=.5lF
4.2. ACWlYkpDkgbGjs0 45
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k3H,G-k#NSU G/mC/+\,88k3HKhCF MOS FL
XN<E0n,88k#?j(C88.s)O/mC/Ydr/85;
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4.2.2 ACWlYkGNpDbGjs0NUm<
4.2.2.1 >hj!KhkbGjs0 (0.3µm F9HACW)
TCNSs)+iNpDN$:r7_el<7gs9k?aKO"TCNS
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4.2.2.2 H%j!KhkbGjs0 (0.18µm F9HACW)
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sI (Vss)[~rl$"&H+ijP7"E;[~bGkr8.9k#H
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[8] .d ge, JD ?, <d B4, dD T, “CMOS _C/9H70J
k? RF s)K*1kpDkgPv,” ERpsL.Xq .X;s
ICD2005-75, pp. 49–53, 2005.
[9] >\ /:, .d ge, JD ?, <d B4, dD T, “ACWlY
kpD(;rO;Q,” pshXq DA 7s]8&‘ @88, pp.
157–162, 2005.
[10] Ie ", .d ge, JD ?, “_C/9H70Jks)K*1k
pDkgN*sACWbK?js0,” ERpsL.Xq .X;s
ICD2006-171, pp. 1–5, 2006.
[11] .d ge, JD ?, <d B4, dD T, “pD/m9H</PvN?
aN,<Ijs0=$NyAs)bGk=j!,” ERpsL.Xq
.X;s ICD2006-206, pp. 55–60, 2006.
,/=
[12] .d ge, >\ /:, JD ?, <d B4, dD T, “pD/m9
H</NrOHPv,” h 9s79F‘ LSI o</7gCW, 2005.
[13] #6 5y, .d ge, Ie ", JD ?, “pDbGkrM87?b
~HpD(;!Ps)_W!N!$,” h 7s7j3s"Jm0RF
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89
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1.1 LSIbtNACWlYk?IjNhpDkg . . . . . . . . 4
1.2 E;?0i&sIP&s9KhkYd~VNQ0 . . . . . 4
1.3 "/F#V,<IPsIU#k? . . . . . . . . . . . . . . 7
1.4 E;E.r?3=9kRSB-CMOS s) . . . . . . . . . . 7
1.5 pDN π ?bGjs0 . . . . . . . . . . . . . . . . . . . . 8
1.6 aC7eN?QA,d . . . . . . . . . . . . . . . . . . . . 8
1.7 <5KhCFpDN,dtrQ= . . . . . . . . . . . . . . 9
1.8 E.;"q3"FLbGkKhkpDN$:m~ . . . . . 10
1.9 -ShE53sQl<?rQ$?pDN$:,js) . . . 11
2.1 CMOS Wm;9K*1kpDkgP) . . . . . . . . . . . 16
2.2 lL*JpDkg,%=$#(a)p?,<Ijs0"(b)n?
,<Ijs0"(c)G#<Wn&’k]1CH (HjWk&’
k=$)"(d)G#<W n &’k,<Ijs0 . . . . . . . . 17
2.3 ClWm;9rQ$?pDkg,%=$#(a)bq3pD"
(b)SOI=$"(c) (T=$ . . . . . . . . . . . . . . . . . . 18
2.4 4<R!Khk>3NN DC q3,j . . . . . . . . . . . . 19
2.5 DCq3,jkL . . . . . . . . . . . . . . . . . . . . . . . 20
2.6 IjNhpDkg,jN (a) F9H=$"(b),jD- . . 21
2.7 z-~_[~HpDVNFL-kg (XJkg)H7<kI
Khk~1zL . . . . . . . . . . . . . . . . . . . . . . . . 22
2.8 SF+LC ?pD(;!Po . . . . . . . . . . . . . . . . . . 23
2.9 SF+LC s)N (a)AC C-H (b)DCC- . . . . . . . . . . 24
3.1 FTsi;KhkpDbGjs0 . . . . . . . . . . . . . . 26
3.2 IjNhrOUm< . . . . . . . . . . . . . . . . . . . . . 27
3.3 (a)Q,@N[V"ZS (b) ;m"(c) +| . . . . . . . . . 28
3.4 (a)?XQXbGjs0"(b) Tc*;Y,[ . . . . . . . . 29
3.5 l$"&HM8->Aj9H . . . . . . . . . . . . . . . . 31
3.6 p+,<Ijs0=$NbGjs0 . . . . . . . . . . . . . . 32
3.7 n+,<Ijs0=$NbGjs0 . . . . . . . . . . . . . . 32
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3.8 G#<W n &’k]1CH=$NbGjs0 . . . . . . . . 33
3.9 G#<W n &’k,<Ijs0=$NbGjs0 . . . . . 33
3.10 (a) w%M8-"(b)LQM8- . . . . . . . . . . . . . . . 35
3.11 F,<Ijs0=$Nq3(4HNzL (10Ωcm) . . . . . 36
3.12 F,<Ijs0=$Nq3(4HNzL (100Ωcm) . . . . . 37
3.13 F,<Ijs0=$Nq3(4HNzL (1kΩcm) . . . . . 38
3.14 XJkg,J$H-NF,<Ijs0=$NzL . . . . . 39
3.15 G#<W n &’k=$NfS#(a)100MHz"(b)2GHz . . . 40
4.1 G8?ks)N<|E0n . . . . . . . . . . . . . . . . . . 42
4.2 TSDPC bGk . . . . . . . . . . . . . . . . . . . . . . . . 42
4.3 TCNS s)H TSDPC bGkNP~ . . . . . . . . . . . . . 43
4.4 >hNpDkgbGk8.Um< . . . . . . . . . . . . . . 44
4.5 H%7?pDkgyAs)8.Um< . . . . . . . . . . . 50
4.6 ACWlYkpDkg,[7_el<7gsbGk . . . . 51
4.7 0.3µmF9HACWN (a)ACWL?"(b)aC7e,dc
HUC7?*UACW$sT<@s9 . . . . . . . . . . . 52
4.8 0.3µm F9HACWNB,"ZS7_el<7gskL#
(a) HA"(b),[ . . . . . . . . . . . . . . . . . . . . . . . 53
4.9 0.18µmF9HACWN (a) ACWL?"(b) aC7e,d
cHUC7?*UACW$sT<@s9 . . . . . . . . . . 54
4.10 0.18µm F9HACWN,j"7_el<7gsHA . . . 55
4.11 0.18µm F9HACWK*1kpDkg,[N,j"7_e
l<7gskL#(a)D$s?V=$"(b)HjWk&’k
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5.1 *sACWpDkg!P79F‘5Q . . . . . . . . . . . 58
5.2 *sACWpDkg,js)=$ . . . . . . . . . . . . . . 59
5.3 >hN_-5KhkpDN$:!P! . . . . . . . . . . 59
5.4 _-5Khk~HtQ9 . . . . . . . . . . . . . . . . . . . 60
5.5 !Ps)4N^ . . . . . . . . . . . . . . . . . . . . . . . . 61
5.6 *sACWpDkg,j79F‘N_W"ZSrOUm< 62
5.7 ACWlYkGN!Ps)7_el<7gsN?aNF9
H=$#(a) pDkg,j^"(b)F9H=$?L^ . . . . 63
5.8 7_el<7gskL#(a)pDkg"(b)!PoPO9Z
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5.9 ,jO"ZS7_el<7gsQN*UACWs8., . . 65
5.10 !PoNWmH?$W . . . . . . . . . . . . . . . . . . . . 66
5.11 WmH?$WACWN~PO.f/YNB,"ZS7_e
l<7gskLNfS . . . . . . . . . . . . . . . . . . . . 67
5.12 *sACWpDkg,jGbACW . . . . . . . . . . . . . 67
5.13 *sACWpDkg,jGbACWN>A . . . . . . . . . 68
5.14 B,H7_el<7gsN9Z/HkfS . . . . . . . . . 69
92
93
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3.1 rO39H . . . . . . . . . . . . . . . . . . . . . . . . . . 34