introduction on silvaco and mosfet simulation technique
TRANSCRIPT
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An overview on SILVACO TCAD and MOSFET Simulation Process Analysis using SILVACO
Presented By:Md.Majharul IslamShowmik Singha
Shaon Das
Dept. of Electrical and Electronic Engineering Shahjalal University Of Science And Technology
SEMICONDUCTOR Research Group ,SUST
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Outline
SEMICONDUCTOR Research Group,SUST
Introduction to TCAD
What Is SILVACO?
How it WORKS?
SILVACO Analogy
About SILVACO MOSFET Simulation
Process Simulation
Device simulation
Characterization and analysis
Our Next Work
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Introduction to TCAD• Technology CAD (Technology Computer Aided Design) is a branch of
electronic design automation that models semiconductor fabrication and semiconductor device operation.
• The modeling of the fabrication is termed Process TCAD [ATHENA In
SILVACO],
• Modeling of the device operation is termed Device TCAD[ATLAS In SILVACO].
SEMICONDUCTOR Research Group,SUST
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Working Scope on SILVACO
• It has Built in Library for Different Semiconductor materials.•We can characterize those materials in Various
Analysis process.• It has 23 different type of Substrate materials to
research•15 different type of impurity materials
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Working Scope on SILVACO cont…List of Different available dopant in SILVACO
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How SILVACO Works?SILVACO
ATHENA
Input TextCommand Output .STR file
ATLASDeckbuild
Tonyplot
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SILVACO Analogy
SILVACO is a Virtual Fabrication Lab
ATHENA fabricates a device by different process
ATLAS analyze device characteristics
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Defining Substrate Materials :
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Oxide Layer To p-well Formation:
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Nitrous diffusion, gate oxide formation and etching:
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Sacrificial Cleaning and defining gate oxide width:
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Polysilicon formation ,Oxidation, Etching & DE-oxidation:
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Aluminum Formation and Etching :
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Inside view and mirroring the device to for Final MOSFET:
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Data extracting and Shaping metal Electrode
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Defining Drain ,Gate and Source Metal nodeready for data extraction via ATLAS
Source DrainGate
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Our next work
Extracting data from the device via ATLASCollect more information about Available materials on
SILVACO.Simulate different MOSFET Devices with variation of
different parameter.Design and Analysis (Solar cell, Multi-gate FET,GFET)
