general product information€¦ · ht-spm) 1 ok ddi hf 1 ok ddi h2o2 (for spm) 1 ok ....

Transaction Information

ToolId SNK521ToolStatus Connected IdleLocation DresdenWaferSize 300 mmFabSection Clean

General Product Information

VendorSupplier DAINIPPON SCREEN MFG. CO., LTD.Model SCREEN SU3100 [MOL SW-CLEAN]Vintage 2011SerialNo 530L00321AAssetDescription SNK521-T DNS SU3100 Single Wafer

CleanSoftwareVersion 267102CIM GEMProcess DNS-SU3100-8ch_MoL-

SWC_SNK52x

Hardware Configuration (Fab)

SystemType Description Quantity StatusMain System SCREEN SU3100 1 OK Factory Interface FOUP 4 OK Handler System Indexer-Robot => Yaskawa XU-

RC350D-K011

Handler System Shuttle-Robot => Yaskawa XU-ACT070V-A00

1

Handler System Center-Robot => Yaskawa XU-RC625L-A02

1

Options SystemOthersOthers

Hardware Configuration (Subfab / Auxilliary Units)

Description Quantity StatusChemical Cabinet HT-H2SO4

1 OK

Chemical Cabinet ACT N-311

1 OK

Chemical Cabinet SSTA2

1 OK

Chemical Cabinet dHF

1 OK

Chemical Cabinet H2SO4

1 OK

Chemical Cabinet e-Folw

1 OK

DDI NH4OH 1 OK DDI H2O2 1 OK DDI H2O2 (for hot HT-SPM)

1 OK

DDI HF 1 OK DDI H2O2 (for SPM)

1 OK

Missing/Faulty Parts / Accesorries List

Description Quantitynone 0

Tool Pictures

general NONENo Picture

hardwarefab NONE

hardwarefab NONE

missingparts NONENo Picture

hardwaresubfab NONENo Picture

manufactureserial SNK521 Manufacturer Serial Number Plate

Additional Configuration Files

11 11

Spin POS. 1 2 3 4 5 6 7 8

Process Module HMP1 HMP2 HMP3 HMP4 HMP5 HMP6 HMP7 HMP8

Chamber configuration

Chamber material FM-PVC FM-PVC HALAR HALAR FM-PVC FM-PVC FM-PVC FM-PVC

FFU PTFE PTFE PTFE PTFE PTFE PTFE PTFE PTFE

Air/Liuid Separetion Box FM-PVC FM-PVC PTFE PTFE PTFE PTFE PTFE PTFE

Cup / Splash guard Shape (Type) Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup Multi Cup

Material PTFE PTFE PTFE PTFE PTFE PTFE PTFE PTFE

Wafer Chuck Shape 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin 6 Pin

Material ETFE-CB ETFE-CB ETFE-CB ETFE-CB PFA-CF PFA-CF PFA-CF PFA-CF

IPA measures

Shield Plate Shape Bevel Bevel Bevel Bevel Bevel Bevel Bevel Bevel

Material HT-PVC HT-PVC PCTFE PCTFE HT-PVC HT-PVC HT-PVC HT-PVC

Nozzle CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ－－－－－－－－N2 N2 N2 N2 N2 N2 N2 N2

Scan Arm #1 Nozzle #1 No use No useCO2-Ｗａｔｅｒ

Fixed Nozzle

CO2-Ｗａｔｅｒ

Fixed NozzleNo use No use CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ

Nozzle #2 No use No use －－ No use No use W WNozzle #3 dHF dHF －－ (DDI) －－－－－－－－

－－－－－－－－CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ－－ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ－－

Scan Arm #2 #1 Nanospray1 CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ

SC1(DDI SC1(DDI

SC1 SC1 －－

－－SST-A2

BackupSST-A2 －－－－

#2 Cover Rinse SC1(DDI SC1(DDI

SC1 SC1

－－SST-A2


CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ－－

Scan Arm #3 Nozzle #1 No use No use ACT N-311ACT N-311

BackupSPM SPM HT-SPM HT-SPM

Nozzle #2 －－SST-A2


Backside Nozzle #1: HF 49% (CC4 HF 49% (CC4

SC1(DDI) SC1(DDI) W W

#2: dHCL (DDI dHCL (DDISST-A2


#3: SC1(DDI SC1(DDI －－－－－－#4: －－－－－－－－#5: －－－－－－－－#6: CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ CO2-Ｗａｔｅｒ

N2 N2 N2 N2 N2 N2 N2 N2

Facility

Drain Line #10: Reclaim applicable HF 49% (CC4 HF 49% (CC4 ACT N-311ACT N-311

Backup－－－－

HF drain HF drain Separetion Box Separetion Box Separetion Box Separetion Box －－

#20: Reclaim applicable －－ SPM SPM －－

Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box Separetion Box

#40: Air/Liquid Separation Box －－ ACT N-311ACT N-311

Backup－－

SC1 drain SC1 drain SC1 drain SC1 drain －－

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Solvent drain

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Solvent drain

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Acid drain

Rinse drain

Air/Liuid

Separetion Box

Exhaust Line Exhaust Switiching Box * *

Acid / Alkali Exhaust * * * * * *

Acid / Alkali / IPA Exhaust

Acid / Organic Exhaust * *

Organic Exhaust

DIW * * * * * * * *

Hot-DIW user facility * * * * * *

CO2-Ｗａｔｅｒ @ 0.1 ~ 1.0 MΩ･cm±15% * * * * * * * *

O3-ＷａｔｅｒChemical

#1: dHF(1:20~100)

@ No Temp. Control* *

#2: SC1

H2O2:DIW = 1:20~100

NH4OH:DIW = 1:20~100

Hot-DIW

@ No Temp. Control

* * * *

# ：

* *

# ：

* *

Chemical Side Cabinet #1: HT-H2SO4 @ 185 * *

from user facility #2:

Chemical Cabinet #2 #1: ACT N-311 @ 40-80 * *

CC2 #2:

Chemical Cabinet #3 #1: SST-A2 @ 40-80 * *

CC3 #2:

Chemical Cabinet #4 #1: HF(49%) @ RT-30 * *

CC4 #2:

Chemical Cabinet #5 #1: H2SO4 @ 50-90 * *

CC5

Special Remark #1: SPM direct drain to facility * *

#2: Photo Ionizer Soft X-ray

#3: Fire Extinguisher

#4: Exhaust piping Materical : PP * *

#5:HT-SPM drain cooling unit * *#6:

#７:

Chemical DDI

from user facility

HF(5.1%)*1

NH4OH 29% *1

H2O2 31% *1

Filter

QCPY 30M 3S

0.03μm

*1: Chemical return

12 12

2-6. Ancillary units

2-6-1. Chemical cabinet

Cabinet CC 1 CC4 eFLOW

Chemical HF(49%) CO2-Water Body material FM-PVC S.S.304 S.S.304 FM-PVC FM-PVC FM-PVC S.S.304 S.S.304

Destination MPC7～8 ～～ MPC1～2 MPC5～6 MPC1～8

CSB #1:

#2:

#3:

Mixing tank Capacity 40Liter 40Liter 40Liter 20Liter 20Liter 180×350×410 180×350×410Material PTFE PTFE PTFE PTFE PTFE

Mixing valve or Measurement pump Fill Direct feed Direct feed Direct feed Direct feed Direct feed

Mixing ratio Premix Premix Premix Premix Premix

Process Temp. Temp. setting 185 50 40 RT-30 50-90Resistance raito

0.1~1.0M

ohm*cm

(Celsius degree) Accuracy (While Tank Is Idle) +/- 10 +/- 5 +/- 5 +/- 05 +/- 5 +/- 15%

Temperature Control Lamp heater * *

Electric Temp. Controller *

Resistance heater * *

Re-circulation Pump * * * * * * *

& Dispence FilterQCVZ ATM 4S

0.05μm

LDFVT1GPDL16

E71-K3

0.05μm

LDFVT1GPDL16

E71-K3

0.05μm

QCVZ ATM 4S

0.05μm

QCVZ ATM 4S

0.05μm

Functions Filter housing Ｄisposable Ｄisposable Ｄisposable Ｄisposable Ｄisposable

Chemical reclaim * * *

Chemical Sampling * * * *

Concentration Monitor

Drain Functions Gravity * * * * * * * *

Drain Line #1: DIW * * * * * * * *

#2: Alkali

#3: Acid * * * *

#4: Organic solvent * * *

#5: IPA

Exhaust Line #1: Acid Exhaust * * * *

#2: Alkali Exhaust

#3: Organic solvent Exhaust * * *

#4: General *

N2 *

CO2 *

DIW * * * * * *

Hot-DIW user facility

Cooling Water *

Chemical flom Facility #1: H2SO4 (96%) * *

#2: HF(49%) *

#3:

#4:

#5:

#6:

Special Remark #1: Fire extinguisher

#2: Chemical discharge * * * * *

#3: Mixing tank N2 purge *

#4: DIW return * * * * *

#5: Chemical return

#6: CSU/Facility supply switching * *

#7:

#8:

general product information€¦ · ht-spm) 1 ok ddi hf 1 ok ddi h2o2 (for spm) 1 ok ....

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