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Innovations and Competencies of Companies

MEMS technology has been established in many application fields throughout the last years. Products in the area of medical technology, biotechnology and analytics became more versatile, more intelligent, smaller and, last but not least, more efficient.

We find a particular challenge with out-standing chances for improvements in transferring MEMS to NEMS. By shrink-ing microsystems into the nanometres range many advantages and new ap-plication areas can be expected.

Due to its compatibility, an integration of MEMS and NEMS processes into es-tablished CMOS processes opens up. In the opinion of experts, scaling down MEMS to NEMS will result in reduced energy consump-tion, increased integration densities and thus smaller footprint.

Here AMO, being a technology venture with 20 years experience in nanotechnology, expects a multitude of novel and in-teresting fields of activities.

AMO offers activities in development and production based on its state of the art CMOS-clean room, i. a. with special tools for nanolithography processes as Ebeam, deep UV interference lithogra-phy and UV (SCIL) nanoimprint. All pro-cesses are steadily refined and adapted to the demands of a permanently changing and challenging market.

Currently, the main focus of AMO is to be found in the fields of silicon photonics and graphene.

We realized a variety of processes and system solutions, integrated into our service portfolio, for our partners and customers. Amongst others, silicon nanowires for sensor applications, graphene field effect transistors, active and passive nanophotonic components for datacom and telecom applications, NOMS sensors and biomedical applica-tions have been put into practice. Here and within many other applica-tion areas of NEMS, AMO with its long term experience in CMOS technology

stands prepared for prototyping MEMS to NEMS and transforming innovation as a partner for the MEMS sector.

AMO GmbH can contribute essentially to the cumulative diversification of ap-plication ranges and thus emphasize the ongoing innovative capacity of CMOS technology.

We would be happy if we have piqued your interest and you intend to take advantage of the experience and technology of the AMO to explore new concepts and components in the field of MEMS-NEMS.

We place ourselves anytime at your disposal for requests.

From MEMS to NEMS

AMO GmbHOtto-Blumenthal-Straße 25D – 52074 AachenPhone +49 (0)241 - 8867 - 125Fax +49 (0)241 - 8867 - 560Mail services@amo.deWeb www.amo.de