freescale pressure sensors

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TM Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2006. Freescale Pressure Sensors

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Freescale pressure sensors datasheet, information, sensor, mems, structure

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  • TM

    Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Freescale Pressure Sensors

  • Pressure Sensors Blood Pressure

    Freescale Pressure Sensors

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Blood Pressure Barometer/Altimeter Engine Control HVAC Applications Respiratory Applications Drug Delivery for Inhalers Consumer Appliance Industrial Equipment

  • What are Sensors?

    A sensor is a device that detects either a real world condition, or a change in a physical quantity, and converts that change into a useful input signal for a decision making center.

    Some examples of physical quantities that our sensors measure include temperature, pressure, flow rate, acceleration, vibration, tilt, and touch.

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Data Processing, Control, and ConnectivitySensor Input

    Actuatoror

    Output

  • Diaphragm

    Ion-implanted Strain

    Signal Conditioning

    Circuit

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    StrainGauge

    Single Chip Integrated Silicon Pressure Sensor

  • Pressure Sensor Cross Section

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

  • DifferentialP1

    P2

    Gauge

    P1

    Types of Measurements

    The bottom (P2) side is exposed to the atmosphere and P1 is where

    The difference in pressure between two points is measured where pressure is applied to both sides of sensor.

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Gauge

    Absolute VacuumP1

    P2 = ATM

    the atmosphere and P1 is where pressure is applied.

    Constraint Wafer

    Pressure is applied to the top of the die while the bottom of the die is a vacuum sealed reference.

  • Barometer

    Altimeter

    Internal Tire Pressure

    MAP/BAP

    Each needs a pressure measurement that is compared to a fixed reference pressure (vacuum).

    Sensor is in an enclosed environment with pressure medium

    Each needs a measurement that compares the barometric pressure in its surroundings to the

    measurement pressure.

    Blood Pressure Monitor

    Water Level

    Exhaust Gas Recirculation

    ABSOLU

    TEG

    AGE

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    measurement pressure.

    In general, anything below 10 psi (70 kPa).Exhaust Gas Recirculation

    Air Mattress

    Each requires a comparison of the pressure between two ports

    of the sensor.

    Flow measurement

    HVAC Applications

    Air Flow

    Filter Pressure

    Pressure Drop

    GAG

    ED

    IFFEREN

    TIAL

  • VFS O

    Span

    S e n s it iv it y

    Y = mX + B

    Vout

    Output Voltage

    Understand our Data Sheet

    Offset Sensor output at zero pressure

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Full Scale Pressure

    Vo f f

    S e n s it iv it y

    Zero Pressure

    Pressure

    Span Sensor output at full scale pressure minus the offset

    Sensitivity - Slope of the line (m), mV/kPa

  • Temperaturecompensation

    Amplification

    Amplification

    MCU

    MCU

    Output

    OutputMPX10DP

    UN-COMPENSATED

    Pressure Sensor Levels of IntegrationPressure Sensor Levels of IntegrationPRODUCT OFFERINGS

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    MPXV5004GINTEGRATED PRESSURE SENSOR (IPS)

    MPXM2010GSCOMPENSATED MCU Output

  • Level of Integration

    Temperaturecompensation

    Amplification

    Amplification

    MCU

    MCU

    Output

    OutputMPX10DP

    UN-COMPENSATED

    Pressure Sensor Levels of IntegrationPressure Sensor Levels of Integration

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    MPXV5004GINTEGRATED PRESSURE SENSOR (IPS)

    MPXM2010GSCOMPENSATED MCU Output

  • Uncompensated:

    Temperature Compensated& Calibrated:

    Design Advantages Design Considerations

    High sensitivity Lowest cost Provides positive and negative

    pressure measurement

    Device to device variation Temp-compensation circuitry required Amplification circuitry required

    Minimal device to devicevariations (interchangeability)

    Temperature compensationincluded on chip.

    Lowest sensitivity than due tocompensation features

    Priced higher than uncomp

    PRODUCT OFFERINGS

    AUTO ZERO +

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Integrated:

    included on chip. Provides positive and negative

    pressure measurement

    PLUG N PLAY Connect directly to MCU Amplified, calibrated for

    span & offset. (Interchangeability) Temperature compensation

    included on-chip

    Priced higher than uncomp Amplification circuitry required

    Priced higher than uncomp & compdevices.

    Lower piece part count

    AUTO ZERO +

    AUTO ZERO +

  • MPAK

    MPAK Axial Port

    SuperSmall

    OutlinePackage(SSOP) Case

    423A

    Package Options

    Case1317

    Tire Pressure Monitor

    Axial Port

    MedicalChip Pak

    Unibody

    BASIC ELEMENT

    GAUGE PORT

    DualPort

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.

    Case482

    Vacuum Port

    SmallOutline

    Package(SOP) Side

    PortDualPort

    ThroughHole

    Axial PortThrough

    Hole 482BAxial Port

    ThroughHole

    Axial Port

    ThroughHole

    Axial Port

  • Freescale Pressure sensor

    MAP/BAP (Manifold/Barometric Absolute Pressure)

    Placement in end product: engines, 2-stroke scooters.

    Modules produced by Customer

    TMFreescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. Freescale Semiconductor, Inc. 2006.