Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

Download Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

Post on 04-Jul-2016

213 views

Category:

Documents

1 download

Embed Size (px)

TRANSCRIPT

<ul><li><p> !" "" # $ % $ &amp; ' ($ &amp; " ) !" #$</p><p>!" *"" " +* " " , ," * "</p><p>, " </p><p> $ " "" *,* " " " " +*" $ % ** </p><p> " "* -# ."$ !</p><p>" "* "" ""/* * "" "" * * " </p><p>"* , 0122$ % ** * """, " +* * " *$ ! " " "* / / ""$ 3 """</p><p> "" *"""*$ % " *,* +" " "</p><p>"* * * 4 * *," " , *5 </p><p>" "" "* * " $ !" " * *" </p><p>," " +$ 6226 ", %$#$ " ",*$</p><p>%&amp;' 7 7 7 7 8</p><p> ,* ."" / </p><p> " C40.* 0222: ,,*$ !" ." 5 C400: </p><p> ," " " """ "</p><p> " * C406: </p><p>" " " " "</p><p>""" * """$ ! </p><p> " " </p><p> / * " ** </p><p>""; """$ " " *"</p><p>* " ."$</p><p> " "" * * </p><p>" " " * " "*</p><p>" ", ** *" ""$</p><p>! " *" " * " "* </p><p> +" *,* </p></li><li><p> + $ ! *,"</p><p>""" *," , * *"</p><p> ," " ""5 C40: "</p><p>" C40: """ * C40: " </p><p>4* "$</p><p>8 ?1@ " " </p><p> ""$ % ** </p><p>+* " "*; "* </p><p>." -# * **$ !"</p><p> * "</p><p>"* "" * *</p><p> *$ !" * " " "</p><p> ?H@$ !" "" ""/* *</p><p>"" "" C22 " * * 0222 " * ; / $ ! +* " "* " </p><p> , "! C40 3 $ </p><p>-:$ ! "* " 66*.6</p><p> C40 " " !4$</p><p> *" !4 " / ""</p><p> " ,* " *$</p><p> , """ , " / </p><p>" " ""$ ! " , </p><p> " " " """ * </p><p>","$ !" " , ""</p><p> "" , " *</p><p>*"",* * " " MM";</p><p>""NN , ."* ,</p><p>", ,$ O, </p><p>$ 0$ = ""5 C40: " " ""7 C40: -# ." "/7 C40: "** +*7</p><p>C40*: , +*7 C40: , "" ""7 C40: ""/ * "$</p><p>() $) (&amp; ) * # $ $ + C40--. /-0/! 060</p></li><li><p>*" " "" " " *;</p><p> "" "* " "$</p><p>! ", *," " </p><p> , " " " $</p><p>" +" "" ""$</p><p>* " " "* </p><p>"" ""/ * "" " *</p><p> " , "* + ?C@ </p><p> "/ " "* * "" *</p><p> """" * /$ !* "</p><p> " "* " / "</p><p> *$ !" " * * </p><p> " " * " *</p><p> **$</p><p>&gt; *"*, " " </p><p>" " "" , </p><p>"* * </p><p>$ !" " " "</p><p>" -A *" . . "* *;</p><p> ?BC@$ !" "" " *"""* </p><p>*$</p><p>8 " " " * </p><p>, </p><p> * $ !" "" </p><p> . *," *$</p><p>% * """, " </p><p> * "" </p><p> * " " </p><p>$ &amp; ""/ , *" *</p><p> " " "" </p><p>" " / $ !" * "</p><p> " * </p><p>" ""$ . " </p><p>* " " " $ 6$ * </p><p> * "" " * </p><p> " " " +* " " </p><p>*", ?B@$ % " +" "* </p><p> *," * " $</p><p> """ </p><p>"" *"""*5 " *; * </p><p>"" ** , "" </p><p>"/ * " $</p><p>!)/) 1 </p><p>" * *"*, </p><p> " " * "" </p><p>, C40$$ * "": "* "</p><p>* * </p><p> " ""$ !" </p><p> " *""7 , "</p><p>"* "K " " *, </p><p>. + " *; " " </p><p>, " )* </p><p>/* . " " </p><p>* *, *"$ &lt; . </p><p> " </p><p>" " ** *</p><p>*" "$ $ B "" , " </p><p> *" *" ""$</p><p>! " </p><p> " * "</p><p> , *; "/ *</p><p> * "*$ .</p><p>" ** * </p><p> ,*$</p><p>! ;" "* " 66*.6</p><p> C40/ " -: 0$60 $L * 6</p><p>0?CC40:@60</p><p>C40/ " </p></li><li><p>$ B$ " </p><p> " " "$</p><p>$ C$ C40: "/ "" ""7 C40: " * "" "" " * "" " &lt; H10 $</p><p>() $) (&amp; ) * # $ $ + C40--. /-0/! 06B</p></li><li><p>"* 0222 1 " * ;" </p><p>"" "* " &amp;/!/ ;</p><p>C40 # *, </p><p>" * , </p><p>" "" " " </p><p>"* * "" " , </p><p>"""" * " "" / / * *"$</p><p>!" "/ " *, *"$</p><p>$ A " " " "" "* +</p><p> *" $ " " ""* </p><p>"+" * * "* "+</p><p> 622 "/$ ! "+" * ." " </p><p> " "+" " * "/</p><p>$</p><p> *" C40E&amp;: " ""</p><p>" "* " " * " * </p><p> " 62 ;$ !" * " * ""</p><p>/ ""$ $ DC40: "" </p><p>"" " " "$ !" ; " "" </p><p> "/ " *" " E&amp; "/</p><p> " $</p><p> " *" " "</p><p> " " "" ,</p><p>"/" *$ % , "/" </p><p>E&amp; / , "/ "</p><p>" " *$ ! , </p><p>"/" , " "" , "/</p><p> * "" " *$ !</p><p>; "" " , "/ C40</p><p>, " " * </p><p>: " 0L ""/ * BC$0L </p><p>""$</p><p>! *" "" " </p><p>"; * " * * </p><p>*" * * /$ $ DC40: "" *</p><p> " "" "</p><p> *"""* " $</p><p> . " " " *"""*</p><p> " """ * </p><p>, ""$ ! " "/ * /</p><p> *" "" "/ " </p><p>* *" "" * *</p><p>"" $</p><p>!)!) 1</p><p> * "" " </p><p> "" ""$ !" " </p><p>",* + * " +;*$ $ 02</p><p>"" . * "$</p><p>! " " *"* </p><p>"$ </p></li><li><p>+)/) 5 </p><p>$ 00 "" " , " </p><p>" $ !" " /* ;" </p><p> * *,* " *</p><p>" ;" , " $ !"</p><p>*, " "* $ ! </p><p>""" 4.* " " *</p><p> "" *" * $</p><p>" 4.* " " *</p><p>" " $ ! </p><p>"" ,* ""/*</p><p>* "" "" * * "</p><p>" C40" $ 02C40::$ ! 0122 R / * "</p><p>,* "* "" C22 R /</p><p> *" *$ !" * </p><p>,** " " " </p><p> " "* 4 *$</p><p> , 0 0 $ "" * " * *</p><p>* * *"* *" * *"</p><p> * * 4 *$ ! "/</p><p> "" " * "" * </p><p>* ." * *"$ , B / . * " </p><p> " """ " "</p><p>* " , * ?D@ ,** </p><p>" " " " * </p><p> * / " 4,$ </p><p> " *, " " "* </p><p>" " $ ( , "* </p><p>,*4 * . , N"</p><p>*" * " 012 =8 "</p><p>" * " " *</p><p>+"$</p><p>$ 06$ C40: ""* ""7</p><p>C40: 6 6 *7 C40: /* *,"$</p><p>$ 0B$ . * * *$ * " </p><p>, 02 ""$</p><p>0B2 () $) (&amp; ) * # $ $ + C40--. /-0/!</p></li><li><p>+)-) 3 2</p><p>$ 0C "" " * </p><p> "" ""$ </p></li><li><p>" " C4002 *: * " ,*$ $ 01C40: "" " *4</p><p>" "* "$ ! " *</p><p> $ ! * " " </p><p>** "" **4 , </p><p> """ " "* </p><p> $ ! , N" *" "* *</p><p>" 012 =8 " "* " * +"$</p><p>! " .* " </p><p>* *" " *4 " </p><p> * * * " ?02@5</p><p> 6:6</p><p>0H%66</p><p>:6</p><p>: </p><p>6</p><p>:6 0</p><p> C40G:</p><p> " * *</p><p>*" : *" </p><p>6 * * * *% " . *</p><p>, </p><p>% B</p><p>060 C40A:</p><p> " N" *" 8""" * " /""$</p><p>&gt; " " "" "" " </p><p>*$ * / " * </p><p>"* * ""$</p><p>+)) 2 2</p><p> * *, " * "</p><p> " " " </p><p> """$ ! " </p><p>$ 01$ C40: "" "* "" "* *$</p><p>! " B1 /$ C40: "" "$</p><p>$ 0H$ C40: " 7 C40: &amp; </p><p> "/7 C40: * " 6 B21 /$</p><p>0B6 () $) (&amp; ) * # $ $ + C40--. /-0/!</p></li><li><p>" * " "" 4 </p><p>" " * * " " "</p><p> $ 0HC40:$ .* . *</p><p>.* * </p><p>" * " * ;</p><p> " *" . </p><p> $</p><p>$ 0HC40: "" * C40" "</p><p>$ DC40::$ " 4 " * </p><p> " $ "* </p><p> " * * * " "/ " </p><p>$ 0HC40:$ !" * MM"""NN ; </p><p> " "" " </p><p>" " * $ ! *</p><p>* " " ,* " "</p><p>"$ ! * " * " " " </p><p> * ** " </p><p> * *$</p><p>" "" , * </p><p>"" " " E 4</p><p>* "" ",, "</p><p>.* 0122$</p><p>! "" </p><p>8 " " " "</p><p> ," * "* * </p><p> $ ** "</p><p>*" -#"", " </p><p> "*$</p><p> *; ,* , </p><p> " " "/ *"$ ,</p><p> * "" "" " ""</p><p> "" " *" "/"</p><p> B2L * "" * ," "" </p><p> "" "" *"""*$ </p><p> ,* "*"</p><p> " * * "$</p><p>! *</p><p> *," * "</p><p> " " " *,*</p><p> * "" +"5 , " </p><p>" "" "" * </p><p>" $</p><p>#$%"</p><p>!" / " "* &amp;" *,*</p><p> " 8)" C40&amp; 8: * - </p><p>* $ B2H26DD621CB * </p><p>* C40: = $ &amp; DGDH022$ " /" </p><p>&amp;$ * * &amp;$ C40O</p><p>" -," * %* &gt;</p><p>-: """ ""/ * ""$</p><p>&amp;'</p><p>?0@ $ O ( $$ S $ = "</p><p> " &gt;6 * BC 8#&amp; ! * " B11</p><p>C406222: 0GDE0AB$</p><p>?6@ $ * =$ 8"" O$ * $'$ %/ "" *"</p><p>""* " B11 C400DD6: G0CE</p><p>G0H$</p><p>?B@ $ ($ S #$$ % $$ &amp; $ ) &amp;, </p><p>) *,* " </p><p>5 8*" 0B &lt; </p><p> "" C40: / ' 6BE6G</p><p>' 6222 $ H0DEH6B$</p><p>?C@ $$ ($ S #$$ % $ $$ &amp; $ )</p><p> " ) </p><p>" + "$ " AD C400F6: C406220: HCEG2$</p><p>?1@ $8$ 8" C40*$: * 5 * !</p><p>8 8"" / 0DD6$</p><p>?H@ 3$ *</p><p>&amp; " C408*:$ O " "" *"</p><p> * " ,"$</p><p>: ( ,* " % * *" " </p><p> ' ! -," 0DDB * 0DDH</p><p>", * ,* * </p><p> -," * %* 6222$ O" " ""</p><p> *" * " </p><p>,"$</p></li><li><p>" C40: -," *$</p><p>8 ) - &amp;$ " "* " "" </p><p>-," * %*$ O" " "" </p><p> ""E"E "" </p><p>"$ " " " " "* *,*</p><p>" * " $ &amp;$ " </p><p> *,* $ O</p><p>" 62 " " " * </p><p>"$</p><p>5 ) " "" "" *</p><p> * T&amp; -," * </p><p>%*$ 8 ) -," " "" "" *</p><p> * " " </p><p>&amp; *</p></li></ul>