electron beam deposition into the krf laser gas
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DESCRIPTION
Summary Should be able to meet ultimate goal of 80% e-beam energy deposition efficiency during the flat-top portion of the pulse at 750 kV. Experimental measurements, plus 1-D and 3-D simulations that have been benchmarked with experiments, point the way: No anode foil is needed (Demonstrated) Pattern and counter-rotate e-beam to “miss” ribs (Demonstrated) Reduce pressure foil from 2 mil to 1 mil (Demonstrated) Shallower hibachi ribs (To be evaluated with new hibachi in early Spring 2003) 750 keV beam (as in ultimate application) Eliminated electron beam halo with floating electric field shapers.