ELECTRICAL AND ELECTROMECHANICAL CHARACTERISTICS OF NANOASSEMBLED

CARBON NANOTUBE THIN FILM RESISTORS ON FLEXIBLE SUBSTRATES

Wei Xue and Tianhong CuiDepartment of Mechanical Engineering, University of Minnesota, Minneapolis, USA

Transducers’07

Speaker: Wen-Fan Liao

ID:g946220

Outline

Introduction Experiments Device Characteristics Conclusion References

Introduction

This paper report the fabrication of single-walled carbon nanotube (SWNT) thin-film on plastic substrates with layer-by-layer self-assembly

assemble SWNTs on flexible substrates and explore the properties of the SWNT thin films which are built with alternating layers of SWNTs and PDDA

Experiments

Layer-by-layer self-assembly of polyelectrolytes/CNTs andpolyelectrolytes/nanoparticles

Ref : T Cui and W Xue, “Assembling three-dimensional carbon nanotube-based cantilever arrays,” SPIE Newsroom 2007

naonoparticles

Polyelectrolytes(+)

CNTs(-)

Experiments

(a) Structure of self-assembled SWNT multilayer thin film (b) SEM image of assembled SWNTs

(PDDA/SWNT)n(PDDA/PSS)2

1μmRef : W Xue and T Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films” IEEE NEMS 2007

Experiments

Schematic structure of a SWNT thin-film resistor built on a flexible substrate

Cr/Au

Ref : W Xue and T Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films” IEEE NEMS 2007

Experiments

(a) Flexed transparency film with prepatterned electrodes (b) Transparency coated with 5 layers of SWNTs

Experiments 4156A Precision S

emiconductor Parameter Analyzer

up to four probes Measurements inc

lude I-V curve, Id-Vg graphs, etc

Ref : http://www.ee.byu.edu/cleanroom/HP4156A.phtml

Device Characteristics

Characteristics of SWNT thin-film resistors on flexible substrates

R10 =6.37 MΩR0 =1.35 MΩRn =(R0×R10)/[R0+(n-10) ×R10]

6.37MΩ

0.37MΩ 0.30MΩ 0.21MΩ 0.14MΩ

Device Characteristics

Resistance versus mechanical deformation of SWNT thin-film resistors

G14 = △R14/R14 = 38.2%G16 = R△ 16/R16 = 47.1%

Device Characteristics

Schematic models for axial deformation of SWNT on different topographies

Conclusion

demonstrated the fabrication and characterization of SWNT multilayer thin films on flexible substrates

MEMS/NEMS devices such as pressure sensors, accelerometers, and magnetic sensors have the potential to be developed and fabricated

References Wei Xue and Tianhong Cui, “Electrical and electromechanical characte

ristics of nano-assembled carbon nanotube thin film resistors on flexible substrates,” Transducers’07, Lyon, France, June 2007

Wei Xue and Tianhong Cui, “Deposition and characterization of layer-by-layer nano selfassembled carbon nanotube multilayer thin films,” IEEE NEMS 2007, Bangkok, Thailand, pp. 371-376, January 2007

Tianhong Cui and Wei Xue, “Assembling three-dimensional carbon nanotube-based cantilever arrays,” The International Society for Optical Engineering - SPIE Newsroom - Micro/Nano Lithography & Fabrication, http://spie.org/x17490.xml, DOI: 10.1117/2.1200710.0901, 2007

http://www.ee.byu.edu/cleanroom/HP4156A.phtml

~Thank you for your attention~