103/06/16 :

Outline

• Micro-fluidic chip

••••

3D Bio -MEMS : Microfabrication / PDMS Process

Silicon Wafer

Silicon Wafer

Silicon Wafer

Slide Glass

Slide Glass

SU-8 microstructure

PDMS curing

PDMS peeling off

PDMS bonding

O2 plasmatreatment

3D Bio -MEMS : Microfabrication Process

SU-8 Microstructure Process ( 25 um and 100 um in thickness )

Glass Substrate Cleaning using acetone and IPA with sonication for 10 min

SU-8 Spin Coating at 500 RPM for 10 sec, then at 1000 ~ 3000 RPM for 30 sec

Soft Bake at 65 oC for 5 ~ 60 min, then at 95 oC for 60 ~ 120 min

UV Exposure using ultra-high UV intensity for 40 ~ 45 sec

Post Exposure Bake at 65 oC for 1 ~ 5 min, then at 95 oC for 10 ~ 15 min

Development at room temperature for 4 ~ 12 min

Hard Bake at 150 oC for 30 ~ 60 min

PDMS Process

Mixing and Degassing in vacuum chamber for 60 min

Mold Curing at 90 ~ 95 oC for 20 min

Outline

• Micro-fluidic chip 簡介

••••

PDMS microchannel

PDMS microchannel

Cross section X > 90umY > 90um

X

Y

Oxide tip

Angle > 30 degreeLength > 300um

Angle

length

3D Bio -MEMS : Pattern Design

1st Layer (1) 1st Layer (2) 2nd Layer

3D Bio -MEMS : Mask Layout

Factor inlet

Mixing channel

Reaction chamber

Macroscopic alignment keys

Microscopic alignment keys

Chemicals recollection outlet

Outline

• M程cro-相lu程申程c ch程能 ••••

90um(outlet)

Top view Side view

SiO2 cantilever

PDMS

PDMS

Si

Electrospray chips (SEM)

Result -Triangular Cantilever Tip (~30 degree)-Channel profile alignment and size (channel size 90x90um)

3D Bio -MEMS : 2D Fluidic Mixing Test

Reaction chamber

Dye inlet

Dye recollection chamber

Mixing channel

3D Bio -MEMS : 3D Fluidic Visualization

Dye inlet

Reaction chamber /Interconnect chamberfor upper and bottomlayers

Opto-microfluidics Chip and its Applications

*Separation and concentration of particles

*Trapping and controlling single particles in real-time

Outline

• M程cro-相lu程申程c ch程能 ••••

SNDL Micro-fluidic chip 製作流程(Q&A)

Coordinator Assistant(Co-work) Question Answer

()

(/ )

1. ?

2. ?

1. NDL ,MES

(SE-series),

Micro-fluidic chip

2. Micro-fluidic chip

,( 8703) , E-

mailty_chen@narlabs.org.tw

MASK ()

( ) 1. NDL?

2.?(Test key,

Mark…etc.)

1.( 20um),

NDL

2.,Mask design rule

SNDL Micro-fluidic chip 製作流程(Q&A)Coordinator Assistant(Co-work) Question Answer

Etching ()

()

? ,

,Si,SiO2,SiNx,poly-Si

Bonding ()

(/ )

1. Bonding ? 1. PDMS

2. (Al, Cr/Au..)PDMS

3. /SiO2/SiNxPDMS

SNDL Micro-fluidic chip 連續製程委託送件流程(Contact)

MES

( ,6632) ( ,6623) ( ,6624)

1.

2.

3.

1.

2.

1.

2.

3.

4.

3.

4.

SNDL Micro-fluidic chip 連續製程委託送件流程(Relation)

----

----

----

----

----

----

----

----

----

----

SNDL Micro-fluidic chip

1. Micro-fluidic chip NDL, , ;

, ( ,8703)

2. NDL , ( ,8703)(.dwg) Email ( ,6624)

,

NDL Micro-fluidic Chip 標準連續製作流程標準連續製作流程標準連續製作流程標準連續製作流程(Micro-fluidic Chip Process Flow)

Substrate clean

Mold 1 Lithography-SU8

Metal 1 Pattern etching

Oxide deposition

Oxide etching

Oxide Lithography

• 35 , , 1 1

Mold 2 Pattern etching

Repeat Process 2 ~ 4 molds for 3D Micro-fluidic Chip

Mold 2 Lithography-AZP series

Mold 2 PR stripping

Replica Mold Substrate

Metal 2 Pattern etching

isotropic-Si etching

PDMS mixing and degassing

O2 plasma treatment

Bonding alignment

PDMS replica & bonding

PDMS de-molding & drilling

Bonding curing

Micro-fluidic Chip 標準連續製作流程標準連續製作流程標準連續製作流程標準連續製作流程光罩流程光罩流程光罩流程光罩流程 (範例範例範例範例)

(Micro-fluidic Chip for Biosensor)

Micro-fluidics

inlet & outlet●PDMS via-hole6

Oxide Tip●Oxide15

Au●Metal-24

Cr●Metal-13

PR-AZP4620●Mold-22

PR-SU8●Mold-11

DescribeClearDarkNameGDS NO.

Micro-fluidic Chip 標準連續製程標準連續製程標準連續製程標準連續製程 Base-Line條件條件條件條件(Micro-fluidic Chip for Biosensor)

0.15umM2 dep. (Au)Metal 2

0.02um~0.05umM1 dep. (Cr)Metal 1

30um/5cmChannel width/length

7,8,9umPR lith-AZP4620

Mold2

100um/5cmChannel width/length

50,75,100umPR lith-SU8

Mold1

1umPassivation (SiOx)Passivation

SpecProcess Step