easygem easygem™2.4 easygem™2.4 technology summary for secs communication easy, fast and...
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EasyGem
EasyGemEasyGem™2.4™2.4 Technology Summary for SECS Communication
Easy, Fast and Reliable Equipment FA Control Solution
EasyGem
Introduction
EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment
EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication
EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments.
CTCCTC
PMCPMC
PMCPMC
PMCPMC
PMCPMC
TMCTMC
Intra-tool Network
HOST
FAB Network
Machine
I/F
GEMGEM
Easycluster
EasyGem
Advantages
Easy to build : Defined using Configuration File or GUI
Easy to extend : GEM Definition options to change functionality. ( ex : 200mm <-> 300mm,
Increased Modules )
Easy to debug : Comprehensive history and communication data logfiles
( Host<->Gem, Gem<->Equip, Error, Debug Message file )
High Reliability and Flexibility : Multiple OEM installs in varied End User facilities
EasyGem
Features
200mm/300mm FA Scenario Support : 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario
Full Gem Scenario Support : Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement
Max 64 Process Module Support : PPID, CEID
User ID Definition : Maximum 3000 : ID => SVID,CEID,ECID,RCMD,ALID
TEPAS Support : TEPAS( Samsung : Total Equipment Prediction Analysis System )
1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported
Variable and Flexible Option : User can configure Option as Fab Request and Equipment System,
EasyGem
User Configuration Files
ALID.cfg : Alarm ID Registry File( link with Equipment Alarm Number )
CEID.cfg : Collection Event ID Registry File( includes Kornic Provision Event )
ECID.cfg : Equipment Constant ID Registry File( link with Equipment Parameter IO )
SVID.cfg : Status Variable ID Registry File( link with Equipment Status IO )
RCMD.cfg : Remote Command Registry File( includes Kornic Default Command )
Recipe.cfg : Process Program ID Registry File( link with Process Module Recipe Item )
System.cfg : EasyGem Option Configuration File
EasyGem
Debugging Files
SECS Message Log File : All messages between Host and Equip. are saved. File is created at 1 hour intervals
Report/Event ID Log File : Can show ReportID/Event from host in GUI.
The information remains persistent, no need to reload
Equipment Execution Log File : Command and Event messages between Gem and Equipment
Gem Analysis Error Log File : If message from host has an error( syntax, format, reject situation ), the analysis error message is saved.
Communication History and Error Log File : Ethernet Port Open Fail and Host Communication Start/End Time
EasyGem
Architecture
Alarm Manager
System
CEID RCMD SVID PP Body
Configuration
IO Manager
Alarm Manager
CTC
Application1
Application2
GUI
PMC / TMC
GUI
IO Manager
Application2
.
.
.
Application1
Easycluster
H/W
Format
Unformat
Analysis
Event
Execution
Datagathering
Easycluster
EasyGem
Log File
SpoolingData
AnalysisDebug
EventLog
Log File
SECS2Message
CommDebug
CommunicationTask
Host
ALID
SECS2 Format UnFormat Task
EasyGem
System Requirements
Control System Pentium III or Higher, min. 128 MB RAM Monitor : SVGA (1,024 768) LAN Card
OS : Window NT 4.0 Workstation, Windows 2000, Windows XP
FA Pre-test Tool : SECSim Pro™ (GW Associates, Ver2.0)
EasyGem
Generic Equipment Model(GEM)
State Models: Process, Communication, Alarm, Control, Material Movement, Spooling
Establish Communications : Communication State Display in GUI, Timer Constants, Comm. Enable/Disable
Data Collection: Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req.
Alarm Management: Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request
Remote Control: Control Event, Control Status Variable, State Display, Appropriately Accept/Deny
Equipment Constants: Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request
EasyGem
Generic Equipment Model(GEM)
Process Program Management: Host Upload/Download/Delete/Directory request, Process Program Verification
Material Movement: Port/Wafer Status, Completion Time
Equipment Terminal Services: Single/Multi Block, Message Display in GUI
Error Messages: Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout
Clock: Equipment Clock Request/Set
Spooling: Non-Volatile Storage, Spool Status and Display
EasyGem
Supported SEMI Standards
SEMI E5-0301 SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30-1000 Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37-0298 High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1-96E High-Speed SECS Message Services Single – Session Mode (HSMS-SS)
SEMI E39-0600 Object Services Standard : Concepts, Behavior, and Services (OSS)
SEMI E40-0301 Standard for Processing Management (PJM)
SEMI E42-0299E Recipe Management Standard: Concepts, Behavior, and Service(RMS)
SEMI E84-0301 Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO)
SEMI E87-0301 Provisional Specification for Carrier Management (CMS)
SEMI E90-0301 Specification for Substrate Tracking(STS)
SEMI E94-1000 Provisional Specification for Control Job Management(CJM)
SEMI E99-1000E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
EasyGem
Supported Stream & Function Msgs.
Stream Primary Function
S1 F1,F3,F11,F13,F15,F17,F76
S2 F13,F15,F17,F23,F25,F29,F31,F33,F35,F37,F39,F41,F43,F45,F47
S3 F1,F3,F17,F23,F25
S5 F1,F3,F5,F7
S6 F1,F3,F9,F11,F23
S7 F1,F17,F19,F23,F25,F27,F29,F65
S9 F1,F3,F5,F7,F9,F11,F13
S10 F1,F3,F5,F9
S14 F1,F3,F9,F11
S16 F1,F5,F7,F9,F11,F13,F15,F17,F19,F21,F23,F25,F27,F29
S18 F5,F7,F9,F11,F13
EasyGem
Semi Standard Compliance( E5-0301/SEMI E30-1000/SEMI E39-0600 )
GEM COMPLIANCE STATEMENT
Fundamental GEM Requirements GEM Section Implemented GEM-Compliant
State Models 3.0, 3.1, 3.3 Yes No
Yes (See NOTE 1)No
Equipment Processing States 3.4 Yes No
Host-Initiated S1=F13/F14 Scenario 4.1.5.1 Yes No
Event Notification 4.2.1.1 Yes No
On-Line Identification 4.2.6 Yes No
Error Message 4.9 Yes No
Documentation 8.4 Yes No
Control ( Operation Initiated) 4.12(except 4.12.5.2) Yes No
Additional Capabilities ImplementedGEM-Compliant
(See NOTE 2)Establish Communications 4.1, 3.2 Yes No Yes No
Dynamic Event Report Configuration 4.2.1.2 Yes No Yes No
Variable Data Collection 4.2.2 Yes No Yes No
Trace Data Collection 4.2.3 Yes No Yes No
Status Data Collection 4.2.5 Yes No Yes No
Alarm Management 4.3 Yes No Yes No
Remote Control 4.4 Yes No Yes No
Equipment Constants 4.5 Yes No Yes No
Process Program Management 4.6 Yes No Yes No
Material Movement 4.7 Yes No Yes No
Equipment Terminal Services 4.8 Yes No Yes No
Clock 4.10 Yes No Yes No
Limits Monitoring 4.2.4 Yes No Yes No
Spooling 4.11 Yes No Yes No
Control (Host-Initiated) 4.12.5.1 Yes No Yes No
EasyGem
Semi Standard Compliance ( E40-0301 )
PM COMPLIANCE STATEMENT
Fundamental PM Requirements PM Section Implemented PM Compliant
Single Process Job Execution 8.2 Yes No Yes No
Process Job Milestones 8.2.1 (except 8.2.1.2, 3) Yes No Yes No
Process Job Failure Indication 8.2.1.7 Yes No Yes No
Abort Command 8.2.3.2 Yes No Yes No
Process Job Object Implementation 8.3, 9 Yes No Yes No
Reject Invalid/Incomplete Parameter 8.2.1.2.1 Yes No Yes No
Reject Unsupported Capabilities 11.2 Yes No Yes No
Services Implementation (not per Additional) 10 Yes No Yes No
Resource Pre/Post-conditioning Yes No Yes No
Stop, Pause and Resume Commands 8.2.3.3, 4, 5 Yes No Yes No
Manual Process Start 8.2.3.9 Yes No Yes No
Process Job Queuing 8.3 Yes No Yes No
Process Tuning 7.5, 10.4.9 Yes No Yes No
Processing of Material Groups 7.6 Yes No Yes No
Multiple Concurrent Process Jobs 7.7 Yes No Yes No
Multiple Consecutive Process Jobs 7.8 Yes No Yes No
Process Job With No Material 7.9 Yes No Yes No
Event Notification 8.2.2 Yes No Yes No
Enhanced Job Creation 10.4.2 Yes No Yes No
Multiple Job Creation 10.4.3 Yes No Yes No
Duplicate Job Creation 10.4.4 Yes No Yes No
EasyGem
Semi Standard Compliance ( E87-0301 )
CMS COMPLIANCE STATEMENT
Fundamental CMS Requirements CMS Section Implemented CMS Compliant
Load Port Number 9.1 ■Yes No ■Yes No
Carrier Slot Number 9.2 ■Yes No ■Yes No
Load Port Transfer State Model 9.3 – 9.4.3 ■Yes No ■Yes No
Carrier Object Implementation 10 ■Yes No ■Yes No
Load Port Reservation State Model (internal buffer equipment)
12 Yes ■No Yes ■No
Load Port/Carrier Association State Model 13 ■Yes No ■Yes No
Carrier ID Verification Support 14.2 ■Yes No ■Yes No
Slot Map Verification Support 14.3 ■Yes No ■Yes No
Services Implementation 16 ■Yes No Yes ■No
Additional Events Implementation 18 ■Yes No Yes ■No
Variable Data Definitions 19 ■Yes No Yes ■No
Alarms Implementation 20 ■Yes No Yes ■No
Additional CMS Capabilities CMS Section Implemented CMS Compliant
Load Port Reservation State Model (fixed buffer equipment)
12 ■Yes No ■Yes No
Reservation Visible Signal 12.2 ■Yes No ■Yes No
EasyGem
Semi Standard Compliance ( E90-0301 )
STS COMPLIANCE STATEMENT
Fundamental STS Requirements
STS Section Implemented STS Compliant
Substrate Tracking 8 (except 8.4) ■Yes No ■Yes No
Substrate Object and State Model
9 ■Yes No ■Yes No
Substrate Location Object and State Model
10 ■Yes No ■Yes No
Service Message Implementation
11 ■Yes No ■Yes No
Variable Data 12 ■Yes No ■Yes No
Events 8.4 ■Yes No ■Yes No
Fundamental STS Requirements
STS Section Implemented STS Compliant
none
EasyGem
Semi Standard Compliance ( E94-1000 )
CJM COMPLIANCE STATEMENT
Fundamental CJM Requirements
CJM Section Implemented CJM Compliant
Control Job Object 8 ■Yes No ■Yes No
Control Job State Model 9 ■Yes No ■Yes No
Control Job Queue Model 10 ■Yes No ■Yes No
Carrier Properties 11 ■Yes No ■Yes No
Service Message Implementation
12 ■Yes No ■Yes No
Variable Data 13 ■Yes No Yes ■No
Events 7.3.2 ■Yes No ■Yes No
Additional Requirements 14 ■Yes No Yes ■No
EasyGem
Related Screens ( Gem Communication )
EasyGem
Related Screens ( Gem Configuration )
EasyGem
Related Screens ( Host Communication )
EasyGem
Related Screens ( Job Manager )
EasyGem
EasyGem Install Base
Equipment Size Numbers Country/End UserControl Type
(SECS2,GEM,HSMS)
CVD
200mm 4 Korea/Samsung 200mm Gem Scenario
300mm 1 Taiwan/PSC 300mm Job Control Scenario
RTP 200mm 7 Korea/Samsung 200mm Gem Scenario
Asher 300mm 3Korea/Samsung
Taiwan/XXX
Korea : 200mm Extension Gem Scenario
Taiwan : 300mm Job Control Scenario
Track 200mm 5Korea/Dongboo
Taiwan/XXX200mm Gem Scenario