Dry Vacuum Pump

LS Series

High pumping speedand Low power consumption

High pumping speedHigh pumping speed at near atmospheric pressure,and pumping down time can be drastically reduced.

Low power consumptionECO-SHOCK technology realizes low power consumption. (C Type)Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)

Low noiseBuilt-in silencer achieves the noise level 61dB(A) or less.

Low running-costNo shaft sealing gas.*Purge gas is available with L Type.

Di�erence in pumping speed In�uence on pumping down timeConditionChamber : 100L Piping : 2inches, 1m Target pressure : From ATM to 10Pa

*This data is a calculated value.It may di�er from the actual condition under the in�uence of the discharge Gas etc.

0

20

40

60

80

100

120

140

1 10 100 1000 10000 1000000.1

Pressure [Pa]

Pum

ping

spee

d [m

3 /h]

1

10

100

1000

10000

100000

200 40 60

Time [sec]

Pres

sure

[Pa]

This difference in performanceaffects pumping down timeThis difference in performanceaffects pumping down time

Pumping timeShorten about 20%Pumping timeShorten about 20%

LS120AGeneral low-power consumption dry pump

LS120AGeneral low-power consumptiondry pump

4 kinds of model

LS120A

LS1200ALS600ALS300A

Pumping speed120~1200m3/h Class *With mecanical booster pump

Model is selectable with the optimum pumping speed according to the application.

2 types for speci�c application

C Type : Clean process (LS***A-C)

Feature : Low power consumption model (with built-in ECO-SHOCK) Applications : For clean process such as air and N2 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.

L Type : Light process (LS***A-L)

Features : Light process model (with surface treatment and purge function) Applications : For light process such as steam and volatile liquid medicine Vacuum drying / Freeze drying / Ashing / General industrial use etc.

Speci�cationsD

imensions

Pumping speed curve

Model

Max. pumping speed

Ultimate pressure

Power consumption *1

Cooling water �ow rate

Purge gas �ow rate *2

Max. water vapor tolerance *3

Noise

m3/h

Pa

kW

L/min

SLM

kg/h

dB(A)

kgWeight

Inlet port

Outlet port

Power supply

Applicable standard

Standard accessory

Pump head option

External option

MODEL

LS120A

LS300A

LS600A

LS1200A

ULVAC, Inc. Components Division www.ulvac.co.jp/en/

USA : ULVAC Technologies, Inc.GERMANY : ULVAC GmbHCHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc.KOREA : ULVAC KOREA, Ltd.SINGAPORE : ULVAC SINGAPORE PTE LTD

Overseas Sales in Japan TEL +81-467-89-2261TEL +1-978-686-7550TEL +49-89-960909-0TEL +86-21-6127-6618TEL +886-3-579-5688TEL +82-31-683-2922TEL +65-6542-2700

PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines BranchVIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative O�ceINDONESIA : ULVAC SINGAPORE PTE LTDIndonesia Representative O�ceTHAILAND : ULVAC (THAILAND) LTDMALAYSIA : ULVAC MALAYSIA SDN. BHD.INDIA : ULVAC, Inc., India Branch

TEL +63-46-437-7700TEL +84-8-6255-6762TEL +62-21-8990-5070TEL +66-2-7388883TEL +60-3-5121-4700TEL +91-40-27007006

This catalog is subject to change without notice.This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1055E/2018041500SP

A

201

226

201

247

B

35

35

35

35

C

78

78

78

78

D

272

-

-

-

H

307

537

563

563

H1

355

593

619

619

L

639

639

639

639

L1

65

65

65

65

P

4-M12

2-M16

4-M16

4-M16

Q

-

ISO-F50

ISO-F80

ISO-F100

W

311

311

311

311

W1

26

26

26

26

Unit : mm

*1 At ultimate pressure (reference only) *2 Purge gas is not available with C Type. *3 Max.water vapor tolerance is a value when purge gas is used. *4 C type is not leakless.

CE, cTUVus

Instruction manual(CD-R), Power connector, Waterproof cable clamp, Remote connector, Guard for power connector

Power supply : 200V Class or 400V Class, Material of seal : FFKM(L type only)

MBP inlet �ange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve

KF40

200V Class : 3Phase, 50/60Hz, AC200-240V or 400V Class : 3Phase, 50/60Hz, AC380-480V

LS120A

C L C L C L C L

0.6 2.0 1.0 2.5 1.3 2.6 1.3 2.7

--

0~50

1.5

--

0~50

1.5

--

0~50

1.5

--

0~50

1.5

LS1200ALS300A LS600A

61

KF50(Horizontal)/VG50(Vertical)

64

ISO-F-100

61

ISO-F-50

62

ISO-F-80

142 266220 242

120

≦0.6

1000380 600

≦0.1

>2.0 >4.0

(C : C Type)(L : L Type)

C

L

HH1

A B

W

Eyebolt:P

Inlet port:Q

L1(400V)

Drain port Lubricant inspection window(L type only) (L type only)

(L type only)

Outlet port:KF40

(L type only) Power connector

Guard for power connector

Signal connector

Controller

Controller

Drain valve

(MBP)

(DRP)

(Accessories)Purge gas inlet

(Swagelok for 6.35 mm-diameter pipe)

Cooling water inlet

Cooling water outlet

(Rc 3/8)

(Rc 3/8)

(Rc 3/8)W1

LS300A / LS600A / LS1200ALS120A

CD

L

A B

W

HH1

Eyebolt:P

Inlet port(vertical):VG50

L1(400V)Lubricant inspection whindow Drain port

(L type only) (L type only) (L type only)

(L type only)

Guard for power connector

Power connectorSignal connectorController

port(Horizontal):KF50

Outlet port:KF40

(Accessories)

Purge gas inlet(Swagelok for 6.35 mm-diameter pipe)

Cooling water inlet

Cooling water outlet(Rc 3/8)

(Rc 3/8)W1 Drain valve

(Rc 3/8)

0.1 1 10 100 1000Pressure [Pa]

Pum

ping

spee

d [m

3 /h]

10000 1000000

20

40

60

80

100

120

140 LS120A

0.1 1 10 100 1000Pressure [Pa]

Pum

ping

spee

d [m

3 /h]

10000 1000000

200

400

600

800

1000

1200 LS300A

LS600A

LS1200A