SEM- Schematic Overview
Electron Detection
Tungsten Filament Electron Source
Filament Emission
Field Emission Gun
Magnetic Lenses
Focusing Optics
Effect of Working distance
Effect of Condenser Lense
Aberations to Minimum Spot Size
Voltage and Atomic Number Effect on Backscatter Electrons
Monte Carlo Simulation and Secondary Electron Generation
Electron- Atom Interaction
X-ray Emission
X-ray Generation
Characteristic X-rays
• Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5
X-ray Transitions
Energy Spectrum for Pure Ni
Auger Electron Spectroscopy
Energy Versus Penetration
SEM Operational Components
Line Scan Process
Pixel Element and Sample area Scanned
Effect of Working Distance and Aperture on Depth of Focus ( in m)
Electron Detector and Electron Sources
Non Dispersive X-ray Detection
Non Dispersive Detector
Multichannel Analyzer
Super Alloy X-ray Spectrum
Peak Broadening Due to Resolution of Si Detector
X-ray Energies 1-10 KeV
Mid Energy K and L Spectra
Bi M and Cu Spectra
Common Interfering X-ray Lines
EDS Spectra of Glass
Wavelength Dispersive X-ray Detector
X-ray Detection
Gas Proportional Counter Single Channel Pulse HeightDetector
Detector Output
Wavelength Dispersive Spectra
Comparison of EDS and WDS
EDS Spectra of Glass
WDS Spectra of High Z Glass
Corrections to Measured X-ray Spectra
X-ray Generation with Depth (z)
Absorption of X-rays Through Specimen
Effect of Absorption on (z)
